Abstract: A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.

Abstract: A method of preparation of reference data for measuring the profile of a patterned structure for use in control of a manufacturing process, the method including: providing a model for generating profiles based on the manufacturing process; generating the profiles by simulation of the manufacturing process; and preparing diffraction signal reference data corresponding to the generated profiles.

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure.

Abstract: An optical element of the present invention includes a conductive microstructure having a conductive property, and detects an optical spectrum signal varied by the binding of measured molecules on the surface of the conductive microstructure. The optical element has a distribution in the binding capacity of the measured molecules on the surface of the conductive microstructure in the direction of the electric displacement vector generated inside the conductive microstructure. As a result, it is possible to provide an optical element capable of measuring the density at high accuracy without depending on the binding position of the measured molecules.

Abstract: A measurement system configured to measure a position of an object in a lithographic apparatus, includes at least three position detectors configured to detect the position of the object, the at least three position detectors each including a single or multi-dimensional optical encoder to provide at least six position values, the optical encoders being coupled to the object at different locations within a three dimensional coordinate system, wherein at least one position value is provided for each dimension of the three dimensional coordinate system, and wherein the measurement system is configured to calculate the position of the object within the three dimensional coordinate system from a subset of at least three of the six position values and to calculate an orientation of the object with respect to the three dimensional coordinate system from another subset of at least three of the six position values.

Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser bean is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.

Abstract: The present invention relates to an inspection system for the automatic inspection of ophthalmic lenses, preferably in an automated lens manufacturing line. The inspection system provides a phase contrast imaging unit and an inspection method using said phase contrast imaging unit designed to recognize defective lenses with an improved degree of reliability but that does not falsely sort out perfect lenses.

Abstract: A method is provided for making and using measurements in gas filter correlation radiometry. A Gas Filter Correlation Radiometer (GFCR) instrument is moved in a region of space surrounding a heavenly body. An atmosphere of the heavenly body is viewed with the GFCR instrument along a first view direction with the atmosphere and the GFCR instrument experiencing a relative velocity of approximately zero. The atmosphere is also viewed with the GFCR instrument along at least one second view direction that is angularly separated from the first view direction such that atmospheric spectra associated with the second view direction appears Doppler shifted with respect to atmospheric spectra associated with the first view direction. A gas filter correlation radiometry application is performed using the measurement signals obtained from the different view directions.

Abstract: Apparatus for the detection of analytes in a fluid, for example the eluant from a liquid chromatography is described. Solvent is evaporated from the eluant to produce a stream of particles when analyte is present in the fluid. The resultant stream of particles is passed through one or more beams of radiation, typically visible light, and radiation scattered by the particles is detected at least at a first angle to a beam of radiation and at a second, different, angle to a radiation beam to produce a signal indicative of the presence of the analyte. Chromatographic apparatus incorporating the detector and methods of operating the detector and chromatographic apparatus are also described.

Abstract: An optical device that may include a sighting portion including an optical axis; an electromagnetic beam source coupled to said sighting portion, electromagnetic beam source facilitates generating a source beam including an axis that is substantially parallel to said optical axis; an optical surface coupled to said electromagnetic beam source; and a frequency filter coupled within said sighting portion.

Abstract: In a light-slit method, a first and a second measurement light projection on a surface of an object to be measured may be unambiguously identified as a first or a second measurement light projection by a camera when there is a support apparatus operating the camera and/or the measurement light projectors such that, in each light-slit recording of the camera, either the first or the second measurement light projection is visible to the camera. The possibility of unambiguous identification allows evaluating several spatially overlapping and not exactly aligned measurement light projections by means of a camera.

Abstract: A method for profiling the shape of a component using a line sensor (110) which is provided in a component mounter (100) and which profiles the shape of the component (200) three-dimensionally by (a) projecting a sweeping light onto the component (200) in a relative movement between the line sensor (110) and the component (200) held by a mounting head (103) so that the sweeping light traverses the direction of the movement and (b) detecting the reflected light from the component using a detector (119). The method includes getting the component (200) from the component supply unit 101 using the mounting head (103), rotating the component (200) by a predetermined angle within a predetermined surface, and profiling the shape of the rotated component using the line sensor (110).

Abstract: The simultaneous measurement of four separately polarized beams upon diffraction from a substrate is used to determine properties of the substrate. Circularly or elliptically polarized light sources are passed via up to three polarizing elements. This polarizes the light sources by 0, 45, 90 and 135°. The plurality of polarizing beamsplitters replaces the use of a phase modulator, but enables the measurement of the intensity of all four beams and thus the measurement of the phase modulation and amplitude of the combined beams to give the features of the substrate.

Abstract: A gas analyzer system includes an optical source, an optical filter assembly, a controller, and an analyzer. The optical source generates an optical signal. The optical filter assembly includes different optical filters in which to filter the optical signal. During operation, the controller selects sequential application of each of the different optical filters in a path of the optical signal to modulate the optical signal using different frequency bands of optical energy. The modulated optical signal passes through an unknown sample. Based on absorption of the optical signal by the sample gas at different frequencies, the optical analyzer detects which types of multiple different gases are present in the sample.

Abstract: In one embodiment, a fingerprint sensing system includes a interference narrow band pass filter, a holographic optical element, a transparent slab stacked together with optical cement. The finger is placed on the filter and illuminated by a narrow band source, the center of its band shifted appropriately with respect to the pass band of the interference filter. A camera on the other side of the slab receives the fingerprint image. The light from the valleys and ridges propagating in the direction of the camera are blocked by the interference filter. The light from the ridges at steep angles are bent by the holographic optical element and then directed towards the lens. This way the ridges are seen by the camera, but not the valleys. In another embodiment, a miniaturized version, the interference filter, a modified holographic optical element, and a blocking filter (if necessary) to block room light can be sequentially attached to the image sensor.

Abstract: A displacement detecting device includes a light source for projecting light to an object to be examined, the light source being movable relative to the object to be examined, a first reflecting element being fixed to the object to be examined and including a reflection portion for reflecting light from the light source and a non-reflection portion, a first light receiving element for receiving light reflected by the first reflecting element, a second reflecting element fixed to the object to be examined and including a reflection portion for reflecting light from the light source and a non-reflection portion, and a second light receiving element for receiving light reflected by the second reflecting element, wherein the second reflecting element is disposed at a light path through which at least a portion of light from the light source and advancing via the first reflecting element is directed to the second light receiving element.

Abstract: The present disclosure has an apparatus for detecting fibers in a gas flowing along a passageway. A laser beam is provided at one end of the passageway and the beam is directed along a length of the passageway through which the gas flows. An electrode system, as disclosed, a quadrupole electrode system is mounted along the passageway to cause fibers carried in the gas to oscillate in a detection zone. A photo detector is positioned laterally of the passageway and detects light scattered by the oscillating fibers and projected through an opening in the passageway to provide an output signal that is a function of the light scattered by the fibers in the detection zone.

Abstract: An automatic analysis apparatus and an automatic analysis method analysis that includes an optical convergence point adjusting unit in order to variably adjust an optical convergence point of irradiation light or an optical convergence point of detection light to or from a reaction cuvette in accordance with at least one of analysis conditions of a kind of reaction of a mixed solution contained in the reaction cuvette, a liquid volume of the mixed solution or a measurement wave length. The optical convergence point adjusting unit is provided in front the reaction cuvette, in back of the reaction cuvette, or both in order to variably control the position of an optical convergence point so as to maximize the irradiation light based on the volume of the mixed solution in the reaction cuvette.

Abstract: A method is disclosed for changing an optical path length through a fluid downhole, comprising interspersing an optically transmissive member into a first optical path through the fluid, thereby creating a second shorter optical path through the fluid. In another embodiment, the method further comprises measuring an intensity of light, I1 transmitted through the first optical path; measuring an intensity of light, I2 transmitted through the second optical path; and estimating an optical property for the second optical path from the ratio, I1/I2. A system is disclosed for changing an optical path length through a fluid downhole, comprising a fluid passage between two optically transmissive windows for the fluid downhole, the fluid passage having a first optical path through the fluid; and an optically transmissive member for insertion into the first optical path, thereby creating a second shorter optical path through the fluid.

Abstract: An optical refractometer is provided for measuring the refractive index of a liquid. Such a refractometer includes a first optical block having a transparent material whereto is secured a light source, a second optical block having a transparent material whereto is secured a position sensor. The optical blocks are arranged on either side of a conduit wherein the liquid flows.