Patents by Inventor Fu-Liang Yang
Fu-Liang Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7728360Abstract: A multiple-gate transistor structure which includes a substrate, source and drain islands formed in a portion of the substrate, a fin formed of a semi-conducting material that has a top surface and two sidewall surfaces, a gate dielectric layer overlying the fin, and a gate electrode wrapping around the fin on the top surface and the two sidewall surfaces separating source and drain islands. In an alternate embodiment, a substrate that has a depression of an undercut or a notch in a top surface of the substrate is utilized.Type: GrantFiled: December 6, 2002Date of Patent: June 1, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hao-Yu Chen, Yee-Chia Yeo, Fu-Liang Yang
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Publication number: 20100117045Abstract: An array includes a transistor comprising a first terminal, a second terminal and a third terminal; a first contact plug connected to the first terminal of the transistor; a second contact plug connected to the first terminal of the transistor; a first resistive memory cell having a first end and a second end, wherein the first end is connected to the first contact plug; and a second resistive memory cell having a third end and a fourth end, wherein the third end is connected to the second contact plug.Type: ApplicationFiled: January 21, 2010Publication date: May 13, 2010Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzyh-Cheang Lee, Chun-Sheng Liang, Jiunn-Ren Hwang, Fu-Liang Yang
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Patent number: 7704809Abstract: A silicon-on-insulator chip includes an insulator layer, typically formed over a substrate. A first silicon island with a surface of a first crystal orientation overlies the insulator layer and a second silicon island with a surface of a second crystal orientation also overlies the insulator layer. In one embodiment, the silicon-on-insulator chip also includes a first transistor of a first conduction type formed on the first silicon island, and a second transistor of a second conduction type formed on the second silicon island. For example, the first crystal orientation can be (110) while the first transistor is a p-channel transistor, and the second crystal orientation can be (100) while the second transistor is an n-channel transistor.Type: GrantFiled: March 18, 2008Date of Patent: April 27, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Fu-Liang Yang
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Patent number: 7705424Abstract: A phase change memory is provided. The method includes forming contact plugs in a first dielectric layer. A second dielectric layer is formed overlying the first dielectric layer and a trench formed therein exposing portions of the contact plugs. A metal layer is formed over surfaces of the trench. One or more heaters are formed from the metal layer such that each heater is formed along one or more sidewalls and a portion of the bottom of the trench, wherein the portion of the heater along the sidewalls does not include a corner region of adjacent sidewalls. The trench is filled with a third dielectric layer, and a fourth dielectric layer is formed over the third dielectric layer. Trenches are formed in the fourth dielectric layer and filled with a phase change material. An electrode is formed over the phase change material.Type: GrantFiled: May 15, 2007Date of Patent: April 27, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzyh-Cheang Lee, Ming-Yi Yang, Fu-Liang Yang, Denny Duan-Iee Tang
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Patent number: 7701008Abstract: A semiconductor structure includes of a plurality of semiconductor fins overlying an insulator layer, a gate dielectric overlying a portion of said semiconductor fin, and a gate electrode overlying the gate dielectric. Each of the semiconductor fins has a top surface, a first sidewall surface, and a second sidewall surface. Dopant ions are implanted at a first angle (e.g., greater than about 7°) with respect to the normal of the top surface of the semiconductor fin to dope the first sidewall surface and the top surface. Further dopant ions are implanted with respect to the normal of the top surface of the semiconductor fin to dope the second sidewall surface and the top surface.Type: GrantFiled: June 5, 2006Date of Patent: April 20, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Ping-Wei Wang, Hao-Yu Chen, Fu-Liang Yang, Chenming Hu
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Patent number: 7663134Abstract: An array includes a transistor cpmprising a first terminal, a second terminal and a third terminal; a first contact plug connected to the first terminal of the transistor; a second contact plug connected to the first terminal of the transistor; a first resistive memory cell having a first end and a second end, wherein the first end is connected to the first contact plug; and a second resistive memory cell having a third end and a fourth end, wherein the third end is connected to the second contact plug.Type: GrantFiled: July 10, 2007Date of Patent: February 16, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzyh-Cheang Lee, Chun-Sheng Liang, Jiunn-Ren Hwang, Fu-Liang Yang
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Patent number: 7659587Abstract: A CMOS integrated circuit includes a substrate having an NMOS region with a P-well and a PMOS region with an N-well. A shallow trench isolation (STI) region is formed between the NMOS and PMOS regions and a composite silicon layer comprising a strained SiGe layer is formed over said P well region and over said N well region. The composite silicon layer is disconnected at the STI region. Gate electrodes are then formed on the composite layer in the NMOS and PMOS regions.Type: GrantFiled: May 9, 2007Date of Patent: February 9, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Chun-Chieh Lin, Fu-Liang Yang, Chen Ming Hu
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Patent number: 7642170Abstract: A method for constructing a phase change memory device includes forming a first dielectric layer on a substrate; forming a first conductive component in the first dielectric layer; forming a second dielectric layer over the first conductive component in the first dielectric layer; forming a conductive crown in the second dielectric layer, the conductive crown being in contact and alignment with the conductive component; depositing a third dielectric layer in the conductive crown; and forming a trench filled with chalcogenic materials having an amorphous phase and a crystalline phase programmable by controlling a temperature thereof to represent logic states, wherein the trench extends across the conductive crown, such that the trench is free from a rounded end portion caused by lithography during fabrication of the phase change memory device.Type: GrantFiled: September 28, 2007Date of Patent: January 5, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tzyh-Cheang Lee, Chun-Sheng Liang, Fu-Liang Yang
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Patent number: 7638376Abstract: A method for forming a substrate contact on a silicon-on-insulator (SOI) wafer is provided that can be integrated with a process for fabricating SOI devices without additional processing after wafer dicing. The method is applicable in many of the more advanced packaging technologies, e.g., such as flip chip and die stacking, directly creating a contact to silicon substrate via the front of the diced SOI wafer.Type: GrantFiled: January 12, 2007Date of Patent: December 29, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Kuo Wen, Chien-Chao Huang, Hao-Yu Chen, Fu-Liang Yang, Hsun-Chih Tsao
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Patent number: 7635632Abstract: A method for forming a gate electrode for a multiple gate transistor provides a doped, planarized gate electrode material which may be patterned using conventional methods to produce a gate electrode that straddles the active area of the multiple gate transistor and has a constant transistor gate length. The method includes forming a layer of gate electrode material having a non-planar top surface, over a semiconductor fin. The method further includes planarizing and doping the gate electrode material, without doping the source/drain active areas, then patterning the gate electrode material. Planarization of the gate electrode material may take place prior to the introduction and activation of dopant impurities or it may follow the introduction arid activation of dopant impurities. After the gate electrode is patterned, dopant impurities are selectively introduced to the semiconductor fin to form source/drain regions.Type: GrantFiled: January 3, 2007Date of Patent: December 22, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yee-Chia Yeo, Hao-Yu Chen, Fu-Liang Yang, Chenming Hu
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Patent number: 7602006Abstract: A flash memory device includes a floating gate made of a multi-layered structure. The floating gate includes a hetero-pn junction which serves as a quantum well to store charge in the floating gate, thus increasing the efficiency of the device, allowing the device to be operable using lower voltages and increasing the miniaturization of the device. The floating gate may be used in n-type and p-type devices, including n-type and p-type fin-FET devices. The stored charge may be electrons or holes.Type: GrantFiled: April 20, 2005Date of Patent: October 13, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien-Chao Huang, Chi Min-Hwa, Fu-Liang Yang
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Publication number: 20090230375Abstract: A semiconductor device is provided which includes a substrate having a dielectric layer formed thereon, a heating element formed in the dielectric layer, a phase change element formed on the heating element, and a conductive element formed on the phase change element. The phase change element includes a substantially amorphous background and an active region, the active region capable of changing phase between amorphous and crystalline.Type: ApplicationFiled: March 17, 2008Publication date: September 17, 2009Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Sheng Liang, Tzyh-Cheang Lee, Fu-Liang Yang
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Patent number: 7589387Abstract: A 2-bit FinFET flash memory cell capable of storing 2 bits and a method of forming the same are provided. The memory cell includes a semiconductor fin on a top surface of a substrate, a gate insulation film on the top surface and sidewalls of a channel section of the semiconductor fin, a gate electrode on the gate insulation film, and two charge-trapping regions along opposite sides of the gate electrode, wherein each charge-trapping region is separated from the gate electrode and the semiconductor fin by a tunneling layer. The memory cell further includes a protective layer on the charge-trapping regions. Each of the two charge-trapping regions is capable of storing one bit. The memory cell can be operated by applying different bias voltages to the source, the drain, and the gate of the memory cell.Type: GrantFiled: October 5, 2005Date of Patent: September 15, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jiunn-Ren Hwang, Min-Hwa Chi, Fu-Liang Yang
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Patent number: 7585711Abstract: A selectively strained MOS device such as selectively strained PMOS device making up an NMOS and PMOS device pair without affecting a strain in the NMOS device the method including providing a semiconductor substrate comprising a lower semiconductor region, an insulator region overlying the lower semiconductor region and an upper semiconductor region overlying the insulator region; patterning the upper semiconductor region and insulator region to form a MOS active region; forming an MOS device comprising a gate structure and a channel region on the MOS active region; and, carrying out an oxidation process to oxidize a portion of the upper semiconductor region to produce a strain in the channel region.Type: GrantFiled: August 2, 2006Date of Patent: September 8, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hao-Yu Chen, Fu-Liang Yang
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Patent number: 7582947Abstract: A semiconductor structure having a recessed active region and a method for forming the same are provided. The semiconductor structure comprises a first and a second isolation structure having an active region therebetween. The first and second isolation structures have sidewalls with a tilt angle of substantially less than 90 degrees. The active region is recessed. By recessing the active region, the channel width is increased and device drive current is improved.Type: GrantFiled: October 5, 2005Date of Patent: September 1, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Chao Huang, Fu-Liang Yang
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Publication number: 20090203202Abstract: Embodiments of the invention provide a semiconductor device and a method of manufacture. MOS devices along with their polycrystalline or amorphous gate electrodes are fabricated such that the intrinsic stress within the gate electrode creates a stress in the channel region between the MOS source/drain regions. Embodiments include forming an NMOS device and a PMOS device after having converted a portion of the intermediate NMOS gate electrode layer to an amorphous layer and then recrystallizing it before patterning to form the electrode. The average grain size in the NMOS recrystallized gate electrode is smaller than that in the PMOS recrystallized gate electrode. In another embodiment, the NMOS device comprises an amorphous gate electrode.Type: ApplicationFiled: March 13, 2009Publication date: August 13, 2009Inventors: Chien-Chao Huang, Fu-Liang Yang
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Patent number: 7573095Abstract: A semiconductor structure includes a memory cell in a first region and a logic MOS device in a second region of a semiconductor substrate. The memory cell includes a first gate electrode over the semiconductor substrate; a first gate spacer on a sidewall of the first gate electrode, wherein the first gate spacer comprises a storage on a tunneling layer; and a first lightly-doped source or drain (LDD) region and a first pocket region adjacent to the first gate electrode. The logic MOS device includes a second gate electrode on the semiconductor substrate; a second gate spacer on a sidewall of the second gate electrode; a second LDD region and a second pocket region adjacent the second gate electrode, wherein at least one of the first LDD region and the first pocket region has a higher impurity concentration than a impurity concentration of the respective second LDD region and the second pocket region.Type: GrantFiled: December 5, 2006Date of Patent: August 11, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzyh-Cheang Lee, Fu-Liang Yang
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Patent number: 7545006Abstract: A semiconductor device includes a semiconductor substrate, a gate stack overlying the semiconductor substrate, a spacer on a sidewall of the gate stack, a lightly doped source/drain (LDD) region adjacent the gate stack, a deep source/drain region adjoining the LDD region, and a graded silicide region on the deep source/drain region and the LDD region. The graded silicide region includes a first portion having a first thickness and a second portion adjoining the first portion and having a second thickness substantially less than the first thickness. The second portion is closer to a channel region than the first portion.Type: GrantFiled: August 1, 2006Date of Patent: June 9, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ming Chen, Chien-Chao Huang, Fu-Liang Yang
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Publication number: 20090108249Abstract: An integrated circuit structure includes a semiconductor substrate; a diode; and a phase change element over and electrically connected to the diode. The diode includes a first doped semiconductor region of a first conductivity type, wherein the first doped semiconductor region is embedded in the semiconductor substrate; and a second doped semiconductor region over and adjoining the first doped semiconductor region, wherein the second doped semiconductor region is of a second conductivity type opposite the first conductivity type.Type: ApplicationFiled: October 31, 2007Publication date: April 30, 2009Inventors: Fang-Shi Jordan Lai, ChiaHua Ho, Fu-Liang Yang
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Publication number: 20090087945Abstract: A method for constructing a phase change memory device includes forming a first dielectric layer on a substrate; forming a first conductive component in the first dielectric layer; forming a second dielectric layer over the first conductive component in the first dielectric layer; forming a conductive crown in the second dielectric layer, the conductive crown being in contact and alignment with the conductive component; depositing a third dielectric layer in the conductive crown; and forming a trench filled with chalcogenic materials having an amorphous phase and a crystalline phase programmable by controlling a temperature thereof to represent logic states, wherein the trench extends across the conductive crown, such that the trench is free from a rounded end portion caused by lithography during fabrication of the phase change memory device.Type: ApplicationFiled: September 28, 2007Publication date: April 2, 2009Inventors: Tzyh Cheang Lee, Chun-Sheng Liang, Fu-Liang Yang