Patents by Inventor Phaedon Avouris

Phaedon Avouris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8809153
    Abstract: Graphene transistor devices and methods of their fabrication are disclosed. In accordance with one method, a resist is deposited to pattern a gate structure area over a graphene channel on a substrate. In addition, gate dielectric material and gate electrode material are deposited over the graphene channel and the resist. Further, the resist and the electrode and dielectric materials that are disposed above the resist are lifted-off to form a gate structure including a gate electrode and a gate dielectric spacer and to expose portions of the graphene channel that are adjacent to the gate structure. Additionally, source and drain electrodes are formed over the exposed portions of the graphene channel.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: August 19, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Phaedon Avouris, Damon B. Farmer, Yu-Ming Lin, Yu Zhu
  • Patent number: 8803130
    Abstract: Graphene transistor devices and methods of their fabrication are disclosed. One such graphene transistor device includes source and drain electrodes and a gate structure including a dielectric sidewall spacer that is disposed between the source and drain electrodes. The device further includes a graphene layer that is adjacent to at least one of the source and drain electrodes, where an interface between the source/drain electrode(s) and the graphene layer maintains a consistent degree of electrical conductivity throughout the interface.
    Type: Grant
    Filed: June 8, 2012
    Date of Patent: August 12, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Phaedon Avouris, Damon B. Farmer, Yu-Ming Lin, Yu Zhu
  • Patent number: 8805148
    Abstract: An electromagnetic device and method for fabrication includes a substrate and a layer of graphene formed on the substrate. A metallization layer is patterned on the graphene. The metallization layer forms electrodes such that when the graphene is excited by light, terahertz frequency radiation is generated.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: August 12, 2014
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Chun-Yung Sung, Alberto Valdes Garcia, Fengnian Xia
  • Patent number: 8753965
    Abstract: A method of forming a transistor structure is provided. The method includes forming a graphene layer on an insulating layer; forming a stack of a first metal portion and a second metal portion over the graphene layer, wherein sidewalls of the first metal portion are vertically coincident with sidewalls of the second metal portion; and laterally offsetting the sidewalls of the first metal portion relative to the sidewalls of the second metal portion by a lateral distance.
    Type: Grant
    Filed: September 1, 2012
    Date of Patent: June 17, 2014
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Damon B. Farmer, Yu-Ming Lin, Yu Zhu
  • Patent number: 8748871
    Abstract: A three-dimensional integrated circuit includes a semiconductor device, an insulator formed on the semiconductor device, an interconnect formed in the insulator, and a graphene device formed on the insulator.
    Type: Grant
    Filed: January 18, 2012
    Date of Patent: June 10, 2014
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Josephine B. Chang, Wilfried E. Haensch, Fei Liu, Zihong Liu, Yanqing Wu, Wenjuan Zhu
  • Publication number: 20140124736
    Abstract: Carbon nanotubes can be aligned with compatibility with semiconductor manufacturing processes, with scalability for forming smaller devices, and without performance degradation related to structural damages. A planar structure including a buried gate electrode and two embedded electrodes are formed. After forming a gate dielectric, carbon nanotubes are assembled in a solution on a surface of the gate dielectric along the direction of an alternating current (AC) electrical field generated by applying a voltage between the two embedded electrodes. A source contact electrode and a drain contact electrode are formed by depositing a conductive material on both ends of the carbon nanotubes. Each of the source and drain contact electrodes can be electrically shorted to an underlying embedded electrode to reduce parasitic capacitance.
    Type: Application
    Filed: January 9, 2014
    Publication date: May 8, 2014
    Applicants: KARLSRUHER INSTITUT FUER TECHNOLOGIE, INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Phaedon Avouris, Yu-ming Lin, Mathias B. Steiner, Michael W. Engel, Ralph Krupke
  • Patent number: 8698165
    Abstract: Graphene-channel based devices and techniques for the fabrication thereof are provided. In one aspect, a semiconductor device includes a first wafer having at least one graphene channel formed on a first substrate, a first oxide layer surrounding the graphene channel and source and drain contacts to the graphene channel that extend through the first oxide layer; and a second wafer having a CMOS device layer formed in a second substrate, a second oxide layer surrounding the CMOS device layer and a plurality of contacts to the CMOS device layer that extend through the second oxide layer, the wafers being bonded together by way of an oxide-to-oxide bond between the oxide layers. One or more of the contacts to the CMOS device layer are in contact with the source and drain contacts. One or more other of the contacts to the CMOS device layer are gate contacts for the graphene channel.
    Type: Grant
    Filed: May 2, 2013
    Date of Patent: April 15, 2014
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Kuan-Neng Chen, Damon Farmer, Yu-Ming Lin
  • Patent number: 8680512
    Abstract: A transistor structure is provided which includes a graphene layer located on an insulating layer, a first metal portion overlying a portion of the graphene layer, a second metal portion contacting and overhanging the first metal portion, a first electrode contacting a portion of the graphene layer and laterally offset from a first sidewall of the first metal portion by a lateral spacing, and a second electrode contacting another portion of the graphene layer and laterally offset from a second sidewall of the first metal portion by the lateral spacing.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: March 25, 2014
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Damon B. Farmer, Yu-Ming Lin, Yu Zhu
  • Patent number: 8637374
    Abstract: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.
    Type: Grant
    Filed: February 8, 2012
    Date of Patent: January 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Joerg Appenzeller, Phaedon Avouris, Kevin K. Chan, Philip G. Collins, Richard Martel, Hon-Sum Philip Wong
  • Patent number: 8629010
    Abstract: Carbon nanotubes can be aligned with compatibility with semiconductor manufacturing processes, with scalability for forming smaller devices, and without performance degradation related to structural damages. A planar structure including a buried gate electrode and two embedded electrodes are formed. After forming a gate dielectric, carbon nanotubes are assembled in a solution on a surface of the gate dielectric along the direction of an alternating current (AC) electrical field generated by applying a voltage between the two embedded electrodes. A source contact electrode and a drain contact electrode are formed by depositing a conductive material on both ends of the carbon nanotubes. Each of the source and drain contact electrodes can be electrically shorted to an underlying embedded electrode to reduce parasitic capacitance.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: January 14, 2014
    Assignees: International Business Machines Corporation, Karlsruher Institut Fuer Technologie (KIT)
    Inventors: Phaedon Avouris, Yu-Ming Lin, Mathias B. Steiner, Michael W. Engel, Ralph Krupke
  • Patent number: 8614435
    Abstract: A fabrication process for a nanoelectronic device and a device are provided. Channel material is deposited on a substrate to form a channel. A source metal contact and a drain metal contact are deposited on the channel material, and the source metal contact and the drain metal contact are on opposing ends of the channel material. A polyhydroxystyrene derivative is deposited on the channel material. A top gate oxide is deposited on the polymer layer. A top gate metal is deposited on the top gate oxide.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: December 24, 2013
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Damon B. Farmer, Fengnian Xia
  • Patent number: 8614141
    Abstract: A fabrication process for a nanoelectronic device and a device are provided. Channel material is deposited on a substrate to form a channel. A source metal contact and a drain metal contact are deposited on the channel material, and the source metal contact and the drain metal contact are on opposing ends of the channel material. A polyhydroxystyrene derivative is deposited on the channel material. A top gate oxide is deposited on the polymer layer. A top gate metal is deposited on the top gate oxide.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: December 24, 2013
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Damon B. Farmer, Fengnian Xia
  • Publication number: 20130335255
    Abstract: Structures and methods for cloaking an object to electromagnetic radiation at the microwave and terahertz frequencies include disposing a plurality of graphene sheets about the object. Intermediate layers of a transparent dielectric material can be disposed between graphene sheets to optimize the performance. In other embodiments, the graphene can be formulated into a paint formulation or a fabric and applied to the object. The structures and methods absorb at least a portion of the electromagnetic radiation at the microwave and terabyte frequencies.
    Type: Application
    Filed: June 14, 2012
    Publication date: December 19, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: PHAEDON AVOURIS, ALBERTO V. GARCIA, CHUN-YUNG SUNG, FENGNIAN XIA, HUGEN YAN
  • Publication number: 20130335254
    Abstract: Structures and methods for cloaking an object to electromagnetic radiation at the microwave and terahertz frequencies include disposing a plurality of graphene sheets about the object. Intermediate layers of a transparent dielectric material can be disposed between graphene sheets to optimize the performance. In other embodiments, the graphene can be formulated into a paint formulation or a fabric and applied to the object. The structures and methods absorb at least a portion of the electromagnetic radiation at the microwave and terabyte frequencies.
    Type: Application
    Filed: June 22, 2012
    Publication date: December 19, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: PHAEDON AVOURIS, ALBERTO V. GARCIA, CHUN-YUNG SUNG, FENGNIAN XIA, HUGEN YAN
  • Publication number: 20130334472
    Abstract: Electromagnetic interference shielding structures and methods of shielding an object form electromagnetic radiation at frequencies greater than a megahertz generally include providing doped graphene sheets about the object to be shielded. The doped graphene sheets have a dopant concentration that is effective to reflect and/or absorb the electromagnetic radiation.
    Type: Application
    Filed: June 22, 2012
    Publication date: December 19, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: PHAEDON AVOURIS, ALBERTO V. GARCIA, CHUN-YUNG SUNG, FENGNIAN XIA, HUGEN YAN
  • Publication number: 20130333937
    Abstract: Electromagnetic interference shielding structures and methods of shielding an object form electromagnetic radiation at frequencies greater than a megahertz generally include providing highly doped graphene sheets about the object to be shielded. The highly doped graphene sheets may have a dopant concentration greater than >1e1013 cm?2, which is effective to reflect the electromagnetic radiation or a dopant concentration of 1e1013 cm?2>n>0 cm?2, which is effective to absorb the electromagnetic radiation.
    Type: Application
    Filed: June 14, 2012
    Publication date: December 19, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: PHAEDON AVOURIS, ALBERTO V. GARCIA, CHUN-YUNG SUNG, FENGNIAN XIA, HUGEN YAN
  • Patent number: 8610989
    Abstract: A microcavity-controlled two-dimensional carbon lattice structure device selectively modifies to reflect or to transmit, or emits, or absorbs, electromagnetic radiation depending on the wavelength of the electromagnetic radiation. The microcavity-controlled two-dimensional carbon lattice structure device employs a graphene layer or at least one carbon nanotube located within an optical center of a microcavity defined by a pair of partial mirrors that partially reflect electromagnetic radiation. The spacing between the mirror determines the efficiency of elastic and inelastic scattering of electromagnetic radiation inside the microcavity, and hence, determines a resonance wavelength of electronic radiation that is coupled to the microcavity. The resonance wavelength is tunable by selecting the dimensional and material parameters of the microcavity. The process for manufacturing this device is compatible with standard complementary metal oxide semiconductor (CMOS) manufacturing processes.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: December 17, 2013
    Assignees: International Business Machines Corporation, Karlsruher Institut Fuer Technologie (KIT), Cambridge Enterprise Limited
    Inventors: Phaedon Avouris, Mathias B. Steiner, Michael Engel, Ralph Krupke, Andrea C. Ferrari, Antonio Lombardo
  • Patent number: 8610617
    Abstract: Structures and methods for cloaking an object to electromagnetic radiation at the microwave and terahertz frequencies include disposing a plurality of graphene sheets about the object. Intermediate layers of a transparent dielectric material can be disposed between graphene sheets to optimize the performance. In other embodiments, the graphene can be formulated into a paint formulation or a fabric and applied to the object. The structures and methods absorb at least a portion of the electromagnetic radiation at the microwave and terabyte frequencies.
    Type: Grant
    Filed: June 22, 2012
    Date of Patent: December 17, 2013
    Assignee: International Business Machines Corporation
    Inventors: Phaedon Avouris, Alberto V. Garcia, Chun-Yung Sung, Fengnian Xia, Hugen Yan
  • Publication number: 20130299782
    Abstract: Graphene transistor devices and methods of their fabrication are disclosed. One such graphene transistor device includes source and drain electrodes and a gate structure including a dielectric sidewall spacer that is disposed between the source and drain electrodes. The device further includes a graphene layer that is adjacent to at least one of the source and drain electrodes, where an interface between the source/drain electrode(s) and the graphene layer maintains a consistent degree of electrical conductivity throughout the interface.
    Type: Application
    Filed: June 8, 2012
    Publication date: November 14, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: ALI AFZALI-ARDAKANI, PHAEDON AVOURIS, DAMON B. FARMER, YU-MING LIN, YU ZHU
  • Publication number: 20130302963
    Abstract: Graphene transistor devices and methods of their fabrication are disclosed. In accordance with one method, a resist is deposited to pattern a gate structure area over a graphene channel on a substrate. In addition, gate dielectric material and gate electrode material are deposited over the graphene channel and the resist. Further, the resist and the electrode and dielectric materials that are disposed above the resist are lifted-off to form a gate structure including a gate electrode and a gate dielectric spacer and to expose portions of the graphene channel that are adjacent to the gate structure. Additionally, source and drain electrodes are formed over the exposed portions of the graphene channel.
    Type: Application
    Filed: May 10, 2012
    Publication date: November 14, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: ALI AFZALI-ARDAKANI, PHAEDON AVOURIS, DAMON B. FARMER, YU-MING LIN, YU ZHU