Patents by Inventor Anthony I. Chou

Anthony I. Chou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10242906
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Grant
    Filed: August 4, 2017
    Date of Patent: March 26, 2019
    Assignee: International Business Machines Corporation
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha
  • Publication number: 20190027601
    Abstract: One illustrative method disclosed herein includes, among other things, forming a conformal piezoelectric material liner layer on at least the opposing lateral sidewalls of a fin, forming a recessed layer of insulating material on opposite sides of the fin and on the conformal piezoelectric material liner layer, removing portions of the conformal piezoelectric material liner layer positioned above the recessed layer of insulating material to thereby expose a portion of the fin above the recessed upper surface, and forming a gate structure above the recessed layer of insulating material and around a portion of the fin positioned above the recessed upper surface.
    Type: Application
    Filed: July 24, 2017
    Publication date: January 24, 2019
    Inventors: Qun Gao, Naved Siddiqui, Anthony I. Chou
  • Publication number: 20180277424
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Application
    Filed: May 25, 2018
    Publication date: September 27, 2018
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha
  • Patent number: 10049942
    Abstract: An aspect of the disclosure provides for an asymmetric semiconductor device. The asymmetric semiconductor device may comprise: a substrate; and a fin-shaped field effect transistor (FINFET) disposed on the substrate, the FINFET including: a set of fins disposed proximate a gate; a first epitaxial region disposed on a source region on the set of fins, the first epitaxial region having a first height; and a second epitaxial region disposed on a drain region on the set of fins, the second epitaxial region having a second height, wherein the first height is distinct from the second height.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: August 14, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony I. Chou, Judson R. Holt, Arvind Kumar, Henry K. Utomo
  • Patent number: 10032862
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: July 24, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha
  • Patent number: 9922831
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: March 20, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Chung-Hsun Lin, Shreesh Narasimha, Claude Ortolland, Jonathan T. Shaw
  • Patent number: 9923082
    Abstract: The present invention relates generally to semiconductor devices and more particularly, to a structure and method of forming a partially depleted semiconductor-on-insulator (SOI) junction isolation structure using a nonuniform trench shape formed by reactive ion etching (RIE) and crystallographic wet etching. The nonuniform trench shape may reduce back channel leakage by providing an effective channel directly below a gate stack having a width that is less than a width of an effective back channel directly above the isolation layer.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: March 20, 2018
    Assignee: GLOBAL FOUNDRIES INC.
    Inventors: Anthony I. Chou, Judson R. Holt, Arvind Kumar, Henry K. Utomo
  • Publication number: 20180076039
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Application
    Filed: November 15, 2017
    Publication date: March 15, 2018
    Inventors: Anthony I. CHOU, Arvind KUMAR, Chung-Hsun LIN, Shreesh NARASIMHA, Claude ORTOLLAND, Jonathan T. SHAW
  • Publication number: 20180061645
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Application
    Filed: October 30, 2017
    Publication date: March 1, 2018
    Inventors: Anthony I. CHOU, Arvind KUMAR, Chung-Hsun LIN, Shreesh NARASIMHA, Claude ORTOLLAND, Jonathan T. SHAW
  • Publication number: 20180061646
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Application
    Filed: October 23, 2017
    Publication date: March 1, 2018
    Inventors: Anthony I. CHOU, Arvind KUMAR, Chung-Hsun LIN, Shreesh NARASIMHA, Claude ORTOLLAND, Jonathan T. SHAW
  • Patent number: 9859122
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: January 2, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Chung-Hsun Lin, Shreesh Narasimha, Claude Ortolland, Jonathan T. Shaw
  • Patent number: 9837319
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: December 5, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Chung-Hsun Lin, Shreesh Narasimha, Claude Ortolland, Jonathan T. Shaw
  • Publication number: 20170338145
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Application
    Filed: August 4, 2017
    Publication date: November 23, 2017
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha
  • Patent number: 9768071
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: September 19, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Chung-Hsun Lin, Shreesh Narasimha, Claude Ortolland, Jonathan T. Shaw
  • Patent number: 9768195
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: September 19, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha
  • Publication number: 20170236898
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Application
    Filed: May 1, 2017
    Publication date: August 17, 2017
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha
  • Patent number: 9721843
    Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: August 1, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Chung-Hsun Lin, Shreesh Narasimha, Claude Ortolland, Jonathan T. Shaw
  • Publication number: 20170199532
    Abstract: Embodiments include methods, computer systems and computer program products for controlling resistance value of a resistor in a circuit. Aspects include: retrieving, via a controller, a set of parameters of the resistor from a non-volatile memory in the circuit, detecting, via the controller, an operating temperature of the resistor during circuit operation in field using a temperature sensor, generating, by the controller, a temperature difference between operating temperature detected and a target temperature at which the resistor has a target resistance value, producing, by the controller, a control signal responsive to the temperature difference generated, and transmitting the control signal to a temperature regulator placed adjacent to the resistor to adjust the resistance value of the resistor. Resistance value of resistor varies in response to temperature changes around resistor according to a temperature coefficient of the resistance of the resistor.
    Type: Application
    Filed: June 23, 2016
    Publication date: July 13, 2017
    Inventors: Anthony I. Chou, Arvind Kumar, Sungjae Lee
  • Patent number: 9703301
    Abstract: Embodiments include methods, computer systems and computer program products for controlling resistance value of a resistor in a circuit. Aspects include: retrieving, via a controller, a set of parameters of the resistor from a non-volatile memory in the circuit, detecting, via the controller, an operating temperature of the resistor during circuit operation in field using a temperature sensor, generating, by the controller, a temperature difference between the operating temperature detected and a target temperature at which the resistor has a target resistance value, producing, by the controller, a control signal responsive to the temperature difference generated, and transmitting the control signal to a temperature regulator placed adjacent to the resistor to adjust the resistance value of the resistor. The resistance value of the resistor varies in response to temperature changes around the resistor according to a temperature coefficient of the resistance of the resistor.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: July 11, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Sungjae Lee
  • Patent number: 9698159
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: July 4, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony I. Chou, Arvind Kumar, Renee T. Mo, Shreesh Narasimha