Patents Examined by Eric Ward
  • Patent number: 11830940
    Abstract: The present disclosure relates to a semiconductor device and a method of fabricating the same. The semiconductor device includes: a substrate including a vertical interface; a channel layer disposed outside the vertical interface; and a channel supply layer disposed outside the channel layer; wherein at least one of a vertical two-dimensional electron gas 2DEG and two-dimensional hole gas 2DHG is formed in the channel layer adjacent to an interface between the channel layer and the channel supply layer.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: November 28, 2023
    Assignee: GUANGDONG ZHINENG TECHNOLOGIES, CO. LTD.
    Inventor: Zilan Li
  • Patent number: 11825655
    Abstract: A memory structure including a substrate and memory cells is provided. The memory cells are stacked on the substrate. Each memory cell includes a first conductive layer, a first gate, a second gate, a second conductive layer, a channel layer, and a first charge storage layer. The first conductive layer, the first gate, the second gate, and the second conductive layer are sequentially stacked. The first conductive layer and the first gate are electrically insulated from each other. The first gate and the second gate are electrically insulated from each other. The second gate and the second conductive layer are electrically insulated from each other. The first gate and the second gate are electrically insulated from the channel layer. The first conductive layer and the second conductive layer are electrically connected to the channel layer. The first charge storage layer is located between the first gate and the channel layer.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: November 21, 2023
    Assignee: Powerchip Semiconductor Manufacturing Corporation
    Inventor: Zih-Song Wang
  • Patent number: 11817387
    Abstract: A semiconductor device includes a cell semiconductor pattern disposed on a semiconductor substrate. A semiconductor dummy pattern is disposed on the semiconductor substrate. The semiconductor dummy pattern is co-planar with the cell semiconductor pattern. A first circuit is disposed between the semiconductor substrate and the cell semiconductor pattern. A first interconnection structure is disposed between the semiconductor substrate and the cell semiconductor pattern. A first dummy structure is disposed between the semiconductor substrate and the cell semiconductor pattern. Part of the first dummy structure is co-planar with part of the first interconnection structure. A second dummy structure not overlapping the cell semiconductor pattern is disposed on the semiconductor substrate. Part of the second dummy structure is co-planar with part of the first interconnection structure.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: November 14, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jang-Gn Yun, Jaesun Yun, Joon-Sung Lim
  • Patent number: 11817488
    Abstract: In some embodiments, a method for forming an integrated chip (IC) is provided. The method incudes forming an interlayer dielectric (ILD) layer over a substrate. A first opening is formed in the ILD layer and in a first region of the IC. A second opening is formed in the ILD layer and in a second region of the IC. A first high-k dielectric layer is formed lining both the first and second openings. A second dielectric layer is formed on the first high-k dielectric layer and lining the first high-k dielectric layer in both the first and second regions. The second high-k dielectric layer is removed from the first region. A conductive layer is formed over both the first and second high-k dielectric layers, where the conductive layer contacts the first high-k dielectric layer in the first region and contacts the second high-k dielectric in the second region.
    Type: Grant
    Filed: June 8, 2021
    Date of Patent: November 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung Ying Lee, Shao-Ming Yu, Tzu-Chung Wang
  • Patent number: 11800708
    Abstract: A nonvolatile memory device and method for fabricating the same are provided. The nonvolatile memory device comprising: a substrate; a mold structure including a first insulating pattern and a plurality of gate electrodes alternately stacked in a first direction on the substrate; and a word line cut region which extends in a second direction different from the first direction and cuts the mold structure, wherein the word line cut region includes a common source line, and the common source line includes a second insulating pattern extending in the second direction, and a conductive pattern extending in the second direction and being in contact with the second insulating pattern and a cross-section in the second direction.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: October 24, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoo Jin Choi, Jung-Hwan Lee
  • Patent number: 11800715
    Abstract: A semiconductor storage device includes: a substrate layer; and a stacked body that is provided on the substrate layer. The semiconductor storage device includes a columnar portion that includes a semiconductor body extending within the stacked body in a stacking direction. The semiconductor storage device includes: an insulating layer provided on the plurality of terrace portions; and a plurality of columnar bodies extending in a first direction and provided within the insulating layer. The semiconductor storage device includes slit portions that split the stacked body into a plurality of string units. Each of the columnar bodies adjacent to each of the slit portions has a core film, the semiconductor body, a tunnel insulating film, and a block insulating film formed in sequence from a shaft center side to an outer periphery side of the columnar body, and the columnar body does not have the charge storage portion.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: October 24, 2023
    Assignee: KIOXIA CORPORATION
    Inventor: Akihito Ikedo
  • Patent number: 11785777
    Abstract: In some embodiments, the present disclosure relates to a method of forming an integrated chip including forming a ferroelectric layer over a bottom electrode layer, forming a top electrode layer over the ferroelectric layer, performing a first removal process to remove peripheral portions of the bottom electrode layer, the ferroelectric layer, and the top electrode layer, and performing a second removal process using a second etch that is selective to the bottom electrode layer and the top electrode layer to remove portions of the bottom electrode layer and the top electrode layer, so that after the second removal process the ferroelectric layer has a surface that protrudes past a surface of the bottom electrode layer and the top electrode layer.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: October 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsiang Chang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Tzu-Yu Chen, Fu-Chen Chang
  • Patent number: 11784247
    Abstract: A MOS controlled thyristor device according to the concept of the present invention includes a substrate comprising a first surface and a second surface, which face each other, gate patterns disposed on the first surface, a cathode electrode configured to cover the gate patterns, and an anode electrode disposed on the second surface, The substrate includes a lower emitter layer having a first conductive type, a lower base layer having a second conductive type on the lower emitter layer, an upper base region provided in an upper portion of the lower emitter layer and having a first conductive type, wherein the upper base region is configured to expose a portion of a top surface of the lower base layer, an upper emitter region having a second conductive type and provided in an upper portion of the upper base region, a first doped region having a first conductive type and a second doped region surrounded by the first doped region and having a second conductive type, wherein the first and second doped regions are
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: October 10, 2023
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Kun Sik Park, Jong Il Won, Doo Hyung Cho, Dong Yun Jung, Hyun Gyu Jang
  • Patent number: 11778813
    Abstract: Semiconductor devices including active regions and gate electrodes are disclosed. An example semiconductor device according to the disclosure includes a gate electrode extending in a first direction, and first and second active regions extending in a second direction. The gate electrode has a side extending in the first direction. The first active region includes: a first center portion having a first width in the first direction; and a first end portion disposed at a first end of the first center portion, and having a second width in the first direction that is greater than the first width. The second active region includes: a second center portion having a third width in the first direction. The gate electrode overlaps along the side with portions of the first end portion and the second center portion.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: October 3, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Masahiro Yokomichi
  • Patent number: 11769807
    Abstract: Semiconductor devices, such as a lateral HEMT, may display current flow between a plurality of interdigitated source fingers and drain fingers, and controlled by a common gate connection. An extended source finger contact may enable improved voltage control across the source fingers, even for large devices with many and/or lengthy source fingers. In this way, unwanted subthreshold operations and switching oscillations may be avoided by reliably maintaining a source voltage at a desired level, to thereby provide fast and reliable switching.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: September 26, 2023
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Woochul Jeon
  • Patent number: 11769800
    Abstract: A semiconductor device of embodiments includes a first gate electrode, a second gate electrode, a third gate electrode extending in a first direction, and a gate wiring line extending in a second direction crossing the first direction and to which the first to the third gate electrodes are connected. Assuming distance between the first and the second gate electrode in the second direction in a first region is S1, distance between the first and the second gate electrode in the second direction in a second region closer to the gate wiring line than the first region is S2, distance between the second and the third gate electrode in the second direction in the first region is S3, and distance between the second and the third gate electrode in the second direction in the second region is S4, following Expressions are satisfied, S1<S3, S1<S2, S3>S4.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: September 26, 2023
    Assignees: Toshiba Electronic Devices & Storage Corporation, Kabushiki Kaisha Toshiba
    Inventors: Shunsuke Asaba, Hiroshi Kono
  • Patent number: 11764276
    Abstract: A semiconductor device according to an embodiment includes: a silicon carbide layer having a first plane parallel to a first direction and a second direction orthogonal to the first direction, and a second plane facing the first plane, the silicon carbide layer including a first trench and a second trench extending in the first direction; a gate electrode in the first trench and the second trench; a gate insulating layer; a gate wiring extending in the second direction, intersecting with the first trench and the second trench, connected to the gate electrode; a first electrode; a second electrode; and an interlayer insulating layer provided between the gate electrode and the first electrode. Neither the gate electrode nor the gate wiring is present between an end of the first trench in the first direction and the interlayer insulating layer.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: September 19, 2023
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Shinichi Kimoto, Ryosuke Iijima, Shinsuke Harada
  • Patent number: 11764059
    Abstract: According to one embodiment, a method for manufacturing a substrate is disclosed. The method can include preparing a structure body. The structure body includes a first semiconductor member and a second semiconductor member. The first semiconductor member includes silicon carbide including a first element. The second semiconductor member includes silicon carbide including a second element. The first element includes at least one selected from a first group consisting of N, P, and As. The second element includes at least one selected from a second group consisting of B, Al, and Ga. The method can include forming a hole that extends through the second semiconductor member and reaches the first semiconductor member. In addition, the method can include forming a third semiconductor member in the hole. The third semiconductor member includes silicon carbide including a third element. The third element includes at least one selected from the first group.
    Type: Grant
    Filed: September 8, 2020
    Date of Patent: September 19, 2023
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Johji Nishio, Tatsuo Shimizu
  • Patent number: 11757018
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming an n-type doped region in a semiconductor substrate and forming a semiconductor stack over the semiconductor substrate. The semiconductor stack has multiple sacrificial layers and multiple semiconductor layers laid out alternately. The method also includes introducing n-type dopants from the n-type doped region into the semiconductor stack during the forming of the semiconductor stack. The method further includes patterning the semiconductor stack to form a fin structure and forming a dummy gate stack to wrap around a portion of the fin structure. In addition, the method includes removing the dummy gate stack and the sacrificial layers to release multiple semiconductor nanostructures made up of remaining portions of the semiconductor layers. The method includes forming a metal gate stack to wrap around the semiconductor nanostructures.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Te-An Yu, Hung-Ju Chou, Jet-Rung Chang, Yen-Po Lin, Jiun-Ming Kuo
  • Patent number: 11735643
    Abstract: Systems and methods for passivation of III-V semiconductors to create heterogeneous structures based on such semiconductors, to the structures themselves, and to devices using passivated III-V semiconductors, such as metal oxide-semiconductor field effect transistors (MOSFET) and Hall effect sensors using III-V semiconductors.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: August 22, 2023
    Assignee: RAMOT AT TEL-AVIV UNIVERSITY LTD.
    Inventors: Alexander Gerber, Gregory Kopnov
  • Patent number: 11706918
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions. Channel-material strings extend through the first tiers and the second tiers. Material of the first tiers is of different composition from material of the second tiers. Conducting material is formed in one of the first tiers. The conducting material comprises a seam in and longitudinally-along opposing sides of individual of the memory-block regions in the one first tier. The seam is penetrated with a fluid that forms intermediate material in the seam longitudinally-along the opposing sides of the individual memory-block regions in the one first tier and comprises a different composition from that of the conducting material. Other embodiments, including structure independent of method, are disclosed.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: July 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins
  • Patent number: 11688773
    Abstract: Disclosure is a method for manufacturing a semiconductor device. The method includes forming a source electrode and a drain electrode on a nitride semiconductor layer formed on a main surface of a SiC substrate, forming a gate electrode having a laminated structure including a Ni layer and an Au layer on the Ni layer between the source electrode and the drain electrode on the nitride semiconductor layer and forming a first metal film having the same laminated structure as the gate electrode in a region adjacent to the source electrode with an interval therebetween, forming a second metal film to contact with the source electrode and the first metal film, forming a hole being continuous with the first metal film from a back surface of the SiC substrate, and forming a metal via being continuous with the first metal film from the back surface in the hole.
    Type: Grant
    Filed: February 14, 2020
    Date of Patent: June 27, 2023
    Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
    Inventors: Shunsuke Kurachi, Tsutomu Komatani
  • Patent number: 11688801
    Abstract: An HEMT includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer. The composition of the first III-V compound layer is different from the composition of the second III-V compound layer. A third III-V compound layer is disposed on the second III-V compound layer. The first III-V compound layer and the third III-V compound layer are composed of the same group III-V elements. The third III-V compound layer includes a body and numerous finger parts. Each of the finger parts is connected to the body. All finger parts are parallel to each other and do not contact each other. A source electrode, a drain electrode and a gate electrode are disposed on the first III-V compound layer.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: June 27, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Po-Yu Yang
  • Patent number: 11688785
    Abstract: A semiconductor device is provided. The semiconductor device comprises a substrate having a first surface and a second surface, the substrate comprising a wide bandgap semiconductor material. An epitaxial layer is on the first surface of the substrate and a metal germanosilicide layer is above the second surface of the substrate. The metal germanosilicide layer forms an ohmic contact to the substrate.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: June 27, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yudi Setiawan, Handoko Linewih
  • Patent number: 11682586
    Abstract: A semiconductor structure is provided. The semiconductor structure includes: a base substrate having an opening; and a first gate layer formed in the opening. In the first gate layer closes a top of the opening and the first gate layer includes at least one void. The semiconductor structure further includes a second gate layer formed on the first gate layer. An atomic radius of the material of the second gate layer is smaller than gaps among atoms of the material of the first gate layer and the void is filled by atoms of one of the material of the first gate layer and the material of the second gate layer.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: June 20, 2023
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Jian Qiang Liu, Chao Tian, Zi Rui Liu, Ching Yun Chang, Ai Ji Wang