Abstract: The present invention provides an optical member excellent in antifouling properties, rubbing resistance, and antifog properties. The optical member of the present invention includes, on a surface thereof, an uneven structure provided with multiple projections at a pitch not longer than a wavelength of visible light, the projections each including a hydrophilic portion at its tip. Preferably, each of the projections is formed from a hydrophobic resin and has its tip covered with a hydrophilic material, the hydrophilic material contains silicon dioxide, and the hydrophilic material has a thickness of 30 nm or smaller.

Abstract: A semiconductor manufacturing apparatus includes a mounting unit arranged to mount an annular member, having an annular shape, to a work substrate including a first substrate and a second substrate bonded to each other so that the annular member surrounds the first substrate. The apparatus further includes a holding unit arranged to hold the work substrate having the annular member mounted thereto. The apparatus further includes a first fluid supply unit arranged to supply a first fluid to the second substrate of the work substrate held by the holding unit.

Abstract: An electron emitting device (100) includes a first electrode (12), a second electrode (52), and a semi-conductive layer (30) provided between the first electrode (12) and the second electrode (52). The semi-conductive layer (30) includes a porous alumina layer (32) having a plurality of pores (34) and silver (42) supported in the plurality of pores (34) of the porous alumina layer (32).

Abstract: The present invention provides a method for producing an optical film excellent in anti-fouling properties and scratch resistance as well as anti-reflection properties. The method includes the steps of: (1) applying a lower layer resin and an upper layer resin; (2) forming a resin layer having the uneven structure on a surface thereof by pressing a mold against the lower layer resin and the upper layer resin from the upper layer resin side in the state where the applied lower layer resin and upper layer resin are stacked; and (3) curing the resin layer, the lower layer resin containing at least one kind of first monomer that contains no fluorine atoms, the upper layer resin containing a fluorine-containing monomer and at least one kind of second monomer that contains no fluorine atoms, at least one of the first monomer and the second monomer containing a compatible monomer that is compatible with the fluorine-containing monomer and being dissolved in the lower layer resin and the upper layer resin.

Abstract: The present invention provides a method for producing an optical film excellent in anti-fouling properties and scratch resistance as well as anti-reflection properties. The method includes the steps of: (1) applying a lower layer resin and an upper layer resin; (2) forming a resin layer having the uneven structure on a surface thereof by pressing a mold against the lower layer resin and the upper layer resin from the upper layer resin side in the state where the applied lower layer resin and upper layer resin are stacked; and (3) curing the resin layer, the lower layer resin containing at least one kind of first monomer that contains no fluorine atoms, the upper layer resin containing a fluorine-containing monomer and at least one kind of second monomer that contains no fluorine atoms, at least one of the first monomer and the second monomer containing a compatible monomer that is compatible with the fluorine-containing monomer and being dissolved in the lower layer resin and the upper layer resin.

Abstract: The present invention provides an optical member with which degradation of adhesion between a substrate containing triacetylcellulose and a polymer layer caused by moisture absorption is suppressed. An optical member according to the present invention includes a substrate and a polymer layer in direct contact with the substrate and having an indented structure on a surface thereof, the indented structure including multiple protrusions formed at a pitch not greater than a wavelength of visible light. Triacetylcellulose is present in at least a surface of the substrate on the polymer layer side, the polymer layer is formed from a polymerizable composition polymerizable by active energy ray irradiation, and the polymerizable composition contains 30 parts by weight or more and 75 parts by weight or less of a polyfunctional acrylate, 25 parts by weight or more and 60 parts by weight or less of a monofunctional monomer having a tertiary amide group, and 0.

Abstract: The present invention provides a method for producing an antifouling film capable of long-term continuous production of an antifouling film having excellent antifouling properties. The method for producing an antifouling film of the present invention includes Process (1) of applying a resin to a surface of a substrate; Process (2) of applying a second release agent to a surface of a die coated with a first release agent; Process (3) of pushing the substrate to the surface of the die coated with the second release agent with the resin in between to form an uneven structure on a surface of the resin; and Process (4) of curing the resin including the uneven structure on the surface thereof to form a polymer layer. The resin contains an antifouling agent that contains a predetermined compound. The first release agent contains a predetermined compound. The second release agent contains a predetermined compound.

Abstract: A method for producing an optical film includes: (1) applying a lower layer resin and an upper layer resin; (2) forming a resin layer having the uneven structure on a surface thereof by pressing a mold against the lower layer resin and the upper layer resin from the upper layer resin side in the state where the applied lower layer resin and upper layer resin are stacked; and (3) curing the resin layer, the lower layer resin containing at least one kind of first monomer that contains no fluorine atoms, the upper layer resin containing a fluorine-containing monomer and at least one kind of second monomer that contains no fluorine atoms, at least one of the first monomer and the second monomer containing a compatible monomer that is compatible with the fluorine-containing monomer and being dissolved in the lower layer resin and the upper layer resin.

Abstract: The present invention provides a method for producing an antifouling film having excellent antifouling properties and rubbing resistance. The method for producing an antifouling film of the present invention includes Process (1) of applying a resin to a surface of a substrate; Process (2) of pushing the substrate to a die with the resin in between to form an uneven structure on a surface of the resin; and Process (3) of curing the resin including the uneven structure on the surface thereof to form a polymer layer. The resin contains an antifouling agent that contains a compound containing a perfluoro(poly)ether group. The die includes a surface having undergone release treatment using a release agent containing a compound that contains a perfluoro(poly)ether group, a hydrolyzable group, and a Si atom.

Abstract: A printing intaglio (100A), (100B) is a printing intaglio for use in intaglio printing, the printing intaglio having a surface which has a plurality of first recessed portions (12) that form a pattern to be printed, wherein at least one of the plurality of first recessed portions has a plurality of minute recessed portions (16p) inside the first recessed portion, and when viewed in a direction normal to the surface of the printing intaglio, a two-dimensional size of the plurality of minute recessed portions is not less than 10 nm and less than 500 nm.

Abstract: The method for producing an optical member of the present invention includes: Process (1) of applying a first resin to a substrate; Process (2) of applying a second resin to at least one of the first resin and a die; Process (3) of pushing the substrate to the die with the first resin and the second resin in between to form a resin layer including on a surface thereof an uneven structure; and Process (4) of curing the resin layer to provide a polymer layer. The die includes a surface after release treatment with a fluorine release agent. The first resin contains a resin component, and the resin component contains predetermined amounts of a (meth)acrylamide compound and a urethane prepolymer containing six or more functional groups. The second resin contains predetermined amounts of a reactive group-containing monomer, a fluorosurfactant, and a fluorine-containing monomer.

Abstract: Provided are an electron emission device having a novel structure and being capable of improving characteristics and/or extending a lifetime of a related-art electron emission device, and a method of manufacturing the electron emission device.

Abstract: The method for producing an optical member of the present invention includes: a step (1) of applying a lower layer resin and an upper layer resin; a step (2) of pressing a die against the lower layer resin and the upper layer resin from the upper layer resin side, so as to form a resin layer including an uneven structure on a surface thereof; and a step (3) of curing the resin layer to form the polymer layer, wherein the lower layer resin contains an amide group, the lower layer resin has an amide group concentration of 1.5 mmol/g or more and less than 5 mmol/g, and the polymer layer has a minimum storage modulus E? of 1×108 Pa or higher and 1×109 Pa or lower at a bottom temperature of 110° C. or higher and 210° C. or lower.

Abstract: A substrate processing method and apparatus which can remove an anti-drying liquid, which has entered a three-dimensional pattern with recessed portions formed in a substrate, in a relatively short time. The substrate processing method includes the steps of: carrying a substrate, having a three-dimensional pattern formed in a surface, into a processing container, said pattern being covered with an anti-drying liquid that has entered the recessed portions of the pattern; heating the substrate and supplying a pressurizing gas or a fluid in a high-pressure state into the processing container, thereby forming a high-pressure atmosphere in the processing container before the anti-drying liquid vaporizes to such an extent as to cause pattern collapse and bringing the anti-drying liquid into a high-pressure state while keeping the liquid in the recessed portions of the pattern; and thereafter discharging a fluid in a high-pressure state or a gaseous state from the processing container.

Abstract: The antifouling film includes a polymer layer that includes on a surface thereof an uneven structure provided with multiple projections at a pitch not longer than a wavelength of visible light. The polymer layer has a proportion of the number of fluorine atoms relative to the sum of the numbers of carbon atoms, nitrogen atoms, oxygen atoms, and fluorine atoms of 33 atom % or more on the surface of the uneven structure and of 3 atom % or less on average in a region 90 to 120 nm deep from the surface of the uneven structure. The polymer layer has a proportion of the number of nitrogen atoms relative to the sum of the numbers of carbon atoms, nitrogen atoms, oxygen atoms, and fluorine atoms of 4 atom % or less on average in a region 90 to 120 nm deep from the surface of the uneven structure.

Abstract: The present invention provides an optical member excellent in antifouling properties, rubbing resistance, and antifog properties. The optical member of the present invention includes, on a surface thereof, an uneven structure provided with multiple projections at a pitch not longer than a wavelength of visible light, the projections each including a hydrophilic portion at its tip. Preferably, each of the projections is formed from a hydrophobic resin and has its tip covered with a hydrophilic material, the hydrophilic material contains silicon dioxide, and the hydrophilic material has a thickness of 30 nm or smaller.

Abstract: The antifouling film includes a polymer layer that includes on a surface thereof an uneven structure provided with multiple projections at a pitch not longer than a wavelength of visible light. The polymer layer has a proportion of the number of fluorine atoms relative to the sum of the numbers of carbon atoms, nitrogen atoms, oxygen atoms, and fluorine atoms of 33 atom % or more on the surface of the uneven structure. The polymer layer has at least one local maximum of the proportion of the number of nitrogen atoms relative to the sum of the numbers of carbon atoms, nitrogen atoms, oxygen atoms, and fluorine atoms in a region 5 to 90 nm deep from the surface of the uneven structure. The local maximum is 0.3 atom % or more greater than the average value in a region 90 to 120 nm deep from the surface of the uneven structure.

Abstract: A mold is disclosed, which is capable of producing a nanoimprint film without a problem of clogging of irregularities of the mold with a resin material. A method for producing the mold and a method for producing a nanoimprint film using the mold are further disclosed. In an embodiment, the mold includes: a first surface having a nanostructure including plural recesses spaced at an interval of less than 1 ?m between bottom points of adjacent recesses; and at least two second surfaces substantially not having the nanostructure, wherein the first surface is coplanar with the at least two second surfaces and is positioned between two second surfaces.

Abstract: A substrate processing method and apparatus for preventing evaporation of an anti-drying fluorine-containing organic solvent from a substrate during transportation of the substrate into a processing container and can prevent decomposition of a fluorine-containing organic solvent in the processing container. A substrate, the surface of which is covered with a first fluorine-containing organic solvent, is carried into a processing container. The first fluorine-containing organic solvent is removed from the substrate surface by forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, having a lower boiling point than the first fluorine-containing organic solvent, in the processing container e.g. by supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container.

Abstract: A manufacturing method of a mold, the mold having at its surface a plurality of recessed portions whose two-dimensional size is not less than 10 nm and less than 500 nm when viewed in a direction normal to the surface, the method comprising: (a) providing a mold base (10); (b) partially anodizing the aluminum alloy layer (18), thereby forming a porous alumina layer (14) which has a plurality of minute recessed portions (14p); (c) bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions; (d) detecting a protrusion (210) formed at a surface of the porous alumina layer or the mold base; (e) determining whether or not a height of the detected protrusion is greater than a predetermined height; and (f) if it is determined at step (e) that the height of the protrusion is greater, irradiating the protrusion with laser light such that the height of the protrusion becomes smaller than the predetermined height.