Abstract: A valve (1), in particular a vacuum valve, with at least one closure member (2) which has a wedge-shaped closure region (3), and with at least one valve seat (5) which surrounds a valve opening (4) of the valve (1), wherein, in a closed position of the closure member (2), the wedge-shaped closure region (3) bears sealingly against the valve seat (5) and closes the valve opening (4) and, in an open position, opens up the valve opening (4) so that fluids and/or solids can be transported through the valve opening (4), wherein the closure member (2) with the wedge-shaped closure region (3) is mounted so as to be movable back and forth between the closed position and the open position along a movement path (6), wherein the movement path (6) is angled-off and/or bent.

Abstract: A valve with an opening surrounded by a seat, and a closure member, which, in a closed position, presses onto the seat and closes the opening and, in an intermediate position, is raised from the seat and overlaps with the opening and, in a maximum opening position, at least partially releases the opening. The valve has a frst valve drive for moving the closure member between the maximum opening position and the intermediate position along a first movement track, and a second valve drive for moving the closure member between the intermediate position and the closed position along a second movement track which is at an angle to the first movement track. The valve has at least one transmission part which is provided for reversible deformation by the second valve drive, and the first valve drive acts on the closure member with the interposition of the transmission part.

Abstract: A valve with an opening surrounded by a seat, and a closure member, which, in a closed position, presses onto the seat and closes the opening and, in an intermediate position, is raised from the seat and overlaps with the opening and, in a maximum opening position, at least partially releases the opening. The valve has a first valve drive for moving the closure member between the maximum opening position and the intermediate position along a first movement track, and a second valve drive for moving the closure member between the intermediate position and the closed position along a second movement track which is at an angle to the first movement track. The valve has at least one transmission part which is provided for reversible deformation by the second valve drive, and the first valve drive acts on the closure member with the interposition of the transmission part.

Abstract: A closure device for the vacuum-tight closure of an opening includes a closure element, at least one rod that projects out of a housing of the closure device and that, outside the housing, supports the closure element and that is rigidly connected to a carrier piece, a transmission unit which is adjustable by a drive parallel to the longitudinal adjustment direction between an initial, open position of the closure element, a middle position, in which the closure element assumes the intermediate position, and a closed, end position. At least one spring is arranged between the transmission unit on the carrier piece, and a stop device which, during adjustment of the transmission unit from the middle to the end position, blocks a further adjustment of the carrier piece parallel to the longitudinal adjustment direction.

Abstract: In a diaphragm bellows, diaphragms that follow one another are welded together alternately in region of their inner and outer edges. At least one guide part is provided for guiding on a surface of a rod passing through an inner through-opening in the diaphragm bellows or of a tube surrounding the diaphragm bellows. The at least one guide part is made of sheet metal and has a holding portion which, in the case of guiding on a rod, is located, in a region of an outer edge, between adjacent diaphragms and is welded to the adjacent diaphragms and, in the case of guiding on a tube, is located, in the region of an inner edge, between adjacent diaphragms and is welded to the adjacent diaphragms. The holding portion is connected to a guide portion for guiding on the surface of the rod or of the tube.

Abstract: The vacuum valve includes a closure member that can be moved, parallel to a longitudinal movement direction, between an open position in which it unblocks the valve opening and an intermediate position in which it covers the valve opening but is raised off the valve seat, and that can be moved, parallel to a transverse movement direction, between the intermediate position and a closed position in which it bears against the valve seat; a valve rod that bears the closure member is mounted for displacement parallel to the longitudinal and transverse movement directions; a displacement part rigidly connected to the valve rod; and a drive motor which rotates a driveshaft about an axis parallel to the longitudinal movement direction in order to move the closure member between the open position, the intermediate position and the closed position.

Abstract: A valve (1), in particular a vacuum valve, having at least one valve housing (2), at least one closure element (3), and at least one valve seat (4). The valve seat (4) surrounds at least one valve opening (5) of the valve (1), and the closure element (3) can be moved back and forth between at least one open position, in which the closure element (3) at least partly releases the valve opening (5), and a closed position, in which a sealing surface (8) of the closure element (3) is pressed against the valve seat (4) in order to close the valve opening (5), by at least one closure element drive (6, 7). At least one surface (9) of the valve (1) has an average surface roughness RZ less than or equal to 0.4 um, preferably less than or equal to 0.25 um.

Abstract: A vacuum valve, including a valve body (1) with a first valve opening (2a) and with a second valve opening (2b), a first and a second closure element (4a, 4b) which are attached to a valve rod (9), a transmission piece (12) which is attached to the valve rod (9) and is adjustable in a longitudinal adjustment direction (16) from an open position into an intermediate position, and in a transverse adjustment direction (30) from the intermediate position into a first closing position, and counter to the transverse adjustment direction (30) from the intermediate position into a second closing position, where the transmission piece (12) is connected via a longitudinal stroke linear guide (13) and a transverse stroke linear guide (17), which comprises a transverse stroke guide part (19) which extends parallel to an oblique adjustment direction (20) lying obliquely with respect to the longitudinal adjustment direction (16), and a transverse stroke carriage (18) which is guided displaceably by the transverse stroke gu

Abstract: A vacuum valve is provided having a valve housing (1) with a valve opening (2, 3) that has an axis (4, 5) and is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state of the valve opening (2, 3) and rests against the valve seat (6, 7) in a closed state of the valve opening (2, 3), and a carrier unit (9) that supports the valve plate (10, 11) and can be moved between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) is connected to the carrier unit (9) via at least two spaced drive elements (20) of the carrier unit (9) and can be moved between a retracted position and an extended position by the drive elements (20). In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state.

Abstract: A vacuum valve includes a valve housing (1) having a first housing part (1a) and a second housing part (1b), between which a ring-shaped housing seal (3b) is arranged, and a closure member (9) which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal (3b) is mounted on a ring-shaped carrier (3a). Additionally on the carrier (3a) radially inside the housing seal (3b) is mounted a ring-shaped seat seal (3c) against which the closure member (9) is pressed with the closure member (9) in the closed position, wherein the seat seal (3c) abuts against a sealing face of the valve housing (1).

Abstract: A door for closing a chamber opening (4) in a chamber wall of a vacuum chamber (3) in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged in a surrounding space, a closing member (5) arranged in the surrounding space, and a rod (10), to which the closing member (5) is connected, wherein a first movement of the rod (10), through which the closing member (5) is displaced from an open position into an intermediate position, occurring in the form of a displacement of the rod (10) in the direction of the longitudinal axis thereof, wherein a second movement of the rod (10) subsequent thereto occurs in the form of a displacement of the rod (10) in a direction at an angle to the longitudinal axis thereof and/or in the form of a pivoting of the rod (10) about a pivot axis which is perpendicular to the longitudinal axis thereof, wherein the closing member is displaced from the intermediate position into a closed position via said second movement of the rod.

Abstract: The diaphragm bellows includes a plurality of diaphragms (1) with outer edges (3) and inner edges (2), wherein diaphragms (1) that follow one another in the direction of the central longitudinal axis (5) of the diaphragm bellows are welded together alternately in the region of their inner edges (2) and in the region of their outer edges (3). A sliding-guidance device of the diaphragm bellows has at least two ring parts (10, 11). The at least two ring parts (10, 11) each extend through at most 180° in the circumferential direction about the longitudinal axis (5) of the diaphragm bellows and each have a guide portion (12) and a holding portion (13) protruding from the guide portion (12) in the direction of the longitudinal axis (5), the holding portion (13) projecting into an intermediate space (6) located between two adjacent diaphragms (1).

Abstract: A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

Abstract: A valve having a closure member which is pressed against a valve seat in a closed position and closes an opening, and having a first valve drive for moving the closure member along a first movement path back and/or forth between a maximum open position and an intermediate position, and having a second valve drive for moving the closure member along a second movement path back and/or forth between the intermediate position and the closed position. The first movement path and the second movement path are arranged in an angled manner with respect to one another. The valve additionally includes at least one locking device with at least one locking body which interacts with at least one inclined surface and/or comprises at least one inclined surface, wherein the locking body is movable relative to the closure member along a third movement path between a locking position and a releasing position.

Abstract: A closure device for the vacuum-tight closure of an opening includes a closure element, at least one rod that projects out of a housing of the closure device and that, outside the housing, supports the closure element and that is rigidly connected to a carrier piece, a transmission unit which is adjustable by a drive parallel to the longitudinal adjustment direction between an initial, open position of the closure element, a middle position, in which the closure element assumes the intermediate position, and a closed, end position. At least one spring is arranged between the transmission unit on the carrier piece, and a stop device which, during adjustment of the transmission unit from the middle to the end position, blocks a further adjustment of the carrier piece parallel to the longitudinal adjustment direction.

Abstract: A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts.

Abstract: The diaphragm bellows includes a plurality of diaphragms (1) with outer edges (3) and inner edges (2), wherein diaphragms (1) that follow one another in the direction of the central longitudinal axis (5) of the diaphragm bellows are welded together alternately in the region of their inner edges (2) and in the region of their outer edges (3). A sliding-guidance device of the diaphragm bellows has at least two ring parts (10, 11). The at least two ring parts (10, 11) each extend through at most 180° in the circumferential direction about the longitudinal axis (5) of the diaphragm bellows and each have a guide portion (12) and a holding portion (13) protruding from the guide portion (12) in the direction of the longitudinal axis (5), the holding portion (13) projecting into an intermediate space (6) located between two adjacent diaphragms (1).

Abstract: A vacuum valve includes a valve housing with a valve opening, a closure member, a valve rod on which the closure member is mounted and which is axially adjustable for adjusting the closure member between open and closed positions, an elastic seal arranged on a front side of the closure member or on the valve seat of the housing, a sealing surface arranged on the other of these, and against which the seal abuts in the closed position, and at least one support part arranged on a rear side of the closure member remote from the valve seat. The abutment between the support surface of the support part and the valve housing is effected in an abutment plane which is inclined in relation to the displacement direction about an axis which is at right angles to both the displacement direction and the longitudinal axis. The support part is pivotable in relation to the closure member about a pivot axis, which is at right angles to both the displacement direction and the longitudinal axis of the valve opening.

Abstract: A vacuum valve including a closure element (3) and a valve housing (1) with a valve opening (4) and an interior (2) in which the closure element (3) is arranged, the closure element resting against a valve seat (6) surrounding the valve opening (4) in the closed state of the vacuum valve. The valve housing (1) has a housing wall (19) made of sheet metal, the housing wall delimiting the interior (2) and being provided with a window opening (20) in order to form the valve opening (4). The valve opening (4) is surrounded by a flange ring (21) that can be connected to a connection flange (28) of a vacuum unit (27) via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring (21) has the valve seat (6) on which the closure element (3) is placed in the closed state of the vacuum valve.

Abstract: A valve rod (12) for a vacuum valve, the plunger having a first connection region (40) for a closure member (5) of the vacuum valve and at least one second connection region (41) for a valve drive of the vacuum valve. At least some sections of the valve rod (12) have a material (42) with an elastic modulus of at least 250 gigapascal, preferably at least 350 gigapascal.