Abstract: A light emitting device includes a light-transmissive ceramic substrate, a light emitting element mounted on the ceramic substrate, a wiring arranged inside the ceramic substrate and electrically connected to the light emitting element, a base material faced to the ceramic substrate, and a seal member hermetically sealing a gap between the ceramic substrate and the base material. The light emitting element is arranged in a space surrounded by the ceramic substrate, the base material, and the seal member. The wiring includes a wiring layer extending in a planar direction of the ceramic substrate.

Abstract: A composite green sheet includes a green sheet, and a bulk metal film provided on the green sheet. Examples of the metal forming the metal film may include aluminum, aluminum alloys, copper, copper alloy, or the like.

Abstract: An electrostatic chuck includes a base body, and an electrostatic electrode embedded in the base body. The base body is a ceramic. The electrostatic electrode has TixOy, which is an oxide of titanium, as a main component, and an atomic ratio y/x is less than 1.7.

Abstract: A latent heat storage includes a ceramic part, formed of a polycrystalline material, and including a closed space famed therein, and a metal part provided inside the closed space, and including copper.

Abstract: A latent heat storage includes a ceramic part, formed of a polycrystalline material, and including a closed space famed therein, and a metal part provided inside the closed space, and including aluminum.

Abstract: A light emitting device includes a ceramic substrate, a light emitting element, and a wiring. The light emitting element is formed on an upper surface of the ceramic substrate. The wiring is arranged inside the ceramic substrate and is electrically and directly connected to the light emitting element. The light emitting element includes a structure in which a lower semiconductor layer, an active layer, and an upper semiconductor layer are sequentially stacked.

Abstract: An ultraviolet detection material includes a composite oxide including aluminum, strontium, cerium, lanthanum and manganese, and a glass having a softening point of 900° C. or lower. The ultraviolet detection material is not excited by an electromagnetic wave having a wavelength longer than 310 nm and is excited by an electromagnetic wave having a wavelength equal to or shorter than 310 nm, thereby emitting light having a peak of an emission wavelength in 480 nm or longer and 700 nm or shorter.

Abstract: A lanthanoid element is included in a part of a material of a member for an electrostatic chuck configured to suck a target object by using an electrostatic force. When electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region.

Abstract: A ceramic composition is provided. The ceramic composition includes a corundum phase, and a CeAl11O18 phase. A ratio of an amount of substance of the CeAl11O18 phase with respect to a total amount of substance of the ceramic composition is not lower than 0.5 mol % and not higher than 5 mol %.

Abstract: A substrate detaching apparatus for detaching a substrate attracted to and held onto an attraction surface of an electrostatic chuck includes a moving unit configured to push and move the substrate in a direction parallel to the attraction surface.

Abstract: An electrostatic chuck includes at least one conductor layer; an electrostatic electrode; and a base body in which the electrostatic electrode is embedded, the base body having a first dielectric layer on which the electrostatic electrode is mounted, the base body having a second dielectric layer stacked on the first dielectric layer with covering the electrostatic electrode. The conductor layer is formed on a surface of the first dielectric layer opposite to a surface on which the electrostatic electrode is mounted. The second dielectric layer has a first surface facing the first dielectric layer and a second surface opposite to the first surface, and the second surface is a placement surface on which a suction target is placed. A relative permittivity of the first dielectric layer is lower than a relative permittivity of the second dielectric layer.

Abstract: An ultraviolet detection material includes a composite oxide including aluminum, strontium, cerium, lanthanum and manganese, and an organic polymer. The ultraviolet detection material is not excited by an electromagnetic wave having a wavelength longer than 310 nm and is excited by an electromagnetic wave having a wavelength equal to or shorter than 310 nm, thereby emitting light having a peak of an emission wavelength in 480 nm or longer and 700 nm or shorter.

Abstract: An ultraviolet detection material includes a composite oxide including aluminum, strontium, cerium, lanthanum and manganese, and a glass having a softening point of 900° C. or lower. The ultraviolet detection material is not excited by an electromagnetic wave having a wavelength longer than 310 nm and is excited by an electromagnetic wave having a wavelength equal to or shorter than 310 nm, thereby emitting light having a peak of an emission wavelength in 480 nm or longer and 700 nm or shorter.

Abstract: A ceramic member includes: a ceramic sintered body; and a conductive member of aluminum or an aluminum alloy provided in the sintered body.

Abstract: A composite oxide contains oxides of aluminum, strontium, cerium, lanthanum, and manganese. A light emitting aspect of the composite oxide when the composite oxide is irradiated with a first electromagnetic wave having a wavelength not longer than 300 nm is different from a light emitting aspect of the composite oxide when the composite oxide is irradiated with a second electromagnetic wave having a wavelength longer than 300 nm.

Abstract: A lanthanoid element is included in a part of a material of a member for an electrostatic chuck configured to suck a target object by using an electrostatic force. When electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region.

Abstract: A light emitting device includes a ceramic substrate, a light emitting element, and a wiring. The light emitting element is formed on an upper surface of the ceramic substrate. The wiring is arranged inside the ceramic substrate and is electrically and directly connected to the light emitting element. The light emitting element includes a structure in which a lower semiconductor layer, an active layer, and an upper semiconductor layer are sequentially stacked.

Abstract: A light emitting device includes a light-transmissive ceramic substrate, a light emitting element mounted on the ceramic substrate, a wiring arranged inside the ceramic substrate and electrically connected to the light emitting element, a base material faced to the ceramic substrate, and a seal member hermetically sealing a gap between the ceramic substrate and the base material. The light emitting element is arranged in a space surrounded by the ceramic substrate, the base material, and the seal member. The wiring includes a wiring layer extending in a planar direction of the ceramic substrate.

Abstract: A sintered body includes a ceramic substrate including sintered oxide particles, a through-hole formed in the ceramic substrate such that the side surfaces of the oxide particles exposed from an inner wall of the through-hole form a flat surface, and a porous body disposed in the through-hole, the porous body including spherical oxide ceramic particles and a mixed oxide configured to bind the spherical oxide ceramic particles.

Abstract: An electrostatic chuck includes at least one conductor layer; an electrostatic electrode; and a base body in which the electrostatic electrode is embedded, the base body having a first dielectric layer on which the electrostatic electrode is mounted, the base body having a second dielectric layer stacked on the first dielectric layer with covering the electrostatic electrode. The conductor layer is formed on a surface of the first dielectric layer opposite to a surface on which the electrostatic electrode is mounted. The second dielectric layer has a first surface facing the first dielectric layer and a second surface opposite to the first surface, and the second surface is a placement surface on which a suction target is placed. A relative permittivity of the first dielectric layer is lower than a relative permittivity of the second dielectric layer.