Non-single Crystal, Or Recrystallized, Material Forms Active Junction With Single Crystal Material (e.g., Monocrystal To Polycrystal Pn Junction Or Heterojunction) Patents (Class 257/51)
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Patent number: 7709837Abstract: Nickel is selectively held in contact with a particular region of an amorphous silicon film. Crystal growth parallel with a substrate is effected by performing a heat treatment. A thermal oxidation film is formed on the silicon film by performing a heat treatment in an oxidizing atmosphere containing a halogen element. During this step, in the silicon film, impurities included such as oxygen or chlorine, are segregated with extending along the crystal growth, the crystallinity is improved, and the gettering of nickel element proceeds. A thin-film transistor is formed so that the direction connecting source and drain regions coincides with the above crystal growth direction. As a result, a TFT having superior characteristics such as a mobility larger than 200 cm2/Vs and an S value smaller than 100 mV/dec. can be obtained.Type: GrantFiled: July 10, 2006Date of Patent: May 4, 2010Assignee: Semiconductor Energy Laboratory Co., LtdInventors: Shunpei Yamazaki, Satoshi Teramoto, Jun Koyama, Yasushi Ogata, Masahiko Hayakawa, Mitsuaki Osame, Hisashi Ohtani, Toshiji Hamatani
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SPIN INJECTION DEVICE HAVING SEMICONDUCTOR-FERROMAGNETIC-SEMICONDUCTOR STRUCTURE AND SPIN TRANSISTOR
Publication number: 20100102319Abstract: A spin injection device and spin transistor including a spin injection device. A spin injection device includes different semiconductor materials and a spin-polarizing ferromagnetic material there between. The semiconductor materials may have different crystalline structures, e.g., a first material can be polycrystalline or amorphous silicon, and a second material can be single crystalline silicon. Charge carriers are spin-polarized when the traverse the spin-polarizing ferromagnetic material and injected into the second semiconductor material. A Schottky barrier height between the first semiconductor and ferromagnetic materials is larger than a second Schottky barrier height between the ferromagnetic and second semiconductor materials. A spin injection device may be a source of a spin field effect transistor.Type: ApplicationFiled: June 29, 2007Publication date: April 29, 2010Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventor: Ya-Hong Xie -
Patent number: 7705426Abstract: The present invention provides an integrated semiconductor device that includes a semiconductor substrate, a first device containing a heterojunction bipolar transistor (HBT) located in a first region of the semiconductor substrate, wherein the HBT includes a base region containing a first portion of a SiGe or SiGeC layer, and a second device located in a second region of the semiconductor substrate, wherein the second device includes an interconnect containing a second portion of the SiGe or SiGeC layer. In a specific embodiment of the present invention, the second device is a memory device including a trench capacitor and a field effect transistor (FET) that are electrically connected together by the second portion of the SiGe or SiGeC layer. Alternatively, the second device is a trench-biased PNPN silicon controlled rectifier (SCR). The present invention also provides a novel reversibly programmable device or a novel memory device formed by a novel trench-biased SCR device.Type: GrantFiled: November 10, 2006Date of Patent: April 27, 2010Assignee: International Business Machines CorporationInventor: Steven Voldman
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Patent number: 7671448Abstract: It is an object of the present invention to form an organic transistor including an organic semiconductor having high crystallinity without loosing an interface between an organic semiconductor of a channel where carriers are spread out and a gate insulating layer and deteriorating a yield. A semiconductor device according to the present invention has a stacked structure of organic semiconductor layers, and at least the upper organic semiconductor layer is in a polycrystalline or a single crystalline state and the lower organic semiconductor layer is made of a material serving as a channel. Carrier mobility can be increased owing to the upper organic semiconductor layer having high crystallinity; thus, insufficient contact due to the upper organic semiconductor layer can be compensated by the lower organic semiconductor layer.Type: GrantFiled: March 16, 2006Date of Patent: March 2, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shinobu Furukawa, Ryota Imahayashi
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Publication number: 20100044705Abstract: A semiconductor structure that is to be heated. The structure includes a substrate for the front face deposition of a useful layer intended to receive components for electronics, optics or optoelectronics. The structure contains doped elements that absorb infrared radiation so as to substantially increase infrared absorption by the structure so that the front face reaches a given temperature when a given infrared power is supplied to the structure. At least one part of the doped elements have insufficient electrical activity or localization in the structure, such that they cannot disturb the operation of the components. In addition, a method of producing this structure and a method of forming a useful layer of semiconductor material on the structure.Type: ApplicationFiled: March 25, 2008Publication date: February 25, 2010Inventors: Robert Langer, Hacène Lahreche
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Publication number: 20100019242Abstract: A polycrystalline Si thin film and a single crystal Si thin film are formed on an SiO2 film deposited on an insulating substrate. A polycrystalline Si layer is grown by thermally crystallizing an amorphous Si thin film so as to form the polycrystalline Si thin film. A single crystal Si substrate, having (a) an SiO2 film thereon and (b) a hydrogen ion implantation portion therein, is bonded to an area of the polycrystalline Si thin film that has been subjected to etching removal, and is subjected to a heating process. Then, the single crystal Si substrate is divided at the hydrogen ion implantation portion in an exfoliating manner, so as to form the single crystal Si thin film. As a result, it is possible to provide a large-size semiconductor device, having the single crystal Si thin film, whose property is stable, at a low cost.Type: ApplicationFiled: October 6, 2009Publication date: January 28, 2010Applicant: Sharp Kabushiki KaishaInventors: Yutaka TAKAFUJI, Takashi Itoga
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Patent number: 7642605Abstract: A semiconductor device includes a glass substrate having a main surface, a polysilicon film formed on the main surface, having a channel region formed and having a source region and a drain region formed on opposing sides of the channel region, a gate insulating film provided so as to be in contact with the polysilicon film and containing oxygen, and a gate electrode provided in a position facing the channel region with the gate insulating film being interposed. The polysilicon film has a thickness larger than 50 nm and not larger than 150 nm. The polysilicon film contains hydrogen in a proportion not smaller than 0.5 atomic percent and not larger than 10 atomic percent. With such a structure, a semiconductor device attaining a large drain current and having a desired electric characteristic is provided.Type: GrantFiled: February 10, 2005Date of Patent: January 5, 2010Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Toru Takeguchi, Kazuyuki Sugahara
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Patent number: 7642178Abstract: A method for manufacturing a semiconductor device includes steps of: forming a first epitaxial film on a silicon substrate; forming a trench in the first epitaxial film; and forming a second epitaxial film on the first epitaxial film and in the trench. The step of forming the second epitaxial film includes a final step, in which a mixed gas of a silicon source gas and a halide gas is used. The silicon substrate has an arsenic concentration defined as ?. The second epitaxial film has an impurity concentration defined as ?. The arsenic concentration and the impurity concentration has a relationship of: ??3×1019×ln(?)?1×1021.Type: GrantFiled: September 26, 2006Date of Patent: January 5, 2010Assignees: DENSO CORPORATION, Sumco CorporationInventors: Shoichi Yamauchi, Takumi Shibata, Tomonori Yamaoka, Syouji Nogami
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Publication number: 20090272975Abstract: A structure and method for a light-emitting diode are presented. A preferred embodiment comprises a substrate with a conductive, poly-crystalline, silicon-containing layer over the substrate. A first contact layer is epitaxially grown, using the conductive, poly-crystalline, silicon-containing layer as a nucleation layer. An active layer is formed over the first contact layer, and a second contact layer is formed over the active layer.Type: ApplicationFiled: August 11, 2008Publication date: November 5, 2009Inventors: Ding-Yuan Chen, Wen-Chih Chiou, Chia-Lin Yu, Chen-Hua Yu
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Publication number: 20090267066Abstract: To provide a photoelectric conversion device with improved photoelectric conversion characteristics and cost competitiveness. A photoelectric conversion device including a semiconductor junction has a semiconductor layer in which a needle-like crystal is made to grow over an impurity semiconductor layer. The impurity semiconductor layer is formed of a microcrystalline semiconductor and includes an impurity imparting one conductivity type. An amorphous semiconductor layer is deposited on a microcrystalline semiconductor layer by setting the flow rate of a dilution gas (typically silane) to 1 time to 6 times the flow rate of a semiconductor source gas (typically hydrogen) at the time of deposition. Thus, a crystal with a three-dimensional shape tapered in a direction of the deposition of a film, i.e., in a direction from the microcrystalline semiconductor layer to the amorphous semiconductor layer is made to grow.Type: ApplicationFiled: April 13, 2009Publication date: October 29, 2009Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Shunpei YAMAZAKI, Satoshi TORIUMI, Tomokazu YOKOI, Makoto FURUNO
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Patent number: 7608530Abstract: A hetero-crystalline device structure and a method of making the same include a first layer and a nanostructure integral to a crystallite in the first layer. The first layer is a non-single crystalline material. The nanostructure is a single crystalline material. The nanostructure is grown on the first layer integral to the crystallite using epitaxial growth.Type: GrantFiled: March 1, 2007Date of Patent: October 27, 2009Assignee: Hewlett-Packard Development Company, L.P.Inventors: Nobuhiko Kobayashi, Shih Yuan Wang
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Patent number: 7601983Abstract: A transistor includes a semiconductor substrate that has a first surface of a {100} crystal plane, a second surface of the {100} crystal plane having a height lower than that of the first surface, and a third surface of a {111} crystal plane connecting the first surface to the second surface. First heavily doped impurity regions are formed under the second surface. A gate structure is formed on the first surface. An epitaxial layer is formed on the second surface and the third surface. Second heavily doped impurity regions are formed at both sides of the gate structure. The second heavily doped impurity regions have side faces of the {111} crystal plane so that a short channel effect generated between the impurity regions may be prevented.Type: GrantFiled: August 19, 2005Date of Patent: October 13, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Tetsuji Ueno, Hwa-Sung Rhee, Ho Lee, Dong-Suk Shin, Seung-Hwan Lee
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Publication number: 20090206336Abstract: A method for fabricating a semiconductor device comprises depositing a first layer of oxide on at least a portion of a channel of a transistor. The method further comprises depositing a layer of nitride on the first layer of oxide and etching at least a portion of the layer of nitride to the first layer of oxide. The method further comprises depositing a second layer of oxide and planarizing the oxide to expose at least a portion of the layer of nitride. The method further comprises stripping at least a portion of the layer of nitride to create one or more notches and removing at least a portion of the first layer of oxide. The method further comprises depositing a layer of polysilicon, wherein at least a portion of the layer of polysilicon is deposited into at least one of the one or more notches.Type: ApplicationFiled: February 19, 2008Publication date: August 20, 2009Inventor: Srinivasa R. Banna
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Publication number: 20090206335Abstract: The invention relates to a BiCMOS device comprising a substrate having a first type of conductivity and a number of active regions that are provided therein and are delimited in a lateral direction by flat field-insulating regions. Vertical npn bipolar epitaxial base transistors are disposed in a first partial number of the active regions while vertical pnp bipolar epitaxial base transistors are arranged in a second partial number of the active regions of the BiCMOS device. One transistor type or both transistor types are provided with both a collector region and a collector contact region in one and the same respective active region. In order to improve the high frequency characteristics, an insulation doping region that is configured so as to electrically insulate the collector and the substrate is provided between the collector region and the substrate exclusively in a first transistor type in which the type of conductivity of the substrate corresponds to that of the collector region.Type: ApplicationFiled: December 1, 2004Publication date: August 20, 2009Inventors: Bernd Heinemann, Jürgen Drews, Steffen Marschmayer, Holger Rücker
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Publication number: 20090166625Abstract: The present invention provides a method for forming a metal-oxide-semiconductor (MOS) device and the structure thereof. The method includes at least the steps of forming a silicon germanium layer by the first selective epitaxy growth process and forming a cap layer on the silicon germanium layer by the second selective epitaxy growth process. Hence, the undesirable effects caused by ion implantation can be mitigated.Type: ApplicationFiled: December 28, 2007Publication date: July 2, 2009Applicant: UNITED MICROELECTRONICS CORP.Inventors: Shyh-Fann Ting, Shih-Chieh Hsu, Cheng-Tung Huang, Chih-Chiang Wu, Wen-Han Hung, Meng-Yi Wu, Li-Shian Jeng, Chung-Min Shih, Kun-Hsien Lee, Tzyy-Ming Cheng
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Patent number: 7553691Abstract: A method and a multijunction solar device having a high band gap heterojunction middle solar cell are disclosed. In one embodiment, a triple-junction solar device includes bottom, middle, and top cells. The bottom cell has a germanium (Ge) substrate and a buffer layer, wherein the buffer layer is disposed over the Ge substrate. The middle cell contains a heterojunction structure, which further includes an emitter layer and a base layer that are disposed over the bottom cell. The top cell contains an emitter layer and a base layer disposed over the middle cell.Type: GrantFiled: April 26, 2005Date of Patent: June 30, 2009Assignee: Emcore Solar Power, Inc.Inventors: Navid Fatemi, Daniel J. Aiken, Mark A. Stan
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Patent number: 7547914Abstract: The process relates to the production of a layer of a single-crystal first material on a second material. The second material has at least one aperture exposing a surface portion of a single-crystal third material. The process generally includes forming an at least partially crystalline first layer of said first material on said surface portion of the third material. Then, an amorphous or partially crystalline second layer of the first material is formed on the at least partially crystalline first layer of the first material and on one part of the second material that is around said aperture. Finally, the process includes recrystallization annealing of the first material. Thus, it is possible to produce, within one and the same wafer, either transistors on a germanium-on-insulator substrate with transistors on a silicon-on-insulator substrate, or transistors on a germanium-on-insulator substrate with transistors on a silicon substrate.Type: GrantFiled: January 16, 2007Date of Patent: June 16, 2009Assignee: STMicroelectronics (Crolles 2) SASInventors: Olivier Kermarec, Yves Campidelli, Guillaume Pin
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Publication number: 20090146146Abstract: A semiconductor device includes a substrate that includes a first layer and a recrystallized layer on the first layer. The first layer has a first intrinsic stress and the recrystallized layer has a second intrinsic stress. A transistor is formed in the recrystallized layer. The transistor includes a source region, a drain region, and a charge carrier channel between the source and drain regions. The second intrinsic stress is aligned substantially parallel to the charge carrier channel.Type: ApplicationFiled: February 9, 2009Publication date: June 11, 2009Inventors: Roman Knoefler, Armin Tilke
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Publication number: 20090127555Abstract: In order to form a metal thin film, a silicide film, or the like between an upper-layer unit cell and a lower-layer unit cell in stacked-layer photoelectric conversion devices, a step of forming the thin film is additionally needed. Therefore, a problem such as decline in productivity of the photoelectric conversion devices occurs. A first unit cell including a single crystal semiconductor layer with a thickness of 10 ?m or less as a photoelectric conversion layer and a second unit cell including a non-single-crystal semiconductor layer as a photoelectric conversion layer, which is provided over the first unit cell, are at least included, and conductive clusters are dispersed between the unit cells. The conductive clusters are located between the lower-layer unit cell and the upper-layer unit cell to form an ohmic contact; thus, current flows between the both unit cells.Type: ApplicationFiled: November 13, 2008Publication date: May 21, 2009Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Shunpei Yamazaki, Yasuyuki Arai
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Patent number: 7531240Abstract: A method of fabricating a large substrate with a locally integrated single crystalline silicon layer is provided. The method includes: forming a buffer layer on a support plate; separately fabricating a single crystalline silicon layer; attaching the single crystalline silicon layer having a predetermined thickness, which is separately fabricated, to a predetermined portion in the support plate; forming a non-single crystalline silicon layer having a predetermined thickness to cover the single crystalline silicon layer and the buffer layer; and processing the non-single crystalline silicon layer to expose a surface of the non-single crystalline silicon layer and to level the surface of the non-single crystalline silicon layer with a surface of the amorphous silicon layer.Type: GrantFiled: December 20, 2005Date of Patent: May 12, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Wenxu Xianyu, Takashi Noguchi, Young-soo Park, Hans S. Cho, Huaxiang Yin
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Publication number: 20090078936Abstract: A PIN diode includes an anode electrode, a P layer, an I layer, an N layer and a cathode electrode. A polysilicon film is formed in a region near the pn junction or n+n junction where the density of carriers implanted in a forward bias state is relatively high, as a predetermined film having a crystal defect serving as a recombination center. The lifetime can thus be controlled precisely.Type: ApplicationFiled: March 19, 2008Publication date: March 26, 2009Applicant: MITSUBISHI ELECTRIC CORPORATIONInventor: Hidenori FUJII
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Publication number: 20090032814Abstract: A diode for alternating current (DIAC) electrostatic discharge (ESD) protection circuit is formed in a silicon germanium (SiGe) hetrojunction bipolar transistor (HBT) process that utilizes a very thin collector region. ESD protection for a pair of to-be-protected pads is provided by utilizing the base structures and the emitter structures of the SiGe transistors.Type: ApplicationFiled: August 2, 2007Publication date: February 5, 2009Inventors: Vladislav Vashchenko, Peter J. Hopper
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Publication number: 20090001371Abstract: A technique is presented which provides for a selective pre-amorphization of source/drain regions of a transistor while preventing pre-amorphization of a gate electrode of the transistor. Illustrative embodiments include the formation of a pre-amorphization implant blocking material over the gate electrode. Further illustrative embodiments include inducing a strain in a channel region by use of various stressors.Type: ApplicationFiled: February 5, 2008Publication date: January 1, 2009Inventors: Anthony Mowry, Markus Lenski, Andy Wei, Roman Boschke
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Patent number: 7456567Abstract: An organic electroluminescent device having a pair of electrodes, and at least one organic layer interposed between the pair of electrodes, with the organic layer containing at least one compound represented by formula (1): wherein L11, L13, and L14 each independently represent an o-arylene group, an o-heteroarylene group, or a vinylene group; L12 represents an o-arylene group, an o-heteroarylene group, a vinylene group, or an ethylene group; and L15 represents a trivalent or higher aromatic ring or a trivalent or higher aromatic heterocyclic ring; and a compound represented by formula (2): wherein L21, L22, L23, L24, and L25 each independently represent a group necessary for forming an aromatic ring or a group necessary for forming an aromatic heterocyclic ring; and a method for producing a compound represented by formula (2).Type: GrantFiled: September 12, 2005Date of Patent: November 25, 2008Assignee: Fujifilm CorporationInventor: Jun Ogasawara
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Publication number: 20080283832Abstract: An integrated circuit comprises a doped semiconductor portion including an amorphous portion and a contact structure comprising a conductive material. The contact structure is in contact with the amorphous portion. According to another embodiment, an integrated circuit comprises a doped semiconductor portion including a region having a non-stoichiometric composition and a contact structure comprising a conductive material. The contact structure is in contact with the region having a non-stoichiometric composition.Type: ApplicationFiled: May 19, 2008Publication date: November 20, 2008Inventors: Matthias GOLDBACH, Dietmar HENKE, Sven SCHMIDBAUER
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Publication number: 20080277662Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a polycrystal substrate, a first single crystal layer formed thereon and a second single crystal layer formed on the first single crystal layer. A variation of coefficients of thermal expansion (CTE) between the first single crystal layer and the polycrystal substrate is less than 25%. There is no lattice mismatch between the first single crystal layer and the polycrystal substrate.Type: ApplicationFiled: May 9, 2008Publication date: November 13, 2008Applicant: Industrial Technology Research InstituteInventors: Kuo-Chuang Chiu, Tzer-Shen Lin
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Patent number: 7446335Abstract: Methods and apparatus for producing nanoparticles, including single-crystal semiconductor nanoparticles, are provided. The methods include the step of generating a constricted radiofrequency plasma in the presence of a precursor gas containing precursor molecules to form nanoparticles. Single-crystal semiconductor nanoparticles, including photoluminescent silicon nanoparticles, having diameters of no more than 10 nm may be fabricated in accordance with the methods.Type: GrantFiled: June 17, 2005Date of Patent: November 4, 2008Assignee: Regents of the University of MinnesotaInventors: Uwe Kortshagen, Elijah J. Thimsen, Lorenzo Mangolini, Ameya Bapat, David Jurbergs
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Publication number: 20080258145Abstract: Semiconductor devices and methods for fabricating the same are disclosed in which an amorphous layer is formed in an interface between a device isolation layer and a source or drain region to stably thin a silicide layer formed in the interface. A leakage current of the silicide layer formed in the interface between the device isolation layer and the source/drain region is reduced.Type: ApplicationFiled: April 14, 2008Publication date: October 23, 2008Inventor: Hyuk PARK
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Publication number: 20080230780Abstract: An object of the present invention is to provide a Group III nitride semiconductor multilayer structure having a smooth surface and exhibiting excellent crystallinity, which multilayer structure employs a low-cost substrate that can be easily processed. Another object is to provide a Group III nitride semiconductor light-emitting device comprising the multilayer structure. The inventive Group III nitride semiconductor multilayer structure comprises a substrate; an AlxGa1-xN (0?x?1) buffer layer which is provided on the substrate and has a columnar or island-like crystal structure; and an AlxInyGa1-x-yN (0?x?1, 0?y?1, 0?x+y?1) single-crystal layer provided on the buffer layer, wherein the substrate has, on its surface, non-periodically distributed grooves having an average depth of 0.01 to 5 ?m.Type: ApplicationFiled: January 25, 2005Publication date: September 25, 2008Inventor: Yasuhito Urashima
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Publication number: 20080210937Abstract: A hetero-crystalline device structure and a method of making the same include a first layer and a nanostructure integral to a crystallite in the first layer. The first layer is a non-single crystalline material. The nanostructure is a single crystalline material. The nanostructure is grown on the first layer integral to the crystallite using epitaxial growth.Type: ApplicationFiled: March 1, 2007Publication date: September 4, 2008Inventors: Nobuhiko Kobayashi, Shih Yuan Wang
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Publication number: 20080210938Abstract: A semiconductor device with superior long-term reliability is disclosed that alleviates current concentration into a switch structure arranged at an outermost portion. The semiconductor device comprises hetero semiconductor regions formed of polycrystalline silicon having a band gap width different from that of a drift region and hetero-adjoined with the drift region, a gate insulation film, a gate electrode adjoined to the gate insulation film, a source electrode connected to a source contact portion of the hetero semiconductor regions and an outermost switch structure and a repeating portion switch structure with a drain electrode connected to a substrate region. In a conduction state, the outermost switch structure comprises a mechanism in which the current flowing at the outermost switch structure becomes smaller than the current flowing at the repeating portion switch structure.Type: ApplicationFiled: December 20, 2007Publication date: September 4, 2008Applicant: NISSAN MOTOR CO., LTD.Inventors: Tetsuya Hayashi, Masakatsu Hoshi, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20080210936Abstract: A hetero-crystalline semiconductor device and a method of making the same include a non-single crystalline semiconductor layer and a nanostructure layer that comprises a single crystalline semiconductor nanostructure integral to a crystallite of the non-single crystalline semiconductor layer.Type: ApplicationFiled: March 1, 2007Publication date: September 4, 2008Inventors: Nobuhiko Kobayashi, Shih Yuan Wang
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Publication number: 20080191206Abstract: A semiconductor device is provided. The semiconductor device comprises a substrate, a gate structure, a spacer, a first poly-SiGe layer being boron-doped and a second poly-SiGe layer being boron-doped. The substrate has two openings and the gate structure is disposed on the substrate between the openings. The spacer is disposed on the sidewalls of the gate structure and above a portion of the openings. The first poly-SiGe layer is disposed on the surface of the openings in the substrate. The second poly-SiGe layer is disposed on the first poly-SiGe layer, and the top of the second poly-SiGe layer is higher than the surface of the substrate. Moreover, the boron concentration in the first poly-SiGe layer is lower than that in the second poly-SiGe layer.Type: ApplicationFiled: February 9, 2007Publication date: August 14, 2008Applicant: UNITED MICROELECTRONICS CORP.Inventor: Po-Lun Cheng
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Publication number: 20080121883Abstract: A disclosed semiconductor device includes a gate electrode that is arranged on a substrate via a gate dielectric film. A gate electrode head is formed on the gate electrode, which gate electrode head is wider than the gate electrode, and extends between a first side wall dielectric film and a second side wall dielectric film that are formed on the same sides as first and second sides of the gate electrode, respectively. A first diffusion region is formed in the substrate on the same side as the first side of the gate electrode and a second diffusion region is formed in the substrate on the same side as the second side of the gate electrode. The gate electrode includes polysilicon at least at a bottom part in contact with the gate dielectric film.Type: ApplicationFiled: December 20, 2007Publication date: May 29, 2008Applicant: FUJITSU LIMITEDInventor: Young Suk KIM
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Publication number: 20080121882Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include creating an amorphous region in source/drain regions of a substrate by ion implantation with an electrically neutral dopant, annealing with a first anneal that removes defects without completely re-crystallizing the amophous region, ion implantation of electrically active dopant to a depth shallower than the remaining amorphous region, followed by a second anneal.Type: ApplicationFiled: November 7, 2006Publication date: May 29, 2008Inventors: Jack Hwang, Sridhar Govindaraju, Seok-Hee Lee, Patrick H. Keys, Chad D. Lindfors
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Patent number: 7342266Abstract: A field effect transistor (FET) device includes a gate conductor and gate dielectric formed over an active device area of a semiconductor substrate. A drain region is formed in the active device area of the semiconductor substrate, on one side of the gate conductor, and a source region is formed in the active device area of the semiconductor substrate, on an opposite side of the gate conductor. A dielectric halo or plug is formed in the active area of said semiconductor substrate, the dielectric halo or plug disposed in contact between the drain region and a body region, and in contact between the source region and the body region.Type: GrantFiled: January 9, 2006Date of Patent: March 11, 2008Assignee: International Business Machines CorporationInventors: Michael P. Belyansky, Dureseti Chidambarrao, Oleg Gluschenkov
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Patent number: 7316949Abstract: At least a p-type and n-type semiconductor device deposited upon a semiconductor wafer containing metal or metal alloy gates. More particularly, a complementary metal-oxide-semiconductor (CMOS) device is formed on a semiconductor wafer having n-type and p-type metal gates.Type: GrantFiled: October 11, 2005Date of Patent: January 8, 2008Assignee: Intel CorporationInventors: Mark Doczy, Justin K. Brask, Steven J. Keating, Chris E. Barns, Brian S. Doyle, Michael L. McSwiney, Jack T. Kavalieros, John P. Barnak
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Publication number: 20070295994Abstract: A hetero-junction bipolar transistor is provided including emitter contact region, an emitter region made of a first semiconductor material, a base region made of a second semiconductor material having a smaller energy band gap than the first semiconductor material, a collector region made of the first semiconductor material, and a collector contact area, the regions being serially formed on a surface of a substrate in a direction parallel to the surface thereof. A buffer layer made of a third semiconductor material with an energy band gap larger than the first semiconductor material is provided between the emitter region, the base region, the collector region and the substrate surface. Emitter, base and collector electrodes are also provided, in contact with the emitter contact region, the base region, and the collector region, respectively.Type: ApplicationFiled: March 14, 2007Publication date: December 27, 2007Inventors: Kazuhiro Mochizuki, Hidetoshi Matsumoto, Shinichiro Takatani
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Patent number: 7294518Abstract: The present invention provides a photoresist stripper including about 5 wt % to about 20 wt % alcohol amine, about 40 wt % to about 70 wt % glycol ether, about 20 wt % to about 40 wt % N-methyl pyrrolidone, and about 0.2 wt % to about 6 wt % chelating agent.Type: GrantFiled: September 2, 2005Date of Patent: November 13, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Hong-Sick Park, Jong-Hyun Jeong, Suk-Il Yoon, Seong-Bae Kim, Wy-Yong Kim, Soon-Beom Huh, Byung-Uk Kim
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Patent number: 7288787Abstract: The present invention provides a thin-film transistor offering a higher electron (or hole) mobility, a method for manufacturing the thin-film transistor, and a display using the thin-film transistor. The present invention provides a thin-film transistor having a source region, a channel region, and a drain region in a semiconductor thin film with a crystal grown in a horizontal direction, the thin-film transistor having a gate insulating film and a gate electrode over the channel region, wherein a drain edge of the drain region which is adjacent to the channel region is formed in the vicinity of a crystal growth end position.Type: GrantFiled: July 3, 2006Date of Patent: October 30, 2007Assignee: Advanced LCD Technologies Development Center Co., Ltd.Inventors: Yoshiaki Nakazaki, Genshiro Kawachi, Terunori Warabisako, Masakiyo Matsumura
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Patent number: 7274050Abstract: Apparatus, packaging, and methods of manufacture of an integrated circuit are provided. The integrated circuit includes a component of a first type fabricated on a first substrate containing a first material, and a component of a second type fabricated on a second substrate containing a second material. The first material has better compatibility than the second material with fabrication and/or performance of the component of the first type, while the second material has better compatibility than the first material with fabrication and/or performance of the component of the second type. Also described, is a method of making the above-mentioned integrated circuit, the method including, among other steps, the step of disposing the first and second substrates opposite one another, and the step of establishing an electrical connection between the components.Type: GrantFiled: October 29, 2004Date of Patent: September 25, 2007Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.Inventors: Ken Nishimura, Qing Bai, Tracy Bell Verhoeven
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Patent number: 7262464Abstract: A semiconductor device includes a substrate with an insulating surface and a single crystal semiconductor layer, which is bonded to the insulating surface of the substrate. The device further includes a first insulating layer, which is provided between the insulating surface of the substrate and the single crystal semiconductor layer, and a second insulating layer, which has been deposited on the entire insulating surface of the substrate except an area in which the first insulating layer is present.Type: GrantFiled: February 1, 2005Date of Patent: August 28, 2007Assignee: Sharp Kabushiki KaishaInventors: Yutaka Takafuji, Takashi Itoga
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Patent number: 7259427Abstract: The present invention relates to a semiconductor device including a circuit composed of thin film transistors having a novel GOLD (Gate-Overlapped LDD (Lightly Doped Drain)) structure. The thin film transistor comprises a first gate electrode and a second electrode being in contact with the first gate electrode and a gate insulating film. Further, the LDD is formed by using the first gate electrode as a mask, and source and drain regions are formed by using the second gate electrode as the mask. Then, the LDD overlapping with the second gate electrode is formed. This structure provides the thin film transistor with high reliability.Type: GrantFiled: August 14, 2003Date of Patent: August 21, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hiroki Adachi
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Patent number: 7241652Abstract: Disclosed herein is a method for fabricating an organic thin film transistor that includes a gate electrode, a gate insulating film, source/drain electrodes and an organic semiconductor layer formed in this order on a substrate wherein the surface of the gate insulating film on which source/drain electrodes are formed is impregnated with an inorganic or organic acid, followed by annealing. According to the method, the surface of a gate insulating film damaged by a photoresist process can be effectively recovered. In addition, organic thin film transistors having high charge carrier mobility and high on/off current ratio can be fabricated.Type: GrantFiled: May 6, 2005Date of Patent: July 10, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Hyun Jung Park, Bon Won Koo, Joo Young Kim, Jung Han Shin, Eun Jeong Jeong, Sang Yoon Lee
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Patent number: 7221023Abstract: According to some embodiments of the invention, a method includes preparing a semiconductor substrate having an active region, doping channel ions in the active region, forming a planarized selective epitaxial growth (SEG) layer in a predetermined region of the active region doped with the channel ions, sequentially forming a gate insulating layer, a gate conductive layer and a gate hard mask layer on the semiconductor substrate having the planarized SEG layer, forming a gate pattern crossing the active region by sequentially patterning the gate hard mask layer and the gate conductive layer, the planarized SEG layer being located at one side of the gate pattern, and forming source/drain regions by implanting impurity ions using the gate pattern as an ion implantation mask. Accordingly, there is provided an asymmetric source/drain transistor capable of preventing a leakage current by diffusing the channel ions into the SEG layer.Type: GrantFiled: February 25, 2005Date of Patent: May 22, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Hyeoung-Won Seo, Nak-Jin Son, Du-Heon Song, Jun Seo
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Patent number: 7198967Abstract: There is provided an active matrix type semiconductor display device which realizes low power consumption and high reliability. In the active matrix type semiconductor display device of the present invention, a counter electrode is divided into two, different potentials are applied to the two counter electrodes, respectively and inversion driving is carried out each other. Since a potential of an image signal can be made low by doing so, it is possible to lower a voltage necessary for operation of a driver circuit. As a result, it is possible to realize improvement of reliability of an element such as a TFT and reduction of consumed electric power. Moreover, since it is possible to lower a voltage of a timing pulse supplied by the driver circuit, a booster circuit can be omitted, and reduction of an area of the driver circuit can be realized.Type: GrantFiled: July 15, 2003Date of Patent: April 3, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yukio Tanaka, Shou Nagao
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Patent number: 7176479Abstract: A nitride compound semiconductor element having improved characteristics, productivity and yield. A nitride compound semiconductor element includes: a sapphire substrate; a first single crystalline layer of AlN formed on said sapphire substrate; a second single crystalline layer formed on said first single crystalline layer, said second single crystalline layer being made of AlxGa1-xN (0.8?x?0.97) and having a thickness of equal to or more than 0.3 ?m and equal to or less than 6 ?m; and a device structure section of a nitride semiconductor formed on said second single crystalline layer.Type: GrantFiled: February 9, 2004Date of Patent: February 13, 2007Assignee: Kabushiki Kaisha ToshibaInventor: Yasuo Ohba
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Patent number: 7154121Abstract: A light emitting device includes a micro-reflection structure carrier, which is formed by performing etching process on a carrier, a reflection layer, a light emitting layer, and a transparent adhesive layer, wherein the reflection layer is formed over the micro-reflection structure carrier and adheres to the light emitting layer through the transparent adhesive layer.Type: GrantFiled: October 29, 2003Date of Patent: December 26, 2006Assignee: Epistar CorporationInventors: Min-Hsun Hsieh, Wen-Huang Liu
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Patent number: 7151277Abstract: A method of etching silicon carbide using a nonmetallic mask layer. The method includes providing a silicon carbide substrate; forming a non-metallic mask layer by applying a layer of material on the substrate; patterning the mask layer to expose underlying areas of the substrate; and etching the underlying areas of the substrate with a plasma at a first rate, while etching the mask layer at a rate lower than the first rate.Type: GrantFiled: July 3, 2003Date of Patent: December 19, 2006Assignee: The Regents of the University of CaliforniaInventors: Di Gao, Roger T. Howe, Roya Maboudian
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Patent number: 7145180Abstract: In the fabricating of a light emitting device, a light emitting layer portion 24 and a current spreading layer 7, respectively composed of a Group III-V compound semiconductor, are stacked on a single crystal substrate. The light emitting layer portion 24 is formed by a metal organic vapor-phase epitaxy process, and the current spreading layer 7, on such light emitting layer portion 24, is formed to have conductivity type of n-type by a hydride vapor-phase epitaxy process.Type: GrantFiled: July 28, 2003Date of Patent: December 5, 2006Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Masayuki Shinohara, Masato Yamada