Patents by Inventor Michio Yamaji
Michio Yamaji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20050221973Abstract: A radiation shielding article 10 is in the form of a plurality of radiation shielding glasses 11 that are stuck together with resin films 12 therebetween, respectively. Each radiation shielding glass 11 is made of glass essentially free of Pb and having a lead equivalent of 0.03 mmPb/mm or more relative to an X-ray of 100 kV. Further, each radiation shielding glass 11 has a composition containing, by mass %, 50 to 65% of SO2, 5 to 15% of Al2O3, 0.1 to 9% of ZrO2, 10 to 27% of MgO+CaO+SrO+BaO+ZnO, and 7 to 15% of Li2O+Na2O+K2O.Type: ApplicationFiled: April 18, 2003Publication date: October 6, 2005Inventors: Yasushi Mure, Michio Yamaji, Yukihiko Yamaguchi
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Publication number: 20050179259Abstract: A pipe joint 1 comprises a first joint member 2 of synthetic resin having an annular recessed portion 7 in an end face thereof, and a second joint member 3 of synthetic resin having an annular ridge 8 on an end face thereof. The ridge 8 is fitted in the opening of the recessed portion 7, with a synthetic resin gasket 4 fitted in the recessed portion 7.Type: ApplicationFiled: March 19, 2003Publication date: August 18, 2005Inventors: Kazuhiko Sugiyama, Keiko Hada, Eiji Ideta, Nobukazu Ikeda, Naofumi Yasumoto, Michio Yamaji
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Publication number: 20050109967Abstract: A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.Type: ApplicationFiled: December 15, 2004Publication date: May 26, 2005Applicant: FUJIKIN INCORPORATEDInventors: Tadahiro Ohmi, Kouji Nishino, Nobukazu Ikeda, Michio Yamaji, Ryousuke Dohi, Eiji Ideta, Takashi Hirose
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Patent number: 6871803Abstract: A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.Type: GrantFiled: June 5, 2000Date of Patent: March 29, 2005Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Kouji Nishino, Nobukazu Ikeda, Michio Yamaji, Ryousuke Dohi, Eiji Ideta, Takashi Hirose
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Patent number: 6868867Abstract: A connecting layer for interconnecting fluid control devices in series and in parallel comprises an upper connecting layer 4 and a lower connecting layer 5. The upper connecting layer 4 is provided by parallel rows each comprising block couplings 41, 42, 43, 44 arranged longitudinally of the apparatus, each of the block couplings having a longitudinal channel 61 for interconnecting the adjacent fluid control devices in the row and a through channel 62 communicating with the fluid control device. The lower connecting layer 5 is provided by block coupling 56, 57, 58 each having a lateral channel 64 for interconnecting the through channels 62 of the block couplings 41, 42, 43, 44 of the upper connecting layer 4 which are arranged laterally and by block couplings 51 each adapted to cause the through channel 62 of the block coupling 41, 43, 44 of the upper connecting layer 4 to communicate with an inlet-side or outlet-side coupling 52, 53.Type: GrantFiled: May 21, 2002Date of Patent: March 22, 2005Assignee: Fujikin IncorporatedInventors: Michio Yamaji, Kenji Tsubota, Hidenaga Hoshiyama
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Patent number: 6848470Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time ?t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.Type: GrantFiled: February 11, 2004Date of Patent: February 1, 2005Assignees: Fujikin Incorporated, Tokyo Electron Ltd.Inventors: Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino, Ryousuke Dohi, Katsunori Yonehana, Nobukazu Ikeda, Michio Yamaji, Jun Hirose, Kazuo Fukazawa, Hiroshi Koizumi, Hideki Nagaoka, Akihiro Morimoto, Tomio Uno, Eiji Ideta, Atsushi Matsumoto, Toyomi Uenoyama, Takashi Hirose
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Patent number: 6820632Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.Type: GrantFiled: June 6, 2002Date of Patent: November 23, 2004Assignees: Fujikin Incorporated, Tokyo Electron Ltd.Inventors: Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino, Ryousuke Dohi, Katsunori Yonehana, Nobukazu Ikeda, Michio Yamaji, Jun Hirose, Kazuo Fukazawa, Hiroshi Koizumi, Hideki Nagaoka, Akihiro Morimoto, Tomio Uno, Eiji Ideta, Atsushi Matsumoto, Toyomi Uenoyama, Takashi Hirose
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Patent number: 6786471Abstract: A diaphragm valve assembly comprising a body defining a valve chamber and first and second passageways through said, a removable, annular valve seat installed in the valve chamber around of said passageways, seat holding means comprising a seat holder shaped to surround said valve seat, a flexibly resilient diaphragm having a valve closing portion and means for holding the diaphragm in position in the valve chamber. The resilience of the diaphragm urges said valve closing portion away from the valve seat. Selectively operable driving means drive the valve closing portion of the diaphragm into contact with the valve seat for closing the valve. A protruding, cylindrical rim portion around said one passageway, and said seat holder define an annular recess adapted to receive the valve seat such that said valve seat is held between said seat holder and said rim portion.Type: GrantFiled: June 25, 2002Date of Patent: September 7, 2004Assignee: Fujikin IncorporatedInventors: Tomohiro Nakata, Michio Yamaji
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Publication number: 20040154664Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point.Type: ApplicationFiled: February 11, 2004Publication date: August 12, 2004Applicants: Fujikin Incorporated, Tokyo Electron Ltd.Inventors: Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino, Ryousuke Dohi, Katsunori Yonehana, Nobukazu Ikeda, Michio Yamaji, Jun Hirose, Kazuo Fukazawa, Hiroshi Koizumi, Hideki Nagaoka, Akihiro Morimoto, Tomio Uno, Eiji Ideta, Atsushi Matsumoto, Toyomi Uenoyama, Takashi Hirose
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Patent number: 6712400Abstract: A method for facilitating fabrication of a coupling member includes a first step of boring one of upwardly open, passageways, a communication passageway and an auxiliary passageway in a body block, a second step of inserting a closure member into the auxiliary passageway, a third step of welding the closure member to the inner peripheral body portion defining the auxiliary passageway, and a fourth step of boring the other upwardly open passageway in the body block. The closure member is inserted in the second step so as to be positioned at least party in the portion where the other upwardly open passageway is to be formed.Type: GrantFiled: November 9, 1999Date of Patent: March 30, 2004Assignee: Fujikin IncorporatedInventors: Michio Yamaji, Osamu Fukata, Kosuke Yokoyama, Tadanobu Yoshida, Hiroshi Morokoshi
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Patent number: 6648020Abstract: A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward.Type: GrantFiled: September 7, 2001Date of Patent: November 18, 2003Assignee: Fujikin IncorporatedInventors: Hideki Fujimoto, Noboru Uzawa, Naoyuki Sato, Michio Yamaji, Shigeaki Tanaka, Yuji Kawano, Yasuyuki Omata, Masakazu Fukui
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Patent number: 6618922Abstract: First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.Type: GrantFiled: March 15, 2002Date of Patent: September 16, 2003Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Michio Yamaji, Tsutomu Shinohara
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Patent number: 6615871Abstract: An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.Type: GrantFiled: October 22, 2002Date of Patent: September 9, 2003Assignees: Tadahiro Ohmi, Fujikin IncorporatedInventors: Tadahiro Ohmi, Hiroshi Morokoshi, Michio Yamaji, Shigeaki Tanaka, Keiji Hirao, Yuji Kawano, Takashi Hirose, Kosuke Yokoyama, Michio Kuramochi, Masayuki Hatano, Nobukazu Ikeda
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Patent number: 6554020Abstract: A pair of tape heaters 11 are arranged respectively on opposite sides of at least one line and held to the corresponding coupling members by a plurality of clips 12. Each of the clips 12 comprises a pair of side walls 13 opposed to each other as spaced apart by a predetermined distance, and a connecting wall 14 interconnecting the pair of side walls 13 at an intermediate portion of the height thereof so as to move lower portions of the side walls 13 away from each other when upper portions of the side walls 13 are subjected to a force acting to move the upper portions toward each other and to restore the side walls 13 to the original state when the force is removed.Type: GrantFiled: June 24, 2002Date of Patent: April 29, 2003Assignee: Fujikin IncorporatedInventors: Michio Yamaji, Tsutomu Shinohara, Ichiro Mine, Izuru Shikata, Kenji Tsubota
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Publication number: 20030041910Abstract: An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.Type: ApplicationFiled: October 22, 2002Publication date: March 6, 2003Applicant: Tadahiro Ohmi, Sendai-shi, Japan and Fujikin IncorporatedInventors: Hiroshi Morokoshi, Michio Yamaji, Shigeaki Tanaka, Keiji Hirao, Yuji Kawano, Takashi Hirose, Kosuke Yokoyama, Michio Kuramochi, Masayuki Hatano, Nobukazu Ikeda
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Publication number: 20030025099Abstract: A diaphragm valve assembly comprising a body (2) defining a valve chamber (10) and first and second passageways (8,9) through said body which, in use, serve as an inlet and an outlet for the valve chamber, a removable, annular valve seat (3) adapted to be installed in the valve chamber around one of said passageways (8,9), seat holding means for holding the valve seat in place in the valve chamber, said seat holding means comprising a seat holder (4) that is shaped to surround said valve seat, a flexibly resilient diaphragm (5) having a valve closing portion and means (4,16) for holding the diaphragm in position in the valve chamber, such that said valve closing portion is disposed juxtaposed said valve seat (3), the diaphragm being shaped such that, when fitted, its resilience urges said valve closing portion away from the valve seat (3) and selectively operable driving means (6) for driving the valve closing portion of the diaphragm (5) into contact with the valve seat (3) for closing the valve; characterisType: ApplicationFiled: June 25, 2002Publication date: February 6, 2003Applicant: Fujikin IncorporatedInventors: Tomohiro Nakata, Michio Yamaji
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Publication number: 20030005959Abstract: A pair of tape heaters 11 are arranged respectively on opposite sides of at least one line and held to the corresponding coupling members by a plurality of clips 12. Each of the clips 12 comprises a pair of side walls 13 opposed to each other as spaced apart by a predetermined distance, and a connecting wall 14 interconnecting the pair of side walls 13 at an intermediate portion of the height thereof so as to move lower portions of the side walls 13 away from each other when upper portions of the side walls 13 are subjected to a force acting to move the upper portions toward each other and to restore the side walls 13 to the original state when the force is removed.Type: ApplicationFiled: June 24, 2002Publication date: January 9, 2003Applicant: FUJIKIN INCORPORATEDInventors: Michio Yamaji, Tsutomu Shinohara, Ichiro Mine, Izuru Shikata, Kenji Tsubota
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Publication number: 20020185185Abstract: A connecting layer for interconnecting fluid control devices in series and in parallel comprises an upper connecting layer 4 and a lower connecting layer 5. The upper connecting layer 4 is provided by parallel rows each comprising block couplings 41, 42, 43, 44 arranged longitudinally of the apparatus, each of the block couplings having a longitudinal channel 61 for interconnecting the adjacent fluid control devices in the row and a through channel 62 communicating with the fluid control device. The lower connecting layer 5 is provided by block coupling 56, 57, 58 each having a lateral channel 64 for interconnecting the through channels 62 of the block couplings 41, 42, 43, 44 of the upper connecting layer 4 which are arranged laterally and by block couplings 51 each adapted to cause the through channel 62 of the block coupling 41, 43, 44 of the upper connecting layer 4 to communicate with an inlet-side or outlet-side coupling 52, 53.Type: ApplicationFiled: May 21, 2002Publication date: December 12, 2002Inventors: Michio Yamaji, Kenji Tsubota, Hidenaga Hoshiyama
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Publication number: 20020179149Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point.Type: ApplicationFiled: June 6, 2002Publication date: December 5, 2002Inventors: Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino, Ryousuke Dohi, Katsunori Yonehana, Nobukazu Ikeda, Michio Yamaji, Jun Hirose, Kazuo Fukazawa, Hiroshi Koizumi, Hideki Nagaoka, Akihiro Morimoto, Tomio Uno, Eiji Ideta, Atsushi Matsumoto, Toyomi Uenoyama, Takashi Hirose
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Publication number: 20020124894Abstract: A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.Type: ApplicationFiled: May 10, 2002Publication date: September 12, 2002Applicant: Tadahiro OhmiInventors: Tadahiro Ohmi, Yukio Minami, Akihiro Morimoto, Nobukazu Ikeda, Keiji Hirao, Takashi Hirose, Michio Yamaji, Kazuhiro Yoshikawa