Abstract: Apparatus for treating products with plasma generated from a source gas. The apparatus includes a vacuum chamber, a plurality of juxtaposed electrodes arranged in adjacent pairs inside the vacuum chamber, and a plasma excitation source electrically coupled with the electrodes. The apparatus may include conductive members extending into the interior of each electrode to establish a respective electrical connection with the plasma excitation source. The apparatus may include a gas distribution manifold and multiple gas delivery tubes coupled with the gas distribution manifold. Each gas delivery tube has an injection port configured to inject the source gas between each adjacent pair of electrodes. The apparatus may further include flow restricting members that operate to partially obstruct a peripheral gap between each adjacent pair of electrodes, which restricts the escape of the source gas from the process chamber between each adjacent pair of electrodes.

Abstract: A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled base plate, an upper plate above the base plate, and an annular mounting groove surrounding a bond layer located between the base plate and the upper plate. The mounting groove includes an inner wall, an opening of the mounting groove faces radially outward relative to the inner wall, and the mounting groove includes a step extending downward from the upper plate on an upper wall of the groove or extending upward from the base plate on a lower wall of the groove. An edge seal including a compressible ring is mounted in the groove such that the compressible ring is compressed between the upper plate and the base plate to cause an outer surface of the compressible ring to be biased radially outward relative to the inner wall toward the step.

Abstract: One embodiment of the invention is a slicing engine that generates two or more slices of a virtual 3D model given a slice plane. The slicing engine then determines connection points on each of the slices that indicate how the 3D model is to be reconnected by the user when the 3D model is fabricated. The slicing engine also determines an optimized layout for the various slices of the 3D model on fabrication material for minimal use of the material. The user is then able to “print” the layout on the fabrication material via 3D printers, and connect the various printed slices according to the connection points to build a physical representation of the 3D model.

Abstract: A sterilizable container for accommodating at least one of at least one biologically active fluid and at least one preparatory fluid has an area within the container configured to accommodate at least one sterilizable three-dimensional printer assembly. The sterilizable three-dimensional printer assembly includes at least one printing platform; at least one printer head for dispensing structural material onto the at least one printing platform to form thereon a three-dimensional structure; and a moving mechanism for providing a relative displacement between the at least one printer head and the at least one printing platform. The area is configured so that the fluid can reach the printer assembly.

Abstract: A beauty gel curing device includes a bottom seat and a main body detachably mounted on the bottom seat. The bottom seat includes a base frame having walls and an opening; a UV LED module having UV LED lamps; a top cover fixed on the base frame to form the main body. A control module is provided on the main body. A grip portion is disposed at a side of the main body. A battery unit is disposed in the main body. A charging port is disposed at a side of the bottom seat. The bottom seat and the main body are electrically connected and the battery unit in the main body is charged through the charging port.

Abstract: A method for producing at least one cutting strand segment of a cutting strand comprises punching at least one cutting strand segment out of a band material. The at least one cutting strand segment includes at least one cutting element and at least one cutter carrier element having at least one connecting element.

Abstract: A system may produce a desired three dimensional object that includes a tank that holds a liquid that solidifies upon exposure to light; a controllable stage that controllably moves within the tank; a controllable light source that emits a light image in a controllable pattern; and a controller that controls the controllable stage and the controllable light source so as to cause at least three cascaded layers to be sequentially solidified in the liquid that collectively approximate at least a section of the desired three dimensional object and that collectively form at least one up-facing step at their outer edges; and, following the solidification of the at least three cascaded layers, cause a meniscus of the liquid to form and solidify in the at least one up-facing step. The controller may control the number and/or width of the sequentially solidified cascaded layers.

Abstract: The present invention relates to a micro-lattice and, more particularly, to an ultra-light micro-lattice and a method for forming the same. The micro-lattice is a cellular material formed of interconnected hollow tubes. The cellular material has a relative density in a range of 0.001% to 0.3%, and a density of 0.9 mg/cc has been demonstrated. The cellular material also has the ability to recover from a deformation exceeding 50% strain.

Abstract: This invention discloses a laser induced breakdown spectroscopy (LIBS) apparatus based on a high repetition rate pulsed laser. The laser produces a train of laser pulses at a high repetition rate in the kHz or even higher range. When the laser beam hits the sample, it generates several thousands of micro-plasmas per second. Synchronized miniature CCD array optical spectrometer modules collect the LIBS signal from these micro-plasmas. By adjusting the integration time of the spectrometer to cover a plurality of periods of the laser pulse train, the spectrometer integrates the LIBS signal produced by this plurality of laser pulses. Hence the intensity of the obtained LIBS spectrum can be greatly improved to increase the signal-to-noise ratio (SNR) and lower the limit of detection (LOD). In addition, the influence of pulse to pulse variation of the laser is minimized since the obtained LIBS spectrum is the spectrum of a plurality of micro-plasmas produced by a plurality of laser pulses.

Abstract: Errors caused by shrinkage during 3D printing may be minimized. A shape that most closely corresponds to the shape of a layer to be printed may be selected from a library of shapes. Each shape in the library may have shrinkage information associated with it that includes, for each of multiple points that define a perimeter of the library shape, a radial distance to the point from an origin of a coordinate system, an angle the radial distance makes with respect to an axis of the coordinate system, and information indicative of an anticipated amount by which the point will deviate from its specified location when the shape is printed due to shrinkage. Compensation for anticipated shrinkage may be calculated based on the shrinkage information that is associated with the selected shape from the library. The information indicative of the shape of the layer to be printed may be modified to minimize errors cause by shrinkage based on the calculated compensation.

Abstract: The embodiments disclosed herein pertain to methods and apparatus for depositing stress compensating layers and sacrificial layers on either the front side or back side of a substrate. In various implementations, back side deposition occurs while the wafer is in a normal front side up orientation. The front/back side deposition may be performed to reduce stress introduced through deposition on the front side of the wafer. The back side deposition may also be performed to minimize back side particle-related problems that occur during post-deposition processing such as photolithography.

Abstract: The method relates to an electric device comprising at least two electrodes which are separated by dielectric part. At least one of said electrodes is arranged to be at a floating potential. The dielectric part comprises at least one turn of at least one non-impregnatable electrically insulating film between two neighboring electrodes. The electrodes are bonded to adjacent turns of non-impregnatable insulating film, and adjacent turns of non-impregnatable insulating film, if any, are bonded to each other, so that the turns of non-impregnatable insulating film and the electrodes form a solid body. The invention further relates to a method of manufacturing an electric device, where bonding of at least one turn is performed upon forming of said turn, so that the bonding of said turn to the turn/electrode underneath will commence before said turn has been completely covered by the next turn.

Abstract: Embodiments of the disclosure relate to an apparatus for processing a semiconductor substrate. The apparatus includes a process chamber having a substrate support for supporting a substrate, a lower dome and an upper dome opposing the lower dome, a plurality of gas injects disposed within a sidewall of the process chamber. The apparatus includes a gas delivery system coupled to the process chamber via the plurality of gas injects, the gas delivery system includes a gas conduit providing one or more chemical species to the plurality of gas injects via a first fluid line, a dopant source providing one or more dopants to the plurality of gas injects via a second fluid line, and a fast switching valve disposed between the second fluid line and the process chamber, wherein the fast switching valve switches flowing of the one or more dopants between the process chamber and an exhaust.

Abstract: A nail gel curing device can include an outer housing, a base, a dome and a detachable tray. The housing, base, dome and tray define an irradiation chamber, an opening to said chamber for inserting a hand or foot of a user, and a space between the dome and housing. The irradiation chamber suitable for curing five nails of a user's hand or foot and the dome including a plurality of light emitting diodes for curing nails positioned in the irradiation chamber, and the space being sufficient to accommodate electronic or electric circuitry to operate the plurality of light emitting diodes in the curing device. A shield can be slidably attached to the device and the shield can be capable of reducing the opening's size by sliding from an open to a more closed position, said closing diminishing a user's secondary exposure to UV light exiting the device.

Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.

Abstract: An electro-optic device may include a photonic chip having an optical grating at a surface, and an IC coupled to the photonic chip. The electro-optic device may include an optical element defining an optical path above the optical grating, and a dichroic mirror above the optical grating and aligned with the optical path.

Abstract: A device for processing of highly viscous photopolymerizable material for layer-by-layer generation of a shaped body comprises a vat including a bottom which is at least in certain areas thereof transparent, a build platform, an exposure unit for exposing a material layer formed between the lower side of the build platform and the vat bottom in a locally selective manner, a control unit in order to adapt the relative position of the build platform to the vat bottom after each exposure step for a layer, in order to successively build up the shaped body in the desired shape, and a moveably guided doctor blade arrangement including a drive unit for moving the doctor blade arrangement back and forth underneath the build platform. The doctor blade arrangement comprises two doctor blades spaced apart in movement direction, which doctor blades are moveable at a constant distance to the vat bottom along the bottom.

Abstract: A compact portable LED nail curing lamp has surface-mounted light emitting diode (SMD LED) lights. The lamp provides fast and consistent results producing high gloss finish and even curing of nail polish (e.g., UV-curable gel polish). The nail lamp has a micro USB port, which can be used to power the lamp using a wall adapter, car charger, laptop USB port, or mobile power bank for ultimate portability. In an implementation, a system includes a compact LED nail curing lamp and a mobile power battery pack. The system also includes a cable to connect the nail lamp and the mobile power battery pack. The battery pack provides portable power to the nail lamp so that the nail lamp can be used portably, such as during travel or on an airplane when a wall outlet is unavailable.

Abstract: In various embodiments, systems, methods, and apparatus are provided for stabilizing filaments in a chemical vapor deposition (CVD) reactor system. A system includes a base plate having a plurality of electrical connections, a pair of filaments extending from the base plate, and a stabilizer connecting the pair of filaments. Each filament is in electrical contact with, and defines a conductive path between, the two electrical connections. A method of stabilizing the filaments includes providing the pair of filaments, and connecting the pair of filaments with at least one stabilizer. The stabilizer may include an electrically insulating material.

Abstract: The present disclosure includes atmospheric plasma systems and methods for plasma treating a surface. The plasma system may include a plasma probe configured to receive a source air that is at or above atmospheric pressure and discharge a plasma from a probe tip. It may also include an air supply system including an air supply conduit configured to supply the source air to the plasma probe and a heat source configured to increase a temperature of the source air in the air supply system to above an ambient temperature. The heat source may include an inline heater disposed within the air supply conduit. The source air may be heated to a temperature of 25° C. to 1,000° C. The heated air plasma system may provide a higher plasma dosage to a treated surface and may allow for reduced cycle times and larger plasma treatment working windows.

Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus in which processes with respect to substrates are performed includes a lower chamber having an opened upper side, the lower chamber including a passage allowing the substrates to pass therethrough in a side thereof, an external reaction tube closing the opened upper side of the lower chamber to provide a process space in which the processes are performed, a substrate holder on which the one ore more substrates are vertically stacked, the substrate holder being movable between a stacking position in which the substrates are stacked within the substrate holder and a process position in which the processes with respect to the substrates are performed, and a gas supply unit disposed inside the external reaction tube to supply a reaction gas into the process space, the gas supply unit forming a flow of the reaction gas having different phase differences in a vertical direction.

Abstract: Provided is a substrate processing apparatus.

Abstract: The present invention relates to an ion implantation machine 100 that comprises: an enclosure 101 that is connected to a pump device 102; a plasma source 115-121-122; a bias power supply 113; a gas inlet 117 leading into the enclosure; and a substrate-carrier 104 connected to the negative pole of the bias power supply and arranged inside the enclosure. The machine is remarkable in that: the substrate-carrier 104 consists in at least two parallel plates 105-106; a reference electrode consists in at least one strip 110, this reference electrode being connected to the positive pole of the bias power supply; and the strip is interposed between the two plates.

Abstract: Embodiments of the present disclosure provide a cover assembly that includes a cover disposed between a device side surface of a substrate and a reflector plate, which are disposed within a thermal processing chamber. The presence of the cover between the device side surface of a substrate and a reflector plate has many advantages over conventional thermal processing chamber designs, which include an improved temperature uniformity during processing, a reduced chamber down time and an improved cost-of-ownership of the processes performed in the thermal processing chamber. In some configurations, the cover includes two or more ports that are formed therein and are positioned to deliver a gas, from a space formed between the reflector plate and the cover, to desired regions of the substrate during processing to reduce the temperature variation across the substrate.

Abstract: The invention is a stereolithography machine (1) comprising: a container (2) suited to contain a fluid substance (3) suited to solidify through exposure to predefined radiation (4a); means (4) suited to emit the predefined radiation (4a) and to solidify a layer of the fluid substance (3) having a predefined thickness and arranged adjacent to the bottom (2a) of the container (2); a modelling plate (5) suited to support the solidified layer (6); actuator means (7) suited to move the modelling plate (5) according to a direction perpendicular to the bottom (2a) of the container (2); levelling means (8) arranged in contact with the fluid substance (3), associated with power means suited to move them with respect to the container (2) so as to redistribute the fluid substance (3) in the container (2).

Abstract: According to one embodiment, a pattern formation method is disclosed. The method is configured to transfer a shape of a pattern to a plurality of shot regions of an object using a mold including a first pattern region and a second pattern region aligned with the first pattern region. The method can include transferring the shape of the pattern to each of the plurality of shot regions sequentially in a first direction from the first pattern region toward the second pattern region when the shape of the pattern is transferred using the first pattern region. The method can include transferring the shape of the pattern to each of the plurality of shot regions sequentially in a second direction from the second pattern region toward the first pattern region when the shape of the pattern is transferred using the second pattern region.

Abstract: A coating mechanism disposes a liquid (e.g., polymer) thin film onto a conveyor surface (e.g., roller or belt) that is moved by a suitable motor to convey the thin film into a precisely controlled gap (or nip) region where applied potentials generate an electric field that causes the liquid to undergo Electrohydrodynamic (EHD) patterning deformation, whereby the liquid forms patterned micro-scale features. A curing mechanism (e.g., a UV laser) is used to solidify (e.g., cross-link) the patterned liquid features inside or immediately after exiting the gap region, thereby forming micro-scale patterned structures that are either connected by an intervening web as part of a sheet, or separated into discrete micro-scale structures. Nanostructures (e.g., nanotubes or nanowires) disposed in the liquid become vertically oriented during the EHD patterning process. Segmented electrodes and patterned charges are utilized to provide digital patterning control.

Abstract: A method of forming a patterned substrate includes casting a layer of a block copolymer having an intrinsic glass transition temperature Tg, on a substrate to form a layered substrate. The method also includes heating the layered substrate at an annealing temperature, which is greater than about 50° C. above the intrinsic glass transition temperature Tg of the block copolymer, in a first atmosphere. The method further includes thermally quenching the layered substrate to a quenching temperature lower than the intrinsic glass transition temperature Tg, at a rate of greater than about 50° C./minute in a second atmosphere. The method further includes controlling an oxygen content in the first and second atmospheres to a level equal to or less than about 50 ppm to maintain the annealing and quenching temperatures below a thermal degradation temperature Td of the block copolymer.

Abstract: A method of forming a patterned substrate includes casting a layer of a block copolymer having an intrinsic glass transition temperature Tg, on a substrate to form a layered substrate. The method also includes heating the layered substrate at an annealing temperature, which is greater than about 50° C. above the intrinsic glass transition temperature Tg of the block copolymer, in a first atmosphere. The method further includes thermally quenching the layered substrate to a quenching temperature lower than the intrinsic glass transition temperature Tg, at a rate of greater than about 50° C./minute in a second atmosphere. The method further includes controlling an oxygen content in the first and second atmospheres to a level equal to or less than about 8 ppm to maintain the annealing and quenching temperatures below a thermal degradation temperature Td of the block copolymer.

Abstract: A process for cladding a metal part of an aircraft turbojet, including a plurality of metal portions, using a nozzle for emitting a laser beam, the process including positioning the metal part to be cladded on a turntable; positioning a cover on the turntable; positioning the nozzle in an aperture present in the cover; introducing an inert gas under the cover; and cladding a first portion of the metal part by carrying out operations of: spraying metal powders; emitting the laser beam; and moving the nozzle relative to the first metal portion.

Abstract: A machine tool arranged to deliver an energy source through a processing head onto a work-piece, wherein; the machine-tool has a clamping mechanism arranged to temporarily receive the processing-head, or another machining or processing-head, to process a work-piece; the processing-head comprising one or more guiding mechanisms arranged to direct the energy source onto a work-piece and a processing-head docking-manifold arranged to have connected thereto one or more media to be, in use, supplied to the processing-head to facilitate processing of the work-piece; wherein the processing-head docking-manifold allows the one or more media to be supplied to the processing-head when the processing-head is connected to the clamping mechanism; and wherein the machine-tool also comprises at least one mechanism arranged to move a supply docking-manifold into and/or out of connection with the processing-head docking-manifold such that when the two manifolds are connected the or each media is supplied to the processing

Abstract: A fabrication resource receives a base material such as metal or other suitable material. The fabrication resource applies optical energy to a surface of the base material. Application of the optical energy transforms a texture on the surface of the base material. Subsequent to transforming the texture on the surface of the base material, the fabrication resource then adheres a supplemental material such as paste including glass powder to the transformed texture on the surface. Application of heat to the paste fuses the glass powder of the applied paste into a glass layer that adheres to the transformed texture. The fabrication resource contacts an electronic circuit device onto an exposed facing of the glass layer and reheats the combination of the electronic circuit device, glass layer, and base material. The application of heat secures the electronic circuit device to the layer of glass and corresponding base material.

Abstract: A system and methods for applying a ceramic coating to a component that includes first applying a coating material to a first portion of a component. A removal agent is then applied to a second portion of the component that has an overspray byproduct thereon, and then the ceramic coating material is applied to at least the second portion of the component.

Abstract: The present invention provides apparatus, including a pigging tool, that comprises a spraying mechanism configured to move along an inner surface of a pipeline, including a slurry transport pipeline in a minable oilsands facility or plant, and to spray a coating on the inner surface of the pipeline; and a curing source, including an ultraviolet (UV) light source, a microwave source or an RF source, configured to cure the coating sprayed on the inner surface of the pipeline in situ as the spray mechanism moves along the inner surface of the pipeline.

Abstract: It is an object, with regard to a configuration for forming a macromolecular layer on a surface of a base material of an artificial joint component, to achieve a size reduction, to accurately control ultraviolet irradiation intensity, to form a macromolecular layer having a uniform thickness, to suppress the influence of ultraviolet light on equipment and workers, and to make the occurrence of a malfunction unlikely. A film-producing device body forms a macromolecular layer in an inner surface of a base material of an artificial joint component, by means of photograft polymerization. The film-producing device body includes a plurality of ultraviolet LED elements and a work holder. On the work holder, solution containing macromolecular monomers is in contact with the inner surface of the base material. The ultraviolet LED elements emit ultraviolet light to a wider area than an area that each of the ultraviolet LED elements individually irradiates.

Abstract: In an imprint method of an embodiment, in the imprinting of an imprint shot including an outermost peripheral region of a substrate where resist is not desired to be entered at the time of imprinting, light curing the resist is applied to a light irradiation region with a predetermined width including a boundary between the outermost peripheral region and a pattern formation region more inside than the outermost peripheral region, whereby the resist which is to enter inside the outermost peripheral region is cured. Then, light curing the resist filled in a template pattern is applied onto a template.

Abstract: Device configured to form a protective film includes a receiving unit made of transparent material, an attracting unit, and an UV curing unit. The receiving unit defines a receiving groove configured to locate and hold an uncoated component. A shape of the receiving groove is same as that of the uncoated component, and a size of the receiving groove is greater than that of the uncoated component. The attracting unit is configured to attract and hold the component as it is coated with protective glue. The UV curing unit is arranged below the receiving unit to cure the glue with UV light to form a protective coating. A method to form a protective film is also provided.

Abstract: A charged powder supply device is disclosed. A plurality of charged powder particles are disposed on an upper side of a carrier and at least an action source is positioned at a lower side of the carrier for acting on the carrier so as to vibrate the charged powder particles on the upper side of the carrier. As such, the vibrated charged powder particles are attached to objects to be coated, such as LEDs, under the effect of an electric field so as to form a powder layer, such as a phosphor layer. Since there are no other external forces that affect the moving direction of the charged powder particles, the powder layer can be uniformly formed on the objects.

Abstract: A method for making a medium for transferring a univocal pattern, comprising the steps of preparing a transfer medium (1) provided with a transfer surface (2), preparing an amount of encapsulated microdrops (3) of color, applying a layer of adhesive material (4) or other material or technique adapted to stably withhold said micro droplets at least on said transfer surface, randomly distributing an amount of encapsulated microdrops of color at least on said surface. Apparatus for implementing the method and medium thereby obtained.

Abstract: A powder coating system which is provided with a rotating stage which makes a metal cylindrical member rotate while holding its internal circumferential surface, a first booth which covers part of the metal cylindrical member which is held by the rotating stage, and a second booth which holds the first booth. A powder coating introduction nozzle which is provided with a filling port of powder coating and a plurality of powder coating spray ports is provided so that a filling port is positioned at the outside of the second booth and so that the plurality of spray ports can be changed in position in the first booth to face surface parts of the metal cylindrical member. The sprayed powder coating is collected inside the second booth by a flow of air from a blow device and is removed by being sucked up by a powder collector.

Abstract: The present invention relates to methods and apparatus to provide coated microbubbles, particularly but not exclusively microbubbles at least partially coated with a component, for example a clinically active component. Systems of the present invention use electromagnetic fields to move microbubbles between streams of liquids in order to perform coating or washing steps.

Abstract: Nail gel curing devices emitting ultraviolet light, as well as methods of their making and use are disclosed. The devices are useful for curing, inter alia, acrylic compositions, more particularly, acrylic nail gel compositions, and typically employ ultraviolet and/or visible light emitting diodes (“LED”) to cure such ultraviolet and/or visible light curable nail gel resins.

Abstract: An apparatus and use of the apparatus to form nanometer sized features on a workpiece includes a plurality of individually biasable tips, and each tip has a diameter on the scale or 10 nm or less. By moving the tips above the surface of a workpiece in the presence of reactants, features can be directly formed on the workpiece on a sub-micron size, below the resolution of current photolithography. The features may be etched into a workpiece, or formed thereover.

Abstract: Method of ablating the surface of a substrate including providing a dry substrate and an electrolyte source, ablating the surface of the dry substrate to at least partially remove a native oxide layer, and immersing the ablated dry substrate in the electrolyte source, in which the dry substrate is ablated prior to being introduced into the electrolyte source. Also provided is a method of ablating the surface of a substrate that includes providing a dry substrate and an electrolyte, depositing a portion of the electrolyte on the substrate at a thickness of less than 10 microns and ablating the surface of the substrate with the electrolyte applied thereon. System for use in the ablation of the surface of a substrate are also provided.

Abstract: In a method for repairing a component (40), in particular a turbine blade, the component (40) is positioned on a carrier (16) such that a repair site (42) of the component (40) faces away from the carrier (16). The component (40) is heated by means of a heating element (46) extending from the carrier (16) adjacent to the component (40). A raw material powder is applied onto the carrier (16) such that the component (40) is covered by the raw material powder. Electromagnetic or particle radiation is selectively irradiated onto the raw material powder applied onto the carrier (16) by means of an irradiation device (18) so as to produce a repair segment on the repair site (42) of the component (40) by an additive layer construction method.

Abstract: Embodiments include systems, apparatuses, and methods of thin metal-organic film deposition with inkjet printheads. A method of depositing a metal-organic thin film over a substrate includes introducing chemical precursors into one or more piezoelectric printheads. The chemical precursors including a metallic compound and a reactive liquid or gas. The method further includes dispensing droplets or a stream of the chemical precursors with the piezoelectric printheads onto a surface of the substrate supported by a stage in a vacuum chamber.

Abstract: Provided is a substrate processing apparatus wherein, even if a trouble occurs, it is bound to continue a process for the substrate without stopping the substrate processing apparatus entirely. The substrate processing apparatus according to the present disclosure includes first and second substrate conveying devices configured to convey wafers, and first and second processing blocks provided on the right and left sides of the substrate conveying device and having processing unit arrays each configured to perform the same process. Processing unit arrays on one side and processing unit arrays on the other side are respectively connected to a processing liquid supply system commonly provided with them. And, when any one of substrate conveying devices, processing liquid supply systems has a problem, the process for the wafer can be performed in the processing unit array to which the substrate conveying device and the processing liquid supply system under normal operation belong.

Abstract: A method of forming a metalloid-containing material comprises the step of preparing a hydrometalloid compound in a low volume on-demand reactor. The method further comprises the step of feeding the hydrometalloid compound prepared in the microreactor to a deposition apparatus. Additionally, the method comprises the step of forming the metalloid-containing material from the hydrometalloid compound via the deposition apparatus. A deposition system for forming the metalloid-containing material comprises at least one low volume on-demand reactor coupled to and in fluid communication with a deposition apparatus.

Abstract: An optical element includes an element main body and a plurality of sub-wavelength structures that is provided on a surface of the element main body. The sub-wavelength structures include an energy-ray-curable resin composition, and the element main body is opaque to energy rays for curing the energy-ray-curable resin composition. The surface, on which the plurality of sub-wavelength structures is provided, has a section in which scattered light is generated by scattering incident light, and intensity distribution of the scattered light is anisotropic.

Abstract: The invention relates to a method for producing a structured, at least partly optically transparent varnish surface on a surface of a substrate board, preferably of a wood material board, having a decoration. The steps of the method include applying a transparent or at least partly transparent varnish to an applicator roll thereby producing a structured varnish surface and transferring the structured varnish surface to a substrate board having a decoration. The varnish is applied to the applicator roll by a plurality of digitally controlled nozzles in a distribution defining a structure and/or is transformed on the applicator roll into a distribution defining a structure. Furthermore, a device for carrying out the method is described.