Abstract: A semiconductor manufacturing system of the present invention includes exposure value detection means for detecting an exposure value, pattern size detection means for detecting a pattern size, size comparison means for calculating a size difference between the pattern size and a target value, optimum exposure value calculation means for calculating an optimum exposure value based on the exposure value and the size difference, and an exposure value control means. In the semiconductor device manufacturing method of the present invention, the optimum exposure value is calculated based on the exposure value and the size difference, and exposure is performed at the optimum exposure value. A semiconductor device of the present invention is manufactured by the manufacturing method.

Abstract: When carrying out a liquid-phase reaction by using a heterogeneous catalyst, the separation of the heterogeneous catalyst and the reaction liquid is carried out certainly and effectively. A reaction method involves carrying out a reaction in liquid phase by using a heterogeneous catalyst particle 30 in a reactor 10, and comprises the steps of: (a) allowing a reaction liquid 40 supplied into the reactor 10 from such as a supplying inlet 12 to react in the presence of the heterogeneous catalyst particle 30, and (b) passing the resultant reaction liquid 40 containing the heterogeneous catalyst particle 30 through a line screen 20 having an opening width where the heterogeneous catalyst particle 30 is not allowed to pass substantially, and then extracting the reaction liquid 40 separated from the heterogeneous catalyst particle 30 from the reactor 10 by way of such as an extracting outlet 14.

Abstract: The present invention provides: a process can be preventive of a polymerization in a distillation apparatus when distilling a solution containing easily polymerizable substances such as (meth)acrylic acid and (meth)acrylic acid ester. In the distillation process for an easily polymerizable substance-containing solution which includes the step of distilling an easily polymerizable substance-containing solution by a distillation column equipped with a condenser for condensation at a vapor outlet of the distillation column, at least one condenser for polymerization inhibition is further placed in series on a vapor outlet side of the condenser for condensation, and the easily polymerizable substance which is contained in vapor from an upstream condenser is condensed by a downstream condenser.

Abstract: A semiconductor manufacturing system and method includes an exposure value detector for detecting an exposure value, a pattern size detector for detecting a pattern size, a size comparator for calculating a size difference between the pattern size and a target value, an optimum exposure value calculator for calculating an optimum exposure value based on the exposure value and the size difference, an exposure value controller. In this semiconductor device manufacturing method, the optimum exposure value is calculated based on the exposure value and the size difference, and exposure is performed at the optimum exposure value. A semiconductor device is manufactured by the manufacturing method.

Abstract: The present invention provides a process for producing a hydroxyalkyl (meth)acrylate which comprises the step of carrying out a reaction between (meth)acrylic acid and an alkylene oxide, wherein the process provides enablement for economically and efficiently recovering and recycling the unreacted residue of the alkylene oxide. The process for producing a hydroxyalkyl (meth)acrylate comprises the steps of, carrying out a reaction between (meth)acrylic acid and an alkylene oxide; stripping the unreacted residue of the alkylene oxide from the resultant reaction liquid; and causing a solvent to absorb the stripped alkylene oxide; wherein: water is used as the absorbing solvent; and an absorbing liquid resultant from the absorption of the unreacted residue of the alkylene oxide is used for production of an alkylene glycol.

Abstract: In a production process for a hydroxyalkyl ester, comprising the step of carrying out a reaction between a carboxylic acid and an alkylene in the presence of a catalyst, the present invention is to provide: a production process which can stop the reaction economically and sufficiently safely. In a production process which comprises the step of carrying out the reaction between a carboxylic acid and an alkylene in a reactor 1 in the presence of a catalyst so as to produce a hydroxyalkyl ester, the reaction is stopped by introducing a reaction terminating liquid 21 into the reactor 1, wherein the reaction terminating liquid comprises water in a ratio of not less than 50 weight %, and has a low temperature of −5 to 45° C.

Abstract: A production process for a hydroxyalkyl(meth)acrylate, which comprises the steps of carrying out a reaction between (meth)acrylic acid and an alkylene oxide and stripping the unreacted residue of the alkylene oxide from the resultant reaction liquid, wherein: (1) the stripping step is performed by use of an inert gas, and the concentration of oxygen in the inert gas is adjusted in the range of 0.

Abstract: In the purification of an easily polymerizable compound such as (meth)acrylic acid by the use of a purification column adapted to withdraw a liquid from the middle portion of the column, a novel liquid withdrawing tray adapted to prevent the compound from polymerization effectively and permit the purification to be stably performed for a long time, a purification column using this tray, and a method for purifications using this purification column are provided. The liquid withdrawing tray for the purification column is composed of a liquid receiving plate and a liquid withdrawing tube for withdrawing the liquid from the liquid receiving plate.

Abstract: The present invention provides a novel production process for a hydroxyalkyl (meth)acrylate in which, when the hydroxyalkyl (meth)acrylate is produced by carrying out a reaction between (meth)acrylic acid and an alkylene oxide, the unreacted (meth)acrylic acid can be effectively recovered and thereafter recycled as a raw reaction material. The production process for a hydroxyalkyl (meth)acrylate comprises the step of carrying out a reaction between (meth)acrylic acid and an alkylene oxide in order to produce the hydroxyalkyl (meth)acrylate, and further comprises the steps of: recovering the unreacted (meth)acrylic acid by distillation of the resultant reaction liquid; and thereafter recycling the recovered unreacted (meth)acrylic acid as a raw material for the reaction.

Abstract: The present invention provide a production process for a hydroxyalkyl ester which comprises the step of carrying out a reaction between a carboxylic acid and an alkylene oxide in the presence of a catalyst, wherein the production process sufficiently enhances the conversion or selectivity in the reaction. The production process is characterized in that the reaction is carried out in a reaction liquid under conditions where a relationship a<b is kept throughout the reaction wherein “a” is a molar concentration (mol %) of the carboxylic acid in the reaction liquid and wherein “b” is a molar concentration (mol %) of the alkylene oxide in the reaction liquid.

Abstract: In the purification of an easily polymerizable compound such as (meth)acrylic acid by the use of a purification column adapted to withdraw a liquid from the middle portion of the column, a novel liquid withdrawing tray adapted to prevent the compound from polymerization effectively and permit the purification to be stably performed for a long time, a purification column using this tray, and a method for purifications using this purification column are provided. The liquid withdrawing tray for the purification column is composed of a liquid receiving plate and a liquid withdrawing tube for withdrawing the liquid from the liquid receiving plate.

Abstract: In a production process for a hydroxyalkyl ester, comprising the step of carrying out a reaction between a carboxylic acid and an alkylene in the presence of a catalyst, the present invention is to provide: a production process which can stop the reaction economically and sufficiently safely. In a production process which comprises the step of carrying out the reaction between a carboxylic acid and an alkylene in a reactor 1 in the presence of a catalyst so as to produce a hydroxyalkyl ester, the reaction is stopped by introducing a reaction terminating liquid 21 into the reactor 1, wherein the reaction terminating liquid comprises water in a ratio of not less than 50 weight %, and has a low temperature of −5 to 45° C.

Abstract: The present invention provides a process for producing a hydroxyalkyl (meth)acrylate which comprises the step of carrying out a reaction between (meth)acrylic acid and an alkylene oxide, wherein the process provides enablement for economically and efficiently recovering and recycling the unreacted residue of the alkylene oxide. The process for producing a hydroxyalkyl (meth)acrylate comprises the steps of, carrying out a reaction between (meth)acrylic acid and an alkylene oxide; stripping the unreacted residue of the alkylene oxide from the resultant reaction liquid; and causing a solvent to absorb the stripped alkylene oxide; wherein: water is used as the absorbing solvent; and an absorbing liquid resultant from the absorption of the unreacted residue of the alkylene oxide is used for production of an alkylene glycol.

Abstract: The present invention provides a process for producing a (meth)acrylic ester which enables to obtain a (meth)acrylic ester in an excellent reaction yield. The process for producing a (meth)acrylic ester uses an alcohol and an acid as raw materials and an ion-exchange resin as a catalyst, and the process is characterized by comprising a dehydration step and an esterification step, wherein the esterification reaction step follows the dehydration step in which water impregnated in the ion-exchange resin is removed by using as a dehydrating solvent at least one member selected from the group consisting of the alcohol, the acid, and the resulting ester.

Abstract: When carrying out a liquid-phase reaction by using a heterogeneous catalyst, the separation of the heterogeneous catalyst and the reaction liquid is carried out certainly and effectively. A reaction method involves carrying out a reaction in liquid phase by using a heterogeneous catalyst particle 30 in a reactor 10, and comprises the steps of: (a) allowing a reaction liquid 40 supplied into the reactor 10 from such as a supplying inlet 12 to react in the presence of the heterogeneous catalyst particle 30, and (b) passing the resultant reaction liquid 40 containing the heterogeneous catalyst particle 30 through a line screen 20 having an opening width where the heterogeneous catalyst particle 30 is not allowed to pass substantially, and then extracting the reaction liquid 40 separated from the heterogeneous catalyst particle 30 from the reactor 10 by way of such as an extracting outlet 14.

Abstract: A distillation column is arranged so that a liquid hole which allows liquid containing a polymerizable organic compound to flow from on a tray supporting member downward is formed in a part of the tray supporting member, for example, a support ring, so that substantial retention of the liquid on the tray supporting member is avoided. Therefore, the liquid, such as crude acrylic acid, is allowed to smoothly flow down from on surfaces of a tray and the tray supporting member, thereby causing no substantial retention of the liquid. As a result, polymerization which tends to occur when the liquid is retained on the surfaces of the tray and the tray supporting member thereby being heated is effectively prevented, and the polymerizable organic compound is efficiently purified.

Abstract: A method of producing a pantothenic acid derivative of formula (I): ##STR1## wherein each of R.sup.1 and R .sup.2 is different, and is a branched aliphatic hydrocarbon group having 3 to 5 carbon atoms, or a phenyl group; or a straight chain aliphatic hydrocarbon group having 5 to 10 carbon atoms, is provided, including methods of producing the starting materials for producing the same and novel amine derivative that can be used for the production of the pantothenic acid derivative.

Abstract: A computer operation management system comprises a computer having a central processing unit, a main memory and, an auxiliary memory, an operating system for operating the computer so as for the computer to execute plural application, programs simultaneously and a process manager for monitoring an execution status of plural application programs to control the number of application programs simultaneously executed and their execution priorities.

Abstract: A method of producing a pantothenic acid derivative of formula (I): ##STR1## wherein each of R.sup.1 and R.sup.2 is different, and is a branched aliphatic hydrocarbon group having 3 to 5 carbon atoms, or a phenyl group; or a straight chain aliphatic hydrocarbon group having 5 to 10 carbon atoms, is provided, including methods of producing the starting materials for producing the same and novel amine derivative that can be used for the production of the pantothenic acid derivative.

Abstract: A cable-saving type CCTV system for transmitting a multiplexed video signal over a single coaxial cable connecting a camera site and a control site by frequency-modulating a bi-directional audio signal and producing a digital control signal and a digital alarm signal and multiplexing the resultant signals and an external synchronizing signal in a blanking period of the video signal.