Patents Examined by Ankush K Singal
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Patent number: 10734305Abstract: A thermal conducting sheet, including: a binder resin; insulating-coated carbon fibers; and a thermal conducting filler other than the insulating-coated carbon fibers, wherein a mass ratio (insulating-coated carbon fibers/binder resin) of the insulating-coated carbon fibers to the binder resin is less than 1.30, and wherein the insulating-coated carbon fibers include carbon fibers and a coating film over at least a part of a surface of the carbon fibers, the coating film being formed of a cured product of a polymerizable material.Type: GrantFiled: January 13, 2017Date of Patent: August 4, 2020Assignee: DEXERIALS CORPORATIONInventors: Hiroki Kanaya, Shinichi Uchida, Shunsuke Uchida, Gupta Rishabh, Keisuke Aramaki
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Patent number: 10727241Abstract: Techniques are disclosed for forming three-dimensional (3D) NAND structures including group III-nitride (III-N) material channels. Typically, polycrystalline silicon (poly-Si) channels are used for 3D NAND structures, such as 3D NAND flash memory devices. However, using III-N channel material for 3D NAND structures offers numerous benefits over poly-Si channel material, such as relatively lower resistance in the channel, relatively higher current densities, and relatively lower leakage. Therefore, using III-N channel material enables an increased number of floating gates or storage cells to be stacked in 3D NAND structures, thereby leading to increased capacity for a given integrated circuit footprint (e.g., increased GB/cm2). For instance, use of III-N channel material can enable greater than 100 floating gates for a 3D NAND structure. Other embodiments may be described and/or disclosed.Type: GrantFiled: June 30, 2016Date of Patent: July 28, 2020Assignee: Intel CorporationInventors: Sansaptak Dasgupta, Prashant Majhi, Han Wui Then, Marko Radosavljevic
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Patent number: 10727057Abstract: A method is provided for self-aligned multi-patterning on a semiconductor workpiece using an integrated sequence of processing steps executed on a common manufacturing platform hosting film-forming modules, etching modules, and transfer modules. A workpiece having a mandrel pattern formed thereon is received into the common manufacturing platform. A sidewall spacer pattern is formed based, at least in part, on the mandrel pattern, the sidewall spacer pattern having a plurality of second features separated by a second pitch distance with the first pitch distance being greater than the second pitch distance. The integrated sequence of processing steps is executed within the common manufacturing platform without leaving the controlled environment and the transfer modules are used to transfer the workpiece between the processing modules while maintaining the workpiece within the controlled environment.Type: GrantFiled: March 18, 2019Date of Patent: July 28, 2020Assignee: Tokyo Electron LimitedInventors: Robert Clark, Richard Farrell, Kandabara Tapily, Angelique Raley, Sophie Thibaut
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Patent number: 10720391Abstract: A method of forming a buried local interconnect is disclosed including, among other things, forming a first sacrificial layer embedded between a first semiconductor layer and a second semiconductor layer, forming a plurality of fin structures above the second semiconductor layer, forming a mask layer having an opening positioned between an adjacent pair of the fin structures, removing a portion of the second semiconductor layer exposed by the opening to expose the first sacrificial layer and define a first cavity in the second semiconductor layer, removing portions of the first sacrificial layer positioned between the first semiconductor layer and the second semiconductor layer to form lateral cavity extensions of the first cavity, forming a first liner layer in the first cavity, and forming a conductive interconnect in the first cavity over the first liner layer.Type: GrantFiled: January 4, 2019Date of Patent: July 21, 2020Assignee: GLOBALFOUNDRIES Inc.Inventors: Bipul C. Paul, Lars W. Liebmann, Ruilong Xie
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Patent number: 10714521Abstract: To improve detection efficiency in a solid-state imaging element including a SPAD in which an electrode and wiring are placed in a central portion. A solid-state imaging element includes a photodiode and a light collecting section. The photodiode includes a light receiving surface and an electrode placed on the light receiving surface, and that outputs an electrical signal in accordance with light incident on the light receiving surface in a state where a voltage exceeding a breakdown voltage is applied to the electrode. The light collecting section causes light from a subject to be collected in the light receiving surface other than a region where the electrode is placed.Type: GrantFiled: March 5, 2019Date of Patent: July 14, 2020Assignee: Sony Semiconductor Solutions CorporationInventors: Yuhi Yorikado, Atsushi Toda, Susumu Inoue
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Patent number: 10707332Abstract: A semiconductor device is provided that includes a pedestal of an insulating material present over at least one layer of a semiconductor material, and at least one fin structure in contact with the pedestal of the insulating material. Source and drain region structures are present on opposing sides of the at least one fin structure. At least one of the source and drain region structures includes at least two epitaxial material layers. A first epitaxial material layer is in contact with the at least one layer of semiconductor material. A second epitaxial material layer is in contact with the at least one fin structure. The first epitaxial material layer is separated from the at least one fin structure by the second epitaxial material layer. A gate structure present on the at least one fin structure.Type: GrantFiled: July 9, 2018Date of Patent: July 7, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Ramachandra Divakaruni, Ali Khakifirooz, Alexander Reznicek, Soon-Cheon Seo
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Patent number: 10692910Abstract: The present disclosure relates to a solid-state imaging element capable of suppressing stray light with respect to a charge storage unit such as an FD, and an electronic device. According to an aspect of the present disclosure, a solid-state imaging element constituted by many pixels includes a photoelectric conversion unit formed for each of the pixels and that converts incident light into a charge; a charge storage unit that temporarily holds the converted charge; and a first light shielding unit formed between the pixels and having a predetermined length in a thickness direction of a substrate. The charge storage unit is formed below a cross portion where the first light shielding unit formed between pixels adjacent to each other in a longitudinal direction crosses the first light shielding unit formed between pixels adjacent to each other in a lateral direction. The present disclosure can be applied to, for example, a backside irradiation type CMOS image sensor.Type: GrantFiled: March 1, 2017Date of Patent: June 23, 2020Assignee: SONY CORPORATIONInventors: Kyohei Mizuta, Takuya Maruyama, Yukihiro Ando
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Patent number: 10672682Abstract: A thermal conducting sheet, including: a binder resin; insulating-coated carbon fibers; and a thermal conducting filler other than the insulating-coated carbon fibers, wherein a mass ratio (insulating-coated carbon fibers/binder resin) of the insulating-coated carbon fibers to the binder resin is less than 1.30, and wherein the insulating-coated carbon fibers include carbon fibers and a coating film over at least a part of a surface of the carbon fibers, the coating film being formed of a cured product of a polymerizable material.Type: GrantFiled: January 13, 2017Date of Patent: June 2, 2020Assignee: DEXERIALS CORPORATIONInventors: Hiroki Kanaya, Shinichi Uchida, Shunsuke Uchida, Gupta Rishabh, Keisuke Aramaki
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Patent number: 10665647Abstract: An array substrate and a fabrication method thereof, and a display panel are provided. The array substrate includes: a base substrate; a first electrode layer and a first pixel defining layer, on the base substrate; a light emitting layer, on the first electrode layer; and a second pixel defining layer, on the first pixel defining layer and the light emitting layer, wherein, the second pixel defining layer overlaps with the light emitting layer in a direction perpendicular to the base substrate.Type: GrantFiled: May 8, 2018Date of Patent: May 26, 2020Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yuxin Zhang, Hongfei Cheng
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Patent number: 10665585Abstract: The alignment mark and method for making the same are described. In one embodiment, a semiconductor structure includes a plurality of gate stacks formed on the semiconductor substrate and configured as an alignment mark; doped features formed in the semiconductor substrate and disposed on sides of each of the plurality of gate stacks; and channel regions underlying the plurality of gate stacks and free of channel dopant.Type: GrantFiled: April 6, 2015Date of Patent: May 26, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ming-Chang Wen, Chun-Kuang Chen, Hsien-Cheng Wang
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Patent number: 10665677Abstract: The present invention relates to a vertical semiconductor device such as an IGBT or a diode which includes an N buffer layer formed in the undersurface of and adjacent to an N? drift layer. A concentration slope ?, which is derived from displacements in a depth TB (?m) and an impurity concentration CB (cm?3), from the upper surface to the lower surface in a main portion of the N buffer layer satisfies a concentration slope condition defined by {0.03???0.7}.Type: GrantFiled: December 11, 2018Date of Patent: May 26, 2020Assignee: Mitsubishi Electric CorporationInventor: Katsumi Nakamura
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Patent number: 10658506Abstract: A fin cut last methodology for manufacturing a vertical FinFET includes forming a plurality of semiconductor fins over a substrate, forming shallow trench isolation between active fins and, following the formation of a functional gate of the active fins, using a selective etch to remove a sacrificial fin from within an isolation region. A further etching step can be used to remove a portion of the gate stack proximate to the sacrificial fin to create an isolation trench and a laterally-extending cavity within the isolation region that are back-filled with an isolation dielectric.Type: GrantFiled: July 18, 2018Date of Patent: May 19, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Chanro Park, Kangguo Cheng
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Patent number: 10651327Abstract: Methods of fabricating photovoltaic cells are provided. The photovoltaic cells include a transparent substrate to allow light to enter the photovoltaic cell through the substrate, and a light absorption layer associated with the substrate. The light absorption layer has opposite first and second surfaces, with the first surface being closer to the transparent substrate than the second surface. A passivation layer is disposed over the second surface of the light absorption layer, and a plurality of first discrete contacts and a plurality of second discrete contacts are provided within the passivation layer to facilitate electrical coupling to the light absorption layer. A first electrode and a second electrode are disposed over the passivation layer to contact the plurality of first discrete contacts and the plurality of second discrete contacts, respectively. The first and second electrodes may include a photon-reflective material.Type: GrantFiled: May 31, 2019Date of Patent: May 12, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Hans-Juergen Eickelmann, Ruediger Kellmann, Hartmut Kuehl, Markus Schmidt
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Patent number: 10636708Abstract: Along dicing lines, cutting grooves that reach a rear surface from a front surface are formed by a first dicing blade in a semiconductor wafer, completely separating the semiconductor wafer into individual semiconductor chips by the cutting grooves. Thereafter, by a second dicing blade that is constituted by abrasive grains having a mean grit size smaller than that of the first dicing blade and that has a blade width wider than that of the first dicing blade, side walls of the cutting grooves, i.e., side surfaces of the semiconductor chips are polished, approaching a specular state.Type: GrantFiled: January 22, 2019Date of Patent: April 28, 2020Assignee: FUJI ELECTRIC CO., LTD.Inventor: Takashi Shimada
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Patent number: 10636704Abstract: Aspects of the disclosure include methods of treating a substrate to remove one or more of voids, seams, and grain boundaries from interconnects formed on the substrate. The method includes heating the substrate in an environment pressurized at supra-atmospheric pressure. In one example, the substrate may be heated in a hydrogen-containing atmosphere.Type: GrantFiled: August 13, 2018Date of Patent: April 28, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul B. Naik, Ellie Y. Yieh, Srinivas D. Nemani
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Patent number: 10622370Abstract: A method for fabricating a memory device with a self-aligned trap layer and rounded active region corners is disclosed. In the present invention, an STI process is performed before any of the charge-trapping and top-level layers are formed. Immediately after the STI process, the sharp corners of the active regions are exposed. Because these sharp corners are exposed at this time, they are available to be rounded through any number of known rounding techniques. Rounding the corners improves the performance characteristics of the memory device. Subsequent to the rounding process, the charge-trapping structure and other layers can be formed by a self-aligned process.Type: GrantFiled: September 25, 2015Date of Patent: April 14, 2020Assignee: Monterey Research, LLCInventors: Tim Thurgate, Shenqing Fang, Kuo-Tung Chang, Youseok Suh, Meng Ding, Hidehiko Shiraiwa, Amol Ramesh Joshi, Hapreet Sachar, David Matsumoto, Lovejeet Singh, Chih-Yuh Yang
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Patent number: 10606170Abstract: A template for imprint lithography can include an active area that includes a plurality of tiers including a first tier and a second tier, and a first feature within the first tier or the second tier. In another embodiment, the first and second tiers include features, and the average feature depth or height within the first tier may be substantially the same as or different from the average feature depth or height within the second tier. The template can be used in imprinting a formable layer to form a patterned resist layer over a device substrate that has at least two tiers. The template and its use are well suited for device substrates having exposed surfaces at significantly different elevations, particularly where planarization would be complicated or nearly impossible to implement.Type: GrantFiled: September 14, 2017Date of Patent: March 31, 2020Assignee: CANON KABUSHIKI KAISHAInventor: Andrew R. Eckert
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Patent number: 10608052Abstract: A display substrate includes a first switching element electrically connected to a gate line extending in a first direction and a data line extending in a second direction crossing the first direction, an organic layer disposed on the first switching element, a shielding electrode disposed on the organic layer and overlapping the data line, a pixel electrode disposed on the same layer as the shielding electrode and a light-blocking pattern disposed on the shielding electrode and adjacent to a corner of the pixel electrodeType: GrantFiled: December 28, 2018Date of Patent: March 31, 2020Assignee: Samsung Display Co., Ltd.Inventors: Hyung-June Kim, Wan-Soon Im
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Patent number: 10593742Abstract: A display device according to an embodiment of the present invention includes: a first substrate; light emitting elements arranged on the first substrate and including electrodes; a first insulation layer covering an edge of each of the electrodes on the first substrate; a second insulating section arranged on the light emitting elements and overlapping with the light emitting elements in plan view; a third insulating section arranged the banks, overlapping with the banks in plan view and having a lower refractive index than a refractive index of the second insulating section.Type: GrantFiled: August 29, 2018Date of Patent: March 17, 2020Assignee: Japan Display Inc.Inventors: Chunche Ma, Hajime Akimoto
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Patent number: 10593538Abstract: The disclosure provides methods and compositions therefor for treating a surface wherein a surface treatment layer is formed on the surface, thereby minimizing or preventing pattern collapse as the surface is subjected to typical cleaning steps in the semiconductor manufacturing process.Type: GrantFiled: March 22, 2018Date of Patent: March 17, 2020Assignee: Fujifilm Electronic Materials U.S.A., Inc.Inventors: William A. Wojtczak, Keeyoung Park, Atsushi Mizutani