Patents Examined by Thanhha S. Pham
  • Patent number: 11935818
    Abstract: A method of producing electronic components including at least one circuit having coupled therewith electrical connections including metallic wire bondable surfaces encased in a packaging, the method including bonding stud bumps, in particular copper stud bumps, at determined areas of said wire bondable surfaces.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: March 19, 2024
    Assignee: STMICROELECTRONICS S.r.l.
    Inventor: Fabio Marchisi
  • Patent number: 11935782
    Abstract: A method of forming a structure comprises forming a pattern of elongate features extending vertically from a base structure. Conductive material is formed on the elongate features. After completing the forming of the pattern of elongate features, the elongate features, the conductive material, or both is (are) exposed to at least one surface treatment gas. The at least one surface treatment gas comprises at least one species formulated to diminish attractive or cohesive forces at a surface of the conductive material. Apparatus and additional methods are also described.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: March 19, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Marko Milojevic, John A. Smythe, Timothy A. Quick, Sumeet C. Pandey
  • Patent number: 11935786
    Abstract: A method of fabricating a semiconductor device includes recessing an upper portion of a first dielectric layer disposed over a conductive feature. The method includes filling the recessed upper portion with a second dielectric layer to form a void embedded in the second dielectric layer. The method includes etching the second dielectric layer and the first dielectric layer to form a contact opening that exposes at least a portion of the conductive feature using the void to vertically align at least a lower portion of the contact opening with the conductive feature. The method includes filling the contact opening with a conductive material to form a contact feature electrically coupled to the conductive feature.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: March 19, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsui-Ling Yen, Chien-Hung Chen
  • Patent number: 11916013
    Abstract: Interconnect structures including super vias are formed during back-end-of-line processing using sacrificial placeholders to protect the bottom portions of the super vias while upper portions of the super vias are formed. The sacrificial placeholders are removed and replaced by metal conductors that fill the bottom and upper portions of the super vias.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: February 27, 2024
    Assignee: International Business Machines Corporation
    Inventors: Yann Mignot, Christopher J. Waskiewicz, Eric Miller, Chanro Park
  • Patent number: 11908796
    Abstract: A semiconductor device includes a substrate, a first metal layer, a dielectric layer, and a second metal layer. The substrate includes a dense region and an isolation region. The first metal layer is disposed over the substrate and includes a first metal pattern and a second metal pattern. The first metal pattern is located in the dense region. There is at least one slot in the first metal pattern. The second metal pattern is located in the isolation region. The dielectric layer is disposed on the first metal layer. The second metal layer is disposed on the dielectric layer.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yu Tseng, Wei-Lun Hu
  • Patent number: 11908779
    Abstract: A semiconductor package structure includes a substrate comprising a land structure. The land structure includes a first land section having a first height in a cross-sectional view and a second land section having a second height in the cross-sectional view that is different than the first height. A mold encapsulant is disposed adjacent a lateral portion of the first land section and is disposed below a bottom portion of the second land section. A semiconductor die is attached to the substrate, and includes a first major surface, a second major surface opposing the first major surface, and an outer perimeter. The semiconductor die further includes a bonding structure disposed adjacent the first major surface, which is coupled to the second land section such that the first land section is disposed outside the perimeter of the semiconductor die A mold member encapsulates at least portions of the semiconductor die.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: February 20, 2024
    Assignee: Amkor Technology Singapore Holding Pte. Ltd.
    Inventors: Kyoung Yeon Lee, Byong Jin Kim, Jae Min Bae, Hyung Il Jeon, Gi Jeong Kim, Ji Young Chung
  • Patent number: 11901225
    Abstract: Exemplary methods of plating are described. The methods may include contacting a patterned substrate with a plating bath in a plating chamber. The patterned substrate includes at least one metal interconnect with a contact surface that is exposed to the plating bath. The metal interconnect is made of a first metal characterized by a first reduction potential. The methods further include plating a diffusion layer on the contact surface of the metal interconnect. The diffusion layer is made of a second metal characterized by a second reduction potential that is larger than the first reduction potential of the first metal in the metal interconnects. The plating bath also includes one or more ions of the second metal and a grain refining compound that reduces the formation of pinhole defects in the diffusion layer.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: February 13, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Eric J. Bergman, John L. Klocke, Marvin L. Bernt, Prayudi Lianto
  • Patent number: 11894376
    Abstract: An integrated circuit device includes: a plurality of channel regions spaced apart from each other in an active region; a plurality of source/drain regions; an insulating structure on the active region, the insulating structure defining a plurality of gate spaces; a first gate stack structure in a first of the gate spaces, the first gate stack structure including a first work function metal-containing layer; and an isolation stack structure in a second of the gate spaces that is adjacent the first of the gate spaces, the isolation stack structure having a different stack structure from the first gate stack structure and being configured to electrically isolate a portion of the active region.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: February 6, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dae-Won Ha, Byoung-Hak Hong
  • Patent number: 11887855
    Abstract: Provided are atomic layer deposition methods to deposit a tungsten film or tungsten-containing film using a tungsten-containing reactive gas comprising one or more of tungsten pentachloride, a compound with the empirical formula WCl5 or WCl6.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: January 30, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson, Steve G. Ghanayem
  • Patent number: 11887940
    Abstract: Disclosed herein are integrated circuit (IC) structures with a conductive element coupled to a first surface of a package substrate, where the conductive element has cavities for embedding components and the embedded components are electrically connected to the conductive element, as well as related apparatuses and methods. In some embodiments, embedded components have one terminal end, which may be positioned vertically, with the terminal end facing into the cavity, and coupled to the conductive element. In some embodiments, embedded components have two terminal ends, which may be positioned vertically with one terminal end coupled to the conductive element and the other terminal end coupled to the package substrate. In some embodiments, embedded components include passive devices, such as capacitors, resistors, and inductors. In some embodiments, a conductive element is a stiffener.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: January 30, 2024
    Assignee: Intel Corporation
    Inventors: Seok Ling Lim, Jenny Shio Yin Ong, Bok Eng Cheah, Jackson Chung Peng Kong
  • Patent number: 11881415
    Abstract: The present disclosure discloses a method of packaging a chip and a chip package structure. The method of packaging the chip includes: forming a protective layer on a front surface of a chip to be packaged; mounting the chip to be packaged formed with the protective layer on the front surface on a first carrier, the back surface of the chip to be packaged facing upwards and a front surface thereof facing towards the first carrier; forming a first encapsulation layer, the first encapsulation layer being formed on the back surface of the chip to be packaged and the exposed first carrier; and detaching the first carrier to exposed the protective layer.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: January 23, 2024
    Assignee: PEP INNOVATION PTE LTD
    Inventor: Hwee Seng Jimmy Chew
  • Patent number: 11881430
    Abstract: A semiconductor device including a first interlayer insulating film; a conductive pattern in the first interlayer insulating film; a resistance pattern on the conductive pattern; an upper etching stopper film spaced apart from the resistance pattern, extending in parallel with a top surface of the resistance pattern, and including a first metal; a lower etching stopper film on the conductive pattern, extending in parallel with a top surface of the first interlayer insulating film, and including a second metal; and a second interlayer insulating film on the upper etching stopper film and the lower etching stopper film, wherein a distance from a top surface of the second interlayer insulating film to a top surface of the upper etching stopper film is smaller than a distance from the top surface of the second interlayer insulating film to a top surface of the lower etching stopper film.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: January 23, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung Jin Kang, Jong Min Baek, Woo Kyung You, Kyu-Hee Han, Han Seong Kim, Jang Ho Lee, Sang Shin Jang
  • Patent number: 11881431
    Abstract: A capping layer is on top of a substrate. A first low-k dielectric layer is on top of the capping layer. One or more trenches are within the first low-k dielectric layer. Each of the one or more trenches have a same depth. Each trench of the one or more trenches include a barrier layer on top of the first low-k dielectric layer, a liner layer and a metal layer on top of the liner layer.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: January 23, 2024
    Assignee: International Business Machines Corporation
    Inventors: Chanro Park, Koichi Motoyama, Kenneth Chun Kuen Cheng, Chih-Chao Yang
  • Patent number: 11877448
    Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A sacrificial layer on a substrate, a first stop layer on the sacrificial layer, a P-type doped semiconductor layer having an N-well on the first stop layer, and a dielectric stack on the P-type doped semiconductor layer are sequentially formed. A plurality of channel structures each extending vertically through the dielectric stack and the P-type doped semiconductor layer are formed, stopping at the first stop layer. The dielectric stack is replaced with a memory stack, such that each of the plurality of channel structures extends vertically through the memory stack and the P-type doped semiconductor layer. The substrate, the sacrificial layer, and the first stop layer are sequentially removed to expose an end of each of the plurality of channel structures. A conductive layer is formed in contact with the ends of the plurality of channel structures.
    Type: Grant
    Filed: September 14, 2020
    Date of Patent: January 16, 2024
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventor: Kun Zhang
  • Patent number: 11869809
    Abstract: A semiconductor component includes a semiconductor substrate, conductive vias in the substrate having terminal portions, a polymer layer on the substrate and back side conductors formed by the terminal portions of the conductive vias embedded in the polymer layer. A stacked semiconductor component includes a plurality of components having aligned conductive vias in electrical communication with one another.
    Type: Grant
    Filed: September 8, 2020
    Date of Patent: January 9, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Jin Li, Tongbi Jiang
  • Patent number: 11869933
    Abstract: Isolator structures for an integrated circuit with reduced effective parasitic capacitance. Disclosed embodiments include an isolator structure with parallel conductive elements forming a capacitor or inductive transformer, overlying a semiconductor structure including a well region of a first conductivity type formed within an tank region of a second conductivity type. The tank region is surrounded by doped regions and a buried doped layer of the first conductivity type, forming a plurality of diodes in series to the substrate. The junction capacitances of the series diodes have the effect of reducing the parasitic capacitance apparent at the isolator.
    Type: Grant
    Filed: August 10, 2021
    Date of Patent: January 9, 2024
    Assignee: Texas Instruments Incorporated
    Inventors: Raja Selvaraj, Anant Shankar Kamath, Byron Lovell Williams, Thomas D. Bonifield, John Kenneth Arch
  • Patent number: 11871636
    Abstract: A display device includes a substrate, and an array of pixels on the substrate, the array of the pixels including a first column in which first pixels emitting first color light and second pixels emitting second color light are alternately disposed in a first direction, and a second column adjacent to the first column. The second column includes third pixels that emit third color light and are disposed in the first direction. The second column includes groups each including two or more third pixels, and a first distance between adjacent third pixels included in a same group is less than a second distance between adjacent third pixels included in different groups.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: January 9, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Sangshin Lee, Sanghoon Kim, Jongdae Lee, Sangmin Yi
  • Patent number: 11862453
    Abstract: Forming a metal gate transistor includes forming a semiconductor channel in a substrate, and depositing a source electrode and a drain electrode on the semiconductor channel. The source and drain electrodes are spaced apart. Dielectric spacers are provided above the source and drain electrodes to define a gate void spanning the source and drain electrodes. A dielectric layer is deposited on a bottom wall and sidewalls of the gate void. A work-function metal layer is deposited on the dielectric layer. The work-function metal layer is etched away from the sidewalls leaving the work-function metal layer on the bottom wall to control work function between the semiconductor channel and a conductive metal gate material to be deposited. The gate void above the work-function metal layer on the bottom wall, and between the dielectric layers on the sidewalls, is filled with the conductive metal gate material.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: January 2, 2024
    Assignee: Marvell Asia Pte, Ltd.
    Inventor: Runzi Chang
  • Patent number: 11855141
    Abstract: The disclosed technique forms epitaxy layers locally within a trench having angled recesses stacked in the sidewall of the trench. The sizes of the recesses are controlled to control the thickness of the epitaxy layers to be formed within the trench. The recesses are covered by cap layers and exposed one by one sequentially beginning from the lowest recess. The epitaxy layers are formed one by one within the trench with the facet edge portion thereof aligned into the respective recess, which is the recess sequentially exposed for the epitaxy layer.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ling-Yen Yeh, Meng-Hsuan Hsiao, Yuan-Chen Sun
  • Patent number: 11856825
    Abstract: An OLED display device including: a substrate including a display area and a non-display area; an organic light emitting element including a first electrode, an organic light emitting layer on the first electrode, and a second electrode on the organic light emitting layer; a first conductive line at the non-display area of the substrate; a first organic layer on the first conductive line; a second conductive line on the first organic layer and connected to the first conductive line; a second organic layer on the second conductive line; and a third conductive line on the second organic layer and connected to the second conductive line. The third conductive line is connected to the second electrode. The first electrode is at the display area of the substrate.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: December 26, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Taehyun Kim, Seungmin Lee, Seonyoung Choi, Sangho Park, Donghwan Shim, Jungkyu Lee, Seunghwan Cho