Abstract: A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.

Abstract: A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to move a valve element holder 5 to an opening position against bias force of a compression coil spring 77, and an working member 74 in manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holder 5 downward when it is moved downward.

Abstract: A heater built-in valve usable even under a high-temperature condition beyond 200° C. is provided. Piston driving means 7 has an upper compressed-air introducing chamber 24 for moving a piston 6 downward, and a lower compressed-air introducing chamber 25 for moving the piston 6 upward. Piston sealing means 8 has an upper bellows 29 that seals the upper compressed-air introducing chamber 24, and a lower bellows 30 that seals the lower compressed air introducing chamber 25.

Abstract: There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.

Abstract: There is provided a fluid control apparatus which enables reducing widths of lines for further reducing space occupied by the apparatus. Support flow-channel blocks 9 and 10 are constituted by large block portions 25 and 27 which have openings of fluid flow channels 9a and 10a abutted against openings of fluid flow channels 11c and 11d in extended flow-channel blocks 11a and 11b with seal portions 20 interposed therebetween and, also, are abutted against lower surfaces of the extended flow-channel blocks 11a and 11b, and small block portions 26 and 28 which have lower surfaces flushed with the large block portions 25 and 27 and have heights smaller than those of the large block portions. The small block portions 26 and 28 are provided with male-screw-members insertion holes 26a and 28a for mounting the support flow-channel blocks 9 and 10 to a base member 30.

Abstract: Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.

Abstract: There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency. A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6a formed integrally therewith. The main body 6a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.

Abstract: A direct touch type metal diaphragm valve, wherein durability of the valve, that is to say, the ensured number of continuous open/close operations of the valve, is substantially increased under conditions that an appropriate flow rate coefficient Cv is maintained, and changes of the afore-mentioned Cv value over time are mitigated by means of restricting the deformation of the valve seat over time. The afore-mentioned metal diaphragm is formed in a round, reverse-dish shape by laminating a plural number of thin stainless steel plates and a thin Nickel.Cobalt alloy plate, and its center part is bulged upward, and the maximum valve stroke of the valve is regulated to be 55% to 70% of the distance of the maximum bulge height ?h of the afore-mentioned metal diaphragm.

Abstract: A controller comprises power transmitting means (11) for amplifying the force applied on the operating shaft (6) and transmitting to the valve rod (4); and a slow start means (12) for slowly moving the operating shaft (6) upward are arranged.

Abstract: A heating apparatus (11) has sheet heaters (12) arranged in both sides of at least one line and heating fluid control devices (2, 3, 4) and joint members (5), heat insulating boards (13, 14) made of an engineering plastic are respectively brought into contact with outer sides of the sheet heaters (12), and the heat insulating boards (13, 14) are coupled to each other by at least one thread member (15), whereby the sheet heater (12) is prevented from dropping out.

Abstract: The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

Abstract: To provide a fluid controller with a joint, which has a general versatility and can reduce a storage cost and a storage space. Between a joint 12 and a body 23 of a fluid controller 13, a passage member 14 for communicating both intervenes. The joint 12 is coupled to the passage member 14 by welding. The passage member 14 is coupled with the body 23 of the fluid controller 13 so as to be attachable and detachable by at least one screw member 26.

Abstract: There is provided a pipe joint locking device which prevents accidental loosening of a pipe joint after tightening and with which a sealing property of a seal portion of the pipe joint is not impaired even if a force for rotating a pipe member acts on the pipe member. The device is formed of: a first component member 11 including a mounting portion 21 to be mounted to a joint member 2 having an external thread while prevented from relative rotation, a cover portion 22 to be brought into contact with an outer peripheral face of a cap nut 5 from a lower side, and a coupling portion 23 to be brought into contact with a pipe member 3 from the lower side; and a second component member 12 including a cover portion 31 to be brought into contact with the outer peripheral face of the cap nut 5 from an upper side and a coupling portion 32 to be brought into contact with the pipe member 3 from the upper side.

Abstract: Provided are a heating method making it possible that when a gas inside the body of a piping member, such as a pipe, is heated, the heating efficiency is improved; and a gas-heating piping member making it possible to perform such a heating method easily. A heat keeping member 4 which can transmit a gas to be heated is inserted to the inside of a piping member body 1 into which the gas can be passed in a state that the heat keeping member is brought into close contact with the inside, and further the piping member body 1 is heated from the outside thereof by means of a heating means 2.

Abstract: A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided. A fluid controller 31 having an inlet port 31a and an outlet port 31b aligned in a line direction and a line-to-line connection port 31c positioned in the middle of the above ports in the line direction is supported by a pair of joint members 7, a stepped part 7a is formed at each upper surface of opposed parts of the joint members 7, and line-to-line connection path forming members 9 and 10 having line-to-line paths 13 and 18 each communicating with the line-to-line connection port 31c of the fluid controller 31, respectively and constituting line-to-line connecting means 8 are supported by the stepped parts 7a of the joint members 7.

Abstract: A pressure type flow rate control reference which allows performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

Abstract: A pipe joint comprises a first joint member of synthetic resin having an annular recessed portion in an end face thereof, and a second joint member of synthetic resin having an annular ridge on an end face thereof. The ridge is fitted in the opening of the recessed portion, with a synthetic resin gasket fitted in the recessed portion. When the pipe joint is properly tightened up, the outer surface of the ridge of the second joint member is pressed against the inner surface of the recessed portion of the first joint member with the gasket interposed therebetween in intimate contact with the surfaces approximately over the entire areas thereof.

Abstract: The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.

Abstract: The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.