Enhancement Mode (e.g., So-called Sits) Patents (Class 257/136)
  • Patent number: 7635600
    Abstract: A photovoltaic (PV) structure is provided, along with a method for forming a PV structure with a conductive nanowire array electrode. The method comprises: forming a bottom electrode with conductive nanowires; forming a first semiconductor layer of a first dopant type (i.e., n-type) overlying the nanowires; forming a second semiconductor layer of a second dopant type, opposite of the first dopant type (i.e., p-type), overlying the first semiconductor layer; and, forming a top electrode overlying the second semiconductor layer. The first and second semiconductor layers can be a material such as a conductive polymer, a conjugated polymer with a fullerene derivative, and inorganic materials such as CdSe, CdS, Titania, or ZnO. The conductive nanowires can be a material such as IrO2, In2O3, SnO2, or indium tin oxide (ITO).
    Type: Grant
    Filed: November 16, 2005
    Date of Patent: December 22, 2009
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Fengyan Zhang, Robert A. Barrowcliff, Sheng Teng Hsu
  • Patent number: 7510955
    Abstract: A multi-fin field effect transistor includes a substrate, an oxide layer, a conductive layer, a gate oxide layer, and a doped region is provided. The substrate is surrounded by a trench, and there are at least two fin-type silicon layers formed in the substrate in a region prepared to form a gate thereon. The oxide layer is disposed in the trench and the top surface of the oxide layer is lower than that of the fin-type silicon layers. The conductive layer is disposed in the region prepared to form a gate. The top surface of the conductive layer is higher than that of the fin-type silicon layers. The gate oxide layer is disposed between the conductive layer and the fin-type silicon layers and disposed between the conductive layer and the substrate. The doped region is disposed in the substrate on both sides of the conductive layer.
    Type: Grant
    Filed: August 2, 2006
    Date of Patent: March 31, 2009
    Assignee: ProMOS Technologies Inc.
    Inventor: Hsiao-Che Wu
  • Patent number: 7508013
    Abstract: The present, invention provides a system for providing a cross-lateral junction field effect transistor (114) having desired high-performance desired voltage, frequency or current characteristics. The cross-lateral transistor is formed on a commercial semiconductor substrate (102). A channel structure (124) is formed along the substrate, having source (120) and drain (122) structures laterally formed on opposites sides thereof. A first gate structure (116) is formed along the substrate, laterally adjoining the channel structure orthogonal to the source and drain structures. A second gate structure (118) is formed along the substrate, laterally adjoining the channel structure, orthogonal to the source and drain structures and opposite the first gate structure.
    Type: Grant
    Filed: August 16, 2007
    Date of Patent: March 24, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Gregory E Howard, Leland Swanson
  • Publication number: 20090072269
    Abstract: A diode device can include an enhancement mode gallium nitride transistor having a gate, a drain and a source, wherein the gate is connected to the drain to enable the device to perform as a diode. In some embodiments, an integrated switching-diode is described that includes a substrate, a gallium nitride switching transistor on the substrate and a free wheeling diode on the substrate and coupled to the switching transistor.
    Type: Application
    Filed: September 17, 2007
    Publication date: March 19, 2009
    Inventors: Chang Soo Suh, James Honea, Umesh Mishra
  • Patent number: 7488992
    Abstract: The present invention comprises an integrated circuit fabricated on a single substrate where the integrated circuit comprises a first block comprising an enhancement mode pHEMT transistor on a substrate; a second block comprising a depletion mode pHEMT transistor on the substrate, the second block operatively connected to the first block; and a third block comprising a power pHEMT transistor on the substrate, the third block operatively connected to at least one of the first block and the second block. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope of meaning of the claims.
    Type: Grant
    Filed: December 4, 2003
    Date of Patent: February 10, 2009
    Assignee: Lockheed Martin Corporation
    Inventor: Kevin L. Robinson
  • Patent number: 7482649
    Abstract: Multi-bit nonvolatile memory devices and related methods of manufacturing the same are described. In some multi-bit nonvolatile memory devices, a semiconductor substrate has a recessed region defined therein. An insulating layer, which can include an ONO layer, is configured to store data within programming regions therein, and covers a sidewall and a lower surface of the recess region. A gate electrode is on the insulating layer in the recessed region. At least one pair of impurity regions are in the semiconductor substrate. The impurity regions adjoin a side surface of the insulating layer in the recess region and form a relative angle that is less than 120° therebetween with respect to a center of the gate electrode.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: January 27, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Min Kim, Eun-Jung Yun
  • Patent number: 7453107
    Abstract: A semiconductor device includes a substrate of semiconductor material. A source region, a drain region, and a conducting region of the semiconductor device are formed in the substrate and doped with a first type of impurities. The conducting region is operable to conduct current between the drain region and the source region when the semiconductor device is operating in an on state. A gate region is also formed in the substrate and doped with a second type of impurities. The gate region abuts a channel region of the conducting region. A stress layer is deposited on at least a portion of the conducting region. The stress layer applies a stress to the conducting region along a boundary of the conducting region that strains at least a portion of the conducting region.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: November 18, 2008
    Assignee: DSM Solutions, Inc.
    Inventor: Ashok K. Kapoor
  • Patent number: 7439563
    Abstract: A high-breakdown-voltage semiconductor device comprises a high-resistance semiconductor layer, trenches formed on the surface thereof in a longitudinal plane shape and in parallel, first regions formed on the semiconductor layer to be sandwiched between adjacent ones of the trenches and having an impurity concentration higher than that of the semiconductor layer, a second region having opposite conductivity to the first regions and continuously disposed in a trench sidewall and bottom portion, a sidewall insulating film disposed on the second region of the trench sidewall, a third region disposed on the second region of the trench bottom portion and having the same conductivity as and the higher impurity concentration than the second region, a fourth region disposed on the back surface of the semiconductor layer, a first electrode formed on each first region, a second electrode connected to the third region, and a third electrode formed on the fourth region.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: October 21, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tetsuo Hatakeyama, Takashi Shinohe
  • Patent number: 7335928
    Abstract: A silicon carbide semiconductor device such as JFET, SIT and the like is provided for accomplishing a reduction in on-resistance and high-speed switching operations. In the JFET or SIT which turns on/off a current with a depletion layer extending in a channel between a gate region formed along trench grooves, a gate contact layer and a gate electrode, which can be supplied with voltages from the outside, are formed on one surface of a semiconductor substrate or on the bottom of the trench groove. A metal conductor (virtual gate electrode) is formed in ohmic contact with a p++ contact layer of the gate region on the bottom of the trench grooves independently of the gate electrode. The virtual gate electrode is electrically isolated from the gate electrode and an external wire.
    Type: Grant
    Filed: May 25, 2007
    Date of Patent: February 26, 2008
    Assignees: Hitachi, Ltd., Denso Corporation
    Inventors: Takasumi Ohyanagi, Atsuo Watanabe, Rajesh Kumar Malhan, Tsuyoshi Yamamoto, Toshiyuki Morishita
  • Patent number: 7314765
    Abstract: A switching device has an S (Superconductor)-N (Normal Metal)-S superlattice to control the stream of electrons without any dielectric materials. Each layer of said Superconductor has own terminal. The superlattice spacing is selected based on “Dimensional Crossover Effect”. This device can operate at a high frequency without such energy losses as devices breaking the superconducting state. The limit of the operation frequency in the case of the Nb/Cu superlattice is expected to be in the order of 1018 Hz concerning plasmon loss energy of the normal metals (Cu; in the order of 103 eV).
    Type: Grant
    Filed: October 26, 2005
    Date of Patent: January 1, 2008
    Inventor: Katsuyuki Tsukui
  • Patent number: 7288800
    Abstract: The present invention provides a system for providing a cross-lateral junction field effect transistor (114) having desired high-performance desired voltage, frequency or current characteristics. The cross-lateral transistor is formed on a commercial semiconductor substrate (102). A channel structure (124) is formed along the substrate, having source (120) and drain (122) structures laterally formed on opposites sides thereof. A first gate structure (116) is formed along the substrate, laterally adjoining the channel structure orthogonal to the source and drain structures. A second gate structure (118) is formed along the substrate, laterally adjoining the channel structure, orthogonal to the source and drain structures and opposite the first gate structure.
    Type: Grant
    Filed: January 7, 2005
    Date of Patent: October 30, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Gregory E. Howard, Leland Swanson
  • Patent number: 7230283
    Abstract: A silicon carbide semiconductor device such as JFET, SIT and the like is provided for accomplishing a reduction in on-resistance and high-speed switching operations. In the JFET or SIT which turns on/off a current with a depletion layer extending in a channel between a gate region formed along trench grooves, a gate contact layer and a gate electrode, which can be supplied with voltages from the outside, are formed on one surface of a semiconductor substrate or on the bottom of the trench groove. A metal conductor (virtual gate electrode) is formed in ohmic contact with a p++ contact layer of the gate region on the bottom of the trench grooves independently of the gate electrode. The virtual gate electrode is electrically isolated from the gate electrode and an external wire.
    Type: Grant
    Filed: May 27, 2005
    Date of Patent: June 12, 2007
    Assignees: Hitachi, Ltd., DENSO Corporation
    Inventors: Takasumi Ohyanagi, Atsuo Watanabe, Rajesh Kumar Malhan, Tsuyoshi Yamamoto, Toshiyuki Morishita
  • Patent number: 7173290
    Abstract: A semiconductor switch includes a thyristor and a current shunt, preferably a transistor in parallel with and controlled by the thyristor, which shunts thyristor current at turn-off. The thyristor includes a portion of a bottom drift layer, with a p-n junction formed below a gate adjacent to the bottom drift layer to establish a depletion region with a high potential barrier to thyristor current flow at turn-off. The bottom drift layer also provides the transistor base, as well as a current path allowing the transistor base current to be controlled by the thyristor. The switch is voltage-controlled device using an insulated gate for turn-on and turn-off.
    Type: Grant
    Filed: August 15, 2003
    Date of Patent: February 6, 2007
    Assignee: Teledyne Licensing, LLC
    Inventor: Hsueh-Rong Chang
  • Patent number: 7119380
    Abstract: A junction field effect transistor is described. The transistor is made from a wide bandgap semiconductor material. The device comprises source, channel, drift and drain semiconductor layers, as well as p-type implanted or Schottky gate regions. The source, channel, drift and drain layers can be epitaxially grown. The ohmic contacts to the source, gate, and drain regions can be formed on the same side of the wafer. The devices can have different threshold voltages depending on the vertical channel width and can be implemented for both depletion and enhanced modes of operation for the same channel doping. The devices can be used for digital, analog, and monolithic microwave integrated circuits. Methods for making the transistors and integrated circuits comprising the devices are also described.
    Type: Grant
    Filed: December 1, 2004
    Date of Patent: October 10, 2006
    Assignee: SemiSouth Laboratories, Inc.
    Inventors: Igor Sankin, Jeffrey B. Casady, Joseph N. Merrett
  • Patent number: 7082248
    Abstract: A semiconductor waveguide based optical receiver is disclosed. An apparatus according to aspects of the present invention includes an absorption region defined along an optical waveguide. The absorption region includes a first type of semiconductor material having a first refractive index. The apparatus also includes a multiplication region defined along the optical waveguide. The multiplication region is proximate to and separate from the absorption region. The multiplication region includes a second type of semiconductor material having a second refractive index. The first refractive index greater than the second refractive index such that an optical beam directed through the optical waveguide is pulled towards the absorption region from the multiplication region and absorbed in the absorption region to create electron-hole pairs from the optical beam. The multiplication region includes first and second doped regions defined along the optical waveguide.
    Type: Grant
    Filed: October 4, 2005
    Date of Patent: July 25, 2006
    Assignee: Intel Corporation
    Inventor: Michael T. Morse
  • Patent number: 7045397
    Abstract: JFET and MESFET structures, and processes of making same, for low voltage, high current and high frequency applications. The structures may be used in normally-on (e.g., depletion mode) or normally-off modes. The structures include an oxide layer positioned under the gate region which effectively reduces the junction capacitance (gate to drain) of the structure. For normally off modes, the structures reduce gate current at Vg in forward bias. In one embodiment, a silicide is positioned in part of the gate to reduce gate resistance. The structures are also characterized in that they have a thin gate due to the dipping of the spacer oxide, which can be below 1000 angstroms and this results in fast switching speeds for high frequency applications.
    Type: Grant
    Filed: May 3, 2005
    Date of Patent: May 16, 2006
    Assignee: Lovoltech, Inc.
    Inventors: Ho-Yuan Yu, Valentino L. Liva
  • Patent number: 6998697
    Abstract: A chalcogenide comprising material is formed to a first thickness over the first conductive electrode material. The chalcogenide material comprises AxBy. A metal comprising layer is formed to a second thickness over the chalcogenide material. The metal comprising layer defines some metal comprising layer transition thickness for the first thickness of the chalcogenide comprising material such that when said transition thickness is met or exceeded, said metal comprising layer when diffused within said chalcogenide comprising material transforms said chalcogenide comprising material from an amorphous state to a crystalline state. The second thickness being less than but not within 10% of said transition thickness. The metal is irradiated effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal into the chalcogenide material.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: February 14, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Kristy A. Campbell, John T. Moore
  • Patent number: 6917054
    Abstract: A semiconductor device includes a trench formed on a source side of a drift region, a p-type gate region and a gate formed at the bottom of the trench, and the source formed over the entire surface of the unit device through an insulating film. The narrowest portion of a channel of the device is deeper than one-half the junction depth of the p-type gate region. This allows the width of the channel on the drain side to be reduced even when a lower energy ion implantation manufacturing process is used.
    Type: Grant
    Filed: October 9, 2003
    Date of Patent: July 12, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Hidekatsu Onose, Hideo Homma, Atsuo Watanabe
  • Patent number: 6897493
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n? region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n? region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Grant
    Filed: June 10, 2003
    Date of Patent: May 24, 2005
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 6894346
    Abstract: A structure is provided that ensures a low on-resistance and a better blocking effect. In a lateral type SIT (Static Induction Transistor) in which a first region is used as a p+ gate and a gate electrode is formed on the bottom of the first region, the structure is built such that the p+ gate and an n+ source are contiguous. An insulating film is formed on the surface of an n? channel, and an auxiliary gate electrode is formed on the insulating film. In addition, the auxiliary gate electrode and the source electrode are shorted.
    Type: Grant
    Filed: August 13, 2003
    Date of Patent: May 17, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Hidekatsu Onose, Atsuo Watanabe
  • Patent number: 6867437
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n? region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n? region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Grant
    Filed: August 20, 2002
    Date of Patent: March 15, 2005
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 6849880
    Abstract: A power semiconductor device includes second layers of a second conductivity type disposed in a first layer of a first conductivity type. The second layers extend in a depth direction and are arrayed at intervals. Third layers of the second conductivity type are disposed respectively in contact with the second layers. Fourth layers of the first conductivity type are respectively formed in surfaces of the third layers. A gate electrode faces, through a first insulating film, a channel region, which is each of portions of the third layers interposed between the fourth layers and the first layer. An additional electrode is disposed on each of the second layers through a second insulating film, and faces, through each of the second layers, the first main electrode. The additional electrode is electrically connected to the gate electrode.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: February 1, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saito, Ichiro Omura, Satoshi Aida
  • Patent number: 6838729
    Abstract: The invention relates to a semiconductor component with enhanced avalanche ruggedness. At the nominal current of this semiconductor component, in the event of an avalanche the voltage applied between two electrodes is 6 % or more above the static reverse voltage at the same temperature.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: January 4, 2005
    Assignee: Infineon Technologies AG
    Inventors: Andreas Schlögl, Markus Schmitt, Hans-Joachim Schulze, Markus Vossebürger, Armin Willmeroth
  • Patent number: 6831328
    Abstract: The invention concerns an anode voltage sensor of a vertical power component selected from the group consisting of components called thyristor, MOS, IGBT, PMCT, EST, BRT transistor, MOS thyristor, turn-off MOS thyristor, formed by a lightly doped N-type substrate (1) whereof the rear surface (2) having a metallizing coat corresponds to the component anode. Said sensor comprises, on the front surface side, a substrate zone (12) surrounded at least partly by a P-type region with low potential in front of an anode potential, said zone (12) being coated with a metallizing coat (M) in ohmic contact with it, whereon is provided an image of the anode voltage.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: December 14, 2004
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Patrick Austin, Jean-Pierre Laur, Olivier Causse, Marie Breil, Jean-Louis Sanchez, Jean Jalade
  • Patent number: 6777722
    Abstract: A method for fabricating a junction field effect transistor (JFET) with a double dose gate structure. A trench is etched in the surface of a semiconductor substrate, followed by a low dose implant to form a first gate region. An anneal may or may not be performed after the low dose implant. A gate definition spacer is then formed on the wall the trench to establish the lateral extent of a second, high dose implant gate region. After the second implant, the gate is annealed. The double dose gate structure produced by the superposition of two different and overlapping regions provides an additional degree of flexibility in determining the ultimate gate region doping profile. A further step comprises using the gate definition spacer to define the walls of a second etched trench that is used to remove a portion of the p-n junction, thereby further reducing the junction capacitance.
    Type: Grant
    Filed: July 2, 2002
    Date of Patent: August 17, 2004
    Assignee: Lovoltech, Inc.
    Inventors: Ho-Yuan Yu, Valentino L. Liva, Pete Pegler
  • Patent number: 6774408
    Abstract: In a trench MOS gate structure of a semiconductor device where trenches (T) are located between an n-type base layer (1) and an n-type source layer (3), a p-type channel layer (12) is formed adjacent to side walls of the trenches, having an even concentration distribution along a depthwise dimension of the trenches. The p-type channel layer enables saturation current to decrease without a raise of ON-resistance of the device, and resultantly a durability against short-circuit can be enhanced. The n-type source layer formed adjacent to the side walls of the trench also further enhances the durability against short-circuit. Providing contacts of the emitter electrode (7) with the n-type source layer at the side walls of the trenches permits a miniaturization of the device and a reduction of the ON-resistance as well.
    Type: Grant
    Filed: June 28, 2002
    Date of Patent: August 10, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hideaki Ninomiya
  • Patent number: 6750477
    Abstract: In a static induction transistor, in addition to a first gate layer (4), a plurality of second gate layers (41) having a shallower depth and a narrower gap therebetween than those of the first gate layer (4) are provided in an area surrounded by the first gate layer (4), thereby an SiC static induction transistor with an excellent off characteristic is realized, while ensuring a required processing accuracy during production thereof.
    Type: Grant
    Filed: April 15, 2002
    Date of Patent: June 15, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Tsutomu Yatsuo, Toshiyuki Ohno, Hidekatsu Onose, Saburo Oikawa
  • Patent number: 6693310
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Grant
    Filed: May 23, 2001
    Date of Patent: February 17, 2004
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 6653666
    Abstract: J-FET having a first semiconductor region (2, 3), which comprises a first contact (7) with a highly doped contact layer (8) serving as a source disposed between two second contacts (9) serving as a gate on its first surface (4). The three contacts (7, 9) are each connected to a respective second semiconductor region (5, 6). The first and second semiconductor regions (2, 3, 5, 6) are of opposite conductivity types. The second semiconductor regions (5) connected to the second contacts (9) extend in the first semiconductor region (2, 3) below the second semiconductor region (6) that is connected to the first contact (7), with the result that the three second semiconductor regions (5, 6) at least partially overlap in a projection onto a horizontal plane and a channel region (11) is formed between the three second semiconductor regions (5, 6) in the first semiconductor region (2, 3).
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: November 25, 2003
    Assignee: SiCED Electronics Development GmbH & Co. KG
    Inventors: Heinz Mitlehner, Ulrich Weinert
  • Publication number: 20030201455
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Application
    Filed: June 10, 2003
    Publication date: October 30, 2003
    Applicant: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 6555878
    Abstract: Described is a MOS gate-controlled SCR (UGSCR) structure with a U-shaped gate (UMOS) for an ESD protection circuit in an IC device which is compatible with shallow trench isolation (STI) and self-aligned silicide (salicide) fabrication technology. The UMOS gate is located in a p-substrate and is surrounded by an n-well on either side. Adjacent to one side of the UMOS gate, a first n+ diffusion is formed which straddles the first n-well. The n+ diffusion together with a p+ pickup diffused next to it form the cathode of the SCR (thyristor). Adjacent to the other side of the UMOS gate, a second n+ and p+ diffusion are formed in a second n-well. The second n+ and p+ diffusion together with the UMOS gate form the anode of the SCR and the input terminal of the circuit to be protected. The SCR is formed by the first n+ diffusion/n-well (cathode), the p-substrate, the second n-well and the second p+/n+ diffusion (anode).
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: April 29, 2003
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Jun Song, Guang ping Hua, Keng-Foo Lo
  • Patent number: 6486511
    Abstract: A solid state microwave switch having a plurality of adjacent parallel fingers covered with an oxide layer. One end of a finger is an N+ source region while the other end is an N+ drain region, with a current conducting N region between them. The oxide layer is covered with a gate layer to which a gate signal is applied for control of current between the N+ regions through the N region. The gate layer is highly resistive and has a sheet resistance on the order of millions of ohms per square. The length from the source to drain region is around 2 &mgr;m, and the fingers are spaced with a pitch of around 1 &mgr;m.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: November 26, 2002
    Assignee: Northrop Grumman Corporation
    Inventors: Harvey C. Nathanson, Philip C. Smith, R. Chris Clarke, David M. Krafcsik, Lawrence E. Dickens
  • Patent number: 6458632
    Abstract: Described is a method of creating a MOS gate-controlled SCR (UGSCR) structure with a U-shaped gate (UMOS) for an ESD protection circuit in an IC device which is compatible with shallow trench isolation (STI) and self-aligned silicide (salicide) fabrication technology. The UMOS gate is located in a p-substrate and is surrounded by an n-well on either side. Adjacent to one side of the UMOS gate, a first n+ diffusion is formed which straddles the first n-well. The n+ diffusion together with a p+ pickup diffused next to it form the cathode of the SCR (thyristor). Adjacent to the other side of the UMOS gate, a second n+ and p+ diffusion are formed in a second n-well. The second n+ and p+ diffusion together with the UMOS gate form the anode of the SCR and the input terminal of the circuit to be protected. The SCR is formed by the first n+ diffusion/n-well (cathode), the p-substrate, the second n-well and the second p+/n+ diffusion (anode).
    Type: Grant
    Filed: March 14, 2001
    Date of Patent: October 1, 2002
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Jun Song, Guang Ping Hua, Keng-Foo Lo
  • Patent number: 6445012
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Grant
    Filed: May 23, 2001
    Date of Patent: September 3, 2002
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Publication number: 20020093029
    Abstract: A method and structure that provides a battery within an integrated circuit for providing voltage to low-current electronic devices that exist within the integrated circuit. The method includes Front-End-Of-Line (FEOL) processing for generating a layer of electronic devices on a semiconductor wafer, followed by Back-End-Of-Line (BEOL) integration for wires the electronic devices together to form completed electrical circuits of the integrated circuit. The BEOL integration includes forming a multilayered structure of wiring levels on the layer of electronic devices. Each wiring level includes conductive metallization (e.g., metal-plated vias, conductive wiring lines, etc.) embedded in insulative material. The battery is formed during BEOL integration within one or more wiring levels, and the conductive metallization conductively couples positive and negative terminals of the battery to the electronic devices.
    Type: Application
    Filed: January 16, 2001
    Publication date: July 18, 2002
    Inventors: Arne W. Ballantine, Robert A. Groves, Jennifer L. Lund, James S. Nakos, Michael B. Rice, Anthony K. Stamper
  • Publication number: 20020088990
    Abstract: A reliable super-junction semiconductor device is provided that facilitates relaxing the tradeoff relation between the on-resistance and the breakdown voltage and improving the avalanche withstanding capability under an inductive load. The super-junction semiconductor device includes an active region including a thin first alternating conductivity type layer and a heavily doped n+-type intermediate drain layer between first alternating conductivity type layer and an n++-type drain layer, and a breakdown withstanding region including a thick second alternating conductivity type layer. Alternatively, active region includes a first alternating conductivity type layer and a third alternating conductivity type layer between first alternating conductivity type layer and n++-type drain layer, third alternating conductivity type layer being doped more heavily than first alternating conductivity type layer.
    Type: Application
    Filed: October 17, 2001
    Publication date: July 11, 2002
    Inventors: Susumu Iwamoto, Tatsuhiko Fujihira, Katsunori Ueno, Yasuhiko Onishi, Takahiro Sato
  • Publication number: 20020036298
    Abstract: A photoelectric conversion device comprising a semiconductor and an organic electrically conducting agent, wherein the organic electrically conducting agent exhibits a melting temperature Tm which is lower than the operation temperature of the photoelectric conversion device.
    Type: Application
    Filed: May 25, 2001
    Publication date: March 28, 2002
    Inventors: Gabriele Nelles, Akio Yasuda, Hans-Werner Schmidt, Thelakkat Mukundan, Haridas R. Karickal, Donal Lupo
  • Patent number: 6355513
    Abstract: A semiconductor device efficiently providing the DC currents required in both discrete and integrated circuits operated at low DC supply voltages. The device disclosed in the present invention is an asymmetrical, enhancement mode, Junction Field Effect Transistor (JFET). The device consists of an epitaxial layer on the surface of a substrate, both of which are doped with the same polarity. The epitaxial layer has a graded doping profile with doping density increasing with distance from the substrate. A grill-like structure is constructed within the upper and lower bounds of, and extending throughout the length and width of the epitaxial layer, and is doped with a polarity opposite to that of the epitaxial layer. A first electrical connection made to the exposed side of the substrate is defined as the drain electrode. A second electrical connection made to the exposed surface of the epitaxial layer is defined as the source electrode.
    Type: Grant
    Filed: September 25, 2000
    Date of Patent: March 12, 2002
    Assignee: Lovoltech, Inc.
    Inventor: Ho-Yuan Yu
  • Publication number: 20010045566
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Application
    Filed: May 23, 2001
    Publication date: November 29, 2001
    Applicant: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 6265735
    Abstract: A pin diode is formed by a p+ collector region, an n type buffer region, an n− region and an n+ cathode region. A trench is formed from the surface of n+ cathode region through n+ cathode region to reach n− region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n+ cathode region. An anode electrode is formed to be electrically connected to p+ collector region. The n+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: July 24, 2001
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 6259134
    Abstract: A MOS-controllable power semiconductor trench device has a gate in the form of a trench which extends through a region of p type silicon into an n type region of low conductivity. A discontinous buried p layer below the bottom of the trench forms part of a thyristor which in operation is triggered into conduction by conduction of a PIN diode which is produced when an accumulation layer is formed in the n type region adjacent to the trench under the action of an on-state gate signal. The device has a high on-state conductivity and is protected against high voltage breakdown in its off-state by the presence of the buried layer. An off-state gate signal causes removal of the accumulation layer and conduction of the PIN diode and the thyristor ceases in safe, reliable and rapid manner.
    Type: Grant
    Filed: July 9, 1998
    Date of Patent: July 10, 2001
    Assignee: Mitel Semiconductor Limited
    Inventors: Gehan A. J Amaratunga, Florin Udrea
  • Patent number: 5977570
    Abstract: A pin diode is formed by a p.sup.+ collector region, an n type buffer region, an n.sup.- region and an n.sup.+ cathode region. A trench is formed from the surface of n.sup.+ cathode region through n.sup.+ cathode region to reach n.sup.- region. An insulating film is formed along an inner wall surface of trench. A gate electrode layer is formed to oppose to the sidewall of n.sup.+ cathode region with insulating film interposed. A cathode electrode is formed to be electrically connected to n.sup.+ cathode region. An anode electrode is formed to be electrically connected to p.sup.+ collector region. The n.sup.+ cathode region is formed entirely over the surface between trenches extending parallel to each other. Thus, a power semiconductor device in which gate control circuit is simplified and which has good on property can be obtained.
    Type: Grant
    Filed: July 18, 1996
    Date of Patent: November 2, 1999
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Takahashi, Katsumi Nakamura, Tadaharu Minato, Masana Harada
  • Patent number: 5786609
    Abstract: A semiconductor detector structure consists of a unipolar or single-pole nsistor disposed or arranged on a substantially depleted semiconductor body, with a drain, a source, a resetting contact, a top gate and a potentially floating layer forming at least one gate of the unipolar transistor, as well as at least one capacitor. The source is directly connected to the first electrode or electrodes of the capacitor or capacitors. The capacitor or the capacitors are integrated jointly with or into the semiconductor structure.
    Type: Grant
    Filed: May 23, 1996
    Date of Patent: July 28, 1998
    Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaflen e.V.
    Inventors: Josef Kemmer, Gerhard Lutz, Rainer Richter, Karl-Ernst Ehwald
  • Patent number: 5753938
    Abstract: A semiconductor switching device includes a plurality of adjacent heterojunction-gate static-induction transistor (SIT) unit cells connected in parallel in a monocrystalline silicon carbide substrate having first and second opposing faces, a relatively highly doped silicon carbide drain region adjacent the first face and a relatively highly doped silicon carbide source region adjacent the second face. A relatively lightly doped drift region is also provided in the substrate and extends between the drain region and source region. A plurality of trenches are also provided in the substrate so that sidewalls of the trenches extend adjacent the drift region. Each trench preferably contains a relatively highly doped second conductivity type nonmonocrystalline silicon gate region comprised of a material selected from the group consisting of polycrystalline silicon or amorphous silicon. These gate regions form P-N heterojunctions with the drift region at the sidewalls and bottoms of the trenches.
    Type: Grant
    Filed: August 8, 1996
    Date of Patent: May 19, 1998
    Assignee: North Carolina State University
    Inventors: Naresh I. Thapar, Praveen Muraleedharan Shenoy, Bantval Jyant Baliga
  • Patent number: 5665987
    Abstract: In a gate insulated static induction thyristor with a split gate type shorted cathode structure, a first gate of the split gate structure is used as a cathode short-circuit gate and the cathode region is formed in the second gate. A MOS structure is formed on the second gate as a control gate electrode isolated therefrom. Since the channel integration density is high, the area efficiency increases. The MOS gate structure suppresses the minority carrier (hole) storage effect to permit high-speed swtching of the thyristor, and the shorted cathode structure provides for increased maximum controllable current/voltage durability. The split gate structure can be used in combination with planar, buried, recessed and double gate structures.
    Type: Grant
    Filed: March 31, 1995
    Date of Patent: September 9, 1997
    Assignees: Toyo Denki Seizo Kabushiki Kaisha, Takashige Tamamushi
    Inventors: Kimihiro Muraoka, Yoshinobu Ohtsubo, Toshio Higuchi, Makoto Iguchi, Takashige Tamamushi
  • Patent number: 5663582
    Abstract: A recess-gate type static induction transistor having a high breakdown voltage is provided, which includes an n-type channel region provided over an n.sup.+ -type drain region, p.sup.+ -type elongated gate regions provided in grooves of the channel region, n.sup.+ -type elongated regions formed on the channel region so as to be arranged in parallel with the gate regions, each of which is disposed between the gate regions, and a p.sup.+ -type guard ring region provided in the channel region and arranged to surround the gate regions. The elongated gate regions are coupled to the guard ring region at both edges. In addition, the outer-most elongated gate regions are coupled to the guard ring region along the longitudinal direction, respectively, thereby increasing the breakdown voltage of the device.
    Type: Grant
    Filed: May 21, 1996
    Date of Patent: September 2, 1997
    Assignee: Zaidan Hojin Handotai Kenkyu Shinkokai
    Inventors: Junichi Nishizawa, Kaoru Motoya, Akira Ito
  • Patent number: 5648665
    Abstract: A P.sup.+ layer is formed on the lower surface of an N.sup.- substrate, and recesses are defined in the upper surface of the N.sup.- substrate. Then, P.sup.+ gate regions and bottom gate regions are formed in side walls and bottoms of the recesses. The N.sup.- substrate and an N.sup.- substrate are ultrasonically cleaned to remove impurities therefrom, then cleaned by pure water, and dried by a spinner. Then, while lands on the upper surface of the N.sup.- substrate are being held against the surface of the N.sup.- substrate, the N.sup.- substrate are joined to each other by heating then at 800.degree. C. in a hydrogen atmosphere.
    Type: Grant
    Filed: April 26, 1995
    Date of Patent: July 15, 1997
    Assignee: NGK Insulators, Ltd.
    Inventor: Yoshio Terasawa
  • Patent number: 5602405
    Abstract: A semiconductor device, by which a base in which gates are buried can be formed by the junction of semiconductor substrates to each other at a lower temperature, and a fabrication process thereof are provided. Recesses are defined in the top of an N.sup.- substrate. A P.sup.+ layer is formed on the underside of the N.sup.- substrate. P.sup.+ -Gate regions are each formed in an area ranging from the bottom to lower side portions of the recesses. A metal layer composed of an Au-Sb alloy is formed on the underside of the N.sup.+ substrate. The N.sup.- substrate and the N.sup.+ substrate are subjected to a treatment for removing impurities thereon with an aqueous solution of sulfuric acid and hydrogen peroxide, washed with purified water and dried by a spin dryer. The N.sup.- substrate and the N.sup.+ substrate are heated at about 350.degree. C.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: February 11, 1997
    Assignee: NGK Insulators, Ltd.
    Inventor: Yoshio Terasawa
  • Patent number: 5559346
    Abstract: A field-effect semiconductor device for reducing on-state source-drain voltage and increasing breakdown voltage, has a one conductivity type semiconductor region, a source region of one conductivity type, a drain region, and gate regions of other conductivity type. The source region, the drain region and the gate regions are formed in the semiconductor region and contiguous to a surface of the semiconductor region. The gate regions are located so as to sandwich a portion of the semiconductor region coupling the source region and the drain region.
    Type: Grant
    Filed: October 18, 1994
    Date of Patent: September 24, 1996
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Tomoyoshi Kushida
  • Patent number: 5545905
    Abstract: The present invention is to provide a Static Induction semiconductor device with a Static Induction Schottky shorted structure where the main electrode region is composed of regions of higher and lower impurity densities relative to each other, the main electrode forms an ohmic contact with the higher impurity density region and also forms a Schottky contact with a Static Induction Schottky shorted region of the lower impurity density region surrounded by tile higher impurity density region, and it is excellent in turn-off performance and easy to use, by substantially reducing tile minority carrier storage time, the fall time and the quantity of gate pull-out charges in order that charges may easily be pulled out from the cathode or source electrode as well as from the gate electrode at turn-off.
    Type: Grant
    Filed: April 18, 1994
    Date of Patent: August 13, 1996
    Assignees: Toyo Denki Seizo Kabushiki Kaisha, Takashige Tamamushi
    Inventors: Kimihiro Muraoka, Naohiro Shimizu, Takashige Tamamushi