Electrode plate for semiconductor manufacturing apparatus
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Description
Claims
The ornamental design for an electrode plate for a semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D789888
Type: Grant
Filed: Mar 22, 2016
Date of Patent: Jun 20, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Jeong Ho Lee (Seoul), Young Hoon Kim (Cheonan-si), Jong Su Kim (Cheonan-si)
Primary Examiner: Eric Goodman
Assistant Examiner: Amy Wierenga
Application Number: 29/558,825
Type: Grant
Filed: Mar 22, 2016
Date of Patent: Jun 20, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Jeong Ho Lee (Seoul), Young Hoon Kim (Cheonan-si), Jong Su Kim (Cheonan-si)
Primary Examiner: Eric Goodman
Assistant Examiner: Amy Wierenga
Application Number: 29/558,825
Classifications
Current U.S. Class:
Electrode (i.e., Grid Or Plate Type) (D13/121)