Abstract: In a shadow mask 21, a large number of slots 23 are made in a mask body 22 in the horizontal direction X and in the vertical direction Y. Each slot 23 has a roughly rectangular backside opening 33, a roughly rectangular front-side opening 32, and a through-hole 31 that connects these two openings 33, 32. Of the multiple slots 23 made in the mask body 22, the slots 23 situated at least in those areas of the mask body 22 that are surrounded by a horizontal axis 24 and two diagonal axes 26, 27 that pass through the center point 28 of the mask body 22 have such front-side openings 32 that a pair of the upper and lower short sides 32c, 32d of the rectangular outline of the front-side opening 32 of each slot 23 are inclined, relative to the horizontal axis 24, along the radiate line 61 radiating from the center point 28 of the mask body 22 toward the slot 23.

Abstract: A detecting device includes a sensor support body having a pair of arms, and an optical sensor having a combination of a light emitting unit and a light receiving unit disposed on one and the other of the arms, respectively. A control operation section controls a driving section and, with the arms inserted in a cassette, the sensor support body is moved, thereby performing a scanning operation for scanning the substrate by the optical sensor. The scanning operation is set such that a light beam is related to the substrate while vertically moving at a plurality of scanning positions. The control operation section finds out the presence of absence of the substrate and the position of the front end of the substrate within the cassette on the basis of data obtained from the optical sensor during scanning.

Abstract: In a shadow mask 21, a large number of slots 23 are made in a mask body 22 in the horizontal direction X and in the vertical direction Y. Each slot 23 has a roughly rectangular backside opening 33, a roughly rectangular front-side opening 32, and a through-hole 31 that connects these two openings 33, 32. Of the multiple slots 23 made in the mask body 22, the slots 23 situated at least in those areas of the mask body 22 that are surrounded by a horizontal axis 24 and two diagonal axes 26, 27 that pass through the center point 28 of the mask body 22 have such front-side openings 32 that a pair of the upper and lower short sides 32c, 32d of the rectangular outline of the front-side opening 32 of each slot 23 are inclined, relative to the horizontal axis 24, along the radiate line 61 radiating from the center point 28 of the mask body 22 toward the slot 23.

Abstract: A camera apparatus is disclosed, including a connector, an image capturing section, and a communication section. The connector is detachably fit to an elongated opening portion of a duct member in which a pair of elongated conductors are disposed along the elongated opening portion. The connector has a pair of terminals that are brought into contact with the pair of conductors. The image capturing section is held by the connector and captures an image of an object and obtains video data. The communication section is held by the connector and wirelessly transmits the video data obtained by the image capturing section. A power supply is connected to the pair of conductors of the duct member. When the connector is fit to the opening portion, the pair of terminals are brought into contact with the pair of conductors and power is supplied to the image capturing section and the communication section.

Abstract: A detecting device includes a sensor support body having a pair of arms, and an optical sensor having a combination of a light emitting unit and a light receiving unit disposed on one and the other of the arms, respectively. A control operation section controls a driving section and, with the arms inserted in a cassette, the sensor support body is moved, thereby performing a scanning operation for scanning the substrate by the optical sensor. The scanning operation is set such that a light beam is related to the substrate while vertically moving at a plurality of scanning positions. The control operation section finds out the presence of absence of the substrate and the position of the front end of the substrate within the cassette on the basis of data obtained from the optical sensor during scanning.

Abstract: A vacuum processing device includes a driven body 122 provided inside a vacuum processing chamber 104, a driving means 126 provided outside the vacuum processing chamber 104 and a drive shaft 124 connecting the driven body 122 to the driving means 126. A first annular body 152 is secured to the drive shaft 124 and a second annular body 150 is rotatably supported by the first annular body 152. A bellows 148 that airtightly seals the periphery of the drive shaft 124 is provided so as to connect the second annular body 150 with the inner wall of the vacuum processing chamber 104. In this structure, the bellows 148 is allowed to move as one body with the drive shaft 124 during vertical motion of the drive shaft 124 but is made to stay in place during rotational motion of the drive shaft 124. Thus, the drive shaft, which engages in vertical motion and rotational motion, is airtightly sealed by the bellows.

Abstract: An image pickup system that is small in scale, handy to maneuver, easy to operate and advanced in editing capabilities is disclosed. A commander device is used both as a remote commander and as a microphone in operating a video camera for image pickup. Wearing a headset on the head, a user looks at images appearing on a headset display to monitor and verify recorded images without recourse to a view finder of the video camera. Functions of the components making up the system are changed by operation of a mode switch attached to the video camera.

Abstract: An image pickup system that is small in scale, handy to maneuver, easy to operate and advanced in editing capabilities is disclosed. A commander device is used both as a remote commander and as a microphone in operating a video camera for image pickup. Wearing a headset on the head, a user looks at images appearing on a headset display to monitor and verify recorded images without recourse to a view finder of the video camera. Functions of the components making up the system are changed by operation of a mode switch attached to the video camera.

Abstract: An image pickup system that is small in scale, handy to maneuver, easy to operate and advanced in editing capabilities is disclosed. A commander device is used both as a remote commander and as a microphone in operating a video camera for image pickup. Wearing a headset on the head, a user looks at images appearing on a headset display to monitor and verify recorded images without recourse to a view finder of the video came. Function of the components making up the system are changed by operation of a mode switch attached to the video camera.

Abstract: An image pickup system that is small in scale, handy to maneuver, easy to operate and advanced in editing capabilities is disclosed. A commander device is used both as a remote commander and as a microphone in operating a video camera for image pickup. Wearing a headset on the head, a user looks at images appearing on a headset display to monitor and verify recorded images without recourse to a view finder of the video camera. Functions of the components making up the system are changed by operation of a mode switch attached to the video camera.

Abstract: An apparatus for detaching/attaching a lid of a wafer carrier includes a driving section for rotating a key member. The driving section includes a moving member horizontally movable by a driving source and a link mechanism to convert motion of the moving member into rotation of the key member. When a lock mechanism is to be locked, the driving section rotates the key member, which engages with an engaging member of the lock mechanism, to exceed a set angle by an extra angle, and then to return by the extra angle.

Abstract: A gate valve (20) for a semiconductor processing system includes a base frame (28) configured movable along a guide (26) to move toward and away from a valve seat (22), which surrounds an opening portion (14). A first stopper (56) is disposed at the upper end of the guide (26), for defining the movement limit of the base frame (28) on the valve seat (22) side. A swing frame (34) is rotatably attached to the base frame (28), and has an upper end connected to a valve plug (24). The swing frame (34) is connected to the base frame (28) by a link mechanism (36), which can bend and stretch while flexing an intermediate portion, and by a spring and damper member (46). The intermediate portion of the link mechanism (36) has a mediation member (38) connected to a reciprocation rod (54) of an air actuator (52).