Abstract: A semiconductor device having a well region of a first conduction type formed in a main surface of a semiconductor substrate, and a nonvolatile memory element formed at the well region is provided. The nonvolatile memory element comprises a gate electrode formed over the well region through an insulating film for charge storage, and a source region and drain region of a second conduction type which are separated from each other and are disposed in the well region. The well region includes a third semiconductor region, a second semiconductor region which is arranged at a position deeper than the third semiconductor region, and a first semiconductor region that is arranged at a position deeper than the second semiconductor region. The first and third semiconductor regions, respectively, have an impurity concentration higher than the second semiconductor region.

Abstract: An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof. Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.

Abstract: A nonvolatile storage element of a single-layer gate type structure is arranged so that a floating gate is formed of a conductive layer which partly overlaps with a control gate, formed of a diffused layer, and is provided with a barrier layer covering a part of or the whole surface of the floating gate. Nonvolatile storage elements characterized as such are used for redundancy control of defects or change of functions.

Abstract: A nonvolatile storage element of a single-layer gate type structure is arranged so that a floating gate is formed of a conductive layer which partly overlaps with a control gate, formed of a diffused layer, and is provided with a barrier layer covering a part of or the whole surface of the floating gate. Nonvolatile storage elements characterized as such are used for redundancy control of defects or change of functions.

Abstract: Power is taken out from radio waves through an antenna and a power receiving unit. A signal receiver, a comparator, and an ID signal holder are operated with the taken-out power to compare an ID contained in a received signal with an ID read out from the ID signal holder. When both the ID's are matched with each other, a switch for a main power source is turned on. In trying to remotely operate household electrical appliances by utilizing the Internet that has become increasingly popular, standby power is consumed if the electrical appliances are kept in a standby state at all times. Since power is taken out from radio waves, the invention is able to cut the standby power in an environment where the radio waves are transferred via radio communication that is expected to be more and more prevalent in future.

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles [obtained at] irradiated from a surface portion of said sample [irradiated with] in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample [as viewed from a direction of said charged particle beam source,] based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract: There is provided a semiconductor device, wherein a digital circuit region and an analog circuit region are located independently. A power supply wiring and a ground wiring are placed on the periphery of each circuit region and are connected to elements in each circuit region. A MOS capacitor is formed under the power supply wiring and the ground wiring. The terminals of the MOS capacity are connected to the power supply wiring and the ground wiring. Pads are placed in each circuit region surrounded by the power supply wiring, the ground wiring, and the MOS capacitor and are connected to the elements of each circuit region.

Abstract: A magnetic powder core comprises a molded article of a mixture of a glassy alloy powder and an insulating material. The glassy alloy comprises Fe and at least one element selected from Al, P, C, Si, and B, and has a texture primarily composed of an amorphous phase. The glassy alloy exhibits a temperature difference ?Tx, which is represented by the equation ?Tx=Tx?Tg, of at least 20 K in a supercooled liquid, wherein Tx indicates the crystallization temperature and Tg indicates the glass transition temperature. The magnetic core precursor is produced mixing the glassy alloy powder with the insulating material, compacting the mixture to form a magnetic core precursor, and annealing the magnetic core precursor at a temperature in the range between (Tg?170) K and Tg K to relieve the internal stress of the magnetic core precursor. The glassy alloy exhibits low coercive force and low core loss.

Abstract: An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.

Abstract: An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.

Abstract: A nonvolatile storage element of a single-layer gate type structure is arranged so that a floating gate is formed of a conductive layer which partly overlaps with a control gate, formed of a diffused layer, and is provided with a barrier layer covering a part of or the whole surface of the floating gate. Nonvolatile storage elements characterized as such are used for redundancy control of defects or change of functions.

Abstract: A magnetic powder core comprises a molded article of a mixture of a glassy alloy powder and an insulating material. The glassy alloy comprises Fe and at least one element selected from Al, P, C, Si, and B, and has a texture primarily composed of an amorphous phase. The glassy alloy exhibits a temperature difference &Dgr;Tx, which is represented by the equation &Dgr;Tx=Tx−Tg, of at least 20 K in a supercooled liquid, wherein Tx indicates the crystallization temperature and Tg indicates the glass transition temperature. The magnetic core precursor is produced mixing the glassy alloy powder with the insulating material, compacting the mixture to form a magnetic core precursor, and annealing the magnetic core precursor at a temperature in the range between (Tg−170) K and Tg K to relieve the internal stress of the magnetic core precursor. The glassy alloy exhibits low coercive force and low core loss.

Abstract: A nonvolatile storage element of a single-layer gate type structure is arranged so that a floating gate is formed of a conductive layer which partly overlaps with a control gate, formed of a diffused layer, and is provided with a barrier layer covering a part of or the whole surface of the floating gate. Nonvolatile storage elements characterized as such are used for redundancy control of defects or change of functions.

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles obtained at a portion of said sample irradiated with the charged particle beam, and means for composing a two-dimensional image of the sample as viewed from a direction of said charged particle beam source, based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract: An optical transmission system according to the present invention is directed to achieving higher transmission quality by improving AWG transmission characteristics. An optical wavelength branching unit shifts a wavelength transmission band in the short-wavelength direction or the long-wavelength direction based on a branching filter operation temperature, and performs a branching operation on a wavelength-multiplexed signal. A reception transponder performs decoding on an error correction code. An error correction monitoring unit gathers an error correction amount. A branching filter temperature control unit sets the branching filter operation temperature based on the error correction amount. A transmission transponder performs encoding on an error correction code.

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract: A magnetic powder core comprises a molded article of a mixture of a glassy alloy powder and an insulating material. The glassy alloy comprises Fe and at least one element selected from Al, P, C, Si, and B, and has a texture primarily composed of an amorphous phase. The glassy alloy exhibits a temperature difference &Dgr;Tx, which is represented by the equation &Dgr;Tx=Tx−Tg, of at least 20 K in a supercooled liquid, wherein Tx indicates the crystallization temperature and Tg indicates the glass transition temperature. The magnetic core precursor is produced mixing the glassy alloy powder with the insulating material, compacting the mixture to form a magnetic core precursor, and annealing the magnetic core precursor at a temperature in the range between (Tg−170) K and Tg K to relieve the internal stress of the magnetic core precursor. The glassy alloy exhibits low coercive force and low core loss.

Abstract: A magnetic powder core comprises a molded article of a mixture of a glassy alloy powder and an insulating material. The glassy alloy comprises Fe and at least one element selected from Al, P, C, Si, and B, and has a texture primarily composed of an amorphous phase. The glassy alloy exhibits a temperature difference &Dgr;Tx, which is represented by the equation &Dgr;Tx=Tx−Tg, of at least 20 K in a supercooled liquid, wherein Tx indicates the crystallization temperature and Tg indicates the glass transition temperature. The magnetic core precursor is produced mixing the glassy alloy powder with the insulating material, compacting the mixture to form a magnetic core precursor, and annealing the magnetic core precursor at a temperature in the range between (Tg−170) K and Tg K to relieve the internal stress of the magnetic core precursor. The glassy alloy exhibits low coercive force and low core loss.

Abstract: An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.