Abstract: There is provided a device for monitoring a thickness reduction of an inner surface in a heat transfer tube or an inner surface in an evaporation tube, the device including: a movement unit which moves along a fin tube; a laser measurement unit which is provided in the movement unit and measures the thickness reduction of the inner surface by a laser; a cable which includes a light guiding path for introducing a laser into the laser measurement unit and a light deriving path for transmitting reflected light; and a thickness reduction determining unit which compares the laser measurement data with past data or standard data and determines the current thickness reduction.

Abstract: Methods and apparatus for measuring an optical azimuth angle ?O of a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and ?A. A combination signal may be computed from the polarization-dependent signals obtained at +A and ?A and a property of the combination signal may be calculated for several mechanical Azimuth angles ?M. A relationship between the optical azimuth angle ?O and the mechanical azimuth angle ?M may be determined from a behavior of the property as a function of mechanical azimuth angle ?M.

Abstract: An illuminating optical system of an inspection device selects an arbitrary wavelength region from the light source, and epi-illuminates the sample via the polarizer and the objective lens. A detecting optical system includes an analyzer having a polarization plane intersected with a polarization direction of the polarizer. Then, the detecting optical system detects light from the sample via the objective lens and the analyzer, and acquires a Fourier image of a sample surface based on this light. An imaging section images the Fourier image. An analyzing section performs computation for processing for determining a notable area to be affected by a state of the pattern more than other areas in the Fourier image.

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure.

Abstract: A paper type determination device of the invention drives plural light emitting points different from one another and having sequentially increasing distances from a reference point to emit light in such a manner that each is identified for irradiating one surface of a sheet of paper subjected to determination. A photodetection device set at a specific detection field of view having the center at the reference point is disposed on the other surface side of the sheet of paper, and it receives light having passed through the sheet of paper from the respective light emitting points at positions on inside and outside of the detection field of view to detect intensity of light for each light emitting point. A diffusing characteristic of the sheet of paper is obtained on the basis of the intensity of light from each light emitting point detected by the photodetection device, and a paper type is determined on the basis of the diffusing characteristic.

Abstract: An apparatus for forming a solid sample from a sample solution and then analyzing the solid sample to determine the solid form of the sample is provided. The apparatus may optionally comprise a masking block with an array of openings, a film on which the solid sample can be deposited, and a sheet. The apparatus may optionally comprise a masking block with an array of openings and a sheet on which the sample can be deposited. The apparatus may comprise the formation unit of a system for forming a solid sample and analyzing the solid sample. The system may further comprise an analysis unit comprising the film and/or sheet with the solid samples and a spacer unit attached to the film after it has been removed from the formation unit. Methods for using the apparatus and/or system of the present invention are also provided.

Abstract: Light is irradiated onto a glass substrate of an organic EL element, and the characteristics of an organic film are analyzed. In the sample analyzing apparatus, in such a way that the glass substrate is located on the upper side, the organic EL element is placed on a stage. The light is irradiated towards the glass substrate, and an amplitude ratio and a phase difference which are related to the organic EL element are measured. Also, the sample analyzing apparatus selects a model of a structure corresponding to reflected lights K1 to K3 of the irradiated light and calculates the amplitude ratio and the phase difference. The sample analyzing apparatus compares the measured result and the result calculated from the model, and properly executes the fitting, and determines the best model among the several models and then analyzes the characteristics related to the organic EL element.

Abstract: A sensor for measuring living body information and a keypad assembly including the sensor includes a light guide panel for guiding a first light. A light extracting pattern is provided on the light guide panel for outputting the first light guided by the light guide panel to an exterior of the light guide panel. A light coupling pattern is provided on the light guide panel for changing a proceeding direction of a second light incident from the exterior of the light guide panel, so that the second light is guided by the light guide panel.

Abstract: The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.

Abstract: A compact, low cost particle sensor utilizing a photodetector (31) which directly collects light scattered by particles (33) entrained in a fluid traversing a beam of light (32). The beam of light (32) is aligned such that it is in close proximity to the photo detector (31). The beam of light (32) is typically provided by a laser and associated focusing/collimating optics. The beam of light (32) intersects a portion of the fluid flow permitting a low pressure drop system and fluid flow generated by a low cost, low pressure device such as an axial fan (50).

Abstract: A system and a method for detecting surface pressure on a surface is provided. A plurality of transponders are located on the surface for transmitting electromagnetic surface waves and for receiving the electromagnetic surface waves upon being reflected, diffracted, refracted, scattered, or otherwise altered by pressure variations on the surface. A controller is coupled to the plurality of transponders. The controller is adapted to coordinate the plurality of transponders for imaging the pressure variations on the surface. The surface includes a surface-wave medium and the surface-wave medium is pressure-sensitive.

Abstract: A sensor head for a dry powder agent according to an exemplary aspect of the present disclosure includes a housing defined along an axis along which light is communicated, the housing defines a multiple of apertures transverse to the axis, the multiple of apertures in communication with a measurement volume along the axis. A mirror is within the housing to reflect the light through the measurement volume.

Abstract: A reagentless whole-blood analyte detection system that is capable of being deployed near a patient has a source capable of emitting a beam of radiation that includes a spectral band. The whole-blood system also has a detector in an optical path of the beam. The whole-blood system also has a housing that is configured to house the source and the detector. The whole-blood system also has a sample element that is situated in the optical path of the beam. The sample element has a sample cell and a sample cell wall that does not eliminate transmittance of the beam of radiation in the spectral band.

Abstract: An optical indicator (130) for identification of a changed state of a fluid with respect to a reference state of the same fluid, or for monitoring or checking or authenticating a fluid. The fluid has an optical parameter that changes with the change of the state of the fluid. The optical indicator (130) may be attached to or integral with a container or packaging (132) for the fluid. The indicator (130) includes a cavity configured to be filed with the fluid such that the fluid filled cavity forms a variable optical element having an optical performance that varies depending on the changeable fluid's optical parameter. The fluid filled cavity coupled to other optical components of the indicator provides an image that may be compared to a reference image to detect a change of at least one optical property of the fluid as compared to the reference fluid. The comparison may be performed visually or by a suitable detector. The comparison may include automated processing of the detector's output signal(s).

Abstract: Apparatus and methods are disclosed for viewing low-birefringence structures within samples directly, with the eye, in real-time. The sample is placed between an entrance polarizer and analyzer polarizer, the transmission state of one of which is changed dynamically to create a modulated view of the scene; against this background, birefringent structures are visible because of their different appearance when modulated. Modulation rates of 4 or more states per second; use of 4 or more states, or even a continuum of states, which lie substantially on a latitude line on the Poincare sphere; and orientation of the polarization components to produce a uniform background; produce a clear view that does not produce operator fatigue. Broad-band wavelength operation spanning 50 nm or more, or the whole visible range, is achieved, and it is compatible with integration into other microscopy modes such as Hoffman relief contrast.

Abstract: A measuring device includes a VCSEL of a first-order or high-order single mode emitting laser beams, a driving part configured to drive the VCSEL, a detecting part configured to detect an electric signal relating to feedback lights generated when laser beams are projected onto an object, and a calculating part configured to identify a direction of movement of the object on the basis of the electric signal detected by the detecting part.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: A method for analyzing the effectiveness of polishing frequency and the number of polishing times on the polishing pads having different patterns and profiles while performing the chemical-mechanical polishing process on the wafers is described. This method is to convert the images of various patterns and topography of the chips and grinding pads into binary images, and then calculates the binary images by numerical matrix method, which only needs to calculate the modified model of the position changed and the frequency of grinding during the rotation and deformation of different patterns and topography during relative movement, and then uses overlay model of effective grinding frequency to predict the distribution of effective grinding frequency at a fixed period of grinding time under a set grinding path.

Abstract: An improved procedure for calibrating the azimuth angle in a metrology module for use in a metrology system that is used for measuring a target on a wafer, and the metrology modules can include oblique Spectroscopic Ellipsometry (SE) and unpolarized or polarized spectroscopic reflectometer devices.

Abstract: A rapid-sampling stochastic scanning multiphoton multifocal microscopy (SS-MMM) fluorescence imaging technique enables multiparticle tracking at rates upwards of 1,000 times greater than conventional single point raster scanning. Stochastic scanning of a diffractive optical element may generate a 10×10 hexagonal array of foci with a white noise driven galvanometer to yield a scan pattern that is random yet space-filling. SS-MMM may create a more uniformly sampled image with fewer spatio-temporal artifacts than obtained by conventional or multibeam raster scanning.