Abstract: An oscillation driver circuit includes a gain control amplifier which causes a vibrator to produce driving vibrations by controlling an oscillation amplitude in an oscillation loop, and a comparator which generates a synchronous detection reference signal based on a signal in the oscillation loop. The comparator has an output current limiting function. The oscillation driver circuit causes the vibrator to produce vibrations using an output from the comparator in a state in which the gain in an oscillation loop formed by the vibrator and the comparator is set to be larger than unity, and then causes the vibrator to produce the driving vibrations by controlling an oscillation amplitude in an oscillation loop formed by the vibrator and the gain control amplifier.

Abstract: An oscillation driver circuit that drives a physical quantity transducer includes a one-input/two-output comparator. The one-input/two-output comparator includes a shared differential section that compares a voltage signal input from a drive current/voltage conversion amplifier circuit with a given voltage, a first output section that receives a signal output from the differential section, variably adjusts a voltage amplitude of the received signal, and outputs the resulting signal, and a second output section that receives the signal output from the differential section, and outputs a synchronous detection reference signal of which the voltage amplitude is fixed.

Abstract: A temperature compensation circuit performing temperature compensation of an analog reference voltage, includes: a first reference voltage generating circuit generating a first voltage of which a voltage level varies depending on a temperature; a second reference voltage generating circuit generating a second voltage of which a voltage level is independent of a temperature and having a circuit configuration that is same as a circuit configuration of the first reference voltage generating circuit; an inverting amplifier having a gain of 1, which inverts and amplifies a voltage difference between the first voltage and the second voltage so as to generate a third voltage; and a differential amplifier amplifying a voltage difference between the third voltage and the first voltage so as to generate a fourth voltage In the temperature compensation circuit, the differential amplifier includes: a first operational amplifier; a first resistor coupled between a first node and a second node that is an inverting input te

Abstract: There is provided an oscillation drive device that forms an oscillation loop with a vibrator for exciting a driving vibration on the vibrator.

Abstract: An oscillation driver device includes a gain control amplifier, an automatic gain control circuit, and a mode setting circuit. When the mode setting circuit has switched a mode from a normal operation mode to a low power consumption mode, the automatic gain control circuit is disabled, and the gain in an oscillation loop that drives the vibrator changes from a state in which the gain in the oscillation loop is controlled to be unity by the automatic gain control circuit to a state in which the gain in the oscillation loop is set to be larger than unity. When the mode setting circuit has switched the mode from the low power consumption mode to the normal operation mode, the automatic gain control circuit resumes operation, and the gain in the oscillation loop changes from the state in which the gain in the oscillation loop is set to be larger than unity to the state in which the gain in the oscillation loop is controlled to be unity by the automatic gain control circuit.

Abstract: A synchronous detection circuit includes: an offset compensation circuit which generates an offset compensation voltage to compensate an offset voltage superposed on a direct current voltage signal; and a temperature compensation circuit which generates a temperature compensation voltage to compensate variation of a direct current reference voltage that depends on a temperature in a signal path of a sensing circuit. In the circuit, the synchronous detection circuit synchronously detects an alternating current signal, the offset compensation voltage and the temperature compensation voltage are respectively superposed on the alternating current signal which is input into the synchronous detection circuit, and the synchronous detection circuit synchronously detects the alternating current signal on which the offset compensation voltage and the temperature compensation voltage have been superposed.

Abstract: Provided are a method of effectively manufacturing an organic EL element with high quality and an apparatus therefor. A surface to be processed of a substrate in an upper electrode forming step is held downward, and the surface to be processed of the substrate in a passivation layer forming step is held upward.

Abstract: A temperature compensation circuit performing temperature compensation of an analog reference voltage, includes: a first reference voltage generating circuit generating a first voltage of which a voltage level varies depending on a temperature; a second reference voltage generating circuit generating a second voltage of which a voltage level is independent of a temperature and having a circuit configuration that is same as a circuit configuration of the first reference voltage generating circuit; an inverting amplifier having a gain of 1, which inverts and amplifies a voltage difference between the first voltage and the second voltage so as to generate a third voltage; and a differential amplifier amplifying a voltage difference between the third voltage and the first voltage so as to generate a fourth voltage In the temperature compensation circuit, the differential amplifier includes: a first operational amplifier; a first resistor coupled between a first node and a second node that is an inverting input te

Abstract: In a plasma processing method, on a back side of a cathode electrode is provided at least one conductor plate d.c. potentially insulated from the cathode electrode and an opposing electrode, and the cathode electrode and the conductor plate are enclosed with a shielding wall such that a ratio of an inter-electrode coupling capacitance provided by the cathode electrode and the opposing electrode to a coupling capacitance provided by the cathode electrode and a bottom surface of the shielding wall on the back side of the conductor plate is not less than a predetermined value. Thereby, a high-quality, high-speed plasma processing is realized.

Abstract: A plasma-processing apparatus having a high frequency power application electrode in which plasma is generated by supplying VHF power to the high frequency power application electrode. The plasma-processing apparatus has an impedance-matching equipment comprising a capacitive element and an inductive element, which are mutually connected in series. The apparatus is arranged so that the capacitive element and the inductive element of the impedance-matching equipment are symmetrical with respect to the center of the high frequency power application electrode.

Abstract: The present invention provides an excellent organic EL device with a glass substrate and a sealing glass sheet which are thinned for weight reduction while avoiding lowering the durability and impact resistance of the device. The organic luminescence device is characterized in that sealing is performed at the space between a face of the sealing glass sheet along the outer edge and a face of the device substrate with a low melting point metal.

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: An oscillation driver circuit includes a current-voltage converter which converts a current value of an oscillation signal in an oscillation loop into a voltage value, and a comparator which outputs a signal corresponding to the result of comparison between the output signal from the current-voltage converter and a given reference signal. The comparator has an output current limiting function. The oscillation driver circuit causes the vibrator to produce driving vibrations based on the output from the comparator.

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: An oscillation driver circuit that drives a physical quantity transducer includes a one-input/two-output comparator. The one-input/two-output comparator includes a shared differential section that compares a voltage signal input from a drive current/voltage conversion amplifier circuit with a given voltage, a first output section that receives a signal output from the differential section, variably adjusts a voltage amplitude of the received signal, and outputs the resulting signal, and a second output section that receives the signal output from the differential section, and outputs a synchronous detection reference signal of which the voltage amplitude is fixed.

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: A driver device that forms an oscillation loop with a vibrator and causes the vibrator to produce driving vibrations includes a current-voltage converter that is provided in the oscillation loop and converts a current that flows through the vibrator into a voltage, and a GCA as a comparator that is provided in the oscillation loop and outputs a signal corresponding to a comparison result between an output from the current-voltage converter and a given voltage. The GCA outputs a first high-level voltage or a low-level voltage during oscillation startup, and outputs a second high-level voltage or the low-level voltage in a steady oscillation state. The first high-level voltage is a voltage higher in potential than the second high-level voltage.

Abstract: An oscillation driver device includes a gain control amplifier, an automatic gain control circuit, and a mode setting circuit. When the mode setting circuit has switched a mode from a normal operation mode to a low power consumption mode, the automatic gain control circuit is disabled, and the gain in an oscillation loop that drives the vibrator changes from a state in which the gain in the oscillation loop is controlled to be unity by the automatic gain control circuit to a state in which the gain in the oscillation loop is set to be larger than unity. When the mode setting circuit has switched the mode from the low power consumption mode to the normal operation mode, the automatic gain control circuit resumes operation, and the gain in the oscillation loop changes from the state in which the gain in the oscillation loop is set to be larger than unity to the state in which the gain in the oscillation loop is controlled to be unity by the automatic gain control circuit.

Abstract: A detection circuit includes a detection terminal to which an alternating current signal from a physical quantity transducer is input, a detection current/voltage conversion amplifier circuit that converts the alternating current signal input through the detection terminal into a voltage signal, an evaluation terminal that supplies an evaluation voltage signal to the detection current/voltage conversion amplifier circuit, an input resistor that has a given resistance ratio with respect to a feedback resistor; and a switch circuit of the detection circuit provided in a signal path that connects the evaluation terminal and an input node of the detection current/voltage conversion amplifier circuit.