Semiconductor wafer processing tool
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Description
Claims
The ornamental design for a semiconductor wafer processing tool, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
D260237 | August 18, 1981 | Fuzere |
D292979 | December 1, 1987 | Chow |
D323628 | February 4, 1992 | Takao |
D328168 | July 21, 1992 | Bartle |
D350490 | September 13, 1994 | Takao |
D350942 | September 27, 1994 | Pellet |
D376688 | December 24, 1996 | Gallagher |
D431040 | September 19, 2000 | Makabe |
D571739 | June 24, 2008 | Hosaka |
D571740 | June 24, 2008 | Hosaka |
D616394 | May 25, 2010 | Sato |
D616395 | May 25, 2010 | Sato |
D672645 | December 18, 2012 | Giannini |
D732487 | June 23, 2015 | Lai |
D732488 | June 23, 2015 | Lai |
D758329 | June 7, 2016 | Lai |
D764278 | August 23, 2016 | Tulin |
D764909 | August 30, 2016 | Tulin |
D803908 | November 28, 2017 | Yamaguchi |
D822081 | July 3, 2018 | Yamaguchi |
D863055 | October 15, 2019 | Hudson |
D871466 | December 31, 2019 | Okada |
D874413 | February 4, 2020 | Hart |
D887832 | June 23, 2020 | Boersma |
- “Korean Application Serial No. 30-2019-0034113, Notice of Preliminary Rejection dated Mar. 17, 2020”, w/o English Translation, 4 pgs.
Patent History
Patent number: D935424
Type: Grant
Filed: May 6, 2019
Date of Patent: Nov 9, 2021
Assignee: Lam Research Corporation (Fremont, CA)
Inventor: Eller Y. Juco (Tualatin, OR)
Primary Examiner: Michael C Stout
Assistant Examiner: Fritzgerald L Butac
Application Number: 29/690,193
Type: Grant
Filed: May 6, 2019
Date of Patent: Nov 9, 2021
Assignee: Lam Research Corporation (Fremont, CA)
Inventor: Eller Y. Juco (Tualatin, OR)
Primary Examiner: Michael C Stout
Assistant Examiner: Fritzgerald L Butac
Application Number: 29/690,193
Classifications