Patents by Inventor Michio Yamaji

Michio Yamaji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120241023
    Abstract: A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.
    Type: Application
    Filed: October 29, 2010
    Publication date: September 27, 2012
    Applicants: Fujikin Incorporated, Tohoku University, Tokyo Electron Limited
    Inventors: Nobukazu Ikeda, Michio Yamaji, Tsuyoshi Tanikawa, Hiroshi Kaneko, Yasushi Yagi, Yuji Ono, Tadahiro Ohmi, Yasuyuki Shirai
  • Publication number: 20120234406
    Abstract: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.
    Type: Application
    Filed: May 30, 2012
    Publication date: September 20, 2012
    Applicants: TOKYO ELECTRON LIMITED, FUJIKIN INCORPORATED
    Inventors: Shuji Moriya, Wataru Okase, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi, Toshihide Yoshida, Yasuyuki Omata
  • Publication number: 20120230757
    Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.
    Type: Application
    Filed: March 7, 2012
    Publication date: September 13, 2012
    Applicants: FUJIKIN INCORPORATED, TOKYO ELECTRON LIMITED
    Inventors: Norihiko Amikura, Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Patent number: 8256115
    Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.
    Type: Grant
    Filed: June 26, 2008
    Date of Patent: September 4, 2012
    Assignee: Fujikin Incorporated
    Inventors: Shigeru Itoi, Michio Yamaji, Tsutomu Shinohara, Kenji Tsubota, Tadanobu Yoshida, Susumu Ozawa
  • Patent number: 8256744
    Abstract: A direct touch type metal diaphragm valve, wherein durability of the valve, that is to say, the ensured number of continuous open/close operations of the valve, is substantially increased under conditions that an appropriate flow rate coefficient Cv is maintained, and changes of the afore-mentioned Cv value over time are mitigated by means of restricting the deformation of the valve seat over time. The afore-mentioned metal diaphragm is formed in a round, reverse-dish shape by laminating a plural number of thin stainless steel plates and a thin Nickel.Cobalt alloy plate, and its center part is bulged upward, and the maximum valve stroke of the valve is regulated to be 55% to 70% of the distance of the maximum bulge height ?h of the afore-mentioned metal diaphragm.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: September 4, 2012
    Assignee: Fujikin Incorporated
    Inventors: Tsuyoshi Tanikawa, Michio Yamaji, Tadayuki Yakushijin, Hiroshi Fukuchi
  • Patent number: 8246087
    Abstract: Coupling members each have a fluid channel having an opening passageway orthogonal to an abutting end face of the coupling member, and a slanting main passageway communicating with the opening passageway. The opening passageway has diameter equal to the inside diameter of a gasket holding annular ridge of the coupling member. A gasket has an inside diameter smaller than the diameter of the opening passageway.
    Type: Grant
    Filed: November 9, 1999
    Date of Patent: August 21, 2012
    Assignee: Fujikin Incorporated
    Inventors: Michio Yamaji, Tsutomu Shinohara, Nobukazu Ikeda
  • Patent number: 8220495
    Abstract: There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.
    Type: Grant
    Filed: May 26, 2008
    Date of Patent: July 17, 2012
    Assignee: Fujikin Incorporated
    Inventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Patent number: 8210022
    Abstract: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.
    Type: Grant
    Filed: December 11, 2008
    Date of Patent: July 3, 2012
    Assignees: Fujikin Incorporated, Tokyo Electron Limited
    Inventors: Shuji Moriya, Wataru Okase, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi, Toshihide Yoshida, Yasuyuki Omata
  • Publication number: 20120074339
    Abstract: [Problem] To provide a regulating valve device having a valve element opened or closed by a working fluid. [Solution to Problem] A valve element 310 has a structure in which a valve head 310a and a valve body 310b are coupled by a valve stem 310c. In the valve box 305, the valve element 310 and a power transmitting member 320a are slidably housed. A first bellows 320b is fixed to the power transmitting member 320a and the valve box 305 to form a first space Us at a position on a side of the power transmitting member 320a opposite the valve element. A second bellows 320c is fixed to the power transmitting member 320a and the valve box 305 to form a second space Ls at a position on a side of the power transmitting member 320a closer to the valve element.
    Type: Application
    Filed: March 8, 2010
    Publication date: March 29, 2012
    Applicants: Fujikin Incorporated, Tohoku University, Tokyo Electron Limited
    Inventors: Nobukazu Ikeda, Michio Yamaji, Tsuyoshi Tanigawa, Hiroshi Kaneko, Yasushi Yagi, Yuji Ono, Tadahiro Ohmi, Yasuyuki Shirai
  • Publication number: 20110315905
    Abstract: A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face.
    Type: Application
    Filed: June 27, 2011
    Publication date: December 29, 2011
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takashi HIROSE, Tsutomu SHINOHARA, Toshihide YOSHIDA, Kohei SHIGYOU, Michio YAMAJI
  • Patent number: 8083267
    Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.
    Type: Grant
    Filed: October 31, 2003
    Date of Patent: December 27, 2011
    Assignee: Fujikin Incorporated
    Inventors: Shigeru Itoi, Michio Yamaji, Tsutomu Shinohara, Kenji Tsubota, Tadanobu Yoshida, Susumu Ozawa
  • Patent number: 8042573
    Abstract: A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided. A fluid controller 31 having an inlet port 31a and an outlet port 31b aligned in a line direction and a line-to-line connection port 31c positioned in the middle of the above ports in the line direction is supported by a pair of joint members 7, a stepped part 7a is formed at each upper surface of opposed parts of the joint members 7, and line-to-line connection path forming members 9 and 10 having line-to-line paths 13 and 18 each communicating with the line-to-line connection port 31c of the fluid controller 31, respectively and constituting line-to-line connecting means 8 are supported by the stepped parts 7a of the joint members 7.
    Type: Grant
    Filed: July 21, 2006
    Date of Patent: October 25, 2011
    Assignee: Fujikin Incorporated
    Inventors: Ichiro Tokuda, Michio Yamaji, Tsutomu Shinohara, Kenji Tsubota
  • Patent number: 7988130
    Abstract: The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: August 2, 2011
    Assignees: Fujikin Incorporated
    Inventors: Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Masafumi Kitano, Akihiro Morimoto
  • Patent number: 7980598
    Abstract: A pipe joint locking device which prevents accidental loosening of a pipe joint after tightening and with which a sealing property of a seal portion of the pipe joint is not impaired even if a force for rotating a pipe member acts on the pipe member. The device is formed of: a first component member 11 including a mounting portion 21 to be mounted to a joint member 2 having an external thread while prevented from relative rotation, a cover portion 22 to be brought into contact with an outer peripheral face of a cap nut 5 from a lower side, and a coupling portion 23 to be brought into contact with a pipe member 3 from the lower side; and a second component member 12 including a cover portion 31 to be brought into contact with the outer peripheral face of the cap nut 5 from an upper side and a coupling portion 32 to be brought into contact with the pipe member 3 from the upper side.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: July 19, 2011
    Assignee: Fujikin Incorporated
    Inventors: Kenji Tsubota, Michio Yamaji
  • Publication number: 20110121217
    Abstract: There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 ?, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 ?, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
    Type: Application
    Filed: March 26, 2009
    Publication date: May 26, 2011
    Inventors: Tadahiro Ohmi, Kouji Nishino, Tsuyoshi Tanigawa, Michio Yamaji, Nobukazu Ikeda, Ryousuke Dohi
  • Publication number: 20110098767
    Abstract: [PROBLEMS] A system for automatically minimizing cardiac oxygen consumption that is capable of estimating a patient's amount of cardiac oxygen consumption with high accuracy and moreover capable of minimizing the amount of cardiac oxygen consumption and a cardiac disease treating system are provided.
    Type: Application
    Filed: February 16, 2007
    Publication date: April 28, 2011
    Applicants: JAPAN HEALTH SCIENCES FOUNDATION, FUJIKIN INCORPORATED
    Inventors: Masaru Sugimachi, Kazunori Uemura, Atsunori Kamiya, Kenji Sunagawa, Michio Yamaji
  • Patent number: 7896030
    Abstract: The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.
    Type: Grant
    Filed: August 26, 2005
    Date of Patent: March 1, 2011
    Assignee: Fujikin Incorporated
    Inventors: Tsutomu Shinohara, Michio Yamaji, Shigeaki Tanaka, Mutsunori Koyomogi, Ichiro Mine, Ichiro Tokuda, Kenji Tsubota
  • Publication number: 20110031745
    Abstract: An object of the present invention is to provide a fluid coupling, even if it has a large diameter, in which a coupling member can be readily retained by a retainer and the retainer can be readily attached to or detached from the coupling member, and a retainer for such a fluid coupling. A retainer 5 includes an annular gasket retaining portion 21 for retaining a gasket 4 therein and an annular coupling member retaining portion 22 which has an inner diameter greater than that of the gasket retaining portion 21 and retains one coupling member 2. At an inner circumference of the gasket retaining portion 21 and an inner circumference of the coupling member retaining portion 22 are formed annular grooves 23 and 24, respectively, for holding therein elastic rings 25 and 26, respectively.
    Type: Application
    Filed: April 21, 2009
    Publication date: February 10, 2011
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Akihiro Harada, Michio Yamaji
  • Publication number: 20100320408
    Abstract: The present invention provides a fluid controller which enables fine adjustments of low flow rates and enables a user to set desired low flow rates.
    Type: Application
    Filed: January 30, 2008
    Publication date: December 23, 2010
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Michio Yamaji, Tsutomu Shinohara, Akihiro Harada
  • Patent number: D633181
    Type: Grant
    Filed: November 5, 2008
    Date of Patent: February 22, 2011
    Assignee: Fujikin Incorporated
    Inventors: Tsutomu Shinohara, Michio Yamaji, Tomokazu Imai