Abstract: A valve (1), in particular a vacuum valve, with at least one closure member (2) which has a wedge-shaped closure region (3), and with at least one valve seat (5) which surrounds a valve opening (4) of the valve (1), wherein, in a closed position of the closure member (2), the wedge-shaped closure region (3) bears sealingly against the valve seat (5) and closes the valve opening (4) and, in an open position, opens up the valve opening (4) so that fluids and/or solids can be transported through the valve opening (4), wherein the closure member (2) with the wedge-shaped closure region (3) is mounted so as to be movable back and forth between the closed position and the open position along a movement path (6), wherein the movement path (6) is angled-off and/or bent.

Abstract: A valve (1) having at least one closure member (2) for closing a valve opening (3) and at least one valve rod (4), at least one first connecting section (5) being provided in or on the valve rod (4), at least one second connecting section (6) being provided in or on the closure member (2), and the closure member being fastenable or fastened to the valve rod by the connection of the first connecting section to the second connecting section. The first connecting section (5) and/or the second connecting section (6) has/have at least one pressure chamber (8) for a fluid, this chamber being delimited by at least one elastically deformable boundary wall (7) and the boundary wall can be elastically deformed by the fluid provided in the pressure chamber (8) in order to form a clamped connection of the first connecting section (5) to the second connecting section (6).

Abstract: A vacuum valve has a valve opening (2, 3) that is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state and rests against the valve seat (6, 7) in a closed state, and a carrier unit (9) that supports the valve plate (10, 11) and moves between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) moves between a retracted position and an extended position. In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state. In the retracted position, the valve plate (10, 11) is supported against the carrier unit (9).

Abstract: A vacuum valve system having a valve seat and a valve closure for closing the valve opening. At least two sealing faces are provided, a first sealing face is the valve seat around the valve opening, and a second sealing face is the valve closure. A drive unit coupled to the valve closure designed so that the valve closure can be adjusted to provide respective valve opening states and is movable from an open position to a closed position, in which the second sealing face is pressed in the direction of the first sealing face and the valve opening in a gastight manner. The vacuum valve system has an optical sensor unit, designed to detect an optical measurement signal and an optical detection axis of the optical sensor unit oriented so that the measurement signal can be detected, and can be produced in a test position.

Abstract: A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.

Abstract: A valve (1), preferably a vacuum valve, is provided including at least one closure element (2), at least one valve seat (3), and at least one drive unit (4). The closure element (2) is pressed against the valve seat (3) in a closed position and is raised from the valve seat (3) in a raised position, and the closure element can be moved by a drive unit (4) in a closing direction (5) from the raised position into the closed position, in particular in a linear closing direction. The closure element (2) is mounted on a support body (6) of the drive unit (4) in a movable manner in at least one direction (7) orthogonally or transversely to the closing direction (5) in order to align the closure element (2) when pressing against the valve seat (3).

Abstract: A closure device (1) including a closure element (2) for closing an opening (5, 6) of the closure device (1) that is surrounded by a valve seat (3, 4) of the closure device (1), wherein the closure device (1) has an open state of the closure element (2), in which the closure element (2) exposes the opening (5, 6) at least partly, in particular completely, for an object to be led through the opening (5, 6), and an intermediate state of the closure element (2), in which the closure element (2) is brought into alignment with the opening (5, 6) without contact with the valve seat (3, 4), and a closed state of the closure element (2), in which the closure element (2) at least rests on the valve seat (3, 4) via a seal (7, 8) of the closure device (1), wherein the seal (7, 8) has a hollow space (9), to which a pressure medium from a pressure source (10) of the closure device (1) can be applied, wherein the closure device (1) has a suction apparatus (11) for sucking the pressure medium out of the hollow space (9) of

Abstract: A closure device (1) for an opening (2) in a chamber wall (3) is provided, wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6). The closure element (4) is fixedly connected to the yoke (6) by the closure element carrier body (5), wherein the yoke (6) is mounted in a housing (9) of the closure device (1) in such a way that the yoke can be slid by at least one cylinder-piston drive unit (7) of the closure device (1), in particular parallel to a longitudinal extent (8) of the closure element carrier body (5). The yoke (6) has at least one cylinder cavity (10) of the cylinder-piston drive unit (7) and/or at least one guide element receptacle (11) for guiding a guide element (12) of the closure device (1).

Abstract: A valve (1), in particular a vacuum valve, having at least one valve housing (2), at least one closure element (3), and at least one valve seat (4). The valve seat (4) surrounds at least one valve opening (5) of the valve (1), and the closure element (3) can be moved back and forth between at least one open position, in which the closure element (3) at least partly releases the valve opening (5), and a closed position, in which a sealing surface (8) of the closure element (3) is pressed against the valve seat (4) in order to close the valve opening (5), by at least one closure element drive (6, 7). At least one surface (9) of the valve (1) has an average surface roughness RZ less than or equal to 0.4 um, preferably less than or equal to 0.25 um.

Abstract: A vacuum valve having a valve body with a valve opening surrounded by a valve seat, a closure member displaceable parallel to a longitudinal adjustment direction between an open position, and an intermediate position, in which the closure member covers the valve opening but is raised from valve seat, and a closed position, a valve rod supporting the closure member, a longitudinal stroke linear guide which has a longitudinal stroke slider connected to the valve rod and a longitudinal stroke guide part by which the longitudinal stroke slider is guided in a linearly displaceable manner in the longitudinal adjustment direction, and a transverse stroke linear guide which includes a transverse stroke slider connected to the longitudinal stroke guide part and a transverse stroke guide part by which the transverse stroke slider is guided in a linearly displaceable in an oblique adjustment direction positioned oblique to the longitudinal adjustment direction.

Abstract: Some embodiments may include a closure element for a vacuum valve that may be configured, for example, for the gastight closing of a process volume by means of cooperation with a vacuum valve opening of the vacuum valve. In some embodiments, the closure element may include a first sealing surface, corresponding to a second sealing surface of the vacuum valve opening, wherein the second sealing surface surrounds the vacuum valve opening, and a sealing material vulcanized onto the first sealing surface and in accordance with its course and having a defined height in the direction of the surface normal of the first sealing surface. In some embodiments, the sealing material may have a defined shape with respect to a sealing material cross section, comprising a first seal portion, provided on the process volume side, and a second seal portion, provided, in particular, facing away from the process volume.

Abstract: A vacuum valve including a valve body with first and second valve openings, first and second closure elements attached to a valve rod, a longitudinally adjustable transmission piece attached to the valve rod that is adjustable from an open position into an intermediate position, and in a transverse adjustment direction from the intermediate position into a first closing position, and counter thereto into a second closing position. The transmission piece is connected to the valve body via a longitudinal stroke linear guide and a transverse stroke linear guide having a transverse stroke guide part which extends parallel to an oblique adjustment direction and a transverse stroke carriage displaceably guided thereon. To adjust the transmission piece from the intermediate position into the first or second closing position, the transverse stroke carriage is linearly displaceable in or counter to the oblique adjustment direction from a central position into a first or second press-on position.

Abstract: A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing.

Abstract: The vacuum valve includes a closure member that can be moved, parallel to a longitudinal movement direction, between an open position in which it unblocks the valve opening and an intermediate position in which it covers the valve opening but is raised off the valve seat, and that can be moved, parallel to a transverse movement direction, between the intermediate position and a closed position in which it bears against the valve seat; a valve rod that bears the closure member is mounted for displacement parallel to the longitudinal and transverse movement directions; a displacement part rigidly connected to the valve rod; and a drive motor which rotates a driveshaft about an axis parallel to the longitudinal movement direction in order to move the closure member between the open position, the intermediate position and the closed position.

Abstract: A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (ES), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (ET), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where ES and ET enclose a defined angle (?), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Abstract: A vacuum valve having a valve body (1) with a valve opening (2) which has an axis (3) and is surrounded by a valve seat (5), a closure member (4) which is displaceable parallel to a longitudinal adjustment direction (16) between an open position, in which the closure member releases the valve opening (2), and an intermediate position, in which the closure member covers the valve opening (2) but is raised from valve seat (5), and which closure member is displaceable parallel to a transverse adjustment direction (30) between the intermediate position and a closed position, in which the closure member is in contact with the valve seat (5), a valve rod (9) supporting the closure member (4), a longitudinal stroke linear guide (13) which has a longitudinal stroke slider (14) connected to the valve rod (9) and a longitudinal stroke guide part (15) by which the longitudinal stroke slider (14) is guided in a linearly displaceable manner in the longitudinal adjustment direction (16), and a transverse stroke linear guid

Abstract: A vacuum valve is provided having a valve housing (1) which has a vacuum region (4) in the interior, a closure unit (5) which is arranged in the vacuum region (4) of the valve housing (1) and by which at least one valve opening (2, 3) is closable in a closed state of the vacuum valve, a longitudinal drive (11) by which the closure unit (5) is adjustable in a longitudinal direction (10) for adjusting the closure unit (5) between a position opening up the valve opening (2, 3) and a position covering the valve opening (2, 3). A longitudinal guide (19) for the displaceable guiding of the closure unit (5) parallel to the longitudinal direction (10) is provided, with this longitudinal guide having a guide rod (20) extending parallel to the longitudinal direction (10), and at least one guide part (21). At least one bearing element (36) of the guide part (21) is arranged in a region sealed off from the vacuum region (4) of the valve housing (1).

Abstract: A valve (1), preferably a vacuum valve, is provided including at least one closure element (2), at least one valve seat (3), and at least one drive unit (4). The closure element (2) is pressed against the valve seat (3) in a closed position and is raised from the valve seat (3) in a raised position, and the closure element can be moved by a drive unit (4) in a closing direction (5) from the raised position into the closed position, in particular in a linear closing direction. The closure element (2) is mounted on a support body (6) of the drive unit (4) in a movable manner in at least one direction (7) orthogonally or transversely to the closing direction (5) in order to align the closure element (2) when pressing against the valve seat (3).

Abstract: The vacuum valve includes a valve housing (1) with an interior (2), first and second valve openings (3, 4), and a closure unit (10) that is arranged in the interior (2) of the valve housing (1) and has a first plate (11), a second plate (12), a roller support (13) which is arranged between the first plate (11) and the second plate (12), multiple roller pairs, each of which is formed from a first spreading roller (14) and a second spreading roller (15), and at least one spring (30, 31). The first and the second plate (11, 12) are carried together with the roller support (13) when the roller support (13) moves parallel to a movement direction (16) from the open position into an intermediate position, and an additional movement of the first and the second plate (11, 12) in the movement direction (16) is blocked when the roller support (13) moves from the intermediate position into a closed position.

Abstract: A pneumatic valve drive (1) for a valve (2), in particular for a vacuum valve, which has at least one pneumatic cylinder (3) with at least one piston (4) that is movably mounted in the pneumatic cylinder (3) and at least two cylinder cavities (5, 6) arranged on opposite sides of the piston (4). Each cylinder cavity (5, 6) is connected to at least one pressure source for applying pressure to each cylinder cavity (5, 6). One of the pressure sources is a constant pressure source (7) for applying a constant pressure to the cylinder cavity (5) arranged on one of the sides of the piston, and one of the other pressure sources is a regulated pressure source (8) for applying a variably regulatable pressure to the cylinder cavity (6) arranged on the opposite side of the piston (4).