Patents Examined by Thanhha S. Pham
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Patent number: 11935818Abstract: A method of producing electronic components including at least one circuit having coupled therewith electrical connections including metallic wire bondable surfaces encased in a packaging, the method including bonding stud bumps, in particular copper stud bumps, at determined areas of said wire bondable surfaces.Type: GrantFiled: May 24, 2021Date of Patent: March 19, 2024Assignee: STMICROELECTRONICS S.r.l.Inventor: Fabio Marchisi
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Patent number: 11935782Abstract: A method of forming a structure comprises forming a pattern of elongate features extending vertically from a base structure. Conductive material is formed on the elongate features. After completing the forming of the pattern of elongate features, the elongate features, the conductive material, or both is (are) exposed to at least one surface treatment gas. The at least one surface treatment gas comprises at least one species formulated to diminish attractive or cohesive forces at a surface of the conductive material. Apparatus and additional methods are also described.Type: GrantFiled: March 7, 2022Date of Patent: March 19, 2024Assignee: Micron Technology, Inc.Inventors: Gurtej S. Sandhu, Marko Milojevic, John A. Smythe, Timothy A. Quick, Sumeet C. Pandey
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Patent number: 11935786Abstract: A method of fabricating a semiconductor device includes recessing an upper portion of a first dielectric layer disposed over a conductive feature. The method includes filling the recessed upper portion with a second dielectric layer to form a void embedded in the second dielectric layer. The method includes etching the second dielectric layer and the first dielectric layer to form a contact opening that exposes at least a portion of the conductive feature using the void to vertically align at least a lower portion of the contact opening with the conductive feature. The method includes filling the contact opening with a conductive material to form a contact feature electrically coupled to the conductive feature.Type: GrantFiled: July 25, 2022Date of Patent: March 19, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tsui-Ling Yen, Chien-Hung Chen
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Patent number: 11916013Abstract: Interconnect structures including super vias are formed during back-end-of-line processing using sacrificial placeholders to protect the bottom portions of the super vias while upper portions of the super vias are formed. The sacrificial placeholders are removed and replaced by metal conductors that fill the bottom and upper portions of the super vias.Type: GrantFiled: September 2, 2021Date of Patent: February 27, 2024Assignee: International Business Machines CorporationInventors: Yann Mignot, Christopher J. Waskiewicz, Eric Miller, Chanro Park
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Patent number: 11908796Abstract: A semiconductor device includes a substrate, a first metal layer, a dielectric layer, and a second metal layer. The substrate includes a dense region and an isolation region. The first metal layer is disposed over the substrate and includes a first metal pattern and a second metal pattern. The first metal pattern is located in the dense region. There is at least one slot in the first metal pattern. The second metal pattern is located in the isolation region. The dielectric layer is disposed on the first metal layer. The second metal layer is disposed on the dielectric layer.Type: GrantFiled: August 30, 2021Date of Patent: February 20, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Yu Tseng, Wei-Lun Hu
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Patent number: 11908779Abstract: A semiconductor package structure includes a substrate comprising a land structure. The land structure includes a first land section having a first height in a cross-sectional view and a second land section having a second height in the cross-sectional view that is different than the first height. A mold encapsulant is disposed adjacent a lateral portion of the first land section and is disposed below a bottom portion of the second land section. A semiconductor die is attached to the substrate, and includes a first major surface, a second major surface opposing the first major surface, and an outer perimeter. The semiconductor die further includes a bonding structure disposed adjacent the first major surface, which is coupled to the second land section such that the first land section is disposed outside the perimeter of the semiconductor die A mold member encapsulates at least portions of the semiconductor die.Type: GrantFiled: April 19, 2021Date of Patent: February 20, 2024Assignee: Amkor Technology Singapore Holding Pte. Ltd.Inventors: Kyoung Yeon Lee, Byong Jin Kim, Jae Min Bae, Hyung Il Jeon, Gi Jeong Kim, Ji Young Chung
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Patent number: 11901225Abstract: Exemplary methods of plating are described. The methods may include contacting a patterned substrate with a plating bath in a plating chamber. The patterned substrate includes at least one metal interconnect with a contact surface that is exposed to the plating bath. The metal interconnect is made of a first metal characterized by a first reduction potential. The methods further include plating a diffusion layer on the contact surface of the metal interconnect. The diffusion layer is made of a second metal characterized by a second reduction potential that is larger than the first reduction potential of the first metal in the metal interconnects. The plating bath also includes one or more ions of the second metal and a grain refining compound that reduces the formation of pinhole defects in the diffusion layer.Type: GrantFiled: September 14, 2021Date of Patent: February 13, 2024Assignee: Applied Materials, Inc.Inventors: Eric J. Bergman, John L. Klocke, Marvin L. Bernt, Prayudi Lianto
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Patent number: 11894376Abstract: An integrated circuit device includes: a plurality of channel regions spaced apart from each other in an active region; a plurality of source/drain regions; an insulating structure on the active region, the insulating structure defining a plurality of gate spaces; a first gate stack structure in a first of the gate spaces, the first gate stack structure including a first work function metal-containing layer; and an isolation stack structure in a second of the gate spaces that is adjacent the first of the gate spaces, the isolation stack structure having a different stack structure from the first gate stack structure and being configured to electrically isolate a portion of the active region.Type: GrantFiled: March 10, 2021Date of Patent: February 6, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dae-Won Ha, Byoung-Hak Hong
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Patent number: 11887855Abstract: Provided are atomic layer deposition methods to deposit a tungsten film or tungsten-containing film using a tungsten-containing reactive gas comprising one or more of tungsten pentachloride, a compound with the empirical formula WCl5 or WCl6.Type: GrantFiled: April 6, 2021Date of Patent: January 30, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson, Steve G. Ghanayem
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Patent number: 11887940Abstract: Disclosed herein are integrated circuit (IC) structures with a conductive element coupled to a first surface of a package substrate, where the conductive element has cavities for embedding components and the embedded components are electrically connected to the conductive element, as well as related apparatuses and methods. In some embodiments, embedded components have one terminal end, which may be positioned vertically, with the terminal end facing into the cavity, and coupled to the conductive element. In some embodiments, embedded components have two terminal ends, which may be positioned vertically with one terminal end coupled to the conductive element and the other terminal end coupled to the package substrate. In some embodiments, embedded components include passive devices, such as capacitors, resistors, and inductors. In some embodiments, a conductive element is a stiffener.Type: GrantFiled: December 17, 2020Date of Patent: January 30, 2024Assignee: Intel CorporationInventors: Seok Ling Lim, Jenny Shio Yin Ong, Bok Eng Cheah, Jackson Chung Peng Kong
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Patent number: 11881415Abstract: The present disclosure discloses a method of packaging a chip and a chip package structure. The method of packaging the chip includes: forming a protective layer on a front surface of a chip to be packaged; mounting the chip to be packaged formed with the protective layer on the front surface on a first carrier, the back surface of the chip to be packaged facing upwards and a front surface thereof facing towards the first carrier; forming a first encapsulation layer, the first encapsulation layer being formed on the back surface of the chip to be packaged and the exposed first carrier; and detaching the first carrier to exposed the protective layer.Type: GrantFiled: June 14, 2021Date of Patent: January 23, 2024Assignee: PEP INNOVATION PTE LTDInventor: Hwee Seng Jimmy Chew
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Patent number: 11881430Abstract: A semiconductor device including a first interlayer insulating film; a conductive pattern in the first interlayer insulating film; a resistance pattern on the conductive pattern; an upper etching stopper film spaced apart from the resistance pattern, extending in parallel with a top surface of the resistance pattern, and including a first metal; a lower etching stopper film on the conductive pattern, extending in parallel with a top surface of the first interlayer insulating film, and including a second metal; and a second interlayer insulating film on the upper etching stopper film and the lower etching stopper film, wherein a distance from a top surface of the second interlayer insulating film to a top surface of the upper etching stopper film is smaller than a distance from the top surface of the second interlayer insulating film to a top surface of the lower etching stopper film.Type: GrantFiled: May 27, 2022Date of Patent: January 23, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sung Jin Kang, Jong Min Baek, Woo Kyung You, Kyu-Hee Han, Han Seong Kim, Jang Ho Lee, Sang Shin Jang
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Patent number: 11881431Abstract: A capping layer is on top of a substrate. A first low-k dielectric layer is on top of the capping layer. One or more trenches are within the first low-k dielectric layer. Each of the one or more trenches have a same depth. Each trench of the one or more trenches include a barrier layer on top of the first low-k dielectric layer, a liner layer and a metal layer on top of the liner layer.Type: GrantFiled: November 22, 2021Date of Patent: January 23, 2024Assignee: International Business Machines CorporationInventors: Chanro Park, Koichi Motoyama, Kenneth Chun Kuen Cheng, Chih-Chao Yang
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Patent number: 11877448Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A sacrificial layer on a substrate, a first stop layer on the sacrificial layer, a P-type doped semiconductor layer having an N-well on the first stop layer, and a dielectric stack on the P-type doped semiconductor layer are sequentially formed. A plurality of channel structures each extending vertically through the dielectric stack and the P-type doped semiconductor layer are formed, stopping at the first stop layer. The dielectric stack is replaced with a memory stack, such that each of the plurality of channel structures extends vertically through the memory stack and the P-type doped semiconductor layer. The substrate, the sacrificial layer, and the first stop layer are sequentially removed to expose an end of each of the plurality of channel structures. A conductive layer is formed in contact with the ends of the plurality of channel structures.Type: GrantFiled: September 14, 2020Date of Patent: January 16, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventor: Kun Zhang
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Patent number: 11869809Abstract: A semiconductor component includes a semiconductor substrate, conductive vias in the substrate having terminal portions, a polymer layer on the substrate and back side conductors formed by the terminal portions of the conductive vias embedded in the polymer layer. A stacked semiconductor component includes a plurality of components having aligned conductive vias in electrical communication with one another.Type: GrantFiled: September 8, 2020Date of Patent: January 9, 2024Assignee: Micron Technology, Inc.Inventors: Jin Li, Tongbi Jiang
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Patent number: 11869933Abstract: Isolator structures for an integrated circuit with reduced effective parasitic capacitance. Disclosed embodiments include an isolator structure with parallel conductive elements forming a capacitor or inductive transformer, overlying a semiconductor structure including a well region of a first conductivity type formed within an tank region of a second conductivity type. The tank region is surrounded by doped regions and a buried doped layer of the first conductivity type, forming a plurality of diodes in series to the substrate. The junction capacitances of the series diodes have the effect of reducing the parasitic capacitance apparent at the isolator.Type: GrantFiled: August 10, 2021Date of Patent: January 9, 2024Assignee: Texas Instruments IncorporatedInventors: Raja Selvaraj, Anant Shankar Kamath, Byron Lovell Williams, Thomas D. Bonifield, John Kenneth Arch
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Patent number: 11871636Abstract: A display device includes a substrate, and an array of pixels on the substrate, the array of the pixels including a first column in which first pixels emitting first color light and second pixels emitting second color light are alternately disposed in a first direction, and a second column adjacent to the first column. The second column includes third pixels that emit third color light and are disposed in the first direction. The second column includes groups each including two or more third pixels, and a first distance between adjacent third pixels included in a same group is less than a second distance between adjacent third pixels included in different groups.Type: GrantFiled: September 1, 2020Date of Patent: January 9, 2024Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Sangshin Lee, Sanghoon Kim, Jongdae Lee, Sangmin Yi
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Patent number: 11862453Abstract: Forming a metal gate transistor includes forming a semiconductor channel in a substrate, and depositing a source electrode and a drain electrode on the semiconductor channel. The source and drain electrodes are spaced apart. Dielectric spacers are provided above the source and drain electrodes to define a gate void spanning the source and drain electrodes. A dielectric layer is deposited on a bottom wall and sidewalls of the gate void. A work-function metal layer is deposited on the dielectric layer. The work-function metal layer is etched away from the sidewalls leaving the work-function metal layer on the bottom wall to control work function between the semiconductor channel and a conductive metal gate material to be deposited. The gate void above the work-function metal layer on the bottom wall, and between the dielectric layers on the sidewalls, is filled with the conductive metal gate material.Type: GrantFiled: August 26, 2021Date of Patent: January 2, 2024Assignee: Marvell Asia Pte, Ltd.Inventor: Runzi Chang
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Patent number: 11855141Abstract: The disclosed technique forms epitaxy layers locally within a trench having angled recesses stacked in the sidewall of the trench. The sizes of the recesses are controlled to control the thickness of the epitaxy layers to be formed within the trench. The recesses are covered by cap layers and exposed one by one sequentially beginning from the lowest recess. The epitaxy layers are formed one by one within the trench with the facet edge portion thereof aligned into the respective recess, which is the recess sequentially exposed for the epitaxy layer.Type: GrantFiled: April 6, 2021Date of Patent: December 26, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ling-Yen Yeh, Meng-Hsuan Hsiao, Yuan-Chen Sun
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Patent number: 11856825Abstract: An OLED display device including: a substrate including a display area and a non-display area; an organic light emitting element including a first electrode, an organic light emitting layer on the first electrode, and a second electrode on the organic light emitting layer; a first conductive line at the non-display area of the substrate; a first organic layer on the first conductive line; a second conductive line on the first organic layer and connected to the first conductive line; a second organic layer on the second conductive line; and a third conductive line on the second organic layer and connected to the second conductive line. The third conductive line is connected to the second electrode. The first electrode is at the display area of the substrate.Type: GrantFiled: November 2, 2020Date of Patent: December 26, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Taehyun Kim, Seungmin Lee, Seonyoung Choi, Sangho Park, Donghwan Shim, Jungkyu Lee, Seunghwan Cho