Patents Examined by Eric Ward
  • Patent number: 11495663
    Abstract: A predetermined relational expression holds where a first distance along the in-plane direction from a channel of the first semiconductor layer to a third semiconductor layer that is the other of the collector layer and the cathode layer is designated as W, a second distance from the channel of the first semiconductor layer to the second semiconductor layer is designated as S, and a diffusion coefficient and a lifetime of a part of the semiconductor substrate between the channel of the first semiconductor layer and the third semiconductor layer are designated as D and ?, respectively.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: November 8, 2022
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kakeru Otsuka, Hirofumi Oki, Kohei Sako
  • Patent number: 11495665
    Abstract: A semiconductor device of an embodiment includes: a first trench in a silicon carbide layer and extending in a first direction; a second trench and a third trench located in a second direction orthogonal to the first direction with respect to the first trench and adjacent to each other in the first direction, n type first silicon carbide region, p type second silicon carbide region on the first silicon carbide region, n type third silicon carbide region on the second silicon carbide region, p type fourth silicon carbide region between the first silicon carbide region and the second trench, and p type fifth silicon carbide region located between the first silicon carbide region and the third trench; a gate electrode in the first trench; a first electrode; and a second electrode. A part of the first silicon carbide region is located between the second trench and the third trench.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: November 8, 2022
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Katsuhisa Tanaka, Ryosuke Iijima, Shinya Kyogoku
  • Patent number: 11489051
    Abstract: A semiconductor device includes an SiC semiconductor layer which has a first main surface on one side and a second main surface on the other side, a semiconductor element which is formed in the first main surface, a raised portion group which includes a plurality of raised portions formed at intervals from each other at the second main surface and has a first portion in which some of the raised portions among the plurality of raised portions overlap each other in a first direction view as viewed in a first direction which is one of the plane directions of the second main surface, and an electrode which is formed on the second main surface and connected to the raised portion group.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: November 1, 2022
    Assignee: ROHM CO., LTD.
    Inventors: Seiya Nakazawa, Sawa Haruyama
  • Patent number: 11489071
    Abstract: A semiconductor device includes a semiconductor substrate of a first conductivity type, having an active portion and a gate pad portion; a first semiconductor layer of the first conductivity type; and a second semiconductor layer of a second conductivity type. The active portion has first semiconductor regions of the first conductivity type, first trenches, gate insulating films, first gate electrodes, an interlayer insulating film, and second semiconductor regions of the second conductivity type. The gate pad portion has at least one second trench, an insulating film 9b, at least one second gate electrode, at least one fourth semiconductor region of the second conductivity type, and a gate electrode pad. Between the gate electrode pad and the semiconductor substrate, a polycrystalline silicon film is provided.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: November 1, 2022
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Keiji Okumura
  • Patent number: 11476358
    Abstract: According to one embodiment, a semiconductor device includes first to third electrodes, first and second semiconductor layers, and an insulating member. The third electrode in a first direction is between the first and second electrodes in the first direction. The first direction is from the first toward second electrode. The first semiconductor layer includes Alx1Ga1-x1N (0?x1<1), and first to sixth partial regions. A second direction from the first partial region toward the first electrode crosses the first direction. The second semiconductor layer includes Alx2Ga1-x2N (0<x2<1 and x1<x2), and first and second semiconductor regions. A direction from the fourth partial region toward the first semiconductor region is along the second direction. A direction toward the second semiconductor region from the fifth and sixth partial regions is along the second direction. The insulating member includes first to third insulating regions.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: October 18, 2022
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yosuke Kajiwara, Aya Shindome, Masahiko Kuraguchi
  • Patent number: 11476354
    Abstract: According to one embodiment, a power generation element includes a first conductive layer, a second conductive layer, and a first member. The first member is provided between the first conductive layer and the second conductive layer. The first member includes a first semiconductor having polarity. A gap is between the second conductive layer and the first member. A <000-1> direction of the first semiconductor is oblique to a first direction from the first conductive layer toward the second conductive layer.
    Type: Grant
    Filed: January 6, 2021
    Date of Patent: October 18, 2022
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hisashi Yoshida, Hisao Miyazaki, Shigeya Kimura
  • Patent number: 11476291
    Abstract: There is provided semiconductor devices and methods of forming the same, the semiconductor devices including: a first semiconductor element having a first electrode; a second semiconductor element having a second electrode; a Sn-based micro-solder bump formed on the second electrode; and a concave bump pad including the first electrode opposite to the micro-solder bump, where the first electrode is connected to the second electrode via the micro-solder bump and the concave bump pad.
    Type: Grant
    Filed: July 3, 2019
    Date of Patent: October 18, 2022
    Assignee: SONY CORPORATION
    Inventors: Satoru Wakiyama, Naoki Jyo, Kan Shimizu, Toshihiko Hayashi, Takuya Nakamura
  • Patent number: 11476352
    Abstract: Doping techniques for fin-like field effect transistors (FinFETs) are disclosed herein. An exemplary method includes forming a fin structure, forming a doped amorphous layer over a portion of the fin structure, and performing a knock-on implantation process to drive a dopant from the doped amorphous layer into the portion of the fin structure, thereby forming a doped feature. The doped amorphous layer includes a non-crystalline form of a material. In some implementations, the knock-on implantation process crystallizes at least a portion of the doped amorphous layer, such that the portion of the doped amorphous layer becomes a part of the fin structure. In some implementations, the doped amorphous layer includes amorphous silicon, and the knock-on implantation process crystallizes a portion of the doped amorphous silicon layer.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: October 18, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sai-Hooi Yeong, Sheng-Chen Wang, Bo-Yu Lai, Ziwei Fang, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 11476369
    Abstract: A power SiC MOSFET with a built-in Schottky rectifier provides advantages of including a Schottky rectifier, such as avoiding bipolar degradation, while reducing a parasitic capacitive charge and related power losses, as well as system cost. A lateral built-in channel layer may enable lateral spacing of the MOSFET gate oxide from a high electric field at the Schottky contact, while also providing current limiting during short-circuit events.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: October 18, 2022
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Andrei Konstantinov
  • Patent number: 11462550
    Abstract: An SRAM structure includes first and second gate strips extending along a first direction. A first active region extends across the first gate strip from a top view, and forms a first pull-up transistor with the first gate strip. A second active region extends across the second gate strip from the top view, and forms a second pull-up transistor with the second gate strip. From the top view the first active region has a first stepped sidewall facing away from the second active region. The first stepped sidewall has a first side surface farthest from the second active region, a second side surface set back from the first side surface along the first direction, and a third side surface set back from the second side surface along the first direction.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: October 4, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Gulbagh Singh, Shun-Chi Tsai, Chih-Ming Lee, Chi-Yen Lin, Kuo-Hung Lo
  • Patent number: 11450768
    Abstract: A field effect transistor for a high voltage operation can include vertical current paths, which may include vertical surface regions of a pedestal semiconductor portion that protrudes above a base semiconductor portion. The pedestal semiconductor portion can be formed by etching a semiconductor material layer employing a gate structure as an etch mask. A dielectric gate spacer can be formed on sidewalls of the pedestal semiconductor portion. A source region and a drain region may be formed underneath top surfaces of the base semiconductor portion. Alternatively, epitaxial semiconductor material portions can be grown on the top surfaces of the base semiconductor portions, and a source region and a drain region can be formed therein. Alternatively, a source region and a drain region can be formed within via cavities in a planarization dielectric layer.
    Type: Grant
    Filed: October 5, 2020
    Date of Patent: September 20, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventor: Mitsuhiro Togo
  • Patent number: 11437367
    Abstract: A 3D integrated circuit (3D IC) chip is described. The 3D IC chip includes a die having a compound semiconductor high electron mobility transistor (HEMT) active device. The compound semiconductor HEMT active device is composed of compound semiconductor layers on a single crystal, compound semiconductor layer. The 3D IC chip also includes an acoustic device integrated in the single crystal, compound semiconductor layer. The 3D IC chip further includes a passive device integrated in back-end-of-line layers of the die on the single crystal, compound semiconductor layer.
    Type: Grant
    Filed: April 21, 2020
    Date of Patent: September 6, 2022
    Assignee: QUALCOMM Incorporated
    Inventors: Je-Hsiung Lan, Ranadeep Dutta, Jonghae Kim
  • Patent number: 11430749
    Abstract: According to one configuration, a fabricator produces an electronic device to include: a substrate; a transistor circuit disposed on the substrate; silicide material disposed on first regions of the transistor circuit; and the silicide material absent from second regions of the transistor circuit. Absence of the silicide material over the second regions of the respective of the transistor circuit increases a resistance of one or more parasitic paths (such as one or more parasitic transistors) in the transistor circuit. The increased resistance in the one or more parasitic paths provides better protection of the transistor circuit against electro-static discharge conditions.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: August 30, 2022
    Assignee: Infineon Technologies AG
    Inventors: Markus Mergens, Werner Simbuerger
  • Patent number: 11417765
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate above the quantum well stack, wherein the first gate includes a first gate metal and a first gate dielectric layer; and a second gate above the quantum well stack, wherein the second gate includes a second gate metal and a second gate dielectric layer, and the second gate dielectric layer extends over the first gate.
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: August 16, 2022
    Assignee: Intel Corporation
    Inventors: Nicole K. Thomas, Ravi Pillarisetty, Kanwaljit Singh, Hubert C. George, David J. Michalak, Lester Lampert, Zachary R. Yoscovits, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
  • Patent number: 11410998
    Abstract: Integrated circuit (IC) structures including buried insulator layer and methods for forming are provided. In a non-limiting example, a IC structure includes: a substrate; a first fin over the substrate; a source region and a drain region in the first fin; a first gate structure and a second gate structure over the first fin, the first and the second gate structures positioned between the source region and the drain region; and a buried insulator layer including a portion disposed under the first fin.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: August 9, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Wenjun Li, Man Gu
  • Patent number: 11411084
    Abstract: A semiconductor device of an embodiment includes a first trench extending in a first direction in a silicon carbide layer; a second trench and a third trench adjacent to each other in the first direction; a first silicon carbide region of n type; a second silicon carbide region of p type on the first silicon carbide region; a third silicon carbide region of n type on the second silicon carbide region; a fourth silicon carbide region of p type between the first silicon carbide region and the second trench; a fifth silicon carbide region of p type between the first silicon carbide region and the third trench; a gate electrode in the first trench; a first electrode, part of which is in the second trench, the first electrode contacting the first silicon carbide region between the fourth silicon carbide region and the fifth silicon carbide region; and a second electrode.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: August 9, 2022
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Katsuhisa Tanaka, Ryosuke Iijima, Shinichi Kimoto, Shinsuke Harada
  • Patent number: 11398556
    Abstract: A semiconductor device of an embodiment includes: a first trench located in a silicon carbide layer extending in a first direction; a second trench and a third trench adjacent to each other in the first direction; n type first silicon carbide region; p type second silicon carbide region on the first silicon carbide region; n type third silicon carbide region on the second silicon carbide region; p type fourth silicon carbide region between the first silicon carbide region and the second trench; p type fifth silicon carbide region between the first silicon carbide region and the third trench; p type sixth silicon carbide region shallower than the second trench between the second trench and the third trench and having a p type impurity concentration higher than that of the second silicon carbide region; a gate electrode in the first trench; a first electrode, and a second electrode.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: July 26, 2022
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Katsuhisa Tanaka, Shinya Kyogoku, Ryosuke Iijima, Shinichi Kimoto, Shinsuke Harada
  • Patent number: 11398381
    Abstract: A method includes forming a metal layer over a substrate; forming a dielectric layer over the metal layer; removing a first portion of the dielectric layer to expose a first portion of the metal layer, while a second portion of the dielectric layer remains on the metal layer; selectively forming a first inhibitor on the second portion of the dielectric layer, while the metal layer is free of coverage by the first inhibitor; and selectively depositing a first hard mask on the exposed first portion of the metal layer, while the first inhibitor is free of coverage by the first hard mask.
    Type: Grant
    Filed: August 8, 2020
    Date of Patent: July 26, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Wei Su, Fu-Ting Yen, Teng-Chun Tsai
  • Patent number: 11387251
    Abstract: A memory device includes a substrate, first, second, and third conductive layers, a stack of fourth conductive layers, a memory pillar, and an insulator. The first, second, and third conductive layer are provided above the substrate. The stack of fourth conductive layers is provided above the third conductive layer. The memory pillar extends in the thickness direction through the stack and the third conductive layer and into the second conductive layer in a first region of the memory device. The insulator extends in a thickness direction through the stack, the third conductive layer, and the second conductive layer in a second region of the memory device. The insulator also extends in a second surface direction of the substrate. A thickness of the third conductive layer in a region through which the insulator extends is greater than a thickness of the third conductive layer in the first region.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: July 12, 2022
    Assignee: KIOXIA CORPORATION
    Inventors: Shigeki Kobayashi, Toru Matsuda, Hanae Ishihara
  • Patent number: 11387356
    Abstract: A semiconductor structure includes a seed layer on a substrate and an epitaxial stack on the seed layer. The epitaxial stack includes a first superlattice part and a second superlattice part on the first superlattice part. The first superlattice part includes first units repetitively stacked M1 times on the seed layer. Each first unit includes a first sub-layer that is an Aly1Ga1-y1N layer, and a second sub-layer that is an Alx1Ga1-x1N layer, wherein y1<x1. The second superlattice part includes second units repetitively stacked M2 times on the first superlattice part. Each second unit includes a third sub-layer that is an Aly2Ga1-y2N layer, and a fourth sub-layer that is an Alx2Ga1-x2N layer, wherein y2<x2. M1 and M2 are positive integers, 0?x1, y1 and y2<1, 0<x2?1, and x1<x2, or x1=x2 and y1<y2.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: July 12, 2022
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Chih-Yen Chen, Franky Juanda Lumbantoruan