VACUUM TUBE AND VACUUM TUBE MANUFACTURING APPARATUS AND METHOD
With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.
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Japan Priority Application 2004-102364, filed Mar. 31, 2004 including the specification, drawings, claims and abstract, is incorporated herein by reference in its entirety. This application is a Divisional of U.S. application Ser. No. 10/594,896 (National Stage of PCT/JP2005/006258), filed Sep. 29, 2006, incorporated herein by reference in its entirety.
BACKGROUND OF THE INVENTION1. Technical Field
This invention relates to a vacuum tube, such as a fluorescent tube, a cold cathode tube, or an electron beam tube, that has been widely used.
2. Background Art
Such a vacuum tube is put into an active state by filling a discharge gas for electric discharge into a reduced-pressure vessel and by causing the electric discharge to occur by applying the electric power from internal or external electrodes. As the kinds of electric discharges, there are various types such as arc discharge, glow discharge, and electron beam emission, but they are the same in that the operation is carried out by supplying the electric power to the reduced-pressure vessel. There are various methods for applying the electric power, various electrode layouts, and so on depending on uses. Generally, there are also various types such that electrons are emitted from a hot cathode, electrons are extracted by applying an electric field to an electron emitting electrode, and so on. Dc power or ac power is given as the electric power and selection is made according to the combination of electrodes with the electric power together with uses.
Patent Document 1:
- Japanese Unexamined Patent Application Publication (JP-A) No. 11-500859
A problem arises with respect to a vacuum tube such that the electrode lifetime is reduced or the discharge efficiency is lowered due to the influence of moisture or an organic gas remaining in a reduced-pressure vessel. The reduction in discharge efficiency causes a problem of a reduction in light emission luminance or the like in a fluorescent lamp or a cold cathode tube. With respect to a deuterium discharge tube, there arises a problem that filled hydrogen, moisture, oxygen, and an organic gas react together to reduce the amount of hydrogen and hence the light emission luminance is lowered or a problem that the lifetime of an electron emitting electrode is reduced. Further, with respect to an electron beam tube, such as an X-ray generating tube or the like, there arises a problem that the lifetime of an electron emitting electrode is reduced. With respect to an ultraviolet generator, a static electricity neutralizer, or the like using a deuterium discharge tube or an X-ray generating tube, there arises a problem such that the static electricity neutralizing performance is lowered due to a reduction in lifetime of a vacuum tube or a reduction in light emission luminance/dose, thus leading to a reduction in product quality due to the static electricity.
With respect to the foregoing problems, there is known a method of introducing an adsorbent (getter) or the like into a vacuum tube, thereby adsorbing the foregoing impurities. However, there arises a problem, such as, an increase in production cost, an increase in the number of processes with an activation process or the like, or a reduction in getter lifetime.
As the vacuum tube using the getter, there is a vacuum tube described in Patent Document 1 or the like.
Means for Solving the ProblemThis invention has been made in view of the foregoing problems and provides a vacuum tube with a small amount of a remnants, such as an organic gas, moisture, and oxygen that cause a reduction in performance of the vacuum tube, and a method and apparatus for manufacturing such a vacuum tube.
A vacuum tube of this invention is a vacuum tube having a reduced-pressure vessel containing at least a discharge gas sealed therein for use in performing electric discharge and is characterized in that the sum total of the number of organic gas molecules, the number of water molecules, and the number of oxygen molecules remaining inside the reduced-pressure vessel is smaller than the number of molecules of the discharge gas. The ratio of the number of molecules of the discharge gas to the sum total of the number of organic gas molecules and the number of water molecules is preferably as large as possible and is preferably not smaller than ten times. It is more preferable that the number of water molecules adsorbed on the inner wall of the reduced-pressure vessel is not greater than 1×1016 molecules/cm2.
Further, in the vacuum tube of this invention, although the discharge gas is not particularly limited, it is preferable to use a gas that is used as a discharge gas and it is more preferable that a gas/gases selected from the group consisting of He, Ne, Ar, Kr, Xe, H2, and D2 be used alone or mixed together. The material of the reduced-pressure vessel is not particularly limited as long as it is a transparent material, but it is preferable to use silicon oxide as a main component in terms of its emitting moisture amount and workability.
Effect of the InventionA vacuum tube manufacturing apparatus of this invention can obtain a vacuum tube with no reduction of lifetime because it is possible to suppress the amount of impurities such as moisture and organic matter remaining in the manufactured vacuum tube.
As shown in
Further, in the vacuum tube manufacturing apparatus of this invention, as shown in
As shown in
Further, as shown in
The flow rate of gas flowing in the pipe is preferably a flow rate that can suppress the invasion of moisture into the gas supply mechanism from the foregoing reduced-pressure vessel connecting portion and is preferably in the range of 1 SCCM to 1000 SCCM when the reduced-pressure vessel is not connected.
In order to suppress a mix of moisture into the vacuum tube vessel, it is preferable that the moisture concentration measured at the first reduced-pressure vessel connecting portion be 1 ppm or less. Further, in order to remove adsorbed moisture inside the pipe in a short time, it is preferable in the vacuum tube manufacturing apparatus of this invention that the surface adapted to contact the gas contains a metal oxide having chromium oxide or aluminum oxide as a main component.
The vacuum tube manufacturing apparatus configured as described above can be suitably used for a fluorescent tube, a cold cathode tube, a deuterium discharge tube, an electron beam tube, an X-ray generating tube, an ultraviolet generator, a static electricity neutralizer using a deuterium discharge tube, an X-ray generating tube, or an ultraviolet generating tube, or the like.
A vacuum tube manufacturing method according to this invention comprises a process of attaching a reduced-pressure vessel to a vacuum tube manufacturing apparatus, a process of exhausting a gas in the reduced-pressure vessel, a process of filling at least a discharge gas into the reduced-pressure vessel, and a process of separating the reduced-pressure vessel filled with the discharge gas from the vacuum tube manufacturing apparatus and is characterized in that a dry inert gas is caused to flow in a reduced-pressure vessel connecting portion of the vacuum tube manufacturing apparatus before the reduced-pressure vessel is attached thereto. Further, a vacuum tube manufacturing method according to this invention comprises a process of attaching a reduced-pressure vessel to a vacuum tube manufacturing apparatus, a process of exhausting a gas in the reduced-pressure vessel, a process of filling at least a discharge gas into the reduced-pressure vessel, and a process of separating the reduced-pressure vessel filled with the discharge gas from the vacuum tube manufacturing apparatus and is characterized in that the process of exhausting the gas in the reduced-pressure vessel performs combination of filling and exhaust of a dry gas a plurality of times and the process of exhausting the gas in the reduced-pressure vessel is carried out by raising the reduced-pressure vessel to a temperature higher than a room temperature. With this configuration, it is possible to efficiently remove moisture in the reduced-pressure vessel such as a glass tube or a quartz tube forming a vacuum tube. Description will be made about the above with reference to the drawings.
A vacuum tube in Example 1 of this invention will be described with reference to
Then, at a time of oxygen gas baking in
At a time of vacuum batching in
In a process of
After repeating the processes of
In processes of
The luminance half-decay lifetime of the cold cathode tube manufactured by this system was measured and had a lifetime which was 1.6 times as compared with a conventional tube manufactured by a conventional fluorescent tube manufacturing apparatus.
Example 2Description will be made about Example 2 in which this invention is applied to a deuterium discharge tube.
According to the vacuum tube manufacturing apparatus of this invention, it is possible to obtain the deuterium discharge tube with less degradation of lifetime because the impurity amount remaining in the tube can be suppressed.
Claims
1. A vacuum tube manufacturing apparatus comprising a reduced-pressure vessel connecting portion, a gas exhaust mechanism connected to said reduced-pressure vessel connecting portion, and a gas supply mechanism connected to said reduced-pressure vessel connecting portion, said vacuum tube manufacturing apparatus characterized in that an inert gas supply mechanism is disposed on a reduced-pressure vessel side of said gas exhaust mechanism.
2. A vacuum tube manufacturing apparatus according to claim 1, characterized in that said gas exhaust mechanism is an exhaust pump and an inert gas supply mechanism is disposed on an exhaust side of said exhaust pump.
3. A vacuum tube manufacturing apparatus according to claim 1, characterized in that said gas exhaust mechanism comprises a pressure-reducing exhaust mechanism and a filling exhaust mechanism.
4. A vacuum tube manufacturing apparatus according to claim 3, characterized by having a first gas flow control mechanism on a gas supply mechanism side of said reduced-pressure vessel connecting portion, wherein said filling exhaust mechanism comprises a second gas flow control mechanism.
5. A vacuum tube manufacturing apparatus according to claim 4, characterized in that said first gas flow control mechanism includes at least an orifice.
6. A vacuum tube manufacturing apparatus according to claim 4, characterized in that said second gas flow control mechanism includes at least an orifice.
7. A vacuum tube manufacturing apparatus according to claim 1, characterized in that said gas supply mechanism has at least a pressure control mechanism adapted to control a pressure inside the reduced-pressure vessel.
8. A vacuum tube manufacturing apparatus according to claim 1, characterized in that said gas supply mechanism has at least a flow rate control mechanism adapted to control a flow rate of a gas flowing in said reduced-pressure vessel connecting portion.
9. A vacuum tube manufacturing apparatus according to claim 1, characterized by comprising a second reduced-pressure vessel connecting portion different from said reduced-pressure vessel connecting portion, an inert gas supply mechanism connected to said second reduced-pressure vessel connecting portion, and a back diffusion prevention mechanism connected to said second reduced-pressure vessel connecting portion.
10. A vacuum tube manufacturing apparatus according to claim 1, characterized in that said back diffusion prevention mechanism is a pipe or an orifice.
11. A vacuum tube manufacturing apparatus according to claim 10, characterized in that a gas flow rate flowing in said pipe is a flow rate for suppressing invasion of moisture into said gas supply mechanism from said reduced-pressure vessel connecting portion.
12. A vacuum tube manufacturing apparatus according to claim 10, characterized in that the gas flow rate flowing in said pipe falls within the range of 1 SCCM to 1000 SCCM when the reduced-pressure vessel is not connected.
13. A vacuum tube manufacturing apparatus according to claim 1, characterized in that a moisture concentration measured at the first reduced-pressure vessel connecting portion is 1 ppm or less.
14. A vacuum tube manufacturing apparatus according to claim 1, characterized in that a surface adapted to contact the gas contains a metal oxide having chromium oxide or aluminum oxide as a main component.
15. A fluorescent tube manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
16. A cold cathode tube manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
17. A deuterium discharge tube manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
18. An electron beam tube manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
19. An X-ray generating tube manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
20. An ultraviolet generator manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
21. A static electricity neutralizer manufactured by using the vacuum tube manufacturing apparatus according to claim 1.
22. A vacuum tube manufacturing method comprising a step of attaching a reduced-pressure vessel to a vacuum tube manufacturing apparatus, a step of exhausting a gas in said reduced-pressure vessel, a step of filling at least a discharge gas into said reduced-pressure vessel, and a step of separating said reduced-pressure vessel filled with the discharge gas from said vacuum tube manufacturing apparatus, said vacuum tube manufacturing method characterized in that a dry inert gas is caused to flow in a reduced-pressure vessel connecting portion of said vacuum tube manufacturing apparatus before said reduced-pressure vessel is attached thereto.
23. A vacuum tube manufacturing method comprising a step of attaching a reduced-pressure vessel to a vacuum tube manufacturing apparatus, a step of exhausting a gas in said reduced-pressure vessel, a step of filling at least a discharge gas into said reduced-pressure vessel, and a step of separating said reduced-pressure vessel filled with the discharge gas from said vacuum tube manufacturing apparatus, said vacuum tube manufacturing method characterized in that the step of exhausting the gas in said reduced-pressure vessel is specified by carrying out combination of filling and exhaust of a dry gas a plurality of times.
24. A vacuum tube manufacturing method according to claim 23, characterized in that the step of exhausting the gas in said reduced-pressure vessel is carried out by raising said reduced-pressure vessel to a temperature higher than a room temperature.
Type: Application
Filed: Jul 3, 2013
Publication Date: Nov 21, 2013
Applicant: Foundation for Advancement of International Science (Ibaraki)
Inventors: Tadahiro OHMI (Miyagi), Akihiro MORIMOTO (Miyagi)
Application Number: 13/934,488
International Classification: H01J 9/395 (20060101); H01J 21/00 (20060101);