Patents by Inventor Shigeru Kusunoki

Shigeru Kusunoki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5369297
    Abstract: An N type field effect transistor having a higher resistivity to hot carriers and exhibiting a higher current handling capability even when used at a low gate voltage, and a method of manufacturing such a transistor are provided. A nitrided oxide film is formed on a drain avalanche hot carrier injection region. The nitrided oxide film is highly resistive to drain avalanche hot carriers as compared to a silicon oxide film. The silicon oxide film is formed on a channel hot electron injection region. The silicon oxide film is highly resistive to channel hot electrons as compared to the nitrided oxide film. A major portion of a gate insulator film is a silicon oxide film. The silicon oxide film exhibits a higher current handling capability at a low gate voltage as compared to the nitrided oxide film.
    Type: Grant
    Filed: August 18, 1992
    Date of Patent: November 29, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shigeru Kusunoki, Masahide Inuishi
  • Patent number: 5341022
    Abstract: A semiconductor device having a reduced leakage current is fabricated in a short time at a low cost with excellent controllability. A buried layer (20) which includes a principal buried layer (21) of high ion concentration containing secondary defects (22) sandwiched between secondary buried layers (3a, 3b) of low ion concentration from upper and lower directions is formed on a semiconductor substrate (1). The secondary defects (22) have stable gettering effects for reducing defects caused during formation of a transistor (200) and contamination by heavy metals. Further, the secondary buried layers (3a, 3b) prevent depletion layers from reaching the secondary defects (22). The semiconductor device can be formed in a short time since no epitaxial growth is employed.
    Type: Grant
    Filed: March 16, 1993
    Date of Patent: August 23, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Takashi Kuroi, Shigeru Kusunoki
  • Patent number: 5336904
    Abstract: A field effect transistor according to the present invention uses a silicon monocrystalline substrate. At least two independent thin amorphous silicon layers are formed in a position for preventing movement of majority carriers in a channel region in the surface of the silicon substrate. Each amorphous silicon layer is between monocrystalline silicon layers. A gate electrode is formed on the surface of the channel region through a gate insulating layer. Thin potential barriers and a potential well are formed in the channel region by at least two amorphous silicon layers. Sharp potential barriers are formed by forming thin amorphous silicon layers, and a field effect transistor utilizing the resonant-tunneling effect with high tunneling efficiency is implemented.
    Type: Grant
    Filed: April 2, 1992
    Date of Patent: August 9, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Shigeru Kusunoki
  • Patent number: 5330923
    Abstract: A micro MIS type FET comprises first conductivity type source/drain regions formed in a surface of a semiconductor layer mutually spaced apart by a distance of less than 2 .mu.m, a second conductivity type channel layer having an impurity concentration of less than 1.times.10.sup.16 /cm.sup.3 formed between the source/drain regions to have a depth less than depths of the source/drain regions, and a second conductivity type threshold voltage control region having an impurity concentration of more than 1.times.10.sup.17 /cm.sup.3 beneath the channel layer.
    Type: Grant
    Filed: November 20, 1992
    Date of Patent: July 19, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shigeru Kusunoki, Shigeki Komori, Katsuhiro Tsukamoto
  • Patent number: 5324678
    Abstract: A multi-layer type semiconductor device is disclosed, in which a plurality of semiconductor layers are formed in vertically opposite directions. The multi-layer type semiconductor device is obtained by forming a first semiconductor layer, an insulating layer and a second semiconductor layer in the mentioned order on a main surface of a first substrate, forming a semiconductor device by using the second semiconductor layer as a base, with an exposed surface thereof directed upward, forming an insulating film on the semiconductor device, attaching a second substrate to the insulating film, thinning the first substrate to expose the first semiconductor layer, and forming a further semiconductor device by using the first semiconductor layer as a base, with an exposed surface of the first semiconductor layer directed upward.
    Type: Grant
    Filed: November 30, 1992
    Date of Patent: June 28, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Shigeru Kusunoki
  • Patent number: 5324980
    Abstract: A multi-layer type semiconductor device is disclosed, in which a plurality of semiconductor layers are formed in vertically opposite directions. The multi-layer type semiconductor device is obtained by forming a first semiconductor layer, an insulating layer and a second semiconductor layer in the mentioned order on a main surface of a first substrate, forming a semiconductor device by using the second semiconductor layer as a base, with an exposed surface thereof directed upward, forming an insulating film on the semiconductor device, attaching a second substrate to the insulating film, thinning the first substrate to expose the first semiconductor layer, and forming a further semiconductor device by using the first semiconductor layer as a base, with an exposed surface of the first semiconductor layer directed upward.
    Type: Grant
    Filed: August 7, 1992
    Date of Patent: June 28, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Shigeru Kusunoki
  • Patent number: 5250775
    Abstract: An electric cooking apparatus includes a single power converter section for converting power supplied from an external AC power source. A heating-energy radiator section receives the converted power from the power converter section and radiates heating energy to a heating chamber. A battery is also provided for supplying power to the power converter section such that a sum of the power from the external AC power source and the battery is converted by the power converting section when an instantaneous voltage of the external AC power source is smaller than a predetermined voltage level, which predetermined voltage level is smaller than a maximum instantaneous voltage of the external AC power source.
    Type: Grant
    Filed: March 12, 1992
    Date of Patent: October 5, 1993
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Naoyoshi Maehara, Daisuke Bessyo, Yuji Nakabayashi, Makoto Shibuya, Takahiro Matsumoto, Shigeru Kusunoki, Susumu Kiritoshi
  • Patent number: 5208473
    Abstract: A method for preparing a MISFET of a minute size with the channel length of not more than 2 .mu.m between a source and a drain, comprises the steps of forming a mask for exposing a region for forming a well on a planar surface of a semiconductor substrate, and introducing ions at a predetermined energy into the well region by using the mask. The predetermined energy is such as to form a peak of the impurity concentration distribution at a position deeper than the bottom surface of the source and the drain and to maintain the layer of at least a partial layer of the channel at an impurity concentration lower than 10 .sup.16 cm.sup.-3 so that a high speed carrier movement in the channel is provided without causing a punch-through phenomenon.
    Type: Grant
    Filed: January 3, 1991
    Date of Patent: May 4, 1993
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shigeki Komori, Shigeru Kusunoki, Katsuhiro Tsukamoto
  • Patent number: 5196908
    Abstract: A micro MIS type FET comprises first conductivity type source/drain regions formed in a surface of a semiconductor layer mutually spaced apart by a distance of less than 2 .mu.m, a second conductivity type channel layer having an impurity concentration of less than 1.times.10.sup.16 /cm.sup.3 formed between the source/drain regions to have a depth less than depths of the source/drain regions, and a second conductivity type threshold voltage control region having an impurity concentration of more than 1.times.10.sup.17 /cm.sup.3 beneath the channel layer.
    Type: Grant
    Filed: January 8, 1991
    Date of Patent: March 23, 1993
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shigeru Kusunoki, Shigeki Komori, Katsuhiro Tsukamoto
  • Patent number: 5195317
    Abstract: An apparatus for regenerating a filter provided to scavenge particulate which is included in exhaust gas discharged from an internal combustion engine. The apparatus includes a heating room accommodating the filter, a heat-combusting device for heat-combusting the particulate scavenged by the filter, a microwave generating device for generating a microwave to be supplied to the heating room, a slit provided in a wall of the heating room, a microwave detecting device for detecting the energy level of the microwave coupled through the slit, and a control section for controlling the heat-combusting device.
    Type: Grant
    Filed: March 26, 1992
    Date of Patent: March 23, 1993
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Tomotaka Nobue, Shigeru Kusunoki, Koji Yoshino, Takashi Kashimoto
  • Patent number: 5189500
    Abstract: A multi-layer type semiconductor device is disclosed, in which a plurality of semiconductor layers are formed in vertically opposite directions. The multi-layer type semiconductor device is obtained by forming a first semiconductor layer, an insulating layer and a second semiconductor layer in the mentioned order on a main surface of a first substrate, forming a semiconductor device by using the second semiconductor layer as a base, with an exposed surface thereof directed upward, forming an insulating film on the semiconductor device, attaching a second substrate to the insulating film, thinning the first substrate to expose the first semiconductor layer, and forming a further semiconductor device by using the first semiconductor layer as a base, with an exposed surface of the first semiconductor layer directed upward.
    Type: Grant
    Filed: September 20, 1990
    Date of Patent: February 23, 1993
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Shigeru Kusunoki
  • Patent number: 5171947
    Abstract: A high-frequency heating apparatus includes: a high-frequency oscillator for generating high-frequency electromagnetic waves using electrical power supplied from a power source circuit; a heating chamber into which the high-frequency electromagnetic waves are supplied by the high-frequency oscillator; a receiving antenna which is provided outside the heating chamber and adjacent to an opening of the heating chamber; a dielectric plate for covering the opening, which is provided between the heating chamber and the antenna; and a control circuit which receives an output from the antenna via a detector so as to output a control signal to the power source circuit.
    Type: Grant
    Filed: May 22, 1991
    Date of Patent: December 15, 1992
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Shigeru Kusunoki, Takashi Kashimoto, Koji Yoshino
  • Patent number: 5128732
    Abstract: A stacked semiconductor device has three-dimensional alternate layers of iconductor elements and insulating layers each electrically insulating the adjacent upper and lower layers of semiconductor elements, formed on a single crystal semiconductor substrate. A semiconductor is deposited in openings formed respectively in the insulating layers to form single crystal semiconductor layers each having the same crystal axis as the single crystal semiconductor substrate respectively over the insulating layers, and semiconductor elements are formed respectively in a plurality of layers. The opening formed through the upper insulating layer reaches the lower layer of the semiconductor element immediately below the same upper insulating layer, and is formed at a position spaced apart horizontally from the opening formed through the lower insulating layer immediately below the same upper insulating layer.
    Type: Grant
    Filed: May 27, 1988
    Date of Patent: July 7, 1992
    Assignee: Kozo Iizuka, Director General, Agency of Industrial Science & Technology
    Inventors: Kazuyuki Sugahara, Tadashi Nishimura, Shigeru Kusunoki, Yasuo Inoue, Yasuo Yamaguchi
  • Patent number: 5094714
    Abstract: A wafer structure for forming a semiconductor single crystal film comprises a semiconductor single crystal substrate, a plurality of recesses formed in a grooved shape to one main surface of the semiconductor single crystal substrate, insulation material embedded to the inside of these recesses, an insulation layer deposited over the insulation material and the semiconductor single crystal substrate and integrated with the insulation material and a polycrystalline or amorphous semiconductor layer to be recrystallized disposed over the insulation layer.A wafer structure with no or less grain boundaries can be obtained. Further, polycrystalline or amorphous semiconductor layer can be prevented from peeling off the substrate by the additional layering of a protecting insulation layer.
    Type: Grant
    Filed: October 31, 1990
    Date of Patent: March 10, 1992
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tadashi Nishimura, Kazuyuki Sugahara, Shigeru Kusunoki, Yasuo Inoue
  • Patent number: 5091617
    Abstract: A high-frequency heating apparatus comprises an inverter including a semiconductor switch and a resonance capacitor, a boosting transformer for a supplying high-voltage power and heater to a magnetron an inductance device inserted in the heater circuit of the magnetron, and an inverter control unit for controlling the semiconductor switch. The inverter control unit is controlled by a start control at the start time of the inverter so that the conduction time of the semiconductor switch becomes shorter than that under a normal operating condition and the non-conduction time thereof becomes longer than that under a normal operating condition and so that the switching period of the semiconductor switch becomes substantially an integral multiple of a resonance period of the resonance circuit formed by the resonance capacitor, whereby the operating frequency of the inverter at the time of starting thereof becomes substantially equal to its normal operating frequency.
    Type: Grant
    Filed: May 22, 1990
    Date of Patent: February 25, 1992
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Naoyoshi Maehara, Takahiro Matsumoto, Kazuho Sakamoto, Daisuke Bessyo, Takashi Niwa, Shigeru Kusunoki, Takao Shitaya
  • Patent number: 5070030
    Abstract: Disclosed herein is a bipolar transistor and a method of manufacturing the same. The present invention provides a bipolar transistor in which a collector layer, a base layer and an emitter layer are transversely arranged in sequence through a monocrystal silicon layer formed on an insulation layer of a semiconductor substrate and a method of manufacturing the same. According to the present invention, parasitic capacity between a base and a collector can be reduced and p-n junction capacity between the collector and the substrate can be removed, thereby to achieve high-speed operation.
    Type: Grant
    Filed: October 31, 1990
    Date of Patent: December 3, 1991
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tatsuhiko Ikeda, Kazuyuki Sugahara, Shigeru Kusunoki, Kyusaku Nishioka
  • Patent number: 5040037
    Abstract: A SOI-MOSFET formed on a thin semiconductor layer (3) having a thickness not more than 1500.ANG. includes a charge carrier absorbing region (9a, 9b, 9c) contacting with at least a portion of the bottom of a channel region (6) of a first conductivity type and with at least a portion of the bottom of a source region (7, 7a) of a second conductivity type. The carrier absorbing region (9a, 9b, 9c) absorbs excess carriers of the first conductivity type contained in the channel region (6).
    Type: Grant
    Filed: December 11, 1989
    Date of Patent: August 13, 1991
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yasuo Yamaguchi, Shigeru Kusunoki
  • Patent number: 5019520
    Abstract: A method for preparing a MISFET of a minute size with the channel length of not more than 2 .mu.m between a source and a drain, comprises the steps of forming a mask for exposing a region for forming a well on a planar surface of a semiconductor substrate, and introducing ions at a predetermined energy into the well region by using the mask. The predetermined energy is such as to form a peak of the impurity concentration distribution at a position deeper than the bottom surface of the source and the drain and to maintain the layer of at least a partial layer of the channel at an impurity concentration lower than 10.sup.16 cm.sup.-3 so that a high speed carrier movement in the channel is provided without causing a punch-through phenomenon.
    Type: Grant
    Filed: April 30, 1990
    Date of Patent: May 28, 1991
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shigeki Komori, Shigeru Kusunoki, Katsuhiro Tsukamoto
  • Patent number: 5006913
    Abstract: A field effect transistor is formed as a first semiconductor element on a main surface of a first semiconductor layer (1). An interlayer insulating film (10) constituted by a first insulating layer (101) and a second insulating layer (102) is formed on the first semiconductor element. The first insulating layer (101) is formed of a BPSG film having a glass transition point no higher than 750.degree. C. The second insulating layer (102) is formed of a silicon oxide film having a glass transition point higher than 750.degree. C. and a thickness no less than 2000 .ANG. and no more than 1 .mu.m formed on the first insulating layer (101). A second semiconductor layer (11) is formed on the second insulating layer (102) of the interlayer insulating film (10). The second semiconductor layer (11) is formed to be an island, with the peripheral portions isolated. A field effect transistor as a second semiconductor element is formed in the second semiconductor layer (11).
    Type: Grant
    Filed: November 2, 1989
    Date of Patent: April 9, 1991
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Kazuyuki Sugahara, Shigeru Kusunoki, Takashi Ipposhi
  • Patent number: RE33657
    Abstract: In an apparatus which produces high frequency electromagnetic waves, a choke portion is provided in a leakage transmission path, which choke portion has a groove wall corresponding to a grounded conductor, a number of strip conductors arranged with a line width a and a pitch p, and a groove bottom, so as to minimize leakage propagation in the longitudinal direction of the groove. Further, this choke portion is designed so that the characteristic impedance of its portion is changed in a region shorter than .lambda./4 of the frequency to be used. As a result, the depth and .[.width.]. .Iadd.clearance .Iaddend.of the groove can .[.also.]. .Iadd.both .Iaddend.be made less than .lambda./4.
    Type: Grant
    Filed: April 20, 1988
    Date of Patent: August 6, 1991
    Assignee: Matsushita Electric Industrial Co.
    Inventors: Shigeru Kusunoki, Tomotaka Nobue, Takashi Kashimoto