Abstract: A resist resin composition includes 100 parts by weight of a copolymer represented by Formula 3 below; 0.5 to 1.5 parts by weight of a photoacid generator and 700 to 1,500 parts by weight of a solvent: wherein R1, R2, and R3 are each independently a C1-30 alkyl group or a C3-30 cycloalkyl group that has or does not have hydrogen, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group, or an aldehyde group, R4, R5, and R6 are each independently hydrogen or a methyl group, and l, m, n, and o each independently refer to the number of repeating units in a main backbone and satisfy the conditions: l+m+n+o=1, 0?l/(l+m+n+o)<0.4, 0<m/(l+m+n+o)<0.6, 0?n/(l+m+n+o)<0.6, and 0<o/(l+m+n+o)<0.4.

Abstract: A sulfonium compound represented by formula (1), a photo-acid generator, and a method for producing a sulfonium compound are provided: wherein X represents an electron-donating group; R1 and R2 each represent an alkyl group, a cycloalkyl group, or the like; R3 and R4 each represent an arylene group or a heteroarylene group; R5 and R6 each represent an alkyl group, a cycloalkyl group, or the like; and A? and B? are anions that are different from each other. The sulfonium compound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.

Abstract: A compound represented by the following formula (1) is provided: wherein R1 represents a hydrogen atom, a trifluoromethyl group, an alkyl group, or an alkoxy group; and A represents a group represented by the following formula (2) or formula (3): wherein R2, R3, R4, R5 and R6 each independently represent a substituted or unsubstituted alkyl group, a substituted or unsubstituted allyl group, a substituted or unsubstituted perfluoroalkyl group, a substituted or unsubstituted benzyl group, or a substituted or unsubstituted aryl group; and two or more of R2, R3 and R4 may be linked to each other to form a saturated or unsaturated carbon ring or a saturated or unsaturated heterocyclic ring. The chemically amplified resist composition comprising a polymer compound which is produced from the compound of formula 1 according to the present invention provides a chemically amplified resist sensitive to far-ultraviolet radiation, which is represented by KrF excimer laser or ArF excimer laser.

Abstract: An electronic device and a method for providing an User Interface (UI) are disclosed. The method for providing a User Interface (UI) in an electronic device according to the present invention, the method may includes receiving a request for provision of the UI, collecting information for configuring the requested UI, classifying the collected information according to a first criterion so as to generate a plurality of pages, hierarchizing the generated pages and arranging the layers according to a second criterion so as to form a multilayer UI and providing the formed multilayer UI as the requested UI.

Abstract: Provided are a process monitoring apparatus and method. The process monitoring apparatus includes a process chamber in which a process is performed, a probe assembly disposed on the process chamber, and comprising a probe electrode, a plasma generator generating plasma around the probe assembly, and a drive processor applying an alternating current (AC) voltage having at least 2 fundamental frequencies to the probe assembly, and extracting process monitoring parameters.

Abstract: The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

Abstract: The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.

Abstract: The present invention relates to an apparatus for measuring pressure inside a vessel using a magnetostrictive acoustic transducer. The apparatus includes a magnetostrictive acoustic transducer, including an exciting coil unit wound on a first magnetization yoke disposed on an outer position of a vessel, a receiving coil unit wound on the first magnetization yoke, and a vibration unit disposed on an inner position of the vessel in which the first magnetization yoke is installed; a control unit for supplying a predetermined excitation current signal to the exciting coil unit; and a pressure measuring unit for measuring an internal pressure of the vessel based on an ultrasonic wave signal received by the receiving coil unit and an excitation current signal into the exciting coil unit.

Abstract: Disclosed are a photoacid generator, a copolymer, a chemically amplified resist composition, and a method of forming a pattern using the chemically amplified resist composition. The photoacid is connected with a main chain of the copolymer, whereby the photoacid is equally dispersed within a resist layer, and characteristics of line edge roughness of a resist pattern is improved.

Abstract: The present invention relates to an apparatus for measuring pressure inside a predetermined vessel based on the principle that the transmitting efficiency of ultrasonic waves is changed by acoustic impedance variation according to an internal pressure. The apparatus includes an ultrasound exciting unit 20 disposed inside the vessel 10 and generating predetermined ultrasonic waves, an ultrasound receiving unit 30 disposed inside the vessel 10 and placed on the same axis line as that of the ultrasound exciting unit 20, a control unit 70 for controlling a frequency and a waveform of the excitation signal transmitted into the ultrasound exciting unit 20, and a pressure measuring unit 80 for measuring an internal pressure of the vessel 10 based on an ultrasonic signal received by the ultrasound receiving unit 30 and the excitation signal transmitted into the ultrasound exciting unit 20.

Abstract: The invention provides a sky wave receiving antenna which includes a receiving element having a radiator and a plurality of directors arranged in parallel on a horizontal support boom with a constant interval in a alternatively crossed direction, a base and a vertical direction adjustor rotationally connected at its one end to the base with a use of a first joint. The receiving antenna further includes a second joint connected to the other end of the vertical direction adjustor and connected to the receiving element so as to obtain a horizontal direction adjustment of the receiving element. The receiving antenna of the invention allows the adjustment of the receiving element to be made in both vertical and horizontal directions in order to enhance the receive directivity.

Abstract: A compound represented by the following formula (1) is provided: wherein R1 represents a hydrogen atom, a trifluoromethyl group, an alkyl group, or an alkoxy group; and A represents a group represented by the following formula (2) or formula (3): wherein R2, R3, R4, R5 and R6 each independently represent a substituted or unsubstituted alkyl group, a substituted or unsubstituted allyl group, a substituted or unsubstituted perfluoroalkyl group, a substituted or unsubstituted benzyl group, or a substituted or unsubstituted aryl group; and two or more of R2, R3 and R4 may be linked to each other to form a saturated or unsaturated carbon ring or a saturated or unsaturated heterocyclic ring. The chemically amplified resist composition comprising a polymer compound which is produced from the compound of formula 1 according to the present invention provides a chemically amplified resist sensitive to far-ultraviolet radiation, which is represented by KrF excimer laser or ArF excimer laser.

Abstract: The apparatus for measuring pressure inside a vessel using acoustic impedance matching layers may include an ultrasound exciting unit attached to the outer surface of the vessel wall that generates ultrasonic waves inside of the vessel. A first acoustic impedance matching layer attached to the inner surface of the vessel wall increases the transmitting efficiency of the ultrasonic waves. An ultrasound receiving unit attached to the outer surface of the vessel wall receives an ultrasonic signal traveling inside the vessel. A second acoustic impedance matching layer attached to the inner surface of the vessel wall increases the transmitting efficiency of the ultrasonic waves. A control unit connected to the ultrasound exciting unit controls the excitation signal transmitted into the ultrasound exciting unit. A pressure measuring unit connected to the control unit measures an internal pressure of the vessel based on the excitation signal and the received ultrasonic waves.

Abstract: The present invention relates to an apparatus for measuring pressure inside a predetermined vessel based on the principle that the transmitting efficiency of ultrasonic waves is changed by acoustic impedance variation according to an internal pressure. The apparatus includes an ultrasound exciting unit 20 disposed inside the vessel 10 and generating predetermined ultrasonic waves, an ultrasound receiving unit 30 disposed inside the vessel 10 and placed on the same axis line as that of the ultrasound exciting unit 20, a control unit 70 for controlling a frequency and a waveform of the excitation signal transmitted into the ultrasound exciting unit 20, and a pressure measuring unit 80 for measuring an internal pressure of the vessel 10 based on an ultrasonic signal received by the ultrasound receiving unit 30 and the excitation signal transmitted into the ultrasound exciting unit 20.

Abstract: The present invention relates to an apparatus for measuring pressure inside a vessel using a magnetostrictive acoustic transducer. The apparatus includes a magnetostrictive acoustic transducer, including an exciting coil unit wound on a first magnetization yoke disposed on an outer position of a vessel, a receiving coil unit wound on the first magnetization yoke, and a vibration unit disposed on an inner position of the vessel in which the first magnetization yoke is installed; a control unit for supplying a predetermined excitation current signal to the exciting coil unit; and a pressure measuring unit for measuring an internal pressure of the vessel based on an ultrasonic wave signal received by the receiving coil unit and an excitation current signal into the exciting coil unit.

Abstract: The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.

Abstract: An apparatus and method for in-situ calibration of a vacuum gauge by absolute method and comparison method, which can carry out absolute calibration using a static type standard for measuring pressures of vacuum chambers by expanding and moving gas between four vacuum chambers of different volumes in order, and comparison calibration of vacuum gauges in an in-situ state without movement of the vacuum gauges according to a method for controlling gas flow through an orifice using a calibrated standard vacuum gauge. Thus, the absolute calibration and the comparative calibration of the vacuum gauges which have been separately carried out by different apparatuses till now can be carried out by just one apparatus, whereby economical efficiency and convenience in calibration of vacuum gauges are maximized.

Abstract: The present invention relates to a spectroscopy analyzer for real-time diagnostics of process, and more particularly, to a spectroscopy analyzer for real-time diagnostics of process, in which a beam is injected to a reaction byproduct or a reactant and then an output beam is measured, thereby performing quantitative and qualitative analysis of the reaction byproduct or the reactant.

Abstract: Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.

Abstract: A method for removing noise of a gate signal that is outputted from a gate driving circuit including a plurality of stages, the method includes electrically connecting two terminals of two adjacent stages that have noise components opposite in phase to each other during a first period, and electrically disconnecting the two terminals of the two adjacent stages that have the noise components opposite in phase to each other during a second period.