Carbon (e.g., Diamond) {c30b 29/04} Patents (Class 117/929)
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Patent number: 7754180Abstract: A single crystal diamond grown by microwave plasma chemical vapor deposition annealed at pressures in excess of 4.0 GPa and heated to temperature in excess of 1500 degrees C. that has a hardness of greater than 120 GPa. A method for manufacture a hard single crystal diamond includes growing a single crystal diamond and annealing the single crystal diamond at pressures in excess of 4.0 GPa and a temperature in excess of 1500 degrees C. to have a hardness in excess of 120 GPa.Type: GrantFiled: November 7, 2007Date of Patent: July 13, 2010Assignee: Carnegie Institution of WashingtonInventors: Russell J. Hemley, Ho-Kwang Mao, Chih-shiue Yan
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Patent number: 7718000Abstract: One provides (101) disperse ultra-nanocrystalline diamond powder material that comprises a plurality of substantially ordered crystallites that are each sized no larger than about 10 nanometers. One then reacts (102) these crystallites with a metallic component. The resultant nanowire is then able to exhibit a desired increase with respect to its ability to conduct electricity while also substantially preserving the thermal conductivity behavior of the disperse ultra-nanocrystalline diamond powder material. The reaction process can comprise combining (201) the crystallites with one or more metal salts in an aqueous solution and then heating (203) that aqueous solution to remove the water. This heating can occur in a reducing atmosphere (comprising, for example, hydrogen and/or methane) to also reduce the salt to metal.Type: GrantFiled: February 14, 2007Date of Patent: May 18, 2010Assignee: Dimerond Technologies, LLCInventor: Dieter M. Gruen
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Patent number: 7655208Abstract: The object of the present invention is to obtain a high quality single crystalline diamond that has less distortion and large area suitable for semiconductor device substrates or an optical component material. The present invention is a single crystalline diamond produced by chemical vapor deposition, wherein, when a linear polarized light which is composed of two linear polarized lights perpendicular to each other is introduced into one main face of the single crystalline diamond, a maximum value of a retardation between the two linear polarized lights perpendicular to each other which come out from an opposite main face is not more than 50 ?m at maximum per a thickness of 100 ?m across an entire of the single crystalline diamond, and also a method for producing the diamond.Type: GrantFiled: April 12, 2006Date of Patent: February 2, 2010Assignee: Sumitomo Electric Industries, Ltd.Inventors: Kiichi Meguro, Yoshiyuki Yamamoto, Takahiro Imai
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Patent number: 7628856Abstract: There is disclosed a method for producing a substrate for single crystal diamond growth, comprising at least a step of preliminarily subjecting a substrate before single crystal diamond growth to a bias treatment for forming a diamond nucleus thereon by a direct-current discharge in which an electrode in a substrate side is a cathode, and wherein in the treatment, at least, a temperature of the substrate from 40 sec after an initiation of the bias treatment to an end of the bias treatment is held in a range of 800° C.±60° C. There can be provided a method for producing a substrate for single crystal diamond growth, by which a single crystal diamond can be grown more certainly.Type: GrantFiled: March 2, 2007Date of Patent: December 8, 2009Assignees: Shin-Etsu Chemical Co., Ltd., AGD Material Co.Inventors: Atsuhito Sawabe, Hitoshi Noguchi, Shintaro Maeda
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Patent number: 7608145Abstract: Disclosed is a method of fabrication of high quality silicon single crystal at high growth rate. The method grows silicon single crystal from silicon melt by Czochralski method, wherein the silicon single crystal is grown according to conditions that the silicon melt has an axial temperature gradient determined according to an equation, {(?Tmax??Tmin)/?Tmin}×100?10, wherein ?Tmax is a maximum axial temperature gradient of the silicon melt and ?Tmin is a minimum axial temperature gradient of the silicon melt, when the axial temperature gradient is measured along an axis parallel to a radial direction of the silicon single crystal.Type: GrantFiled: July 5, 2007Date of Patent: October 27, 2009Assignee: Siltron Inc.Inventor: Hyon-Jong Cho
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Patent number: 7594968Abstract: The invention relates to a single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m1/2. The invention also relates to a method of producing a single-crystal diamond with a toughness of at least about 30 MPa m1/2. The invention further relates to a process for producing a single crystal CVD diamond in three dimensions on a single crystal diamond substrate.Type: GrantFiled: September 9, 2005Date of Patent: September 29, 2009Assignee: Carnegie Institution of WashingtonInventors: Russell J. Hemley, Ho-kwang Mao, Chih-shiue Yan
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Patent number: 7585366Abstract: An improved method for controlling nucleation sites during superabrasive particle synthesis can provide high quality industrial superabrasive particles with high yield and a narrow size distribution. The synthesis method can include forming a particulate crystal growth layer by mixing a raw material and a catalyst material and then placing the crystalline seeds in a predetermined pattern in the growth layer. Preferably, seeds can be substantially surrounded by catalyst material. The growth precursor can be maintained at a temperature and pressure at which the superabrasive crystal is thermodynamically stable for a time sufficient for a desired degree of growth. The crystalline seeds can be placed in a predetermined pattern using a template, a transfer sheet, vacuum chuck or similar techniques. The superabrasive particles grown using the described methods typically have a high yield of high quality industrial particles and a narrow distribution of particle sizes.Type: GrantFiled: December 14, 2006Date of Patent: September 8, 2009Inventor: Chien-Min Sung
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Patent number: 7572332Abstract: One provides nanocrystalline diamond material that comprises a plurality of substantially ordered diamond crystallites that are sized no larger than about 10 nanometers. One then disposes a non-diamond component within the nanocrystalline diamond material. By one approach this non-diamond component comprises an electrical conductor that is formed at the grain boundaries that separate the diamond crystallites from one another. The resultant nanowire is then able to exhibit a desired increase with respect to its ability to conduct electricity while also preserving the thermal conductivity behavior of the nanocrystalline diamond material.Type: GrantFiled: April 26, 2006Date of Patent: August 11, 2009Assignee: Dimerond Technologies, LLCInventor: Dieter M. Gruen
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Patent number: 7560086Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described, as well as a system for use in performing such a method, and articles incorporating such a composition.Type: GrantFiled: October 29, 2004Date of Patent: July 14, 2009Assignee: Apollo Diamond, Inc.Inventors: Robert C. Linares, Patrick J Doering
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Patent number: 7547358Abstract: A system and method for growing diamond crystals from diamond crystal seeds by epitaxial deposition at low temperatures and atmospheric and comparatively low pressures. A solvent is circulated (by thermal convection and/or pumping), wherein carbon is added in a hot leg, transfers to a cold leg having, in some embodiments, a range of progressively lowered temperatures and concentrations of carbon via the circulating solvent, and deposits layer-by-layer on diamond seeds located at the progressively lower temperatures since as diamond deposits the carbon concentration lowers and the temperature is lowered to keep the solvent supersaturated. The solvent includes metal(s) or compound(s) that have low melting temperatures and transfer carbon at comparatively low temperatures. A controller receives parameter signals from a variety of sensors located in the system, processes these signals, and optimizes diamond deposition by outputting the necessary control signals to a plurality of control devices (e.g.Type: GrantFiled: June 27, 2008Date of Patent: June 16, 2009Inventor: Zalman M. Shapiro
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Patent number: 7534296Abstract: An electrically conductive diamond electrode and process for preparation thereof is described. The electrode comprises diamond particles coated with electrically conductive doped diamond preferably by chemical vapor deposition which are held together with a binder. The electrodes are useful for oxidation reduction in gas, such as hydrogen generation by electrolysis.Type: GrantFiled: March 17, 2006Date of Patent: May 19, 2009Assignee: Board of Trustees of Michigan State UniversityInventors: Greg Swain, Anne Fischer, Jason Bennett, Michael Lowe
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Patent number: 7524373Abstract: The invention provides a method to enforce face-to-face stacking of organic semiconductors in the solid state that employs semiconductor co-crystal formers (SCCFs), to align semiconductor building blocks (SBBs). Single-crystal X-ray analysis reveals n-orbital overlap optimal for organic semiconductor device applications.Type: GrantFiled: January 30, 2006Date of Patent: April 28, 2009Assignee: University of Iowa Research FoundationInventors: Leonard R. MacGillivray, Anatoliy N. Sokolov
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Patent number: 7459024Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described, as well as a system for use in performing such a method, and articles incorporating such a composition.Type: GrantFiled: October 29, 2004Date of Patent: December 2, 2008Assignee: Apollo Diamond, Inc.Inventors: Robert C. Linares, Patrick J. Doering
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Patent number: 7407549Abstract: A diamond single crystal composite substrate which are constructed from a plurality of diamond single crystal substrates with uniform plane orientations disposed side by side and integrated overall by growing diamond single crystals thereon by vapor phase synthesis, in which the deviation of the plane orientation of the main plane of each of said plurality of diamond single crystal substrates, excluding one diamond single crystal substrate, from the {100} plane is less than 1 degree, the deviation of the plane orientation of the main plane of the excluded one substrate from the {100} plane is 1 to 8 degrees, said one diamond single crystal substrate is disposed in the outermost circumferential part when the diamond single crystal substrates are disposed side by side, and is disposed so that the <100> direction in the main plane of said one substrate faces in the outer circumferential direction of the disposed substrates, and diamond single crystals are then grown by vapor phase synthesis so that the diaType: GrantFiled: November 4, 2004Date of Patent: August 5, 2008Assignee: Sumitomo Electric Industries, Ltd.Inventors: Kiichi Meguro, Yoshiyuki Yamamoto, Takahiro Imai
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Patent number: 7404857Abstract: An improved method for synthesizing superabrasive particles provides high quality industrial superabrasive particles with high yield and a narrow size distribution. The synthesis method includes forming a substantially homogeneous mixture of raw material and catalyst material or layers of raw material and metal catalyst. A plurality of crystalline seeds is placed in a predetermined pattern in the mixture or one of the layers to form a growth precursor. The growth precursor is maintained at a temperature and pressure at which the superabrasive crystal is thermodynamically stable for a time sufficient for a desired degree of growth. Advantageously, the patterned placement of crystalline seeds and disclosed processes allow for production of various morphologies of synthetic diamonds, including octahedral and cubic diamonds, and improved growth conditions generally. As a result, the grown superabrasive particles typically have a high yield of high quality particles and a narrow distribution of particle sizes.Type: GrantFiled: August 25, 2004Date of Patent: July 29, 2008Inventor: Chien-Min Sung
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Publication number: 20080156256Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: March 13, 2008Publication date: July 3, 2008Applicant: Apollo Diamond, Inc.Inventors: Robert C. Linares, Patrick J. Doering
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Patent number: 7368013Abstract: An improved method for synthesizing superabrasive particles provides high quality industrial superabrasive particles with high yield and a narrow size distribution. The synthesis method can include forming a growth precursor of a substantially homogeneous mixture of raw material and catalyst material or layers of raw material and metal catalyst. The growth precursor can have a layer of adhesive over at least a portion thereof. A plurality of crystalline seeds can be placed in a predetermined pattern on the layer of adhesive. The growth precursor can be maintained at a temperature and pressure at which the superabrasive crystal is thermodynamically stable for a time sufficient for a desired degree of growth. Advantageously, the patterned placement of crystalline seeds and disclosed processes allow for production of various morphologies of synthetic diamonds, including octahedral and cubic diamonds, and improved growth conditions generally.Type: GrantFiled: July 5, 2005Date of Patent: May 6, 2008Inventor: Chien-Min Sung
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Publication number: 20080098659Abstract: A method for temporarily securing superabrasive particles to a substrate such as a tool substrate or a growth precursor and articles formed therefrom are provided. The method can include applying an array of adhesive droplets onto at least a portion of a substrate in accordance with a predetermined pattern. The pattern may be uniform grid equally spacing each adhesive droplet. The adhesive droplets can be suitable to each secure only a single superabrasive particle. The method may further include adhering a single superabrasive particle to each adhesive droplet. As a result of the method can yield a tool substrate and grow precursor having enhance particle growth and wear properties.Type: ApplicationFiled: October 26, 2006Publication date: May 1, 2008Inventor: Chien-Min Sung
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Publication number: 20080022925Abstract: In a first exemplary embodiment of the present invention, a method is provided for marking a sample of a doped crystalline material. According to a feature of the present invention, the method comprises the steps of causing a controlled alteration to the crystalline material at a preselected spot on the sample of the crystalline material, sufficient to cause a change in a cathodoluminescence spectrum of the crystalline material at the preselected spot and utilizing the altered cathodoluminescence spectrum to mark the crystalline material.Type: ApplicationFiled: July 26, 2006Publication date: January 31, 2008Applicant: American Museum Of Natural HistoryInventor: Jacob Louis Mey
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Patent number: 7323049Abstract: An improved method for controlling nucleation sites during superabrasive particle synthesis can provide high quality industrial superabrasive particles with high yield and a narrow size distribution. The synthesis method can include forming a raw material layer, forming a particulate catalyst layer adjacent the raw material layer, and placing crystalline seeds in a predetermined pattern at least partially in the catalyst layer or raw material layer to form a growth precursor. Alternatively, the raw material and catalyst material can be mixed to form a particulate crystal growth layer and then placing the crystalline seeds in a predetermined pattern in the growth layer. Preferably, seeds can be substantially surrounded by catalyst material. The growth precursor can be maintained at a temperature and pressure at which the superabrasive crystal is thermodynamically stable for a time sufficient for a desired degree of growth.Type: GrantFiled: March 1, 2004Date of Patent: January 29, 2008Inventor: Chien-Min Sung
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Patent number: 7309476Abstract: Novel diamondoid-based components that may be used in nanoscale construction are disclosed. Such components include rods, brackets, screws, gears, rotors, and impellers. Subassemblies (or subsystems) may comprise one or more diamondoid components. Exemplary subassemblies include atomic force microscope tips, molecular tachometers and signal waveform generators, and self-assembling cellular membrane pores and channels.Type: GrantFiled: July 16, 2003Date of Patent: December 18, 2007Assignee: Chevron U.S.A. Inc.Inventors: Robert M. Carlson, Jeremy E. Dahl, Shenggao Liu
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Patent number: 7306441Abstract: High pressure synthesis of various crystals such as diamond, cBN and the like can be carried out using reaction assemblies suitable for use in methods such as temperature gradient methods. The reaction assembly can be oriented substantially perpendicular to gravity during application of high pressure. Orienting the reaction assembly in this manner can avoid detrimental effects of gravity on the molten catalyst, e.g., convection, hence increasing available volumes for growing high quality crystals. Multiple reaction assemblies can be oriented in series or parallel, each reaction assembly having one or more growth cells suitable for growth of high quality crystals. Additionally, various high pressure apparatuses can be used. A split die design allows for particularly effective results and control of temperature and growth conditions for individual crystals.Type: GrantFiled: February 6, 2004Date of Patent: December 11, 2007Inventor: Chien-Min Sung
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Patent number: 7306778Abstract: The present invention provides films and substrates coated with films that comprise a nano-crystalline diamond matrix that is substantially free of graphite inclusions. The present invention also provides a method of chemical vapor deposition to prepare the films. The method of chemical vapor deposition operates at a DC bias voltage that substantially precludes the formation of a plasma ion capable of causing a region of a nano-crystalline diamond matrix within a forming film to allotrope when the plasma ion collides with the film.Type: GrantFiled: December 9, 2003Date of Patent: December 11, 2007Assignee: Nanotech LLCInventor: John Harvie Chaffin
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Patent number: 7306674Abstract: Novel uses of higher diamondoids are disclosed. Specifically, higher diamondoids may be used to nucleate diamond films and diamond-like carbon films. Such higher diamondoids include iso-tetramantane [1(2)3], anti-tetramantane [121], the two enantiomers of skew-tetramantane [123], the ten possible pentamantane, the thirty nine possible hexamantanes, the one hundred sixty heptamantanes, as well as the various octamantanes, nonamantanes, decamantanes, and undecamantanes.Type: GrantFiled: June 10, 2004Date of Patent: December 11, 2007Assignee: Chevron U.S.A. Inc.Inventors: Jeremy E. Dahl, Robert M. Carlson, Shenggao Liu
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Patent number: 7276222Abstract: Novel uses of diamondoid-containing materials in the field of microelectronics are disclosed. Embodiments include, but are not limited to, thermally conductive films in integrated circuit packaging, thermally conductive adhesive films, and thermally conductive films in thermoelectric cooling devices. The diamondoids employed in the present invention may be selected from lower diamondoids, as well as the newly provided higher diamondoids, including substituted and unsubstituted diamondoids. The higher diamondoids include tetramantane, pentamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, and undecamantane. The diamondoid-containing material may be fabricated as a diamondoid-containing polymer, a diamondoid-containing sintered ceramic, a diamondoid ceramic composite, a CVD diamondoid film, a self-assembled diamondoid film, and a diamondoid-fullerene composite.Type: GrantFiled: July 14, 2004Date of Patent: October 2, 2007Assignee: Chevron U.S.A. Inc.Inventors: Jeremy E. Dahl, Robert M. Carlson, Shenggao Liu
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Patent number: 7273598Abstract: Novel uses of diamondoid-containing materials in the field of microelectronics are disclosed. Embodiments include, but are not limited to, passivation films for integrated circuit devices (ICs). The diamondoids employed in the present invention may be selected from lower diamondoids, as well as the newly provided higher diamondoids, including substituted and unsubstituted diamondoids. The higher diamondoids include tetramantane, pentamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, and undecamantane. The diamondoid-containing material may be fabricated as a diamondoid-containing polymer, a diamondoid-containing sintered ceramic, a diamondoid ceramic composite, a CVD diamondoid film, a self-assembled diamondoid film, and a diamondoid-fullerene composite.Type: GrantFiled: July 14, 2004Date of Patent: September 25, 2007Assignee: Chevron U.S.A. Inc.Inventors: Jeremy E. Dahl, Robert M. Carlson, Shenggao Liu
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Publication number: 20070209578Abstract: There is disclosed a method for producing a substrate for single crystal diamond growth, comprising at least a step of preliminarily subjecting a substrate before single crystal diamond growth to a bias treatment for forming a diamond nucleus thereon by a direct-current discharge in which an electrode in a substrate side is a cathode, and wherein in the treatment, at least, a temperature of the substrate from 40 sec after an initiation of the bias treatment to an end of the bias treatment is held in a range of 800° C.±60° C. There can be provided a method for producing a substrate for single crystal diamond growth, by which a single crystal diamond can be grown more certainly.Type: ApplicationFiled: March 2, 2007Publication date: September 13, 2007Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventor: Hitoshi Noguchi
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Patent number: 7264675Abstract: In a diamond manufacturing method, a melt of carbon and blue kimberlite is contained in a vessel at 1000° C. The vessel is pressurized by a gas of predominantly hydrogen to 200 atmospheres. A crystallization seed is drawn from the melt to generate a piece of diamond material.Type: GrantFiled: June 10, 2005Date of Patent: September 4, 2007Inventors: Richard L Lewis, Leon Zakinov
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Patent number: 7258741Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described, as well as a system for use in performing such a method, and articles incorporating such a composition.Type: GrantFiled: April 8, 2003Date of Patent: August 21, 2007Assignee: Apollo Diamond, Inc.Inventors: Robert C. Linares, Patrick J. Doering
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Patent number: 7255743Abstract: This invention is a method of making a synthetic gem comprising elements recovered from remains of a species of the Kingdom Animalia, comprising the steps of collecting substantially pure carbon from the remains and creating gems from the carbon using crystal growth sublimation.Type: GrantFiled: August 19, 2003Date of Patent: August 14, 2007Assignee: International Research & Recovery CorporationInventors: Russell P. VandenBiesen, Gregory R. Herro, Dean T. VandenBiesen
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Patent number: 7255744Abstract: Concerns lithium-doped diamond: Low-resistivity n-type semiconductor diamond doped with lithium and nitrogen, and a method of manufacturing such diamond are provided. Low-resistivity n-type semiconductor diamond containing 1017 cm?3 or more of lithium atoms and nitrogen atoms together, in which are respectively doped lithium atoms into carbon-atom interstitial lattice sites, and nitrogen atoms into carbon-atom substitutional sites, with the lithium and the nitrogen holding arrangements that neighbor each other. To obtain low-resistivity n-type semiconductor diamond, in a method for the vapor synthesis of diamond, photodissociating source materials by photoexcitation utilizing vacuum ultraviolet light and irradiating a lithium source material with an excimer laser to scatter and supply lithium atoms enables the diamond to be produced.Type: GrantFiled: December 22, 2003Date of Patent: August 14, 2007Assignee: Sumitomo Electric Industries, Ltd.Inventors: Akihiko Namba, Takahiro Imai, Hisao Takeuchi
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Patent number: 7241434Abstract: The present invention is directed to a method for treating discolored natural diamond, especially Type IIa diamond and Type IaA/B diamond with nitrogen as predominantly B centers, for improving its color. The method includes preblocking and preshaping a discolored natural diamond to prevent its breakage in a high pressure/high temperature (HP/HT) press, placing said discolored natural diamond in a pressure transmitting medium which is consolidated into a pill. Next, the pill is placed into a HP/HT press at elevated pressure and elevated temperature within the graphite-stable or diamond-stable range of the carbon phase diagram for a time sufficient to improve the color of said diamond. Finally, the diamond is recovered from said press. Colorless and fancy colored diamonds can be made by this method.Type: GrantFiled: August 8, 2001Date of Patent: July 10, 2007Assignee: Bellataire International, LLCInventors: Thomas R. Anthony, Yavuz Kadioglu, Suresh S. Vagarali, Steven W. Webb, William E. Jackson, William F. Banholzer, John K. Casey, Alan C. Smith
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Patent number: 7220309Abstract: The crystal structures of CD45 and LAR, described herein, provide a basis for kinetic and functional studies. Identification of the crystal structures of cellular molecules is important in to determine functional roles in immunity, phosphorylation events, disease initiation mechanism. The isolated crystals and methods for crystallization thereof, are also important in identifying small molecule interactions with cellular molecules for new drug discovery.Type: GrantFiled: March 10, 2003Date of Patent: May 22, 2007Assignee: Dana Farber Cancer InsituteInventors: Christin Frederick, Haruo Saito
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Patent number: 7201886Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: GrantFiled: October 29, 2004Date of Patent: April 10, 2007Assignee: Apollo Diamond, Inc.Inventors: Robert C. Linares, Patrick J. Doering
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Patent number: 7192483Abstract: The present invention relates to a method for diamond coating of substrates in which the substrate is exposed in a vacuum atmosphere to a reactive gas mixture excited by means of a plasma discharge, the plasma discharge comprising a plasma beam (14) in an evacuated receiver (16) that is formed between a cathode chamber (1) and an anode (2), and the reactive gas mixture comprising a reactive gas and a working gas, the reactive gas in (9) and the working gas in (8) and/or (9) introduced into the receiver, and the receiver (16) is evacuated by a pump arrangement (15), and the hydrogen concentration of the reactive gas mixture being 0–45 vol. %.Type: GrantFiled: October 7, 2002Date of Patent: March 20, 2007Assignee: Unaxis Balzers AktiengesellschaftInventors: David Franz, Johann Karner
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Patent number: 7172655Abstract: A method of producing a single crystal CVD diamond of a desired color which includes the steps of providing single crystal CVD diamond which is colored and heat treating the diamond under conditions suitable to produce the desired color. Colors which may be produced are, for example, in the pink-green range.Type: GrantFiled: September 5, 2003Date of Patent: February 6, 2007Inventors: Daniel James Twitchen, Philip Maurice Martineau, Geoffrey Alan Scarsbrook
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Patent number: 7160617Abstract: A layer of single crystal boron doped diamond produced by CVD and having a total boron concentration which is uniform. The layer is formed from a single growth sector, or has a thickness exceeding 100 ?m, or has a volume exceeding 1 mm3, or a combination of such characteristics.Type: GrantFiled: September 3, 2003Date of Patent: January 9, 2007Inventors: Geoffrey Alan Scarsbrook, Philip Maurice Martineau, Daniel James Twitchen, Andrew John Whitehead, Michael Andrew Cooper, Bärbel Susanne Charlotte Dorn
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Patent number: 7160529Abstract: Novel uses of diamondoid-containing materials in the field of microelectronics are disclosed. Embodiments include, but are not limited to, thermally conductive films in integrated circuit packaging, low-k dielectric layers in integrated circuit multilevel interconnects, thermally conductive adhesive films, thermally conductive films in thermoelectric cooling devices, passivation films for integrated circuit devices (ICs), and field emission cathodes. The diamondoids employed in the present invention may be selected from lower diamondoids, as well as the newly provided higher diamondoids, including substituted and unsubstituted diamondoids. The higher diamondoids include tetramantane, pentamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, and undecamantane.Type: GrantFiled: February 24, 2004Date of Patent: January 9, 2007Assignee: Chevron U.S.A. Inc.Inventors: Jeremy E. Dahl, Robert M. Carlson, Shenggao Liu
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Patent number: 7128974Abstract: This invention relates to diamond and more particularly to diamond produced by chemical vapour deposition (hereinafter referred to as CVD). According to a first aspect of the invention, there is provided a layer of single crystal CVD diamond of high quality having a thickness of at least 2 mm.Type: GrantFiled: December 19, 2003Date of Patent: October 31, 2006Inventors: Geoffrey Alan Scarsbrook, Philip Maurice Martineau, Barbel Susanne Charlotte Dorn, Michael Andrew Cooper, John Lloyd Collins, Andrew John Whitehead, Daniel James Twitchen, Ricardo Simon Sussmann
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Patent number: 7101433Abstract: A high temperature/high pressure (HP/HT) apparatus for converting feedstock housed in a capsule into product crystals, comprising at least two electrical heating paths for independent control of both the mean temperature in the reaction cell and the temperature gradient across the reaction cell.Type: GrantFiled: October 31, 2003Date of Patent: September 5, 2006Assignee: General Electric CompanyInventors: Mark P. D'Evelyn, Robert V. Leonelli, Jr., Peter S. Allison, Kristi J. Narang, Robert A. Giddings
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Patent number: 7101435Abstract: Methods of cleaning substrates and growing epitaxial silicon thereon are provided. Wafers are exposed to a plasma for a sufficient time prior to epitaxial silicon growth, in order to clean the wafers. The methods exhibit enhanced selectivity and reduced lateral growth of epitaxial silicon. The wafers may have dielectric areas that are passivated by the exposure of the wafer to a plasma.Type: GrantFiled: May 30, 2003Date of Patent: September 5, 2006Assignee: Micron Technology, Inc.Inventors: Jingyan Zhang, Er-Xuan Ping
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Patent number: 7070651Abstract: A film (carbon and/or diamond) for a field emitter device, which may be utilized within a computer display, is produced by a process utilizing etching of a substrate and then depositing the film. The etching step creates nucleation sites on the substrate for the film deposition process. With this process patterning of the emitting film is avoided. A field emitter device can be manufactured with such a film.Type: GrantFiled: May 21, 1997Date of Patent: July 4, 2006Assignee: SI Diamond Technology, Inc.Inventors: Zhidan Li Tolt, Zvi Yaniv, Richard Lee Fink
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Patent number: 7063742Abstract: A substrate is polished and made an inclined substrate, which is exposed to a hydrogen plasma and is thereby smoothened. The substrate is then heated controlledly until it surface temperature reaches 830° C. Meanwhile, a gas mixture of 1% methane, 50 ppm hydrogen sulfide and hydrogen is introduced in a tubular reaction vessel to flow therethrough at 200 ml/min, where microwave plasma is excited to cause n-type semiconductor diamond to epitaxially grow on the substrate. An ion doped n-type semiconductor is thus formed that has a single donor level of an activation energy at 0.38 eV and is high in mobility and of high quality.Type: GrantFiled: March 27, 2000Date of Patent: June 20, 2006Assignee: Japan Science and Technology AgencyInventors: Toshihiro Ando, Yoichiro Sato, Eiji Yasu, Mika Gamo, Isao Sakaguchi
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Patent number: 6924509Abstract: Monoatomic and monocrystalline layer of large size, in diamond type carbon, and method for the manufacture of this layer. According to the invention, a monocrystalline substrate (2) is formed in SiC terminated by an atomic plane of carbon according to a reconstruction c(2×2) and at least one annealing is carried out, capable of transforming this atomic plane, which is a plane of dimers C?C (4) of sp configuration, into a plane of dimers C—C (8) of sp3 configuration. Application to microelectronics, optics, optoelectronics, micromechanics and biomaterials.Type: GrantFiled: September 23, 2004Date of Patent: August 2, 2005Assignees: Commissariat a l'Energie Atomique, Centre National de la Recherche ScientifiqueInventors: Vincent Derycke, Gérald Dujardin, Andrew Mayne, Patrick Soukiassian
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Patent number: 6905544Abstract: The invention has as an object proving a carbon nanomaterial fabrication method that can continuously mass-produce a high purity carbon a nanomaterial. The tube-shaped or fiber-shaped carbon nanomaterial having carbon as the main constituent is fabricated with a compound that includes carbon (raw material) and an additive that includes a metal by using a fluidized bed reactor.Type: GrantFiled: February 21, 2003Date of Patent: June 14, 2005Assignees: Mitsubishi Heavy Industries, Ltd., Osaka Gas Co., Ltd.Inventors: Toshihiko Setoguchi, Yuichi Fujioka, Yoshihiko Tsuchiyama, Akinori Yasutake, Matsuhei Noda, Norihisa Kobayashi, Ryoichi Nishida, Hitoshi Nishino, Katsuhide Okimi, Akihiro Hachiya
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Patent number: 6887144Abstract: An element-doped diamond crystal is disclosed herein. The crystal includes at least one dopant element which has a greater concentration toward or near an outermost surface of the crystal than in the center of the crystal. The concentration of the dopant element is at a local minimum at least about 5 micrometers below the surface. The concentration-profile of the dopant element for these diamond crystals causes an expansion of the diamond lattice, thereby generating tangential compressive stresses at the surface of the diamond crystal. These stresses beneficially increase the compressive fracture strength of the diamond.Type: GrantFiled: February 14, 2001Date of Patent: May 3, 2005Assignee: Diamond Innovations, Inc.Inventors: Mark Philip D'Evelyn, Dong-Sil Park, Thomas Richard Anthony, Clifford Lawrence Spiro, Yue Meng, Christopher Allen Long
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Patent number: 6884290Abstract: An electrically conducting and dimensionally stable diamond (12, 14) and metal particle (13) electrode produced by electrodepositing the metal on the diamond is described. The electrode is particularly useful in harsh chemical environments and at high current densities and potentials. The electrode is particularly useful for generating hydrogen, and for reducing oxygen and oxidizing methanol in reactions which are of importance in fuel cells.Type: GrantFiled: January 8, 2003Date of Patent: April 26, 2005Assignee: Board of Trustees of Michigan State UniversityInventors: Greg M. Swain, Jian Wang
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Patent number: 6858080Abstract: Monocrystalline diamond, adapted for use as in applications such as semiconductor devices, optical waveguides, and industrial applications, in the form of a single crystalline diamond structure having one or more diamond layers, at least one of which is formed by a CVD process. The diamond layers are “lattice-matched” or “lattice-mismatched” to each other to provide a desired level of strain.Type: GrantFiled: December 24, 2002Date of Patent: February 22, 2005Assignee: Apollo Diamond, Inc.Inventors: Robert C. Linares, Patrick J. Doering
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Patent number: 6852163Abstract: A very-high pressure generator of construction such that the lower and upper guide blocks of the generator are each configured so as to form a pyramidal recess on the bottom surface and an upside-down pyramidal recess on the top surface accurately symmetrically, their pyramidal slopes given one and the same angle of inclination and are prevented from being deformed under high pressure not by enlarging the guide blocks and the press, but by making the support conditions of all the anvils of the generator uniform, the positions of the anvils can easily be adjusted and therefore the generator is capable of pressurizing a pressure transmitting medium into the shape of the desired cube accurately. Each of the lower and upper guide blocks has a pyramidal recess in its bottom surface and an upside-down pyramided recess in its top surface and us symmetric with respect to its horizontal center plane. Each of lower and upper base blocks has a lower upside-down pyramidal portion and an upper pyramidal portion.Type: GrantFiled: December 14, 2001Date of Patent: February 8, 2005Assignee: Sumitomo Heavy IndustriesInventor: Masashi Tado
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Patent number: 6841002Abstract: Carbon nanotubes are formed on a surface of a substrate using a plasma chemical deposition process. After the nanotubes have been grown, a post-treatment step is performed on the newly formed nanotube structures. The post-treatment removes graphite and other carbon particles from the walls of the grown nanotubes and controls the thickness of the nanotube layer. The post-treatment is performed with the plasma at the same substrate temperature. For the post-treatment, the hydrogen containing gas is used as a plasma source gas. During the transition from the nanotube growth step to the post-treatment step, the pressure in the plasma process chamber is stabilized with the aforementioned purifying gas without shutting off the plasma in the chamber. This eliminates the need to purge and evacuate the plasma process chamber.Type: GrantFiled: November 22, 2002Date of Patent: January 11, 2005Assignee: cDream Display CorporationInventors: Sung Gu Kang, Craig Bae