Patents by Inventor Fu-Liang Yang

Fu-Liang Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8847253
    Abstract: A semiconductor light emitting device and a method to form the same are disclosed. The device has at least one porous or low density dielectric region formed in or on top of a bottom electrode, at least one top electrode on the porous or low density dielectric region, and one or more color filters placed above the top electrode, wherein the porous or low density dielectric region contains light emitting nanocrystal materials.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Chao Huang, Fu-Liang Yang
  • Patent number: 8835291
    Abstract: Embodiments of the invention provide a semiconductor device and a method of manufacture. MOS devices along with their polycrystalline or amorphous gate electrodes are fabricated such that the intrinsic stress within the gate electrode creates a stress in the channel region between the MOS source/drain regions. Embodiments include forming an NMOS device and a PMOS device after having converted a portion of the intermediate NMOS gate electrode layer to an amorphous layer and then recrystallizing it before patterning to form the electrode. The average grain size in the NMOS recrystallized gate electrode is smaller than that in the PMOS recrystallized gate electrode. In another embodiment, the NMOS device comprises an amorphous gate electrode.
    Type: Grant
    Filed: March 13, 2009
    Date of Patent: September 16, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Chao Huang, Fu-Liang Yang
  • Patent number: 8790970
    Abstract: A semiconductor structure includes of a plurality of semiconductor fins overlying an insulator layer, a gate dielectric overlying a portion of said semiconductor fin, and a gate electrode overlying the gate dielectric. Each of the semiconductor fins has a top surface, a first sidewall surface, and a second sidewall surface. Dopant ions are implanted at a first angle (e.g., greater than about 7°) with respect to the normal of the top surface of the semiconductor fin to dope the first sidewall surface and the top surface. Further dopant ions are implanted with respect to the normal of the top surface of the semiconductor fin to dope the second sidewall surface and the top surface.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: July 29, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yee-Chia Yeo, Ping-Wei Wang, Hao-Yu Chen, Fu-Liang Yang, Chenming Hu
  • Publication number: 20140110656
    Abstract: A memory device includes a phase change element, which further includes a first phase change layer having a first grain size; and a second phase change layer over the first phase change layer. The first and the second phase change layers are depth-wise regions of the phase change element. The second phase change layer has a second average grain size different from the first average grain size.
    Type: Application
    Filed: December 31, 2013
    Publication date: April 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Sheng Liang, Tzyh-Cheang Lee, Fu-Liang Yang
  • Publication number: 20140083855
    Abstract: A bio-chip adapted for separating and concentrating particles in a solution includes a chip body defining a receiving space therein for receiving the solution, an inner electrode disposed in the receiving space, an outer electrode unit disposed in the receiving space of the chip body and including a first outer electrode that is spaced apart from and surrounds the inner electrode, and a second outer electrode that is spaced apart from and surrounds the first outer electrode, and a power source electrically connected to the inner electrode, the first outer electrode, and the second outer electrode. A method for using the bio-chip to separating and concentrating the particles in the solution is also disclosed in the present invention.
    Type: Application
    Filed: September 18, 2013
    Publication date: March 27, 2014
    Applicant: NATIONAL APPLIED RESEARCH LABORATORIES
    Inventors: I-Fang Cheng, Fu-Liang Yang, Hsien-Chang Chang, Tzu-Ying Chen
  • Patent number: 8679728
    Abstract: A method for fabricating a patterned layer is disclosed. Firstly, a semiconductor substrate is provided. Then, a precursory gas on the semiconductor substrate is formed. Finally, a patterned layer on the semiconductor substrate is deposited by reacting the precursory gas with at least one electron beam or at least one ion beam. The present invention not only fabricates a patterned layer on the substrate in a single step but also achieves a high lithographic resolution and avoids remains of contaminations by using the properties of the electron beam or the ion beam and the precursory gas.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: March 25, 2014
    Assignee: National Applied Research Laboratories
    Inventors: Chien-Chao Huang, Chun-Chi Chen, Shyi-Long Shy, Cheng-San Wu, Fu-Liang Yang
  • Publication number: 20140008799
    Abstract: A metal line fabricating method includes the following steps. Firstly, a substrate is provided. Then, a first barrier layer is formed over the substrate. A first dielectric layer is formed over the first barrier layer. An opening is formed in the first dielectric layer, wherein the opening runs through the first dielectric layer, so that the first barrier layer is exposed to the opening. A metal deposition process is performed to form a metal line over the exposed first barrier layer at a bottom of the opening. The first dielectric layer and the first barrier layer underlying the first dielectric layer are removed, but the metal line and the first barrier layer underlying the metal line are remained. Afterwards, a second dielectric layer is formed over the substrate which is provided with the metal line and the first barrier layer.
    Type: Application
    Filed: July 4, 2012
    Publication date: January 9, 2014
    Inventors: Chao-An Jong, Fu-Liang Yang
  • Publication number: 20140008726
    Abstract: A semiconductor structure fabricating method includes the following steps. Firstly, a silicon substrate is provided. The silicon substrate has a first surface and a second surface. In addition, a first semiconductor structure is formed on the first surface of the silicon substrate. Then, the second surface of the silicon substrate is textured as a rough surface. Then, a first electrode layer is formed on the rough surface.
    Type: Application
    Filed: July 4, 2012
    Publication date: January 9, 2014
    Inventors: Yu-Jen HSIAO, Ting-Jen HSUEH, Jia-Min SHIEH, Yu-Ming YEH, Chee-Wee LIU, Bau-Tong DAI, Fu-Liang YANG
  • Patent number: 8618524
    Abstract: A memory device includes a phase change element, which further includes a first phase change layer having a first grain size; and a second phase change layer over the first phase change layer. The first and the second phase change layers are depth-wise regions of the phase change element. The second phase change layer has a second average grain size different from the first average grain size.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: December 31, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Sheng Liang, Tzyh-Cheang Lee, Fu-Liang Yang
  • Patent number: 8603882
    Abstract: A method for making a dual silicide or germanide semiconductor comprises steps of providing a semiconductor substrate, forming a gate, forming source/drain regions, forming a first silicide, reducing spacers thickness and forming a second silicide. Forming a gate comprises forming an insulating layer over the semiconductor substrate, and forming the gate over the insulating layer. Forming source/drain regions comprises forming lightly doped source/drain regions in the semiconductor substrate adjacent to the insulating layer, forming spacers adjacent to the gate and over part of the lightly doped source/drain regions, and forming heavily doped source/drain regions in the semiconductor substrate. The first silicide is formed on an exposed surface of lightly and heavily doped source/drain regions. The second silicide is formed on an exposed surface of lightly doped source/drain regions. A first germanide and second germanide may replace the first silicide and the second silicide.
    Type: Grant
    Filed: May 13, 2011
    Date of Patent: December 10, 2013
    Assignee: National Applied Research Laboratories
    Inventors: Szu-Hung Chen, Hung-Min Chen, Yu-Sheng Lai, Wen-Fa Wu, Fu-Liang Yang
  • Patent number: 8569845
    Abstract: A method of manufacturing a microelectronic device includes forming a p-channel transistor on a silicon substrate by forming a poly gate structure over the substrate and forming a lightly doped source/drain region in the substrate. An oxide liner and nitride spacer are formed adjacent to opposing side walls of the poly gate structure and a recess is etched in the semiconductor substrate on opposing sides of the oxide liner. Raised SiGe source/drain regions are formed on either side of the oxide liner and slim spacers are formed over the oxide liner. A hard mask over the poly gate structure is used to protect the poly gate structure during the formation of the raised SiGe source/drain regions. A source/drain dopant is then implanted into the substrate including the SiGe regions.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: October 29, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Chao Huang, Cheng-Chuan Huang, Fu-Liang Yang
  • Patent number: 8564018
    Abstract: A structure for an integrated circuit is disclosed. The structure includes a crystalline substrate and four crystalline layers. The first crystalline layer of first lattice constant is positioned on the crystalline substrate. The second crystalline layer has a second lattice constant different from the first lattice constant, and is positioned on said first crystalline layer. The third crystalline layer has a third lattice constant different than said second lattice constant, and is positioned on said second crystalline layer. The strained fourth crystalline layer includes, at least partially, a MOSFET device.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: October 22, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chich Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Patent number: 8288842
    Abstract: A method provides for dicing a wafer having a base material with a diamond structure. The wafer first undergoes a polishing process, in which a predetermined portion of the wafer is polished away from its back side. The wafer is then diced through at least one line along a direction at a predetermined offset angle from a natural cleavage direction of the diamond structure. A wafer is produced with one or more dies formed thereon with at least one of its edges at an offset angle from a natural cleavage direction of a diamond structure of a base material forming the wafer. At least one dicing line has one or more protection elements for protecting the dies from undesired cracking while the wafer is being diced along the dicing line.
    Type: Grant
    Filed: January 18, 2007
    Date of Patent: October 16, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd
    Inventors: Hsin-Hui Lee, Chien-Chao Huang, Chao-Hsiung Wang, Fu-Liang Yang, Chenming Hu
  • Publication number: 20120190163
    Abstract: A method for making a dual silicide or germanide semiconductor comprises steps of providing a semiconductor substrate, forming a gate, forming source/drain regions, forming a first silicide, reducing spacers thickness and forming a second silicide. Forming a gate comprises forming an insulating layer over the semiconductor substrate, and forming the gate over the insulating layer. Forming source/drain regions comprises forming lightly doped source/drain regions in the semiconductor substrate adjacent to the insulating layer, forming spacers adjacent to the gate and over part of the lightly doped source/drain regions, and forming heavily doped source/drain regions in the semiconductor substrate. The first silicide is formed on an exposed surface of lightly and heavily doped source/drain regions. The second silicide is formed on an exposed surface of lightly doped source/drain regions. A first germanide and second germanide may replace the first silicide and the second silicide.
    Type: Application
    Filed: May 13, 2011
    Publication date: July 26, 2012
    Applicant: National Applied Research Laboratories
    Inventors: Szu-Hung Chen, Hung-Min Chen, Yu-Sheng Lai, Wen-Fa Wu, Fu-Liang Yang
  • Publication number: 20120178210
    Abstract: A method of fabricating a memory cell includes forming a bottom electrode on a substrate, a variable resistive material layer on the bottom electrode, and a top electrode on the variable resistive material layer. A first metal oxide layer interposes the top electrode and the variable resistive material layer. In an embodiment, the first metal oxide layer is a self-formed layer provided by the oxidation of a portion of the top electrode. In an embodiment, a second metal oxide layer is provided interposing the first metal oxide layer and the variable resistive material layer. The second metal oxide may be a self-formed layer formed by the reduction of the variable resistive material layer.
    Type: Application
    Filed: March 8, 2012
    Publication date: July 12, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
    Inventors: Tzyh-Cheang Lee, Fu-Liang Yang, Tseung-Yuen Tseng, Chih-Yang Lin
  • Patent number: 8173990
    Abstract: An array includes a transistor comprising a first terminal, a second terminal and a third terminal; a first contact plug connected to the first terminal of the transistor; a second contact plug connected to the first terminal of the transistor; a first resistive memory cell having a first end and a second end, wherein the first end is connected to the first contact plug; and a second resistive memory cell having a third end and a fourth end, wherein the third end is connected to the second contact plug.
    Type: Grant
    Filed: January 21, 2010
    Date of Patent: May 8, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzyh-Cheang Lee, Chun-Sheng Liang, Jiunn-Ren Hwang, Fu-Liang Yang
  • Patent number: 8174073
    Abstract: A semiconductor structure includes a semiconductor substrate; and a first Fin field-effect transistor (FinFET) and a second FinFET at a surface of the semiconductor substrate. The first FinFET includes a first fin; and a first gate electrode over a top surface and sidewalls of the first fin. The second FinFET includes a second fin spaced apart from the first fin by a fin space; and a second gate electrode over a top surface and sidewalls of the second fin. The second gate electrode is electrically disconnected from the first gate electrode. The first and the second gate electrodes have a gate height greater than about one half of the fin space.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: May 8, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Lin Lee, Chang-Yun Chang, Sheng-Da Liu, Fu-Liang Yang
  • Patent number: 8154003
    Abstract: The present disclosure provides a memory cell. The memory cell includes a first electrode, a variable resistive material layer coupled to the first electrode, a metal oxide layer coupled the variable resistive material layer; and a second electrode coupled to the metal oxide layer. In an embodiment, the metal oxide layer provides a constant resistance.
    Type: Grant
    Filed: August 9, 2007
    Date of Patent: April 10, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzyh-Cheang Lee, Fu-Liang Yang, Tseung-Yuen Tseng, Chih-Yang Lin
  • Patent number: RE45165
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu, Chang-Yu Chang, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang
  • Patent number: RE45180
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Grant
    Filed: June 2, 2010
    Date of Patent: October 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu, Chang-Yun Chang, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang