Patents by Inventor Uygar E. Avci

Uygar E. Avci has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220181433
    Abstract: Disclosed herein are capacitors including built-in electric fields, as well as related devices and assemblies. In some embodiments, a capacitor may include a top electrode region, a bottom electrode region, and a dielectric region between and in contact with the top electrode region and the bottom electrode region, wherein the dielectric region includes a perovskite material, and the top electrode region has a different material structure than the bottom electrode region.
    Type: Application
    Filed: December 9, 2020
    Publication date: June 9, 2022
    Applicant: Intel Corporation
    Inventors: Sou-Chi Chang, Chia-Ching Lin, Kaan Oguz, I-Cheng Tung, Uygar E. Avci, Matthew V. Metz, Ashish Verma Penumatcha, Ian A. Young, Arnab Sen Gupta
  • Patent number: 11355505
    Abstract: Techniques and mechanisms to provide a memory array comprising a 1T1C (one transistor and one capacitor) based memory cell. In an embodiment, the memory cell comprises a transistor, fabricated on a backend of a die, and a capacitor which includes a ferroelectric material. The transistor of the 1T1C memory cell is a vertical transistor. In another embodiment, the capacitor is positioned vertically over the transistor.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: June 7, 2022
    Assignee: Intel Corporation
    Inventors: Daniel H. Morris, Uygar E. Avci, Ian A. Young
  • Patent number: 11355504
    Abstract: Described herein are anti-ferroelectric (AFE) memory cells and corresponding methods and devices. For example, in some embodiments, an AFE memory cell disclosed herein includes a capacitor employing an AFE material between two capacitor electrodes. Applying a voltage to one electrode of such capacitor allows boosting the charge at the other electrode, where nonlinear behavior of the AFE material between the two electrodes may advantageously manifest itself in that, for a given voltage applied to the first electrode, a factor by which the charge is boosted at the second electrode of the capacitor may be substantially different for different values of charge at that electrode before the boost. Connecting the second capacitor electrode to a storage node of the memory cell may then allow boosting the charge on the storage node so that different logic states of the memory cell become more clearly resolvable, enabling increased retention times.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: June 7, 2022
    Assignee: Intel Corporation
    Inventors: Daniel H. Morris, Uygar E. Avci, Ian A. Young
  • Publication number: 20220149192
    Abstract: Thin film transistors having electrostatic double gates are described. In an example, an integrated circuit structure includes an insulator layer above a substrate. A first gate stack is on the insulator layer. A 2D channel material layer is on the first gate stack. A second gate stack is on a first portion of the 2D channel material layer, the second gate stack having a first side opposite a second side. A first conductive contact is adjacent the first side of the second gate stack, the first conductive contact on a second portion of the 2D channel material layer. A second conductive contact is adjacent the second side of the second gate stack, the second conductive contact on a third portion of the 2D channel material layer. A gate electrode of the first gate stack extends beneath a portion of the first conductive contact and beneath a portion of the second conductive contact.
    Type: Application
    Filed: November 9, 2020
    Publication date: May 12, 2022
    Inventors: Kirby MAXEY, Ashish Verma PENUMATCHA, Carl NAYLOR, Chelsey DOROW, Kevin P. O'BRIEN, Shriram SHIVARAMAN, Tanay GOSAVI, Uygar E. AVCI, Sudarat LEE
  • Publication number: 20220123151
    Abstract: Described is an apparatus which comprises: a first layer comprising a semiconductor; a second layer comprising an insulating material, the second layer adjacent to the first layer; a third layer comprising a high-k insulating material, the third layer adjacent to the second layer; a fourth layer comprising a ferroelectric material, the fourth layer adjacent to the third layer; and a fifth layer comprising a high-k insulating material, the fifth layer adjacent to the fourth layer.
    Type: Application
    Filed: December 15, 2021
    Publication date: April 21, 2022
    Applicant: Intel Corporation
    Inventors: Uygar E. Avci, Joshua M. Howard, Seiyon Kim, Ian A. Young
  • Publication number: 20220102499
    Abstract: Disclosed herein are transistors including two-dimensional materials, as well as related methods and devices. In some embodiments, a transistor may include a first two-dimensional channel material and a second two-dimensional source/drain (S/D) material in a source/drain (S/D), and the first two-dimensional material and the second two-dimensional material may have different compositions or thicknesses. In some embodiments, a transistor may include a first two-dimensional material in a channel and a second two-dimensional material in a source/drain (S/D), wherein the first two-dimensional material is a single-crystal material, and the second two-dimensional material is a single-crystal material.
    Type: Application
    Filed: September 25, 2020
    Publication date: March 31, 2022
    Applicant: INTEL CORPORATION
    Inventors: Carl Hugo Naylor, Kevin P. O'Brien, Chelsey Jane Dorow, Kirby Kurtis Maxey, Tanay Arun Gosavi, Ashish Verma Penumatcha, Urusa Shahriar Alaan, Uygar E. Avci
  • Publication number: 20220102495
    Abstract: Disclosed herein are transistors including two-dimensional materials, as well as related methods and devices. In some embodiments, a transistor may include a first two-dimensional channel material and a second two-dimensional source/drain (S/D) material in a source/drain (S/D), and the first two-dimensional material and the second two-dimensional material may have different compositions or thicknesses. In some embodiments, a transistor may include a first two-dimensional material in a channel and a second two-dimensional material in a source/drain (S/D), wherein the first two-dimensional material is a single-crystal material, and the second two-dimensional material is a single-crystal material.
    Type: Application
    Filed: September 25, 2020
    Publication date: March 31, 2022
    Applicant: Intel Corporation
    Inventors: Kirby Kurtis Maxey, Ashish Verma Penumatcha, Carl Hugo Naylor, Chelsey Jane Dorow, Kevin P. O'Brien, Shriram Shivaraman, Tanay Arun Gosavi, Uygar E. Avci
  • Publication number: 20220068931
    Abstract: Described herein are IC devices that include semiconductor nanoribbons stacked over one another to realize high-density three-dimensional (3D) dynamic random-access memory (DRAM). An example device includes a first semiconductor nanoribbon, a second semiconductor nanoribbon, a first source or drain (S/D) region and a second S/D region in each of the first and second nanoribbons, a first gate stack at least partially surrounding a portion of the first nanoribbon between the first and second S/D regions in the first nanoribbon, and a second gate stack, not electrically coupled to the first gate stack, at least partially surrounding a portion of the second nanoribbon between the first and second S/D regions in the second nanoribbon. The device further includes a bitline coupled to the first S/D regions of both the first and second nanoribbons.
    Type: Application
    Filed: November 9, 2021
    Publication date: March 3, 2022
    Applicant: Intel Corporation
    Inventors: Wilfred Gomes, Kinyip Phoa, Mauro J. Kobrinsky, Tahir Ghani, Uygar E. Avci, Rajesh Kumar
  • Publication number: 20220068794
    Abstract: Metal insulator metal capacitors are described. In an example, a capacitor includes a first electrode plate, and a first capacitor dielectric on the first electrode plate. A second electrode plate is on the first capacitor dielectric and is over and parallel with the first electrode plate, and a second capacitor dielectric is on the second electrode plate. A third electrode plate is on the second capacitor dielectric and is over and parallel with the second electrode plate, and a third capacitor dielectric is on the third electrode plate. A fourth electrode plate is on the third capacitor dielectric and is over and parallel with the third electrode plate. In another example, a capacitor includes a first electrode, a capacitor dielectric on the first electrode, and a second electrode on the capacitor dielectric. The capacitor dielectric includes a plurality of alternating first dielectric layers and second dielectric layers.
    Type: Application
    Filed: December 21, 2020
    Publication date: March 3, 2022
    Inventors: Aaron J. WELSH, Christopher M. PELTO, David J. TOWNER, Mark A. BLOUNT, Takayoshi ITO, Dragos SEGHETE, Christopher R. RYDER, Stephanie F. SUNDHOLM, Chamara ABEYSEKERA, Anil W. DEY, Che-Yun LIN, Uygar E. AVCI
  • Patent number: 11257822
    Abstract: Described herein are IC devices that include semiconductor nanoribbons stacked over one another to realize high-density three-dimensional (3D) dynamic random-access memory (DRAM). An example device includes a first semiconductor nanoribbon, a second semiconductor nanoribbon, a first source or drain (S/D) region and a second S/D region in each of the first and second nanoribbons, a first gate stack at least partially surrounding a portion of the first nanoribbon between the first and second S/D regions in the first nanoribbon, and a second gate stack, not electrically coupled to the first gate stack, at least partially surrounding a portion of the second nanoribbon between the first and second S/D regions in the second nanoribbon. The device further includes a bitline coupled to the first S/D regions of both the first and second nanoribbons.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: February 22, 2022
    Assignee: Intel Corporation
    Inventors: Wilfred Gomes, Kinyip Phoa, Mauro J. Kobrinsky, Tahir Ghani, Uygar E. Avci, Rajesh Kumar
  • Patent number: 11239361
    Abstract: Described is an apparatus which comprises: a first layer comprising a semiconductor; a second layer comprising an insulating material, the second layer adjacent to the first layer; a third layer comprising a high-k insulating material, the third layer adjacent to the second layer; a fourth layer comprising a ferroelectric material, the fourth layer adjacent to the third layer; and a fifth layer comprising a high-k insulating material, the fifth layer adjacent to the fourth layer.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: February 1, 2022
    Assignee: Intel Corporation
    Inventors: Uygar E. Avci, Joshua M. Howard, Seiyon Kim, Ian A. Young
  • Patent number: 11232832
    Abstract: One embodiment provides an apparatus. The apparatus includes a first inverter comprising a first pull up transistor and a first pull down transistor; a second inverter cross coupled to the first inverter, the second inverter comprising a second pull up transistor and a second pull down transistor; a first access transistor coupled to the first inverter; and a second access transistor coupled to the second inverter. A gate electrode of one transistor of each inverter comprises a polarization layer.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: January 25, 2022
    Assignee: Intel Corporation
    Inventors: Daniel H. Morris, Uygar E. Avci, Ian A. Young
  • Publication number: 20210408288
    Abstract: Embodiments disclosed herein comprise semiconductor devices with two dimensional (2D) semiconductor channels and methods of forming such devices. In an embodiment, the semiconductor device comprises a source contact and a drain contact. In an embodiment, a 2D semiconductor channel is between the source contact and the drain contact. In an embodiment, the 2D semiconductor channel is a shell.
    Type: Application
    Filed: June 26, 2020
    Publication date: December 30, 2021
    Inventors: Kevin P. O'Brien, Carl NAYLOR, Chelsey DOROW, Kirby MAXEY, Tanay GOSAVI, Ashish Verma PENUMATCHA, Shriram SHIVARAMAN, Chia-Ching LIN, Sudarat LEE, Uygar E. AVCI
  • Publication number: 20210398993
    Abstract: Described herein are ferroelectric (FE) memory cells that include transistors having gate stacks separate from FE capacitors of these cells. An example memory cell may be implemented as an IC device that includes a support structure (e.g., a substrate) and a transistor provided over the support structure and including a gate stack. The IC device also includes a FE capacitor having a first capacitor electrode, a second capacitor electrode, and a capacitor insulator of a FE material between the first capacitor electrode and the second capacitor electrode, where the FE capacitor is separate from the gate stack (i.e., is not integrated within the gate stack and does not have any layers that are part of the gate stack). The IC device further includes an interconnect structure, configured to electrically couple the gate stack and the first capacitor electrode.
    Type: Application
    Filed: June 19, 2020
    Publication date: December 23, 2021
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Shriram Shivaraman, Sou-Chi Chang, Jack T. Kavalieros, Uygar E. Avci, Chia-Ching Lin, Seung Hoon Sung, Ashish Verma Penumatcha, Ian A. Young, Devin R. Merrill, Matthew V. Metz, I-Cheng Tung
  • Publication number: 20210391478
    Abstract: Embodiments include two-dimensional (2D) semiconductor sheet transistors and methods of forming such devices. In an embodiment, a semiconductor device comprises a stack of 2D semiconductor sheets, where individual ones of the 2D semiconductor sheets have a first end and a second end opposite from the first end. In an embodiment, a first spacer is over the first end of the 2D semiconductor sheets, and a second spacer is over the second end of the 2D semiconductor sheets. Embodiments further comprise a gate electrode between the first spacer and the second spacer, a source contact adjacent to the first end of the 2D semiconductor sheets, and a drain contact adjacent to the second end of the 2D semiconductor sheets.
    Type: Application
    Filed: June 15, 2020
    Publication date: December 16, 2021
    Inventors: Kirby MAXEY, Chelsey DOROW, Kevin P. O'BRIEN, Carl NAYLOR, Ashish Verma PENUMATCHA, Tanay GOSAVI, Uygar E. AVCI, Shriram SHIVARAMAN
  • Patent number: 11107908
    Abstract: Embodiments herein describe techniques for a semi-conductor device comprising a channel having a first semiconductor material; a source contact coupled to the channel, comprising a first Heusler alloy; and a drain contact coupled to the channel, comprising a second Heusler alloy. The first Heusler alloy is lattice-matched to the first semiconductor material within a first predetermined threshold. A first Schottky barrier between the channel and the source contact, and a second Schottky barrier between the channel and the drain contact are negative, or smaller than another predetermined threshold. The source contact and the drain contact can be applied to a strained silicon transistor, an III-V transistor, a tunnel field-effect transistor, a dichalcogenide (MX2) transistor, and a junctionless nanowire transistor.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: August 31, 2021
    Assignee: Intel Corporation
    Inventors: Sasikanth Manipatruni, Anurag Chaudhry, Dmitri E. Nikonov, Jasmeet S. Chawla, Christopher J. Wiegand, Kanwaljit Singh, Uygar E. Avci, Ian A. Young
  • Patent number: 11056593
    Abstract: Techniques are disclosed for forming semiconductor integrated circuits including one or more of source and drain contacts and gate electrodes comprising crystalline alloys including a transition metal. The crystalline alloys help to reduce contact resistance to the semiconductor devices. In some embodiments of the present disclosure, this reduction in contact resistance is accomplished by aligning the work function of the crystalline alloy with the work function of the source and drain regions such that a Schottky barrier height associated with an interface between the crystalline alloys and the source and drain regions is in a range of 0.3 eV or less.
    Type: Grant
    Filed: September 12, 2017
    Date of Patent: July 6, 2021
    Assignee: Intel Corporation
    Inventors: Sasikanth Manipatruni, Dmitri E. Nikonov, Uygar E. Avci, Christopher J. Wiegand, Anurag Chaudhry, Jasmeet S. Chawla, Ian A Young
  • Publication number: 20210167073
    Abstract: A device is disclosed. The device includes a substrate that includes a base portion and a fin portion that extends upward from the base portion, an insulator layer on sides and top of the fin portion, a first conductor layer on a first side surface of the insulator layer, a second conductor layer on a second side surface of the insulator layer, and a ferroelectric layer on portions of a top surface of the base portion, a portion of the insulator layer below the first conductor layer, a side and top surface of the first conductor layer, a top surface of the insulator layer above the fin portion, a side and top surface of the second conductor layer, and a portion of the insulator layer below the second conductor layer. A word line conductor is on the top surface of the ferroelectric layer.
    Type: Application
    Filed: December 2, 2019
    Publication date: June 3, 2021
    Inventors: Shriram Shivaraman, Seung Hoon Sung, Ashish Verma Penumatcha, Uygar E. Avci
  • Publication number: 20210167182
    Abstract: A integrated circuit structure comprises a fin extending from a substrate. The fin comprises source and drain regions and a channel region between the source and drain regions. A multilayer high-k gate dielectric stack comprises at least a first high-k material and a second high-k material, the first high-k material extending conformally over the fin over the channel region, and the second high-k material conformal to the first high-k material, wherein either the first high-k material or the second high-k material has a modified material property different from the other high-k material, wherein the modified material property comprises at least one of ferroelectricity, crystalline phase, texturing, ordering orientation of the crystalline phase or texturing to a specific crystalline direction or plane, strain, surface roughness, and lattice constant and combinations thereof. A gate electrode ix over and on a topmost high-k material in the multilayer high-k gate dielectric stack.
    Type: Application
    Filed: December 2, 2019
    Publication date: June 3, 2021
    Inventors: Seung Hoon SUNG, Ashish Verma PENUMATCHA, Sou-Chi CHANG, Devin MERRILL, I-Cheng TUNG, Nazila HARATIPOUR, Jack T. KAVALIEROS, Ian A. YOUNG, Matthew V. METZ, Uygar E. AVCI, Chia-Ching LIN, Owen LOH, Shriram SHIVARAMAN, Eric Charles MATTSON
  • Publication number: 20210159229
    Abstract: Described herein are IC devices that include semiconductor nanoribbons stacked over one another to realize high-density three-dimensional (3D) dynamic random-access memory (DRAM). An example device includes a first semiconductor nanoribbon, a second semiconductor nanoribbon, a first source or drain (S/D) region and a second S/D region in each of the first and second nanoribbons, a first gate stack at least partially surrounding a portion of the first nanoribbon between the first and second S/D regions in the first nanoribbon, and a second gate stack, not electrically coupled to the first gate stack, at least partially surrounding a portion of the second nanoribbon between the first and second S/D regions in the second nanoribbon. The device further includes a bitline coupled to the first S/D regions of both the first and second nanoribbons.
    Type: Application
    Filed: November 21, 2019
    Publication date: May 27, 2021
    Applicant: Intel Corporation
    Inventors: Wilfred Gomes, Kinyip Phoa, Mauro J. Kobrinsky, Tahir Ghani, Uygar E. Avci, Rajesh Kumar