Patents Examined by Walter H Swanson
  • Patent number: 11538685
    Abstract: A method of forming a semiconductor structure includes providing a to-be-etched layer, forming a core layer over the to-be-etched layer, the core layer including a first trench extending along a first direction, forming a sidewall spacer layer on a top surface of the core layer and on sidewalls and a bottom surface of the first trench, forming a block cut structure in the first trench after forming the sidewall spacer layer, and after forming the block cut structure, etching back the sidewall spacer layer until exposing the top surface of the core layer, thereby leaving a sidewall spacer on the sidewalls of the first trench. The block cut structure extends through the first trench along a second direction. The second direction and the first direction are different. The block cut structure includes a first block-cut layer and a second block-cut layer.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: December 27, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Xiamei Tang, Wei Shi, Tao Dou, Bo Su, Youcun Hu
  • Patent number: 11532569
    Abstract: A semiconductor package structure includes a first redistribution layer, a second redistribution layer and an interconnecting structure. The first redistribution layer has a first surface and a second surface opposite to each other. The second redistribution layer is disposed over the first surface of the first redistribution layer, wherein the second redistribution layer has a third surface and a fourth surface opposite to each other, and the third surface facing the first surface. The interconnecting structure is disposed between and electrically connected to the first redistribution layer and the second redistribution layer, wherein the interconnecting structure comprises a conductive post and a conductive bump stacked to each other.
    Type: Grant
    Filed: April 27, 2020
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Jui-Pin Hung, Feng-Cheng Hsu, Shuo-Mao Chen, Shin-Puu Jeng, De-Dui Marvin Liao
  • Patent number: 11532591
    Abstract: A semiconductor package includes a substrate, a die stack on the substrate, and connection terminals between the substrate and the die stack. The die stack includes a first die having a first active surface facing the substrate, the first die including first through electrodes vertically penetrating the first die, a second die on the first die and having a second active surface, the second die including second through electrodes vertically penetrating the second die, and a third die on the second die and having a third active surface facing the substrate. The second active surface of the second die is in direct contact with one of the first or third active surfaces.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: December 20, 2022
    Inventors: Eunseok Song, Kyung Suk Oh
  • Patent number: 11527432
    Abstract: Structures with altered crystallinity beneath semiconductor devices and methods associated with forming such structures. Trench isolation regions surround an active device region composed of a single-crystal semiconductor material. A first non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. A second non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. The first non-single-crystal layer is arranged between the second non-single-crystal layer and the active device region.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: December 13, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Steven M. Shank, Anthony K. Stamper, Ian McCallum-Cook, Siva P. Adusumilli
  • Patent number: 11527409
    Abstract: Contact slots forming method applying photoresists include the following steps. A dielectric layer and a hard mask layer are formed on a substrate sequentially. A first patterned photoresist layer is formed over the hard mask layer, wherein the first patterned photoresist layer includes island patterns connecting to each other by connecting dummy parts. The hard mask layer is etched using the first patterned photoresist layer to form a patterned hard mask layer including island patterns connecting to each other by connecting dummy parts. A second patterned photoresist layer is formed over the patterned hard mask layer. The dielectric layer is etched using the second patterned photoresist layer and the patterned hard mask layer as a mask to form contact holes in the dielectric layer.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: December 13, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Wei-Lin Liu
  • Patent number: 11520312
    Abstract: A method of controlling a motor control apparatus includes selecting one of a first option and a first additional option in a first setting item in response to a first user input via a setting sequence prior to a control-mode-finding sub-process of the setting sequence, the first setting item relating to a motor and including the first option and the first additional option, the first option being different from the first additional option. A first control mode is selected in the control-mode-finding sub-process via the setting sequence based on the first option selected in the first setting item prior to the control-mode-finding sub-process. A second control mode is selected in the control-mode-finding sub-process via the setting sequence based on the first additional option selected in the first setting item prior to the control-mode-finding sub-process. The first control mode is different from the first option and the first additional option.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: December 6, 2022
    Assignees: KABUSHIKI KAISHA YASKAWA DENKI, YASKAWA AMERICA, INC.
    Inventors: Yasushi Kibe, William Phillips, Christopher Jaszczolt, Micah Stuedemann
  • Patent number: 11501998
    Abstract: There is formed, on a stack formed by alternately stacking an oxide film and a nitride film or an oxide film and a polysilicon film on a substrate, a hard mask in which two or more kinds of lines made of mutually different materials are arranged in order. Then, a photoresist is applied onto the hard mask. Furthermore, the photoresist is trimmed until one line is exposed from the end of the hard mask. Moreover, one line of the hard mask exposed beneath the photoresist is etched. Furthermore, a part of the stack exposed beneath the hard mask is etched. The etching of the photoresist, the hard mask, and the stack is repeated while changing etching conditions.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: November 15, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kazuo Kibi, Akihiro Takahashi, Wataru Sakamoto
  • Patent number: 11495537
    Abstract: A semiconductor device includes transistors over a substrate, and first, second, and third metallization layers over the transistors. The first, second, and third metallization layer includes first, second, and third metal features, respectively. The second metal features are oriented lengthwise substantially perpendicular to the first metal features, and the third metal features are oriented lengthwise substantially parallel to the first metal features. The first, second, and third metal features have a first, second, and third thickness, respectively, along a first direction perpendicular to a top surface of the substrate. The second thickness is smaller than both the first and the third thicknesses.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: November 8, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11482424
    Abstract: The invention discloses an active region structure and a manufacturing method thereof, which also comprises a edge portion around the active region, so that the stress generated by the shallow trench insulation layer in the peripheral area on the active region can be blocked, and the component unit in the peripheral edge area of the active region can be prevented from being damaged due to stress. In addition, the edge portion includes branches extending into the active region, and the branches extend in at least two different directions, which can compensate the uneven stress at the end between the active lines and avoid the damage of the component unit.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: October 25, 2022
    Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventor: Gang-Yi Lin
  • Patent number: 11469213
    Abstract: In accordance with disclosed embodiments, there are provided methods, systems, and apparatuses for implementing reduced height semiconductor packages for mobile electronics. For instance, there is disclosed in accordance with one embodiment a stacked die package having therein a bottom functional silicon die; a recess formed within the bottom functional silicon die by a thinning etch partially reducing a vertical height of the bottom functional silicon die at the recess; and a top component positioned at least partially within the recess formed within the bottom functional silicon die. Other related embodiments are disclosed.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: October 11, 2022
    Assignee: Intel Corporation
    Inventors: Georg Seidemann, Thomas Wagner, Klaus Reingruber, Bernd Waidhas, Andreas Wolter
  • Patent number: 11462406
    Abstract: The present disclosure provides a semiconductor device structure with fine boron nitride spacer patterns and a method for forming the semiconductor device structure, which can prevent the collapse of the fine patterns. The semiconductor device structure includes a first target structure and a second target structure disposed over a semiconductor substrate. The semiconductor device structure also includes a first boron nitride spacer disposed over the first target structure, wherein a topmost point of the first boron nitride spacer is between a central line of the first target structure and a central line of the second target structure in a cross-sectional view.
    Type: Grant
    Filed: July 29, 2020
    Date of Patent: October 4, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Pei Cheng Fan
  • Patent number: 11456174
    Abstract: A semiconductor structure and a formation method thereof are provided. One form of the formation method includes: providing a substrate; forming a plurality of discrete mandrel layers on the substrate, wherein a minimum pitch between mandrel layers of the plurality of mandrel layers is a second pitch, and a minimum pitch between each of other pitches is a first pitch; forming second side wall covering layer between the mandrel layers having the second pitch; removing a first side wall covering layer, and maintaining the second side wall covering layer; forming a third side wall covering layer on an exposed side wall of the mandrel layer; removing the mandrel layer and the second side wall covering layer; and etching the substrate by using the third side wall covering layer as a mask to form a desired pattern. In embodiments and implementations of the present disclosure, the mandrel layer and the second side wall covering layer are configured to define a pitch between the third side wall covering layers.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: September 27, 2022
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Hanqiuhua, Zhang Hai Yang, Ji Shi Liang
  • Patent number: 11437341
    Abstract: A semiconductor device comprises two memory chips, one control chip controlling each memory chip, a signal transmission path through which a signal transmission between the control chip and each memory chip is performed, and a capacitance coupled onto the signal transmission path. Also, the capacitance (capacitor element) is larger than each parasitic capacitance parasitic on each chip. Accordingly, it is possible to perform the signal transmission of the semiconductor device at high speed.
    Type: Grant
    Filed: December 1, 2020
    Date of Patent: September 6, 2022
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Ryuichi Oikawa
  • Patent number: 11424237
    Abstract: A memory device includes a first plurality of program lines of a first group, a second plurality of program lines of a second group, and a plurality of address lines. The second plurality of program lines are disposed next to and are parallel to the first plurality of program lines. The plurality of address lines are coupled to the first plurality of program lines and the second plurality of program lines respectively. The plurality of address lines are twisted and are intersected with the first plurality of program lines and the second plurality of program lines in a layout view. At least two adjacent program lines of the first plurality of program lines or the second plurality of program lines have lengths different from each other. A method is also disclosed herein.
    Type: Grant
    Filed: July 14, 2020
    Date of Patent: August 23, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Yuan Ma, Ke-Liang Shang, Xin-Yong Wang
  • Patent number: 11424124
    Abstract: A method of forming a patterned hard mask includes: forming first photoresist features on a hard mask layer; forming at least one sacrificial feature between immediately-adjacent two of the first photoresist features on the hard mask layer; performing a trimming process to the first photoresist features to form second photoresist features; and using the at least one sacrificial feature and the second photoresist features as etching mask, and performing a first etching process to the hard mask layer, in which a plurality of trenches are formed in the hard mask layer to obtain the patterned hard mask.
    Type: Grant
    Filed: November 5, 2020
    Date of Patent: August 23, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chien-Chung Wang, Hsih-Yang Chiu
  • Patent number: 11424211
    Abstract: Apparatuses relating to a microelectronic package are disclosed. In one such apparatus, a substrate has first contacts on an upper surface thereof. A microelectronic die has a lower surface facing the upper surface of the substrate and having second contacts on an upper surface of the microelectronic die. Wire bonds have bases joined to the first contacts and have edge surfaces between the bases and corresponding end surfaces. A first portion of the wire bonds are interconnected between a first portion of the first contacts and the second contacts. The end surfaces of a second portion of the wire bonds are above the upper surface of the microelectronic die. A dielectric layer is above the upper surface of the substrate and between the wire bonds. The second portion of the wire bonds have uppermost portions thereof bent over to be parallel with an upper surface of the dielectric layer.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: August 23, 2022
    Assignee: TESSERA LLC
    Inventors: Hiroaki Sato, Teck-Gyu Kang, Belgacem Haba, Philip R. Osborn, Wei-Shun Wang, Ellis Chau, Ilyas Mohammed, Norihito Masuda, Kazuo Sakuma, Kiyoaki Hashimoto, Kurosawa Inetaro, Tomoyuki Kikuchi
  • Patent number: 11417526
    Abstract: A method of forming a device includes depositing a first etch mask layer over a mandrel formed using a lithography process. The method includes depositing a second etch mask layer over the first etch mask layer. The method includes, using a first anisotropic etching process, etching the first etch mask layer and the second etch mask layer to form an etch mask including the first etch mask layer and the second etch mask layer. The method includes removing the mandrel to expose an underlying surface of the layer to be patterned. The method includes, using the etch mask, forming a feature by performing a second anisotropic etching process to pattern the layer to be patterned, where during the first anisotropic etching process, the first etch mask layer etches at a first rate and the second etch mask layer etches at a second rate, and where the first rate is different from the second rate.
    Type: Grant
    Filed: February 3, 2020
    Date of Patent: August 16, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: David L. O'Meara, Eric Chih-Fang Liu, Jodi Grzeskowiak, Anton deVilliers, Akiteru Ko, Anthony Dip
  • Patent number: 11410938
    Abstract: According to one embodiment, a semiconductor package includes a semiconductor chip, a sealing resin that has a flat plate shape and seals the semiconductor chip inside, a first electrode that includes a first mounting surface exposed on a first main face of the sealing resin, a second electrode that includes a second mounting surface exposed on the first main face, and a groove provided on the first main face. The first mounting surface includes a first end portion arranged in an inner region of the first main face and opposed to the second electrode. The groove includes a first connection portion connected to the first end portion, and a second connection portion connected to a lateral face of the sealing resin.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: August 9, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Miwako Suzuki
  • Patent number: 11404425
    Abstract: The present invention provides a test key structure, the test key structure a substrate, a plurality of test key cells disposed on the substrate, wherein each test key cell includes a first gate structure arranged along a first direction (X-axis), a first diffusion region, a second diffusion region, a connection diffusion region and a share contact arranged along a second direction (Y-axis), wherein the first gate structure crosses over the first diffusion region to form a pull-up transistor (PU), the second gate structure crosses over the second diffusion region to form a pull-down transistor (PD), and wherein the plurality of share contacts and the plurality of connection diffusion regions of the plurality of test key cells are electrically connected to each other.
    Type: Grant
    Filed: April 8, 2020
    Date of Patent: August 2, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Fang-Sheng Chou, Ching Chang
  • Patent number: 11387379
    Abstract: A semiconductor layer is doped with a first doping type and has an upper surface. A first electrode insulated from the semiconductor layer extending through the semiconductor layer from the upper surface. A second electrode insulated from the semiconductor layer extends through the semiconductor layer from the upper surface. The first and second electrodes are biased by a voltage to produce an electrostatic field within the semiconductor layer causing the formation of a depletion region. The depletion region responds to absorption of a photon with an avalanche multiplication that produces charges that are collected at first and second oppositely doped regions within the semiconductor substrate.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: July 12, 2022
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventor: Francois Roy