Patents Examined by Fernando L. Toledo
  • Patent number: 11968834
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings vertically extending through the alternating stack and having lateral protrusions at levels of the electrically conductive layers, and memory opening fill structures located in the memory openings. Each of the memory opening fill structures includes a vertical semiconductor channel, a dielectric material liner laterally surrounding the vertical semiconductor channel, and a vertical stack of discrete memory elements laterally surrounding the dielectric material liner and located within volumes of the lateral protrusions. Each discrete memory element includes a vertical inner sidewall and a convex or stepped outer sidewall.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: April 23, 2024
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Ramy Nashed Bassely Said, Raghuveer S. Makala, Senaka Kanakamedala, Fei Zhou
  • Patent number: 11967591
    Abstract: A method of forming a semiconductor device includes forming a first interconnect structure over a carrier; forming a thermal dissipation block over the carrier; forming metal posts over the first interconnect structure; attaching a first integrated circuit die over the first interconnect structure and the thermal dissipation block; removing the carrier; attaching a semiconductor package to the first interconnect structure and the thermal dissipation block using first electrical connectors and thermal dissipation connectors; and forming external electrical connectors, the external electrical connectors being configured to transmit each external electrical connection into the semiconductor device, the thermal dissipation block being electrically isolated from each external electrical connection.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: April 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Hao Chen, Fong-Yuan Chang, Po-Hsiang Huang, Ching-Yi Lin, Jyh Chwen Frank Lee
  • Patent number: 11956965
    Abstract: A memory device and an electronic system, the memory device including a substrate; a ground selection line on the substrate, a cutting portion cutting the ground selection line; a first insulation layer and a first word line stacked immediately above the ground selection line; and second insulation layers and second word lines alternately stacked on the first word line, wherein the first word line includes a first portion laterally offset from the cutting portion and a second portion overlying the cutting portion, the first portion of the first word line has a first thickness, and the second portion of the first word line has a second thickness less than the first thickness.
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: April 9, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Giyong Chung, Jaehyung Kim
  • Patent number: 11948926
    Abstract: In an embodiment, a structure includes: a processor device including logic devices; a first memory device directly face-to-face bonded to the processor device by metal-to-metal bonds and by dielectric-to-dielectric bonds; a first dielectric layer laterally surrounding the first memory device; a redistribution structure over the first dielectric layer and the first memory device, the redistribution structure including metallization patterns; and first conductive vias extending through the first dielectric layer, the first conductive vias connecting the metallization patterns of the redistribution structure to the processor device.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Hua Yu, Wei Ling Chang, Chuei-Tang Wang, Chieh-Yen Chen
  • Patent number: 11943916
    Abstract: A semiconductor device includes a stack structure including mold layers and horizontal conductive layers, which are alternately stacked. A channel structure vertically extending in the stack structure is provided. A pillar structure vertically extending in the stack structure is provided. A contact plug connected to a corresponding one of the horizontal conductive layers is disposed. The pillar structure includes a pillar extending through the horizontal conductive layers, and extensions protruding from a side surface of the pillar. Each extension is horizontally aligned with a corresponding one of the horizontal conductive layers.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: March 26, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seongjae Go, Jongsoo Kim
  • Patent number: 11925088
    Abstract: A foldable display apparatus includes: a non-folding area, and a folding area, in which an aperture ratio of a plurality of red sub pixels in the folding area is lower than an aperture ratio of a plurality in red sub pixels of the non-folding area, an aperture ratio of the plurality of green sub pixels in the folding area is lower than an aperture ratio of the plurality of green sub pixels of the non-folding area, and an aperture ratio of the plurality in blue sub pixels of the folding area is lower than an aperture ratio of the plurality of blue sub pixels of the non-folding area.
    Type: Grant
    Filed: May 9, 2022
    Date of Patent: March 5, 2024
    Assignee: LG Display Co., Ltd.
    Inventors: Suk Choi, Sinchul Kang, Miyeon Seo
  • Patent number: 11923314
    Abstract: A semiconductor package includes a connection structure including a redistribution layer, a plurality of under bump metal layers electrically connected to the redistribution layer, a passivation layer which overlaps at least portions of side faces of the plurality of under bump metal layers, and includes a first trench disposed between under bump metal layers adjacent to each other, a surface mounting element which is on the under bump metal layers adjacent to each other, connected to the redistribution layer, and overlaps the first trench, and an underfill material layer that is between a portion of the passivation layer and the surface mounting element, and is in the first trench. The first trench extends in a first direction and includes a first sub-trench having a first width in a second direction, and a second sub-trench having a second width different from the first width in the second direction.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: March 5, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ik Kyu Jin, Jin Su Kim, Ki Ju Lee
  • Patent number: 11908906
    Abstract: A semiconductor structure and a fabrication method of the semiconductor structure are provided. The method includes providing a substrate, forming a first dielectric layer and a plurality of gate structures, forming source-drain doped regions, and forming a source-drain plug. The first dielectric layer covers surfaces of the gate structure, the source-drain doped region and the source-drain plug. The method also includes forming a first plug in the first dielectric layer, and forming a second dielectric layer on the first dielectric layer. The first plug is in contact with a top surface of one of the source-drain plug and the gate structure. The second dielectric layer covers the first plug. Further, the method includes forming a second plug material film in the first and second dielectric layers. The second plug material film is in contact with the top surface of one of the source-drain plug and the gate structure.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: February 20, 2024
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Hailong Yu, Xuezhen Jing, Hao Zhang, Tiantian Zhang, Jinhui Meng
  • Patent number: 11908865
    Abstract: A semiconductor structure and a fabrication method of the semiconductor structure are provided. The semiconductor structure includes a substrate. The substrate includes a first region, a second region, and an isolation region between the first region and the second region. The semiconductor structure also includes a first fin, a second fin and a third fin disposed over the first region, the second region, and the isolation region, respectively. Further, the semiconductor structure includes a gate structure. The gate structure includes a first work function layer over the first region and a first portion of the isolation region, and a second work function layer over the second region and a second portion of the isolation region. An interface where the first work function layer is in contact with the second work function layer is located over a top surface of the third fin.
    Type: Grant
    Filed: January 14, 2022
    Date of Patent: February 20, 2024
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Da Huang, Yao Qi Dong, Xiaowan Dai, Zhen Tian
  • Patent number: 11908751
    Abstract: In an embodiment, a method includes: etching a trench in a substrate; depositing a liner material in the trench with an atomic layer deposition process; depositing a flowable material on the liner material and in the trench with a contouring flowable chemical vapor deposition process; converting the liner material and the flowable material to a solid insulation material, a portion of the trench remaining unfilled by the solid insulation material; and forming a hybrid fin in the portion of the trench unfilled by the solid insulation material.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Szu-Ying Chen, Sen-Hong Syue, Huicheng Chang, Yee-Chia Yeo
  • Patent number: 11908863
    Abstract: A transistor device includes a substrate, a fin structure extending on the substrate in a direction parallel to a top surface of the substrate, a source region and a drain region provided at an upper portion of the fin structure, a constant current generating layer provided at a lower portion of the fin structure, a gate insulating film provided on both side surfaces and a top surface of the upper portion of the fin structure, and a gate electrode provided on the gate insulating film, wherein the gate electrode is provided on the fin structure and between the source region and the drain region, the constant current generating layer generates a constant current between the drain region and the substrate, and the constant current is independent from a gate voltage applied to the gate electrode.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: February 20, 2024
    Assignee: UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
    Inventors: Kyung Rok Kim, Jae Won Jeong, Young Eun Choi, Woo Seok Kim, Jiwon Chang
  • Patent number: 11908861
    Abstract: A semiconductor device is disclosed. The semiconductor device may include an active pattern on a substrate, source/drain patterns on the active pattern, a fence spacer on side surfaces of each of the source/drain patterns, a channel pattern interposed between the source/drain patterns, a gate electrode crossing the channel pattern and extending in a first direction, and a gate spacer on a side surface of the gate electrode. A first thickness of an upper portion of the fence spacer in the first direction may be greater than a second thickness of the gate spacer in a second direction crossing the first direction.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: February 20, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Munhyeon Kim, Mingyu Kim, Doyoung Choi, Daewon Ha
  • Patent number: 11908921
    Abstract: The present disclosure is directed to method for the fabrication of spacer structures between source/drain (S/D) epitaxial structures and metal gate structures in nanostructure transistors. The method includes forming a fin structure with alternating first and second nanostructure elements on a substrate. The method also includes etching edge portions of the first nanostructure elements in the fin structure to form cavities. Further, depositing a spacer material on the fin structure to fill the cavities and removing a portion of the spacer material in the cavities to form an opening in the spacer material. In addition, the method includes forming S/D epitaxial structures on the substrate to abut the fin structure and the spacer material so that sidewall portions of the S/D epitaxial structures seal the opening in the spacer material to form an air gap in the spacer material.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Yun Peng, Fu-Ting Yen, Keng-Chu Lin
  • Patent number: 11901440
    Abstract: A semiconductor device containing a self-aligned contact rail is provided. The self-aligned contact rail can have a reduced critical dimension, CD. The self-aligned contact rail can be obtained utilizing a sacrificial semiconductor fin as a placeholder structure for the contact rail. The used of the sacrificial semiconductor fin enables reduced, and more controllable, CDs.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: February 13, 2024
    Assignee: International Business Machines Corporation
    Inventors: Yann Mignot, Christopher J. Waskiewicz, Su Chen Fan, Brent Anderson, Junli Wang
  • Patent number: 11901412
    Abstract: The present disclosure describes a semiconductor device having facet-free epitaxial structures with a substantially uniform thickness. The semiconductor device includes a fin structure on a substrate. The fin structure includes a fin bottom portion and a fin top portion. A top surface of the fin bottom portion is wider than a bottom surface of the fin top portion. The semiconductor device further includes a dielectric layer on the fin top portion, an amorphous layer on the dielectric layer, and an epitaxial layer. The epitaxial layer is on a top surface of the amorphous layer, sidewall surfaces of the amorphous layer, the dielectric layer, the fin top portion, and the top surface of the fin bottom portion.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Winne Victoria Wei-Ning Chen, Pang-Yen Tsai
  • Patent number: 11894310
    Abstract: A fan-out semiconductor package including a first redistribution layer; a first semiconductor chip on the first redistribution layer; an interconnector on the first redistribution layer and spaced apart from the first semiconductor chip; a molded layer covering the interconnector and side surfaces of the first semiconductor chip; and a second redistribution layer on the molded layer, wherein the interconnector includes a metal ball and is electrically connected to the first redistribution layer, the second redistribution layer includes a first line wiring, and a first via electrically connected to the first line wiring, the first via is connected to the interconnector, and a part of the first via is in the molded layer.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: February 6, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Myung Sam Kang, Ki Ju Lee, Young Chan Ko, Jeong Seok Kim, Bong Ju Cho
  • Patent number: 11894243
    Abstract: A wafer system-level fan-out packaging structure and a manufacturing method. The method includes: forming a redistribution layer, where the redistribution layer includes a first surface and an opposite second surface; providing a patch element, and bonding the patch element to the second surface; providing a die having a bump disposed on a front side, and bonding the front side of the die to the second surface of the redistribution layer through the bump; and forming a plastic packaging layer on the second surface of the redistribution layer, where the plastic packaging layer covers the patch element, back side and side surfaces of the die. In the wafer system-level fan-out packaging structure and the manufacturing method of the present disclosure, the die and the patch element are packaged in a plastic packaging layer, and the die and the patch element are connected and let out by the redistribution layer.
    Type: Grant
    Filed: November 19, 2021
    Date of Patent: February 6, 2024
    Assignee: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
    Inventors: Yenheng Chen, Chengchung Lin
  • Patent number: 11869966
    Abstract: A method includes forming a trench in a first surface in an edge region of a semiconductor body, forming a plurality of superjunction transistor cells in an inner region of a semiconductor body, and forming an insulation layer on the first surface of the semiconductor body in the edge region and in the inner region, wherein forming the insulation layer includes a thermal oxidation process.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: January 9, 2024
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Christian Fachmann, Franz Hirler, Winfried Kaindl, Markus Rochel
  • Patent number: 11869839
    Abstract: A packaged electronic device includes a semiconductor die with an electronic component and a contact structure connected to the electronic component, as well as an organic panel frame, a lamination structure that partially embeds the semiconductor die in an opening of the organic panel frame, and a ceramic substrate mounted to a first side of the semiconductor die.
    Type: Grant
    Filed: May 11, 2021
    Date of Patent: January 9, 2024
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Woochan Kim, Benjamin Allen Samples, Vivek Kishorechand Arora
  • Patent number: 11862657
    Abstract: To achieve a size reduction of a semiconductor package while securing stability in mounting. Three terminals t1, t2, and t4 are individually arranged on a semiconductor package 10 having a rectangular shape as viewed in plan in such a manner that the center in the longitudinal direction of the semiconductor package 10 of each of the three terminals t1, t2, and t4 and the center in the longitudinal direction of each of the other terminals are not overlapped with each other as viewed from the side of the long side.
    Type: Grant
    Filed: July 1, 2022
    Date of Patent: January 2, 2024
    Assignee: Asahi Kasei Microdevices Corporation
    Inventors: Osamu Shirata, Yusuke Hidaka