Patents by Inventor Chia-Wei Liu

Chia-Wei Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11728272
    Abstract: A device structure may include an interconnect-level dielectric material layer located over a substrate, a first metal interconnect structure embedded in the interconnect-level dielectric material layer and including a first metallic barrier liner and a first metallic fill material portion, and an overlying dielectric material layer. An opening in the overlying dielectric material layer may be formed entirely within an area of the first metallic barrier layer and outside the area of the first metallic fill material portion to reduce plasma damage. A second metal interconnect structure contacting a top surface of the first metallic barrier liner may be formed in the opening. An entirety of a top surface the first metallic fill material portion contacts a bottom surface of the overlying dielectric material layer.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: August 15, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
  • Patent number: 11710632
    Abstract: In a semiconductor manufacturing method, a mask is disposed on a semiconductor layer or semiconductor substrate. The semiconductor layer or semiconductor substrate is etched in an area delineated by the mask to form a cavity. With the mask disposed on the semiconductor layer or semiconductor substrate, the cavity is lined to form a containment structure. With the mask disposed on the semiconductor layer or semiconductor substrate, the containment structure is filled with a base semiconductor material. After filling the containment structure with the base semiconductor material, the mask is removed. At least one semiconductor device is fabricated in and/or on the base semiconductor material deposited in the containment structure.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: July 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Hung-Te Lin, Hung-Chih Yu, Chia-Wei Liu
  • Patent number: 11705340
    Abstract: A cavity may be formed in a dielectric material layer overlying a substrate. A layer stack including a metallic barrier liner, a metallic fill material layer, and a metallic capping material may be deposited in the cavity and over the dielectric material layer. Portions of the layer stack located above a horizontal plane including a top surface of the dielectric material layer may be removed. A contiguous set of remaining material portions of the layer stack includes a metal interconnect structure that is free of a pitted surface.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: July 18, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
  • Publication number: 20230223366
    Abstract: A method for forming a bonded semiconductor structure is disclosed. A first device wafer having a first bonding layer and a first bonding pad exposed from the first bonding layer and a second device wafer having a second bonding layer and a second bonding pad exposed from the second bonding layer are provided. Following, a portion of the first bonding pad is removed until a sidewall of the first bonding layer is exposed, and a portion of the second bonding layer is removed to expose a sidewall of the second bonding pad. The first device wafer and the second device wafer are then bonded to form a dielectric bonding interface between the first bonding layer and the second bonding layer and a conductive bonding interface between the first bonding pad and the second bonding pad. The conductive bonding interface and the dielectric bonding interface comprise a step-height.
    Type: Application
    Filed: March 8, 2023
    Publication date: July 13, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chung-Sung Chiang, Chia-Wei Liu, Yu-Ruei Chen, Yu-Hsiang Lin
  • Publication number: 20230191624
    Abstract: An end effector, which is connected to a wafer transfer robot, includes a main member, a sensor and a lid. The main member has a first room on a side thereof, in which the sensor is received. The lid is fixed to the main member to cover the sensor. The sensor transmits a vibration signal to a central controller when the main member is vibrating. The end effect may work in a narrow space to transfer wafers and still keep high sensible and precise detection of vibration.
    Type: Application
    Filed: December 9, 2022
    Publication date: June 22, 2023
    Inventors: TENG YEN WU, CHIA WEI LIU
  • Patent number: 11678592
    Abstract: The present disclosure is directed to a method for the formation of resistive random-access memory (RRAM) structures with a low profile between or within metallization layers. For example, the method includes forming, on a substrate, a first metallization layer with conductive structures and a first dielectric layer abutting sidewall surfaces of the conductive structures; etching a portion of the first dielectric layer to expose a portion of the sidewall surfaces of the conductive structures; depositing a memory stack on the first metallization layer, the exposed portion of the sidewall surfaces, and a top surface of the conductive structures; patterning the memory stack to form a memory structure that covers the exposed portion of the sidewall surfaces and the top surface of the conductive structures; depositing a second dielectric layer to encapsulate the memory stack; and forming a second metallization layer on the second dielectric layer.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: June 13, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Ming Wang, Chia-Wei Liu, Jen-Sheng Yang, Wen-Ting Chu, Yu-Wen Liao, Huei-Tzu Wang
  • Publication number: 20230140134
    Abstract: A RRAM device is provided. The RRAM device includes: a bottom electrode in a first dielectric layer; a switching layer in a second dielectric layer over the first dielectric layer, wherein a conductive path is formed in the switching layer when a forming voltage is applied; and a needle-like-shaped top electrode region in a third dielectric layer over the second dielectric layer. The needle-like-shaped top electrode region includes: an oxygen-rich dielectric layer, wherein a lower end of the oxygen-rich dielectric layer is a tip; and a top electrode over the oxygen-rich dielectric layer.
    Type: Application
    Filed: February 15, 2022
    Publication date: May 4, 2023
    Inventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
  • Patent number: 11640949
    Abstract: A bonded semiconductor structure includes a first device wafer and a second device wafer. The first device includes a first dielectric layer, a first bonding pad disposed in the first dielectric layer, and a first bonding layer on the first dielectric layer. The second device wafer includes a second dielectric layer, a second bonding layer on the second dielectric layer, and a second bonding pad disposed in the second dielectric layer and extending through the second bonding layer and at least a portion of the first bonding layer. A conductive bonding interface between the first bonding pad and the second bonding pad and a dielectric bonding interface between the first bonding layer and the second bonding layer include a step-height.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: May 2, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chung-Sung Chiang, Chia-Wei Liu, Yu-Ruei Chen, Yu-Hsiang Lin
  • Patent number: 11621731
    Abstract: A simultaneous client wireless device includes wireless modules configured to perform communication functions of a PHY (physical) layer for wireless radios operable in different bands. The simultaneous client wireless device also includes a communication module configured as an intermediate layer between the PHY layer of the wireless modules and a network layer. The communication module is configured to use an application programming interface to retrieve information from the PHY layer and write information to the PHY layer of the wireless modules, perform communication functions of upper MAC (media access control) and lower MAC layers for the wireless bands, and manage simultaneous communications over the wireless bands. The communications over the wireless bands can use a local area network protocol.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: April 4, 2023
    Assignee: NETGEAR, INC.
    Inventors: Joseph Amalan Arul Emmanuel, Peiman Amini, Chia-Wei Liu
  • Publication number: 20230069716
    Abstract: Interconnect structures and methods of forming interconnect structures are disclosed that provide decreased risk of unwanted via formation through interconnect-level dielectric layers. A method of forming an interconnect structure includes forming first and second dielectric layers over a first metal interconnect feature, where the dielectric layers include localized elevated regions caused by a hillock in the first metal interconnect feature. A planarization process removes the localized elevated region of the second dielectric layer, and third and fourth dielectric layers are formed over the planar upper surface of the second dielectric layer. An etching process through the third and fourth dielectric layers, and into the second dielectric layer, provides a trench having a planar bottom surface.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Inventors: Jheng-Hong JIANG, Shing-Huang WU, Chia-Wei LIU
  • Patent number: 11587824
    Abstract: A method for manufacturing a semiconductor structure includes at least following steps. A device layer is formed on a first semiconductor substrate. The device layer is separated from the first semiconductor substrate. A dielectric layer is formed on a second semiconductor substrate. The device layer is bonded onto the dielectric layer.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: February 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Yu-Hsiang Tsai, Chung-Chuan Tseng, Chia-Wei Liu, Li-Hsin Chu
  • Publication number: 20230043608
    Abstract: A near-eye display includes a semiconductor substrate that has a first curved surface and a second curved surface opposite to each other, and a plurality of luminous pixels formed over the first curved surface of the semiconductor substrate. The luminous pixels cooperatively form a display area of the near-eye display. The second curved surface of the semiconductor substrate is formed with a plurality of indentations at a portion that corresponds in position to the display area.
    Type: Application
    Filed: August 4, 2022
    Publication date: February 9, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jheng-Hong JIANG, Shing-Huang WU, Chia-Wei LIU
  • Publication number: 20230034562
    Abstract: A near eye display system is provided. The near eye display system includes: a frame comprising a main body and two temple arms and; at least one near eye sensor mounted on the main body and configured to measure user eye parameters; a first near eye display mounted on the main body and configured to form a first image projected on a first retina of a first eye; a second near eye display mounted on the main body and configured to form a second image projected on a second retina of a second eye; and a processing unit located at at least one of the two temple arms and configured to generate a display control signal based at least on the user eye parameters, wherein the display control signal drives the first near eye display and the second near eye display.
    Type: Application
    Filed: March 21, 2022
    Publication date: February 2, 2023
    Inventors: Jheng-Hong Jiang, Shing-Huang WU, Chia-Wei Liu
  • Publication number: 20230027657
    Abstract: A damping device is provided. The damping device includes a damper including a mechanical deflector. The damping device includes a post coupled to the mechanical deflector. The damping device includes a case in which the damper is disposed.
    Type: Application
    Filed: January 24, 2022
    Publication date: January 26, 2023
    Inventors: Jheng-Hong JIANG, Shing-Huang WU, Chia-Wei LIU
  • Publication number: 20230008792
    Abstract: A bonded semiconductor structure includes a first device wafer and a second device wafer. The first device includes a first dielectric layer, a first bonding pad disposed in the first dielectric layer, and a first bonding layer on the first dielectric layer. The second device wafer includes a second dielectric layer, a second bonding layer on the second dielectric layer, and a second bonding pad disposed in the second dielectric layer and extending through the second bonding layer and at least a portion of the first bonding layer. A conductive bonding interface between the first bonding pad and the second bonding pad and a dielectric bonding interface between the first bonding layer and the second bonding layer include a step-height.
    Type: Application
    Filed: August 19, 2021
    Publication date: January 12, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chung-Sung Chiang, Chia-Wei Liu, Yu-Ruei Chen, Yu-Hsiang Lin
  • Publication number: 20220411259
    Abstract: A micromechanical arm is provided. The micromechanical arm includes: a bottom metal piece having a plurality of trenches extending downwardly from a top surface of the bottom metal piece; an intermediate layer on the bottom metal piece and filling at least a portion of each of the plurality of trenches; and a top metal piece on the intermediate layer. The intermediate layer is made of a material that has a stiffness smaller than the bottom metal piece and the top metal piece.
    Type: Application
    Filed: February 15, 2022
    Publication date: December 29, 2022
    Inventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
  • Publication number: 20220406999
    Abstract: A RRAM device is provided. The RRAM device includes: a bottom electrode in a first dielectric layer; a switching layer in a second dielectric layer over the first dielectric layer, wherein a conductive path is formed in the switching layer when a forming voltage is applied; and a tapered top electrode region in a third dielectric layer over the second dielectric layer, wherein the tapered top electrode region extends downwardly into the switching layer.
    Type: Application
    Filed: February 15, 2022
    Publication date: December 22, 2022
    Inventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
  • Publication number: 20220384503
    Abstract: A method includes following steps. A first III-V compound layer is epitaxially grown over a semiconductive substrate. The first III-V compound layer has an energy gap in a gradient distribution. A source/drain contact is formed over the first III-V compound layer. A gate structure is formed over the first III-V compound layer.
    Type: Application
    Filed: August 9, 2022
    Publication date: December 1, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Ying WU, Li-Hsin CHU, Chung-Chuan TSENG, Chia-Wei LIU
  • Publication number: 20220384725
    Abstract: A memory device includes: a first conductor extending in parallel with a first axis; a first selector material comprising a first portion that extends along a first sidewall of the first conductor; a second selector material comprising a first portion that extends along the first sidewall of the first conductor; a first variable resistive material comprising a portion that extends along the first sidewall of the first conductor; and a second conductor extending in parallel with a second axis substantially perpendicular to the first axis, wherein the first portion of the first selector material, the first portion of the second selector material, and the portion of the first variable resistive material are arranged along a first direction in parallel with a third axis substantially perpendicular to the first axis and second axis.
    Type: Application
    Filed: August 9, 2022
    Publication date: December 1, 2022
    Inventors: Jheng-Hong JIANG, Cheung CHENG, Chia-Wei LIU
  • Publication number: 20220367340
    Abstract: Devices and methods of manufacture for a graduated, “step-like,” capacitance structure having two or more capacitors. A semiconductor structure comprising a capacitor structure, the capacitor structure comprising a first capacitor and a second capacitor. The first capacitor comprising a first bottom electrode and a top electrode having a bottom surface that is a first distance from a top surface of the first bottom electrode. The second capacitor comprising a second bottom electrode and the top electrode, in which the bottom surface is a second distance from a top surface of the second bottom electrode, and in which the first distance is different from the second distance.
    Type: Application
    Filed: May 12, 2021
    Publication date: November 17, 2022
    Inventors: Jheng-Hong JIANG, Shing-Huang WU, Chia-Wei LIU