Patents by Inventor Liang Cheng

Liang Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11872608
    Abstract: A method of removing sludge from a drain pipe used for cleaning a drain pipe comprises a piling step, a platform setting step, a drilling path planning step, a coil deploying step, a conveying bracket lifting step, a guiding step, a drilling step, and a cleaning step. In the piling step, a plurality of supporting columns are provided around the opening of the drain pipe. In the platform setting step, a work platform is provided on the plurality of supporting columns. In the drilling path planning step, a drilling path is planned. In the coil deploying step, an induction coil group is placed above the drain pipe. In the conveying bracket lifting step, a conveying bracket is hung by lifting equipment so that the conveying bracket is aligned with the opening of the drain pipe. In the guiding step, the drill bit is guided to the opening of the drain pipe using the conveying bracket. In the drilling step, the drill bit is controlled to drill into the clogged bulk in the drain pipe.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: January 16, 2024
    Inventors: Kuo-Chung Cheng, Mei-Liang Cheng
  • Patent number: 11871581
    Abstract: A ferroelectric memory cell (FeRAM) is disclosed that includes an active device (e.g., a transistor) and a passive device (e.g., a ferroelectric capacitor) integrated in a substrate. The transistor and its gate contacts are formed on a front side of the substrate. A carrier wafer can be bonded to the active device to allow the active device to be inverted so that the passive device and associated contacts can be electrically coupled from a back side of the substrate.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: January 9, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, Huang-Lin Chao
  • Publication number: 20240006479
    Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes a plurality of nanostructures surrounded by a gate structure, and a source/drain (S/D) structure adjacent to the gate structure. The semiconductor structure includes a first S/D contact structure formed over a first side of the S/D structure, and a second S/D contact structure formed over a second side of the S/D structure. The second S/D contact structure includes a conductive layer. The semiconductor structure includes a dielectric layer adjacent to the second contact structure, and the dielectric layer is doped with germanium (Ge), and the dielectric layer is in direct contact with the conductive layer.
    Type: Application
    Filed: June 29, 2022
    Publication date: January 4, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Li-Zhen YU, Chung-Liang CHENG, Wen-Ting LAN, Lin-Yu HUANG
  • Publication number: 20240006311
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate and a second substrate. The first substrate includes a first semiconductor layer, including a first trench isolation that extends through a portion of the first substrate layer; and a first interconnect structure, disposed over the first semiconductor layer. The second substrate includes a second semiconductor layer, including a plurality of semiconductor islands and surrounded by at least a second isolation penetrating the second semiconductor layer; a second interconnect structure, disposed over the second substrate layer and bonded to the first interconnect structure; and a dielectric layer, disposed over the second semiconductor layer opposite to the second interconnect structure. A method of manufacturing the semiconductor structure is also provided.
    Type: Application
    Filed: July 3, 2022
    Publication date: January 4, 2024
    Inventors: KUAN-LIANG LIU, CHUNG-LIANG CHENG, YEN LIANG WU, CHUNG-YUAN LI, YA CHUN TENG
  • Patent number: 11862681
    Abstract: The structure of a semiconductor device with different gate structures configured to provide ultra-low threshold voltages and a method of fabricating the semiconductor device are disclosed. The method includes forming first and second nanostructured channel regions in first and second nanostructured layers, respectively, and forming first and second gate-all-around (GAA) structures surrounding the first and second nanostructured channel regions, respectively. The forming the first and second GAA structures includes selectively forming an Al-based n-type work function metal layer and a Si-based capping layer on the first nanostructured channel regions, depositing a bi-layer of Al-free p-type work function metal layers on the first and second nanostructured channel regions, depositing a fluorine blocking layer on the bi-layer of Al-free p-type work function layers, and depositing a gate metal fill layer on the fluorine blocking layer.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, Chun-I Wu, Huang-Lin Chao
  • Publication number: 20230420297
    Abstract: A method is provided for forming a metal contact plug. In one step, a substrate, which is an Si substrate or an SiO2 substrate, is etched to form a contact hole. In one step, a dielectric liner layer is formed on a sidewall of the contact hole. In one step, the metal contact plug that is in contact with the dielectric liner layer is formed in the contact hole. In one step, an implantation process is performed on the substrate, so as to implant dopants having an atomic size greater than that of Si into the substrate.
    Type: Application
    Filed: June 23, 2022
    Publication date: December 28, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Liang CHENG, Lin-Yu HUANG, Li-Zhen YU, Huang-Lin CHAO, Pinyen LIN
  • Publication number: 20230420452
    Abstract: Embodiments include a FinFET transistor including an embedded resistor disposed in the fin between the source epitaxial region and the source contact. A control contact may be used to bias the embedded resistor, thereby changing the resistivity of the resistor. Edge gates of the FinFET transistor may be replaced with insulating structures. Multiple ones of the FinFET/embedded resistor combination may be utilized together in a common drain/common source contact design.
    Type: Application
    Filed: June 24, 2022
    Publication date: December 28, 2023
    Inventors: Kai-Qiang Wen, Shih-Fen Huang, Shih-Chun Fu, Chi-Yuan Shih, Feng Yuan, Wan-Lin Tsai, Chung-Liang Cheng
  • Publication number: 20230408385
    Abstract: A testing device for simulating coalbump includes a testing chamber. A first oil cylinder, a second oil cylinder and a third oil cylinder are provided within the testing chamber; each piston rod of each oil cylinder can stretch or retract. A first reaction seat, a second reaction seat and a third reaction seat are arranged opposite to a side of the first piston rod of the first oil cylinder, a side of the second piston rod of the second oil cylinder and a side of the third piston rod of the third oil cylinder respectively. The testing device includes a shear loading unit including a fourth oil cylinder and a fifth oil cylinder located on a same axis, and a side of a fourth piston rod of the fourth oil cylinder and a side of a fifth piston rod of the fifth oil cylinder are arranged opposite to each other.
    Type: Application
    Filed: December 19, 2022
    Publication date: December 21, 2023
    Inventors: Shoujian Peng, Jiang Xu, Qingfeng Xu, Liang Cheng, Li Jia, Bin Zhou, Yi'an Chen, Feng Jiao, Yan Yang, Hailin Yang, Qingqing Gan, Xiaomei Wang
  • Publication number: 20230411391
    Abstract: A complementary metal oxide semiconductor (CMOS) device includes a transistor of a first type formed over a first substrate, and a transistor of a second type formed over a second substrate. The CMOS device is formed when the transistor of the first type formed on the first substrate is bonded to the transistor of the second type formed over the second substrate.
    Type: Application
    Filed: August 7, 2023
    Publication date: December 21, 2023
    Inventors: Chung-Liang CHENG, Ying-Hsun CHEN
  • Publication number: 20230411141
    Abstract: A method for treating a semiconductor structure includes: forming the semiconductor structure which includes a carrier substrate, a device substrate, a semiconductor device formed on the device substrate, and a bonding layer formed to bond the semiconductor device with the carrier substrate, the device substrate having an upper surface which is faced upwardly, and which is opposite to the semiconductor device; and directing a chemical fluid to impinge the upper surface of the device substrate so as to remove an edge portion of the device substrate.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kenichi SANO, Chung-Liang CHENG, De-Yang CHIOU, Kuan-Liang LIU, Pinyen LIN
  • Publication number: 20230413546
    Abstract: A method for manufacturing a flash memory device is provided. The method includes forming a plurality of isolation structures in a substrate, an opening is formed between two adjacent isolation structures, and conformally depositing a first silicon seed layer on the substrate and the isolation structures and performing a first cycle. The first cycle includes performing a first deposition process to conformally form a first amorphous silicon layer on the first silicon seed layer. A first recess is defined by the first amorphous silicon layer. A first in-situ chlorine etching process is performed to widen the caliber of the first recess. The method includes performing a first thermal annealing process to transform the first amorphous silicon layer into a first polysilicon layer. The method includes performing an amorphous silicon deposition process to form an amorphous silicon layer on the first polysilicon layer and completely fill the opening.
    Type: Application
    Filed: May 25, 2023
    Publication date: December 21, 2023
    Inventors: Chih-Jung NI, Min-Liang CHENG
  • Publication number: 20230411520
    Abstract: A semiconductor structure includes a plurality of semiconductor devices, each of which includes at least one channel layer, at least one interfacial layer, a gate dielectric layer, a gate electrode, and dipole elements. The at least one interfacial layer is disposed on the at least one channel layer. The gate dielectric layer is disposed over the at least one interfacial layer such that the at least one channel layer is separated from the gate dielectric layer through the at least one interfacial layer. The gate electrode is disposed on the gate dielectric layer. The dipole elements are present in the interfacial layer of at least one of the semiconductor devices in a predetermined amount such that the at least one of the semiconductor devices has a tunability of threshold voltage from that of the other of the semiconductor devices. Methods for manufacturing the semiconductor structure are also disclosed.
    Type: Application
    Filed: May 23, 2022
    Publication date: December 21, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shen-Yang LEE, Chung-Liang CHENG, Hsiang-Pi CHANG, Chun-I WU, Huang-Lin CHAO, Pinyen LIN
  • Publication number: 20230402524
    Abstract: A semiconductor device includes a multi-silicide structure comprising at least two conformal silicide layers. The multi-silicide structure may include a first conformal silicide layer on a source/drain, a second conformal silicide layer on the first conformal silicide layer, and a capping layer over the second conformal silicide layer. The semiconductor device includes a contact structure on the multi-silicide structure. The semiconductor device includes a dielectric material around the contact structure. In some implementations, a controller may determine etch process parameters to be used by an etch tool to perform an iteration of an atomic layer etch (ALE) process on the semiconductor device.
    Type: Application
    Filed: August 10, 2023
    Publication date: December 14, 2023
    Inventor: Chung-Liang CHENG
  • Patent number: 11842927
    Abstract: A semiconductor structure includes a substrate including a first region and a second region, a first channel layer disposed in the first region and a second channel layer disposed in the second region, a first dielectric layer disposed on the first channel layer and a second dielectric layer disposed on the second channel layer, and a first gate electrode disposed on the first dielectric layer and a second gate electrode disposed on the second dielectric layer. The first channel layer in the first region includes Ge compound of a first Ge concentration, the second channel layer in the second region includes Ge compound of a second Ge concentration. The first Ge concentration in the first channel layer is greater than the second Ge concentration in the second channel layer.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: I-Ming Chang, Chung-Liang Cheng, Hsiang-Pi Chang, Hung-Chang Sun, Yao-Sheng Huang, Yu-Wei Lu, Fang-Wei Lee, Ziwei Fang, Huang-Lin Chao
  • Publication number: 20230393093
    Abstract: A semiconductor device includes a substrate, an interconnect, a second transistor, and a sensing film. The substrate includes devices disposed therein. The interconnect is disposed on the substrate and electrically coupled to the devices, where the interconnect includes a plurality of build-up layers and a through hole formed therein. The first transistor is disposed in the interconnect and vertically extends through at least one of the plurality of build-up layers, and the first transistor is electrically coupled to a first device of the devices through the interconnect. The second transistor is disposed in the interconnect and vertically extends through the at least one of the plurality of build-up layers, and the second transistor is electrically coupled to a second device of the devices through the interconnect, where the first transistor and the second transistor are laterally separated from one another through the through hole.
    Type: Application
    Filed: June 2, 2022
    Publication date: December 7, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Lee, Chung-Liang Cheng, Pei-Wen Liu, Ke-Wei Su, Kuan-Lun Cheng
  • Publication number: 20230393092
    Abstract: A semiconductor device includes a substrate, an interconnect, and a sensor. The substrate includes devices therein and has a front side and a rear side opposite to the front side. The interconnect is disposed on the front side and electrically coupled to the devices. The sensor is disposed over the substrate and in the interconnect, and includes a sensing element and a reference element. The sensing element is disposed in a topmost layer of the interconnect and exposed therefrom, where the sensing element is electrically coupled to a first device of the devices through the interconnect. The reference element is disposed in the topmost layer of the interconnect and exposed therefrom, where the reference element is laterally spaced from the sensing element and is electrically coupled to a second device of the devices through the interconnect.
    Type: Application
    Filed: June 2, 2022
    Publication date: December 7, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Lee, Chung-Liang Cheng, Pei-Wen Liu, Ke-Wei Su, Kuan-Lun Cheng
  • Publication number: 20230386915
    Abstract: A method is provided for forming a contact plug by bottom-up metal growth. In one step, a substrate is etched to form a contact hole that exposes a silicon-containing feature in the substrate. In one step, a silicide layer is formed on the silicon-containing feature. In one step, a metal seed layer is formed over the silicide layer. In one step, a metal contact layer is deposited over the metal seed layer to form the contact plug in the contact hole.
    Type: Application
    Filed: May 26, 2022
    Publication date: November 30, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Liang CHENG, Lin-Yu HUANG, Li-Zhen YU, Huang-Lin CHAO, Pinyen LIN
  • Publication number: 20230387081
    Abstract: Some implementations described herein provide a semiconductor structure. The semiconductor structure may include a logic device disposed, at a first side of the logic device, on a carrier wafer of the semiconductor structure. The semiconductor structure may include a dielectric structure disposed on a second side of the logic device, the second side being opposite the first side. The semiconductor structure may include a memory device formed on the dielectric structure.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 30, 2023
    Inventor: Chung-Liang CHENG
  • Publication number: 20230389335
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first and second transistors arranged over a substrate. The first transistor includes first channel structures extending between first and second source/drain regions. A first gate electrode is arranged between the first channel structures, and a first protection layer is arranged over a topmost one of the first channel structures. The second transistor includes second channel structures extending between the second source/drain region and a third source/drain region. A second gate electrode is arranged between the second channel structures, and a second protection layer is arranged over a topmost one of the second channel structures. The integrated chip further includes a first interconnect structure arranged between the substrate and the first and second channel structures, and a contact plug structure coupled to the second source/drain region and arranged above the first and second gate electrodes.
    Type: Application
    Filed: August 9, 2023
    Publication date: November 30, 2023
    Inventors: Kuan-Liang Liu, Sheng-Chau Chen, Chung-Liang Cheng, Chia-Shiung Tsai, Yeong-Jyh Lin, Pinyen Lin, Huang-Lin Chao
  • Publication number: 20230386917
    Abstract: A method includes etching a dielectric layer to form a trench in the dielectric layer, depositing a metal layer extending into the trench, performing a nitridation process on the metal layer to convert a portion of the metal layer into a metal nitride layer, performing an oxidation process on the metal nitride layer to form a metal oxynitride layer, removing the metal oxynitride layer, and filling a metallic material into the trench using a bottom-up deposition process to form a contact plug.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 30, 2023
    Inventors: Yen-Yu Chen, Chung-Liang Cheng