Patents by Inventor Volker Dudek
Volker Dudek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190326446Abstract: A stacked III-V semiconductor diode having an n+-layer with a dopant concentration of at least 1019 N/cm3, an n?-layer with a dopant concentration of 1012 -1016 N/cm3, a layer thickness of 10-300 microns, a p+-layer with a dopant concentration of 5×1018-5×1020 cm3, with a layer thickness greater than 2 microns, wherein said layers follow one another in the sequence mentioned, each comprising a GaAs compound. The n+-layer or the p+-layer is formed as the substrate and a lower side of the n?-layer is materially bonded with an upper side of the n+-layer, and a doped intermediate layer is arranged between the n?-layer and the p+-layer and materially bonded with an upper side and a lower side.Type: ApplicationFiled: July 1, 2019Publication date: October 24, 2019Applicant: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Publication number: 20190312151Abstract: A stacked III-V semiconductor component having a stack with a top, a bottom, a side surface, and a longitudinal axis. The stack has a p+ region, an n? layer, and an n+ region. The p+ region, the n? layer, and the n+ region follow one another in the specified order along the longitudinal axis and are monolithic in design, and include a GaAs compound. The n+ region or the p+ region is a substrate layer. The stack has, in the region of the side surface, a first and a second peripheral, shoulder-like edge. The first edge is composed of the substrate layer; the second edge is composed of the n? layer or of an intermediate layer adjacent to the n? layer and to the p+ region and the first and the second peripheral edges each have a width of at least 10 ?m.Type: ApplicationFiled: April 9, 2019Publication date: October 10, 2019Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Publication number: 20190221676Abstract: A stacked III-V semiconductor diode having an n? layer having a first surface, a second surface, a dopant concentration of 1012 N/cm3 to 1017 N/cm3 and a layer thickness of 50 ?m to 1,000 ?m, a p+ layer, which is integrally connected to the first surface and has a dopant concentration of 5·1018 N/cm3 to 5·1020 N/cm3, an n+ layer, which is integrally connected to the second surface and has a dopant concentration of at least 1019 N/cm3. The p+ layer, the n? layer and the n+ layer each having a monolithic design and each being made up of a GaAs compound. The dopant concentration of the n? layer having a first value on the first surface and a second value on the second surface, and the second value of the dopant concentration being greater than the first value at least by a factor between 1.5 and 2.5.Type: ApplicationFiled: January 18, 2019Publication date: July 18, 2019Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Patent number: 10340394Abstract: A stacked III-V semiconductor diode having an n+-layer with a dopant concentration of at least 1019 N/cm3, an n?-layer with a dopant concentration of 1012-1016 N/cm3, a layer thickness of 10-300 microns, a p+-layer with a dopant concentration of 5×1018-5×1020 cm3, with a layer thickness greater than 2 microns, wherein said layers follow one another in the sequence mentioned, each comprising a GaAs compound. The n+-layer or the p+-layer is formed as the substrate and a lower side of the n?-layer is materially bonded with an upper side of the n+-layer, and a doped intermediate layer is arranged between the n?-layer and the p+-layer and materially bonded with an upper side and a lower side.Type: GrantFiled: March 23, 2018Date of Patent: July 2, 2019Assignee: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Publication number: 20190198625Abstract: A stacked III-V semiconductor component having a p+ region with a top side, a bottom side, and a dopant concentration of 5·1018-5·1020 N/cm3, a first n? layer with a top side and a bottom side, a dopant concentration of 1012-1017 N/cm3, and a layer thickness of 10-300 ?m, an n+ region with a top side, a bottom side, and a dopant concentration of at least 1018 N/cm3, wherein the p+ regions, the n? layer, and the n+ region follow one another in the stated order, are each formed monolithically, and each comprise a GaAs compound or consist of a GaAs compound, the n+ region or the p+ region is formed as the substrate layer, and the n? layer comprises chromium with a concentration of at least 1014 N/cm3 or at least 1015 N/cm3.Type: ApplicationFiled: December 21, 2018Publication date: June 27, 2019Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Patent number: 10312381Abstract: A stacked III-V semiconductor diode that has an n+ layer having a dopant concentration of at least 1019 N/cm3, an n? layer having a dopant concentration of 1012 N/cm3 to 1016 N/cm3, a layer thickness of 10 ?m to 300 ?m, a p+ layer having a dopant concentration of 5·1018 N/cm3 to 5·1020 cm3 and a layer thickness greater than 2 ?m, the layers following each other in the specified order, each including a GaAs compound or being made from a GaAs compound and having a monolithic design, the n+ layer or the p+ layer being a substrate, and a lower side of the n? layer being integrally connected to an upper side of the n+ layer. The stacked III-V semiconductor diode including a first defect layer having a layer thickness greater than 0.5 ?m, the defect layer being situated within the n? layer.Type: GrantFiled: March 26, 2018Date of Patent: June 4, 2019Assignee: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Patent number: 10276730Abstract: A stacked Schottky-diode having a stack with a top side and a bottom side. The stack has at least three semiconductor layers, and a first connection contact layer materially connected to the bottom side of the stack. A second connection contact layer is connected to the top side of the stack, wherein the second connection contact layer forms a Schottky contact. The second connection contact layer is disposed in a partial region of the top side and the second connection contact layer is bounded by edges. The first semiconductor layer, formed as an n+ layer, is placed on the bottom side of the stack and the first semiconductor layer. A second semiconductor layer, formed as an n? layer, is placed on the first semiconductor layer. A third semiconductor layer formed as a p? layer is placed on the second semiconductor layer.Type: GrantFiled: November 14, 2017Date of Patent: April 30, 2019Assignee: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Patent number: 10263124Abstract: A stacked III-V semiconductor diode having an n+ substrate with a dopant concentration of at least 1019 cm?3 and a layer thickness of 50-400 ?m, an n? layer with a dopant concentration of 1012-1016 cm?3 and a layer thickness of 10-300 ?m, a p+ layer with a dopant concentration of 5·1018-5·1020 cm?3, including a GaAs compound and with a layer thickness greater than 2 ?m, wherein the n+ substrate and the n? layer are integrally joined to one another. A doped intermediate layer with a layer thickness of 1-50 ?m and a dopant concentration of 1012-1017 cm?3 is arranged between the n? layer and the p+ layer, and the intermediate layer is integrally joined to the n? layer and to the p+ layer.Type: GrantFiled: November 14, 2017Date of Patent: April 16, 2019Assignee: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Patent number: 10192745Abstract: A method for manufacturing a layer stack having a p+-substrate, a p?-layer, an n?-layer and a third layer. A first partial stack and a second partial stack is produced, and an upper side of the first partial stack is integrally bonded with an upper side of the second partial stack , and the first partial stack has at least the p+-substrate. The second partial stack has at least the n?-layer, and the p?-layer is produced by epitaxy or implantation on an upper side of the p+-substrate or by epitaxy on the n?-layer. The p?-layer forms the upper side of the first partial stack or the second partial stack. The third layer is produced prior to or after the wafer bonding, and the n?-layer is produced after the wafer bonding by abrading an n?-substrate or prior to the wafer bonding on an n+-substrate.Type: GrantFiled: December 18, 2017Date of Patent: January 29, 2019Assignee: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Publication number: 20180277687Abstract: A stacked III-V semiconductor diode that has an n+ layer having a dopant concentration of at least 1019 N/cm3, an n? layer having a dopant concentration of 1012 N/cm3 to 1016 N/cm3, a layer thickness of 10 ?m to 300 ?m, a p+ layer having a dopant concentration of 5·1018 N/cm3 to 5·1020 cm3 and a layer thickness greater than 2 ?m, the layers following each other in the specified order, each including a GaAs compound or being made from a GaAs compound and having a monolithic design, the n+ layer or the p+ layer being a substrate, and a lower side of the n? layer being integrally connected to an upper side of the n+ layer. The stacked III-V semiconductor diode including a first defect layer having a layer thickness greater than 0.5 ?m, the defect layer being situated within the n? layer.Type: ApplicationFiled: March 26, 2018Publication date: September 27, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Publication number: 20180277686Abstract: A stacked III-V semiconductor diode having an n+-layer with a dopant concentration of at least 1019 N/cm3, an n?-layer with a dopant concentration of 1012-1016 N/cm3, a layer thickness of 10-300 microns, a p+-layer with a dopant concentration of 5×1018-5×1020 cm3, with a layer thickness greater than 2 microns, wherein said layers follow one another in the sequence mentioned, each comprising a GaAs compound. The n+-layer or the p+-layer is formed as the substrate and a lower side of the n?-layer is materially bonded with an upper side of the n+-layer, and a doped intermediate layer is arranged between the n?-layer and the p+-layer and materially bonded with an upper side and a lower side.Type: ApplicationFiled: March 23, 2018Publication date: September 27, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Patent number: 10074540Abstract: A stacked III-V semiconductor diode having a p+ substrate with a dopant concentration of 5*1018 to 5*1020 cm?3, a layer thickness of 50-500 ?m, and formed of a GaAs compound, an n?-layer with a dopant concentration of 1014-1016 cm?3, a layer thickness of 10-300 ?m, and formed of a GaAs compound, an n+ layer with a dopant concentration of at least 1019 cm?3, a layer thickness less than 2 ?m and formed of a GaAs compound, wherein the n? layer and the n+ layer are materially connected to one another, a doped intermediate layer with a layer thickness of 5-50 ?m and a dopant concentration of 1015-1017 cm?3 is placed between the p+ substrate and the n? layer, and the intermediate layer is materially connected to the p+ substrate and to the n? layer.Type: GrantFiled: November 14, 2017Date of Patent: September 11, 2018Assignee: 3-5 Power Electronics GmbHInventor: Volker Dudek
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Publication number: 20180182874Abstract: IGBT semiconductor structure having a p+ substrate, an n? layer, at least one p region adjacent to the n? layer, and at least one n+ region adjacent to the p region, a dielectric layer and three terminal contacts. The p region forms a first p-n junction together with the n? layer, and the n+ region forms a second p-n junction together with the at least one p region. The dielectric layer covers the first p-n junction and the second p-n junction. The second terminal contact is implemented as a field plate on the dielectric layer and a doped intermediate layer with a layer thickness of 1 ?m-50 ?m and a dopant concentration of 1012-1017 cm?3 is arranged between the p+ substrate and the n? layer, wherein the intermediate layer is integrally joined to at least the p+ substrate.Type: ApplicationFiled: December 28, 2017Publication date: June 28, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Publication number: 20180174841Abstract: A method for manufacturing a layer stack having a p+-substrate, a p?-layer, an n?-layer and a third layer. A first partial stack and a second partial stack is produced, and an upper side of the first partial stack is integrally bonded with an upper side of the second partial stack , and the first partial stack has at least the p+-substrate. The second partial stack has at least the n?-layer, and the p?-layer is produced by epitaxy or implantation on an upper side of the p+-substrate or by epitaxy on the n? layer. The p?-layer forms the upper side of the first partial stack or the second partial stack. The third layer is produced prior to or after the wafer bonding, and the n?-layer is produced after the wafer bonding by abrading an n?-substrate or prior to the wafer bonding on an n+-substrate.Type: ApplicationFiled: December 18, 2017Publication date: June 21, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Publication number: 20180138043Abstract: A stacked III-V semiconductor diode having a p+ substrate with a dopant concentration of 5*1018 to 5*1020 cm?3, a layer thickness of 50-500 ?m, and formed of a GaAs compound, an n?-layer with a dopant concentration of 1014-1016 cm?3, a layer thickness of 10-300 ?m, and formed of a GaAs compound, an n+ layer with a dopant concentration of at least 1019 cm?3, a layer thickness less than 2 ?m and formed of a GaAs compound, wherein the n? layer and the n+ layer are materially connected to one another, a doped intermediate layer with a layer thickness of 5-50 ?m and a dopant concentration of 1015-1017 cm?3 is placed between the p+ substrate and the n? layer, and the intermediate layer is materially connected to the p+ substrate and to the n? layer.Type: ApplicationFiled: November 14, 2017Publication date: May 17, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Publication number: 20180138321Abstract: A stacked Schottky-diode having a stack with a top side and a bottom side. The stack has at least three semiconductor layers, and a first connection contact layer materially connected to the bottom side of the stack. A second connection contact layer is connected to the top side of the stack, wherein the second connection contact layer forms a Schottky contact. The second connection contact layer is disposed in a partial region of the top side and the second connection contact layer is bounded by edges. The first semiconductor layer, formed as an n+ layer, is placed on the bottom side of the stack and the first semiconductor layer. A second semiconductor layer, formed as an n? layer, is placed on the first semiconductor layer. A third semiconductor layer formed as a p? layer is placed on the second semiconductor layer.Type: ApplicationFiled: November 14, 2017Publication date: May 17, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Publication number: 20180138320Abstract: A stacked III-V semiconductor diode having an n+ substrate with a dopant concentration of at least 1019 cm?3 and a layer thickness of 50-400 ?m, an n? layer with a dopant concentration of 1012-1016 cm?3 and a layer thickness of 10-300 ?m, a p+ layer with a dopant concentration of 5·1018-5·1020 cm?3, including a GaAs compound and with a layer thickness greater than 2 ?m, wherein the n+ substrate and the n? layer are integrally joined to one another. A doped intermediate layer with a layer thickness of 1-50 ?m and a dopant concentration of 1012-1017 cm?3 is arranged between the n? layer and the p+ layer, and the intermediate layer is integrally joined to the n? layer and to the p+ layer.Type: ApplicationFiled: November 14, 2017Publication date: May 17, 2018Applicant: 3-5 Power Electronics GmbHInventor: Volker DUDEK
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Patent number: 8378414Abstract: By aligning the primary flat of a wafer with a (100) plane rather than a (110) plane, devices can be formed with primary currents flowing along the (100) plane. In this case, the device will intersect the (111) plane at approximately 54.7 degrees. This intersect angle significantly reduces stress propagation/relief along the (111) direction and consequently reduces defects as well as leakage and parasitic currents. The leakage current reduction is a direct consequence of the change in the dislocation length required to short the source-drain junction. By using this technique the leakage current is reduced by up to two orders of magnitude for an N-channel CMOS device.Type: GrantFiled: June 30, 2011Date of Patent: February 19, 2013Assignee: Atmel CorporationInventors: Gayle W. Miller, Volker Dudek, Michael Graf
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Patent number: 8093640Abstract: A method and system for fabricating a stacked capacitor and a DMOS transistor are disclosed. In one aspect, the method and system include providing a bottom plate, an insulator, and an additional layer including first and second plates. The insulator covers at least a portion of the bottom plate and resides between the first and second top plates and the bottom plate. The first and second top plates are electrically coupled through the bottom plate. In another aspect, the method and system include forming a gate oxide. The method and system also include providing SV well(s) after the gate oxide is provided. A portion of the SV well(s) resides under a field oxide region of the device. Each SV well includes first, second, and third implants having a sufficient energy to provide the portion of the SV well at a desired depth under the field oxide region without significant additional thermal processing. A gate, source, and drain are also provided.Type: GrantFiled: July 13, 2009Date of Patent: January 10, 2012Assignee: Atmel CorporationInventors: Stefan Schwantes, Volker Dudek, Michael Graf, Alan Renninger, James Shen
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Publication number: 20110260250Abstract: By aligning the primary flat of a wafer with a (100) plane rather than a (110) plane, devices can be formed with primary currents flowing along the (100) plane. In this case, the device will intersect the (111) plane at approximately 54.7 degrees. This intersect angle significantly reduces stress propagation/relief along the (111) direction and consequently reduces defects as well as leakage and parasitic currents. The leakage current reduction is a direct consequence of the change in the dislocation length required to short the source-drain junction. By using this technique the leakage current is reduced by up to two orders of magnitude for an N-channel CMOS device.Type: ApplicationFiled: June 30, 2011Publication date: October 27, 2011Applicant: ATMEL CORPORATIONInventors: Gayle W. Miller, Volker Dudek, Michael Graf