Abstract: Internal combustion engine and method with compression and expansion chambers of variable volume, a combustion chamber, a variable intake valve for controlling air intake to the compression chamber, a variable outlet valve for controlling communication between the compression chamber and the combustion chamber, means for introducing fuel into the combustion chamber to form a mixture of fuel and air which burns and expands in the combustion chamber, a variable inlet valve for controlling communication between the combustion chamber and the expansion chamber, a variable exhaust valve for controlling exhaust flow from the expansion chamber, means for monitoring temperature and pressure conditions, and a computer responsive to the temperature and pressure conditions for controlling opening and closing of the valves and introduction of fuel into to the combustion chamber to optimize engine efficiency over a wide range of engine load conditions The relative volumes of the compression and expansion chambers and the

Abstract: Rotary valve system for controlling communication with a port in an internal combustion engine which, in one disclosed embodiment, has a crankshaft, compression and expansion pistons connected to the crankshaft for reciprocating movement within compression and expansion chambers, a combustion chamber in which air from the compression chamber is combined with fuel and burned to produce an increased gas volume.

Abstract: Constant pressure internal combustion engine having an elongated combustion chamber which in some embodiments is folded back upon itself and has a rough, twisting interior side wall, a fuel inlet for introducing fuel into the chamber, a compression chamber in communication with the combustion chamber, means for varying the volume of the compression chamber and combustion chamber to form a mixture of fuel and air that burns as it travels through the chamber and is further mixed by the rough, twisting side wall of the chamber, an expansion chamber in communication with the combustion chamber, and an output member in the expansion chamber which is driven by pressure produced by the burning mixture, with the means for varying the volume of the compression chamber and the output member in the expansion chamber being connected together for movement in concert such that the pressure remains substantially constant within the combustion chamber.

Abstract: Internal combustion engine and method with compression and expansion chambers of variable volume, a combustion chamber, a variable intake valve for controlling air intake to the compression chamber, a variable outlet valve for controlling communication between the compression chamber and the combustion chamber, means for introducing fuel into the combustion chamber to form a mixture of fuel and air which burns and expands in the combustion chamber, a variable inlet valve for controlling communication between the combustion chamber and the expansion chamber, a variable exhaust valve for controlling exhaust flow from the expansion chamber, means for monitoring temperature and pressure conditions, and a computer responsive to the temperature and pressure conditions for controlling opening and closing of the valves and introduction of fuel into to the combustion chamber to optimize engine efficiency over a wide range of engine load conditions The relative volumes of the compression and expansion chambers and the

Abstract: Constant pressure internal combustion engine having an elongated combustion chamber which in some embodiments is folded back upon itself and has a rough, twisting interior side wall, a fuel inlet for introducing fuel into the chamber, a compression chamber in communication with the combustion chamber, means for varying the volume of the compression chamber and combustion chamber to form a mixture of fuel and air that burns as it travels through the chamber and is further mixed by the rough, twisting side wall of the chamber, an expansion chamber in communication with the combustion chamber, and an output member in the expansion chamber which is driven by pressure produced by the burning mixture, with the means for varying the volume of the compression chamber and the output member in the expansion chamber being connected together for movement in concert such that the pressure remains substantially constant within the combustion chamber.

Abstract: Constant pressure internal combustion engine having an elongated combustion chamber which in some embodiments is folded back upon itself and has a rough, twisting interior side wall, a fuel inlet for introducing fuel into the chamber, a compression chamber in communication with the combustion chamber, means for varying the volume of the compression chamber and combustion chamber to form a mixture of fuel and air that burns as it travels through the chamber and is further mixed by the rough, twisting side wall of the chamber, an expansion chamber in communication with the combustion chamber, and an output member in the expansion chamber which is driven by pressure produced by the burning mixture, with the means for varying the volume of the compression chamber and the output member in the expansion chamber being connected together for movement in concert such that the pressure remains substantially constant within the combustion chamber.

Abstract: Internal combustion engine and method with compression and expansion chambers of variable volume, a combustion chamber, a variable intake valve for controlling air intake to the compression chamber, a variable outlet valve for controlling communication between the compression chamber and the combustion chamber, means for introducing fuel into the combustion chamber to form a mixture of fuel and air which burns and expands in the combustion chamber, a variable inlet valve for controlling communication between the combustion chamber and the expansion chamber, a variable exhaust valve for controlling exhaust flow from the expansion chamber, means for monitoring temperature and pressure conditions, and a computer responsive to the temperature and pressure conditions for controlling opening and closing of the valves and introduction of fuel into to the combustion chamber to optimize engine efficiency over a wide range of engine load conditions The relative volumes of the compression and expansion chambers and the

Abstract: Constant pressure internal combustion engine having an elongated combustion chamber which in some embodiments is folded back upon itself and has a rough, twisting interior side wall, a fuel inlet for introducing fuel into the chamber, a compression chamber in communication with the combustion chamber, means for varying the volume of the compression chamber and combustion chamber to form a mixture of fuel and air that burns as it travels through the chamber and is further mixed by the rough, twisting side wall of the chamber, an expansion chamber in communication with the combustion chamber, and an output member in the expansion chamber which is driven by pressure produced by the burning mixture, with the means for varying the volume of the compression chamber and the output member in the expansion chamber being connected together for movement in concert such that the pressure remains substantially constant within the combustion chamber.

Abstract: Rotary valve system for controlling communication with a port in an internal combustion engine which, in one disclosed embodiment, has a crankshaft, compression and expansion pistons connected to the crankshaft for reciprocating movement within compression and expansion chambers, a combustion chamber in which air from the compression chamber is combined with fuel and burned to produce an increased gas volume.

Abstract: Constant pressure internal combustion engine having an elongated combustion chamber which in some embodiments is folded back upon itself and has a rough, twisting interior side wall, a fuel inlet for introducing fuel into the chamber, a compression chamber in communication with the combustion chamber, means for varying the volume of the compression chamber and combustion chamber to form a mixture of fuel and air that burns as it travels through the chamber and is further mixed by the rough, twisting side wall of the chamber, an expansion chamber in communication with the combustion chamber, and an output member in the expansion chamber which is driven by pressure produced by the burning mixture, with the means for varying the volume of the compression chamber and the output member in the expansion chamber being connected together for movement in concert such that the pressure remains substantially constant within the combustion chamber.

Abstract: Internal combustion engine and method with compression and expansion chambers of variable volume, a combustion chamber, a variable intake valve for controlling air intake to the compression chamber, a variable outlet valve for controlling communication between the compression chamber and the combustion chamber, means for introducing fuel into the combustion chamber to form a mixture of fuel and air which burns and expands in the combustion chamber, a variable inlet valve for controlling communication between the combustion chamber and the expansion chamber, a variable exhaust valve for controlling exhaust flow from the expansion chamber, means for monitoring temperature and pressure conditions, and a computer responsive to the temperature and pressure conditions for controlling opening and closing of the valves and introduction of fuel into to the combustion chamber to optimize engine efficiency over a wide range of engine load conditions.

Abstract: Apparatus and process for etching semiconductor wafers and the like in which a substrate is supported by a pedestal within a chamber, and at least one gas capable of etching the substrate or a film material on the substrate is introduced into the chamber through a segmented gas injection element which is separated from the substrate by a distance approximately less than its size from which the distribution of the flow or mixture of gas can be altered spatially proximate to the substrate in a controlled and variable way, for each wafer or substrate if desired, by having a varying amount or mixture of gas flow to some or all of the segments such as to cause the etching rate distribution to vary across the substrate.

Abstract: The method and apparatus for playing a dice game of the present invention includes a casino table covered with a felt, the felt having the necessary game areas printed on it, seven standard six-sided dice and a dice cup, wherein one of the seven standard six-sided dice is the dealer die, which is a different color than the other six. The method and apparatus further includes utilizing the apparatus by rolling the dealer die to determine the dealer's number and then wagering on which of the remaining numbers from 1-6 is rolled again or before the end of six rolls. The method and apparatus further includes a “double hit” option of wagering if a player wins in the first round.

Abstract: Plasma systems and methods for supplying activation energy to remove cross-linked photoresist crust using ion bombardment of the substrate from a plasma, at reduced temperature, achieved in part by operating the processing chamber at low pressures. Reduced temperatures prevent “popping” of the photoresist which can cause particulate contamination. The gas flow may comprise a principal gas, an inert diluent gas, and an additive gas. Principal gases for HDIS may comprise oxygen, hydrogen, and water vapor at pressures less than about 200 mTorr and a bias may be applied to the substrate support. When low-k dielectric material is present on vertical surfaces, reduced ion bombardment on vertical surfaces may be used, and a protective layer may be deposited on those surfaces.

Abstract: Plasma reactor and process for very fast etching of organic materials in which a workpiece is placed on a pedestal in a chamber, gas is exhausted from the chamber, an oxidizing gas is introduced into the chamber through a showerhead electrode which is spaced from the pedestal by a distance on the order of 1.0 to 1.5 cm, RF power is applied to the pedestal and/or the showerhead electrode, and pressure within the chamber is maintained at a level on the order of 3 to 15 Torr while an organic material is removed from the workpiece.

Abstract: The invention described in this disclosure is an apparatus and method for clamping semiconductor wafers or other substrates or workpieces during etching, CVD, or surface modification processes. The purpose of the invention is to achieve improved heat transfer during processing between the wafer/substrate and a temperature controlled pedestal used for supporting it in the process chamber. The typical level of process heat put into the wafer during plasma-based etching or deposition processes will be up to about 10 Watts per centimeter squared while the maximum acceptable temperature differential between wafer/substrate and pedestal is less than about 100 Celsius. In such low gas pressure environments typical for plasma-based processes, the heat removal from the wafer/substrate by gaseous conduction may be inadequate to meet requirements.

Abstract: Plasma systems and methods for supplying activation energy to remove cross-linked photoresist crust using ion bombardment of the substrate from a plasma, at reduced temperature, achieved in part by operating the processing chamber at low pressures. Reduced temperatures prevent “popping” of the photoresist which can cause particulate contamination. The gas flow may comprise a principal gas, an inert diluent gas, and an additive gas. Principal gases for HDIS may comprise oxygen, hydrogen, and water vapor at pressures less than about 200 mTorr and a bias may be applied to the substrate support. When low-k dielectric material is present on vertical surfaces, reduced ion bombardment on vertical surfaces may be used, and a protective layer may be deposited on those surfaces.

Abstract: This invention consists of an apparatus and method of permitting automatic, in-situ cleaning of the process chamber and condensation trap of the vacuum pumping system used for etching Gallium Arsenide and other materials producing toxic and condensable etching by-products. This automated cleaning greatly reduces the danger of human exposure to the toxic materials and by-products of the etching. There are two key features. First, the process chamber and condensation trap are designed so that all components are vacuum-sealed to each other (or may be purged with inert gas) such that during wafer processing gas phase species from the process environment cannot condense in narrow spaces between components in the chamber. The surfaces of all parts that come in contact with, and may react to, enchant byproducts, process gases, or any cleaning liquid, are covered with nickel, or Teflon or other highly chemically inert coating.

Abstract: Plasma reactor and process for very fast etching of silicon or epoxy resins in which a wafer is placed on a pedestal in a chamber, gas is exhausted from the chamber through a pressure regulation valve, a gas containing fluorine and/or oxygen is introduced into chamber through a showerhead electrode which is positioned substantially parallel to and less than 6 mm from the pedestal, RF power is applied to the pedestal and/or the showerhead electrode, and the pressure inside the chamber is maintained at a level greater than 1.5 Torr.

Abstract: A more uniform plasma process is implemented for treating a treatment object using an inductively coupled plasma source which produces an asymmetric plasma density pattern at the treatment surface using a slotted electrostatic shield having uniformly spaced-apart slots. The slotted electrostatic shield is modified in a way which compensates for the asymmetric plasma density pattern to provide a modified plasma density pattern at the treatment surface. A more uniform radial plasma process is described in which an electrostatic shield arrangement is configured to replace a given electrostatic shield in a way which provides for producing a modified radial variation characteristic across the treatment surface. The inductively coupled plasma source defines an axis of symmetry and the electrostatic shield arrangement is configured to include a shape that extends through a range of radii relative to the axis of symmetry.