Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.

Abstract: The present invention provides a system for recording valve actuation information that enables to figure out the actual operation condition of each individual valve without checking plural valves individually, and the valves do not have to be wired, and the structure of the system is simple. The present invention is a system for recording valve actuation information comprising a valve, detecting means for detecting actuation of said valve, a RFID tag affixed to said valve and recording the valve actuation information detected by said detecting means, and a terminal for reading out the valve actuation information detected by said detecting means, wherein said RFID tag searches said terminal by intermittently transmitting a radio wave, wherein said RFID tag transfers the valve actuation information recorded in said RFID tag to said terminal when said RFID tag detects said terminal.

Abstract: The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent the corrosions, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of the gas. Specifically, the aluminum passivation is applied on the piping parts, i.e. the valve and others, used in the vacuum exhaustion system to inhibit the gas decomposition caused by the temperature rise at the time of the baking so that components for the reduction in the diameter size in the vacuum exhaustion system are provided. The corrosions, cloggings and seat leakages caused by the gas decomposition are prevented.

Abstract: A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body 2 to allow the diaphragm 3 to rest on and move away from the valve seat 8, wherein synthetic resin films 5 of predetermined thickness are coated on fluid-contacting parts 25 of the afore-mentioned body 2 and diaphragm 3. A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.

Abstract: The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.

Abstract: Force amplifying means 5 comprises a tapered member 41 extending vertically downward from the lower end of an operating rod 3, a disk member 42 provided at the upper end of a valve stem 16, and front and rear pivotal members 43, 44 arranged between the two members 41, 42 and opposed to each other with the tapered member 41 positioned therebetween, the pivotal members 43, 44 being pivotally movable about respective pivots 45, 46. Each of the pivotal members 43, 44 has a plate body 43a, 44a, an upper contact face 43b, 44b formed on an upper portion of the body and in bearing contact with a tapered face of the tapered member 41, and a lower contact face 43c, 44c formed on a lower portion of the body and bearing on the upper surface of the disk member 42. The lower contact face 43c, 44c of each pivotal member is in the form of a circular-arc cam face centered about a center line positioned away from the axis of the pivot 45, 46.

Abstract: A heating apparatus (11) has sheet heaters (12) arranged in both sides of at least one line and heating fluid control devices (2, 3, 4) and joint members (5), heat insulating boards (13, 14) made of an engineering plastic are respectively brought into contact with outer sides of the sheet heaters (12), and the heat insulating boards (13, 14) are coupled to each other by at least one thread member (15), whereby the sheet heater (12) is prevented from dropping out.

Abstract: A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.

Abstract: A controller comprises power transmitting means (11) for amplifying the force applied on the operating shaft (6) and transmitting to the valve rod (4); and a slow start means (12) for slowly moving the operating shaft (6) upward are arranged. The slow start means (12) includes a piston (8) that moves up and down with respect to the operating shaft (6); a pressure spring (44), arranged between a pressure spring receiver (43) arranged at the operating shaft.

Abstract: Line interconnecting means 50 comprises lower channel blocks 51 each having a line interconnecting channel 54 and arranged in an upper stage of lines B1, B2, B3 to be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blocks 57 each arranged on an upper side of the lower channel blocks 51 of adjacent lines interconnected and each having a transverse channel 58a extending orthogonal to the lines and downward channel 58b extending from the transverse channel 58a and communicating with the respective line interconnecting channels 54 of the lower channel blocks 51. Each of the lower channel blocks 51 is removably fastened to a coupling member in a lower stage with screws from above, and the upper channel blocks 57 are removably fastened to the lower channel blocks 51 with screws from above.

Abstract: A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

Abstract: Two coupling members are provided in respective butting end faces thereof with annular recessed portions surrounding respective fluid channels thereof and having annular projections each formed in a bottom face of the recessed portion. A gasket comprises a sealing portion having an outside diameter smaller than the diameter of the recessed portions and is positioned between the projections of the coupling members, and a guide has an outside diameter permitting the guide to be fitted into the recessed portions and positioned externally of the sealing portion. The butting end faces of the coupling members are movable into contact with each other when the coupling is tightened up properly. The sealing portion has an annular groove formed in an outer periphery thereof, and the sealing portion and the guide are connected together by a snap ring fitted in the annular groove.

Abstract: A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to move a valve element holder 5 to an opening position against bias force of a compression coil spring 77, and an working member 74 in manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holder 5 downward when it is moved downward.

Abstract: A stopper support member 12 has a rectangular plate 15 provided with a circular through hole 16 for a cylinder 7 of a fluid controller body 2 to be fittingly inserted therethrough, a downward projection 17 provided at lengthwise one end of the rectangular plate 15 and held in contact with one side wall of a rectangular parallelepipedal portion 4 of the controller body 2, and an extension 15a extending outward from the plate 15 beyond the parallelepipedal portion 4. A stopper 13 in the form of a vertical plate is upwardly or downwardly movably inserted through a hole 18 formed in the extension 15a of the support member 12. The stopper 13 has a contact portion 19 movable into contact with the knob 3a of the handle 3 from outside widthwise of the knob when the stopper is in a locking position and a lock attaching portion 20 positioned above the support member 12 when the stopper is in the locking position.

Abstract: Force amplifying means 5 comprises a tapered member 41 extending vertically downward from the lower end of an operating rod 3, a disk member 42 provided at-the upper end of a valve stem 16, and front and rear pivotal members 43, 44 arranged between the two members 41, 42 and opposed to each other with the tapered member 41 positioned therebetween, the pivotal members 43, 44 being pivotally movable about respective pivots 45, 46. Each of the pivotal members 43, 44 has a plate body 43a, 44a, an upper contact face 43b, 44b formed on an upper portion of the body and in bearing contact with a tapered face of the tapered member 41, and a lower contact face 43c, 44c formed on a lower portion of the body and bearing on the upper surface of the disk member 42. The lower contact face 43c, 44c of each pivotal member is in the form of a circular-arc cam face centered about a center line positioned away from the axis of the pivot 45, 46.

Abstract: The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent the corrosions, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of the gas. Specifically, the aluminum passivation is applied on the piping parts, i.e. the valve and others, used in the vacuum exhaustion system to inhibit the gas decomposition caused by the temperature rise at the time of the baking so that components for the reduction in the diameter size in the vacuum exhaustion system are provided. The corrosions, cloggings and seat leakages caused by the gas decomposition are prevented.

Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface.

Abstract: Line interconnecting means 50 comprises lower channel blocks 51 each having a line interconnecting channel 54 and arranged in an upper stage of lines B1, B2, B3 to be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blocks 57 each arranged on an upper side of the lower channel blocks 51 of adjacent lines interconnected and each having a transverse channel 58a extending orthogonal to the lines and downward channel 58b extending from the transverse channel 58a and communicating with the respective line interconnecting channels 54 of the lower channel blocks 51. Each of the lower channel blocks 51 is removably fastened to a coupling member in a lower stage with screws from above, and the upper channel blocks 57 are removably fastened to the lower channel blocks 51 with screws from above.

Abstract: Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.

Abstract: Two coupling member 1, 2 are provided in respective butting end faces thereof with annular recessed portions 3, 4 surrounding respective fluid channels 1a, 2a thereof and having annular projections 5, 6 each formed in a bottom face of the recessed portion. A gasket 10 comprises a sealing portion 11 having an outside diameter smaller than the diameter of the recessed portions 3, 4 and positioned between the projections 5, 6 of the coupling members 1, 2, and a guide 12 having an outside diameter permitting the guide to be fitted into the recessed portions 3, 4 and positioned externally of the sealing portion 11. The butting end faces of the coupling members 1, 2 are movable into contact with each other when the coupling is tightened up properly. The sealing portion 11 has an annular groove 14 formed in an outer periphery thereof, and the sealing portion 11 and the guide 12 are connected together by a snap ring 13 fitted in the annular groove 14.