Patents Examined by Meiya Li
  • Patent number: 11849587
    Abstract: A three-dimensional memory device including first and second stacking structures and first and second conductive pillars is provided. The first stacking structure includes first stacking layers stacked along a vertical direction. Each first stacking layer includes a first gate layer, a first channel layer, and a first ferroelectric layer between the first gate and channel layers. The second stacking structure is laterally spaced from the first stacking structure and includes second stacking layers stacked along the vertical direction. Each second stacking layer includes a second gate layer, a second channel layer, and a second ferroelectric layer is between the second gate and channel layers. The first and second gate layers are disposed between the first and second ferroelectric layers, and the first and second conductive pillars extend along the vertical direction in contact respectively with the first and second channel layers.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: December 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-I Wu, Sai-Hooi Yeong, Yu-Ming Lin, Han-Jong Chia
  • Patent number: 11844208
    Abstract: An apparatus includes a base structure having a first portion including a plurality of transistors and a second portion surrounding the first portion; a storage structure on the first portion of the base structure, the storage structure including a plurality of storage capacitors each coupled to a corresponding one of the plurality of transistors; an interface structure on the second portion of the base structure; and a peripheral structure on the interface structure; wherein the interface structure is divided into a plurality of insulating films and the plurality of insulating films are arranged away from each other to have a plurality of voids between the second portion of the base structure and the peripheral structure.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: December 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Mitsunari Sukekawa, Hiroshi Toyama, Hiroyuki Uno, Yasutaka Okada
  • Patent number: 11843015
    Abstract: An image sensor includes a device isolation layer disposed in a substrate and defining pixel regions, and a grid pattern on a surface of the substrate. The grid pattern overlaps the device isolation layer between adjacent pixel regions in a direction perpendicular to the surface. The grid pattern has a width less than a width of the device isolation layer.
    Type: Grant
    Filed: March 3, 2022
    Date of Patent: December 12, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Min Jang, Jungchak Ahn, Junsung Park, Younggu Jin
  • Patent number: 11842985
    Abstract: Semiconductor devices having through-stack interconnects for facilitating connectivity testing, and associated systems and methods, are disclosed herein. In one embodiment, a semiconductor device includes a stack of semiconductor dies and a plurality of through-stack interconnects extending through the stack to electrically couple the semiconductor dies. The interconnects include functional interconnects and at least one test interconnect. The test interconnect is positioned in a portion of the stack more prone to connectivity defects than the functional interconnects. Accordingly, testing the connectivity of the test interconnect can provide an indication of the connectivity of the functional interconnects.
    Type: Grant
    Filed: October 13, 2022
    Date of Patent: December 12, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Christian N. Mohr, Scott E. Smith
  • Patent number: 11830947
    Abstract: In a method of manufacturing a semiconductor device, an opening is formed in an interlayer dielectric layer such that a source/drain region is exposed in the opening. A first semiconductor layer is formed to fully cover the exposed source/drain region within the opening. A heating process is performed to make an upper surface of the first semiconductor layer substantially flat. A conductive contact layer is formed over the first semiconductor layer.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Blandine Duriez, Mark van Dal, Martin Christopher Holland, Gerben Doornbos
  • Patent number: 11832529
    Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: November 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
  • Patent number: 11817455
    Abstract: An SCR with a first semiconductor region and plural concentric semiconductor regions, each surrounding the first semiconductor region. The SCR also includes, surrounded by at least one concentric semiconductor region in the plurality of concentric semiconductor regions, an electrically non-contacted region of a semiconductor type and positioned to modulate a snapback voltage of the silicon controlled rectifier and an electrically-contacted region of the semiconductor type and positioned to provide a diodic response between the at least one concentric semiconductor region in the plurality of concentric semiconductor regions and the electrically-contacted region.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: November 14, 2023
    Assignee: Texas Instruments Incorporated
    Inventor: Aravind Chennimalai Appaswamy
  • Patent number: 11792972
    Abstract: A memory array and a method for preparing the memory are provided. The memory array includes a semiconductor substrate, an isolation structure and contact enhancement sidewall spacers. The semiconductor substrate has a trench defining laterally separate active areas formed of surface regions of the semiconductor substrate. Top surfaces of a first group of the active areas are recessed with respect to top surfaces of a second group of the active areas. The isolation structure is filled in the trench and in lateral contact with bottom portions of the active areas. The contact enhancement sidewall spacers laterally surround top portions of the active areas, respectively.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: October 17, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Ping Hsu
  • Patent number: 11784220
    Abstract: A semiconductor device includes: a semiconductor layer of a first conductivity type; a first electrode located on the semiconductor layer; a second electrode located on the semiconductor layer; a third electrode located on the semiconductor layer between the first electrode and the second electrode, and separated from them; a first semiconductor region that is located in the semiconductor layer and is of a second conductivity type; a first cathode region of the first conductivity type; a first anode region of the second conductivity type; a second cathode region of the first conductivity type; a second anode region of the second conductivity type; a third anode region of the second conductivity type; a third cathode region of the first conductivity type; a second semiconductor region of the second conductivity type; a fourth anode region of the second conductivity type; and a fourth cathode region of the first conductivity type.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: October 10, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Hideaki Sai
  • Patent number: 11785757
    Abstract: A method for preparing the memory are provided. The method includes forming a trench at a front side of a semiconductor substrate, wherein the trench defines laterally separate active areas formed of surface regions of the semiconductor substrate; filling an isolation structure in the trench, wherein the isolation structure is filled to a height lower than top surfaces of the active areas; recessing a first group of the active areas from top surfaces of the first group of the active areas, while having top surfaces of a second group of the active areas covered; and forming contact enhancement sidewall spacers to laterally surround top portions of the active areas, respectively.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: October 10, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yuan-Yuan Lin
  • Patent number: 11776981
    Abstract: A method of eliminating interconnect strains in a stack-up is provided. The method includes providing a detector portion including a detector substrate and detector layers, providing a read-out integrated circuit (ROIC) stack-up including ROIC layers and an initial ROIC substrate, removing the initial ROIC substrate from the ROIC layers, attaching a new ROIC substrate to a first surface of the ROIC layers, the new ROIC substrate having a coefficient of thermal expansion (CTE) that matches a CTE of the detector substrate and hybridizing the detector layers to a second surface of the ROIC layers by way of interconnects.
    Type: Grant
    Filed: November 18, 2020
    Date of Patent: October 3, 2023
    Assignee: RAYTHEON COMPANY
    Inventors: Paul A. Drake, Christopher Moshenrose, Heather D. Leifeste
  • Patent number: 11776911
    Abstract: A method includes forming a gate structure on a substrate; forming a gate spacer on a sidewall of the gate structure; forming a carbon-containing layer on the gate spacer; diffusing carbon from the carbon-containing layer into a portion of the substrate below the gate spacer; forming a recess in the substrate on one side of the gate spacer opposite to the gate structure; and forming an epitaxy feature in the recess of the substrate.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Ming Chen, Yu-Chang Lin, Chung-Ting Li, Jen-Hsiang Lu, Hou-Ju Li, Chih-Pin Tsao
  • Patent number: 11764060
    Abstract: Device structures for a field-effect transistor and methods of forming a device structure for a field-effect transistor. A trench isolation region is formed in a substrate, and surrounds a semiconductor body. An undercut cavity region is also formed in the substrate. The undercut cavity region extends laterally beneath the semiconductor body and defines a body pedestal as a section of the substrate that is arranged in vertical alignment with the semiconductor body.
    Type: Grant
    Filed: May 2, 2017
    Date of Patent: September 19, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Michel J. Abou-Khalil, Steven M. Shank, Alvin J. Joseph, Michael J. Zierak
  • Patent number: 11751401
    Abstract: A semiconductor device includes a semiconductor substrate, a memory gate, and a data storage element. The semiconductor substrate includes a memory well which has two source/drain regions and a channel region between the source/drain regions. The memory gate is disposed above the channel region. The data storage element includes a ferroelectric material, and is disposed around the memory gate to separate the memory gate from the channel region.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu-Yu Chen, Sheng-Hung Shih, Kuo-Chi Tu
  • Patent number: 11744065
    Abstract: A semiconductor device is provided. The semiconductor device includes a metal-oxide-semiconductor field-effect-transistor (MOSFET) device electrically attachable to a first data line and a read-only memory (ROM) element. The ROM element is electrically interposable between the MOSFET device and a second data line. The ROM element includes first and second sets of memory cells in high and low resistance states, respectively, to form a secure identifier (ID).
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: August 29, 2023
    Assignee: International Business Machines Corporation
    Inventors: Tenko Yamashita, Effendi Leobandung
  • Patent number: 11728356
    Abstract: A photoelectric conversion element includes a first electrode, a second electrode, a first layer, and a second layer. The first layer is provided between the first electrode and the second electrode. The second layer is provided between the first layer and the second electrode. The first layer contains selenium. The second layer contains In, Ga, Zn, and O. The second layer may contain an In—Ga—Zn oxide. The selenium may be crystalline selenium. The first layer functions as a photoelectric conversion layer. The second layer functions as a hole injection blocking layer. The In—Ga—Zn oxide may have a c-axis aligned crystal.
    Type: Grant
    Filed: May 9, 2016
    Date of Patent: August 15, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Koji Dairiki, Shunpei Yamazaki
  • Patent number: 11723199
    Abstract: A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: August 8, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsu Ching Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Feng-Cheng Yang, Chung-Te Lin
  • Patent number: 11723209
    Abstract: A three-dimensional memory device and a manufacturing method thereof are provided. The three-dimensional memory device includes first and second stacking structures, isolation pillars, gate dielectric layers, channel layers and conductive pillars. The stacking structures are laterally spaced apart from each other. The stacking structures respectively comprises alternately stacked insulating layers and conductive layers. The isolation pillars laterally extend between the stacking structures. The isolation pillars further protrude into the stacking structures, and a space between the stacking structures is divided into cell regions. The gate dielectric layers are respectively formed in one of the cell regions, and cover opposing sidewalls of the stacking structures and sidewalls of the isolation pillars. The channel layers respectively cover an inner surface of one of the gate dielectric layers.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: August 8, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Chun-Fu Cheng, Feng-Cheng Yang, Sheng-Chen Wang, Yu-Chien Chiu, Han-Jong Chia
  • Patent number: 11710790
    Abstract: A memory cell includes a ferroelectric (FE) material contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the FE material is disposed between the OS layer and the word line. The OS layer comprises: a first region adjacent the FE material, the first region having a first concentration of a semiconductor element; a second region adjacent the source line, the second region having a second concentration of the semiconductor element; and a third region between the first region and the second region, the third region having a third concentration of the semiconductor element, the third concentration is greater than the second concentration and less than the first concentration.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: July 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
  • Patent number: 11706927
    Abstract: Some embodiments include an integrated assembly having pillars arranged in an array. The pillars have channel regions between upper and lower source/drain regions. Gating structures are proximate to the channel regions and extend along a row direction. Digit lines are beneath the pillars, extend along a column direction, and are coupled with the lower source/drain regions. Linear structures are above the pillars and extend along the column direction. Bottom electrodes are coupled with the upper source/drain regions. The bottom electrodes have horizontal segments adjacent the upper source/drain regions and have vertical segments extending upwardly from the horizontal segments. The vertical segments are adjacent to lateral sides of the linear structures. Ferroelectric-insulative-material and top-electrode-material are over the bottom electrodes. A slit passes through the top-electrode-material, is directly over one of the linear structures, and extends along the column direction.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: July 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Giorgio Servalli, Marcello Mariani