Amorphous Semiconductor Material Patents (Class 257/52)
- With impurity other than hydrogen to passivate dangling bonds (e.g., halide) (Class 257/58)
- In array having structure for use as imager or display, or with transparent electrode (Class 257/59)
- With field electrode under or on a side edge of amorphous semiconductor material (e.g., vertical current path) (Class 257/60)
- With heavily doped regions contacting amorphous semiconductor material (e.g., heavily doped source and drain) (Class 257/61)
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Patent number: 9012912Abstract: Glass treatment methods, wafer, panels, and semiconductor devices are disclosed. In some embodiments, a method of treating a glass substrate includes forming a first film on the glass substrate, the first film having a first porosity. The method includes forming a second film on the first film, the second film comprising an electrically insulating material and having a second porosity. The first porosity is lower than the second porosity.Type: GrantFiled: March 13, 2013Date of Patent: April 21, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Wen-Shiang Liao
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Patent number: 9013011Abstract: A staggered die MEMS package includes a substrate having a converter cavity formed therein. A converter electronic component is mounted within the converter cavity. Further, a MEMS electronic component is mounted to both the substrate and the converter electronic component in a staggered die arrangement. By staggering the MEMS electronic component directly on the converter electronic component instead of locating the MEMS electronic component in a side by side arrangement with the converter electronic component, the total package width of the staggered die MEMS package is minimized. Further, by locating the converter electronic component within the converter cavity and staggering the MEMS electronic component directly on the converter electronic component, the total package height, sometimes called Z-height, of the staggered die MEMS package is minimized.Type: GrantFiled: March 11, 2011Date of Patent: April 21, 2015Assignee: Amkor Technology, Inc.Inventors: Bob Shih-Wei Kuo, Brett Arnold Dunlap, Louis B. Troche, Jr., Ahmer Syed, Russell Shumway
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Patent number: 9013008Abstract: A semiconductor structure has embedded stressor material for enhanced transistor performance. The method of forming the semiconductor structure includes etching an undercut in a substrate material under one or more gate structures while protecting an implant with a liner material. The method further includes removing the liner material on a side of the implant and depositing stressor material in the undercut under the one or more gate structures.Type: GrantFiled: October 11, 2013Date of Patent: April 21, 2015Assignee: International Business Machines CorporationInventors: Xi Li, Viorel C. Ontalus
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Publication number: 20150097187Abstract: The disclosed technology generally relates to semiconductor devices and more particularly to selector devices for memory devices having a resistance switching element, particularly resistive random access memory (RRAM) devices. In one aspect, a selector device includes a first barrier structure comprising a first metal and a first semiconductor or a first low bandgap dielectric material, and a second barrier structure comprising a second metal and a second semiconductor or a second low bandgap dielectric material. The selector device additionally includes an insulator interposed between the first semiconductor or the first low bandgap dielectric material and the second semiconductor or the second low bandgap dielectric material. The first barrier structure, the insulator, and the second barrier structure are stacked to form a metal/semiconductor or low bandgap dielectric/insulator/semiconductor or low bandgap dielectric/metal structure.Type: ApplicationFiled: October 7, 2014Publication date: April 9, 2015Inventors: Bogdan GOVOREANU, Christoph ADELMANN, Leqi ZHANG, Malgorzata JURCZAK
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Patent number: 8999105Abstract: An etch mask is formed on a substrate. The substrate is positioned in an enclosure configured to shield an interior of the enclosure from electromagnetic fields exterior to the enclosure; and the substrate is etched in the enclosure, including removing a portion of the substrate to form a structure having at least a portion that is isolated and/or suspended over the substrate.Type: GrantFiled: January 4, 2013Date of Patent: April 7, 2015Assignee: President and Fellows of Harvard CollegeInventors: Marko Loncar, Mikhail D. Lukin, Michael J. Burek, Nathalie de Leon, Brendan Shields
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Patent number: 8994623Abstract: A pixel circuit includes: a switching transistor whose conduction is controlled by a drive signal supplied to the control terminal; a drive wiring adapted to propagate the drive signal; and a data wiring adapted to propagate a data signal. The drive wiring is formed on a first wiring layer and connected to the control terminal of the switching transistor. The data wiring is formed on a second wiring layer and connected to a first terminal of the switching transistor. A multi-layered wiring structure is used so that the second wiring layer is formed on a layer different from that on which the first wiring layer is formed.Type: GrantFiled: March 31, 2014Date of Patent: March 31, 2015Assignee: Sony CorporationInventors: Tetsuo Minami, Yukihito Iida, Katsuhide Uchino
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Patent number: 8987730Abstract: An object of one embodiment of the present invention is to provide a highly reliable semiconductor device by giving stable electric characteristics to a transistor including an oxide semiconductor film. The semiconductor device includes a gate electrode layer over a substrate, a gate insulating film over the gate electrode layer, an oxide semiconductor film over the gate insulating film, a drain electrode layer provided over the oxide semiconductor film to overlap with the gate electrode layer, and a source electrode layer provided to cover an outer edge portion of the oxide semiconductor film. The outer edge portion of the drain electrode layer is positioned on the inner side than the outer edge portion of the gate electrode layer.Type: GrantFiled: January 28, 2013Date of Patent: March 24, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Satoru Saito, Terumasa Ikeyama
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Patent number: 8981367Abstract: A semiconductor device includes a first transistor which includes a first gate electrode below its oxide semiconductor layer and a second gate electrode above its oxide semiconductor layer, and a second transistor which includes a first gate electrode above its oxide semiconductor layer and a second gate electrode below its oxide semiconductor layer and is provided so as to at least partly overlap with the first transistor. In the semiconductor device, a conductive film serving as the second gate electrode of the first transistor and the second gate electrode of the second transistor is shared between the first transistor and the second transistor. Note that the second gate electrode not only controls the threshold voltages (Vth) of the first transistor and the second transistor but also has an effect of reducing interference of an electric field applied from respective first gate electrodes of the first transistor and the second transistor.Type: GrantFiled: November 21, 2012Date of Patent: March 17, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Seiichi Yoneda, Takuro Ohmaru
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Patent number: 8980657Abstract: The present invention is a method for producing a light-emitting device whose p contact layer has a p-type conduction and a reduced contact resistance with an electrode. On a p cladding layer, by MOCVD, a first p contact layer of GaN doped with Mg is formed. Subsequently, after lowering the temperature to a growth temperature of a second p contact layer being formed in the subsequent process, which is 700° C., the supply of ammonia is stopped and the carrier gas is switched from hydrogen to nitrogen. Thereby, Mg is activated in the first p contact layer, and the first p contact layer has a p-type conduction. Next, the second p contact layer of InGaN doped with Mg is formed on the first p contact layer by MOCVD using nitrogen as a carrier gas while maintaining the temperature at 700° C. which is the temperature of the previous process.Type: GrantFiled: July 10, 2012Date of Patent: March 17, 2015Assignee: Toyoda Gosei Co., Ltd.Inventors: Shinya Boyama, Yasuhisa Ushida
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Patent number: 8975124Abstract: One or more embodiments of the disclosed technology provide a thin film transistor, an array substrate and a method for preparing the same. The thin film transistor comprises a base substrate, and a gate electrode, a gate insulating layer, an active layer, an ohmic contact layer, a source electrode, a drain electrode and a passivation layer prepared on the base substrate in this order. The active layer is formed of microcrystalline silicon, and the active layer comprises an active layer lower portion and an active layer upper portion, and the active layer lower portion is microcrystalline silicon obtained by using hydrogen plasma to treat at least two layers of amorphous silicon thin film prepared in a layer-by-layer manner.Type: GrantFiled: May 15, 2012Date of Patent: March 10, 2015Assignees: Boe Technology Group Co., Ltd., Beijing Asahi Glass Electronics Co., Ltd.Inventors: Xueyan Tian, Chunping Long, Jiangfeng Yao
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Patent number: 8969182Abstract: A semiconductor device using an oxide semiconductor is provided with stable electric characteristics to improve the reliability. In a manufacturing process of a transistor including an oxide semiconductor film, an oxide semiconductor film containing a crystal having a c-axis which is substantially perpendicular to a top surface thereof (also called a first crystalline oxide semiconductor film) is formed; oxygen is added to the oxide semiconductor film to amorphize at least part of the oxide semiconductor film, so that an amorphous oxide semiconductor film containing an excess of oxygen is formed; an aluminum oxide film is formed over the amorphous oxide semiconductor film; and heat treatment is performed thereon to crystallize at least part of the amorphous oxide semiconductor film, so that an oxide semiconductor film containing a crystal having a c-axis which is substantially perpendicular to a top surface thereof (also called a second crystalline oxide semiconductor film) is formed.Type: GrantFiled: April 23, 2012Date of Patent: March 3, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Junichi Koezuka, Naoto Yamade, Yuhei Sato, Yutaka Okazaki, Shunpei Yamazaki
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Publication number: 20150053983Abstract: Systems and methods are provided for dopant activation in a semiconductor structure for fabricating semiconductor devices. For example, a substrate is provided. A semiconductor structure is formed on the substrate. Pre-amorphization implantation is performed on the semiconductor structure. Microwave radiation is applied to the semiconductor structure to activate dopants in the semiconductor structure for fabricating semiconductor devices. Microwave-radiation absorption of the semiconductor structure is increased after the pre-amorphization implantation.Type: ApplicationFiled: August 22, 2013Publication date: February 26, 2015Applicant: Taiwan Semiconductor Manufacturing Company LimitedInventors: CHUN-HSIUNG TSAI, CHEN-FENG HSU, YI-TANG LIN, Clement HSINGJEN WANN
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Patent number: 8952243Abstract: A stacked structure may include semiconductors or semiconductor layers grown on an amorphous substrate. A light-emitting device and a solar cell may include the stacked structure including the semiconductors grown on the amorphous substrate. A method of manufacturing the stacked structure, and the light-emitting device and the solar cell including the stacked structure may involve growing a crystalline semiconductor layer on an amorphous substrate.Type: GrantFiled: September 25, 2011Date of Patent: February 10, 2015Assignee: Samsung Electronics Co., Ltd.Inventor: Jun-hee Choi
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Publication number: 20150034953Abstract: Post programming resistance of a semiconductor fuse is enhanced by using an implantation to form an amorphous silicon layer and to break up an underlying high-?/metal gate. Embodiments include forming a shallow trench isolation (STI) region in a silicon substrate, forming a high-? dielectric layer on the STI region, forming a metal gate on the high-? dielectric layer, forming a polysilicon layer over the metal gate, performing an implantation to convert the polysilicon layer into an amorphous silicon layer, wherein the implantation breaks up the metal gate, and forming a silicide on the amorphous silicon layer. By breaking up the metal gate, electrical connection of the fuse contacts through the metal gate is eliminated.Type: ApplicationFiled: October 17, 2014Publication date: February 5, 2015Inventors: Andreas KURZ, Maciej WIATR
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Patent number: 8946707Abstract: The invention provides a tunneling magnetoresistance (TMR) read sensor with an integrated auxiliary shield comprising buffer, parallel-coupling, shielding and decoupling layers for high-resolution magnetic recording. The buffer layer, preferably formed of an amorphous ferromagnetic Co—X (where X is Hf, Y, Zr, etc.) film, creates microstructural discontinuity between a lower ferromagnetic shield and the TMR read sensor. The parallel-coupling layer, preferably formed of a polycrystalline nonmagnetic Ru film, causes parallel coupling between the buffer and shielding layers. The shielding layer, preferably formed of a polycrystalline ferromagnetic Ni—Fe film exactly identical to that used as the lower ferromagnetic shield, shields magnetic fluxes stemming from a recording medium into the lower edge of the TMR read sensor.Type: GrantFiled: January 30, 2013Date of Patent: February 3, 2015Assignee: HGST Netherlands B.V.Inventor: Tsann Lin
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Patent number: 8946714Abstract: A semiconductor device includes: a transistor including an oxide semiconductor film; a first insulating film covering the oxide semiconductor film and including a first resin material; and a second insulating film including a second resin material that has polarity different from polarity of the first resin material, the second insulating film being laminated on the first insulating film.Type: GrantFiled: March 21, 2013Date of Patent: February 3, 2015Assignee: Sony CorporationInventor: Masanori Nishiyama
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Patent number: 8945971Abstract: The present disclosure relates a method to mitigate wafer warpage in advanced technology manufacturing processes due to crystallization of one or more amorphous layers with asymmetrical front-surface and back-surface layer thicknesses. After deposition of one or more layers of amorphous material on a front-surface and a back-surface of the wafer in a furnace tool, the front-surface layers are patterned which thins a front layer thickness. Downstream thermal processing performed at a temperature which exceeds a crystallization threshold of the amorphous material will result in asymmetric stress between the front and back surfaces due to the asymmetrical layer thicknesses. To mitigate this effect, the amount of warpage as a function of the difference in asymmetrical layer thickness may be determined such that a front-surface deposition tool may be utilized in conjunction with the furnace tool to reduce the difference in front-surface and back-surface layer thicknesses. Other methods are also disclosed.Type: GrantFiled: July 8, 2013Date of Patent: February 3, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun Hsiung Tsai, Shiang-Rung Tsai
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Patent number: 8941112Abstract: A semiconductor device in which fluctuation in electric characteristics due to miniaturization is less likely to be caused is provided. The semiconductor device includes an oxide semiconductor film including a first region, a pair of second regions in contact with side surfaces of the first region, and a pair of third regions in contact with side surfaces of the pair of second regions; a gate insulating film provided over the oxide semiconductor film; and a first electrode that is over the gate insulating film and overlaps with the first region. The first region is a CAAC oxide semiconductor region. The pair of second regions and the pair of third regions are each an amorphous oxide semiconductor region containing a dopant. The dopant concentration of the pair of third regions is higher than the dopant concentration of the pair of second regions.Type: GrantFiled: December 20, 2011Date of Patent: January 27, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8941111Abstract: Non-crystalline inorganic light emitting diode. In accordance with a first embodiment of the present invention, an article of manufacture includes a light emitting diode. The light emitting diode includes a non-crystalline inorganic light emission layer and first and second semiconducting non-crystalline inorganic charge transport layers surrounding the light emission layer. The light emission layer may be amorphous. The charge transport layers may be configured to inject one type of charge carrier and block the other type of charge carrier.Type: GrantFiled: December 21, 2012Date of Patent: January 27, 2015Assignee: Invensas CorporationInventors: Ilyas Mohammed, Liang Wang
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Publication number: 20150021606Abstract: An MRAM bit (10) includes a free magnetic region (15), a fixed magnetic region (17) comprising an antiferromagnetic material, and a tunneling barrier (16) comprising a dielectric layer positioned between the free magnetic region (15) and the fixed magnetic region (17). The MRAM bit (10) avoids a pinning layer by comprising a fixed magnetic region exhibiting a well-defined high Hflop using a combination of high Hk (uniaxial anisotropy), high Hsat (saturation field), and ideal soft magnetic properties exhibiting well-defined easy and hard axes.Type: ApplicationFiled: June 12, 2014Publication date: January 22, 2015Inventors: Srinivas V. Pietambaram, Bengt J. Akerman, Renu Whig, Jason Janesky, Nicholas D. Rizzo, Jon Slaughter
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Patent number: 8933450Abstract: An organic electro-luminescent display device includes a substrate, a pixel electrode on the substrate, and a pixel define layer covering edges of the pixel electrode and having an opening to expose the pixel electrode, a surface of the pixel define layer facing the opening being bent at a predetermined curvature.Type: GrantFiled: November 5, 2010Date of Patent: January 13, 2015Assignee: Samsung Display Co., Ltd.Inventors: Jae-Bok Kim, Won-Jun Song
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Patent number: 8933449Abstract: Apparatus having a dielectric containing scandium and gadolinium can provide a reliable structure with a high dielectric constant (high k). In an embodiment, a monolayer or partial monolayer sequence process, such as for example atomic layer deposition (ALD), can be used to form a dielectric containing gadolinium oxide and scandium oxide. In an embodiment, a dielectric structure can be formed by depositing gadolinium oxide by atomic layer deposition onto a substrate surface using precursor chemicals, followed by depositing scandium oxide onto the substrate using precursor chemicals, and repeating to form a thin laminate structure. A dielectric containing scandium and gadolinium may be used as gate insulator of a MOSFET, a capacitor dielectric in a DRAM, as tunnel gate insulators in flash memories, as a NROM dielectric, or as a dielectric in other electronic devices, because the high dielectric constant (high k) of the film provides the functionality of a much thinner silicon dioxide film.Type: GrantFiled: December 6, 2013Date of Patent: January 13, 2015Assignee: Micron Technology, Inc.Inventors: Kie Y. Ahn, Leonard Forbes
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Publication number: 20140367687Abstract: An etch mask is formed on a substrate. The substrate is positioned in an enclosure configured to shield an interior of the enclosure from electromagnetic fields exterior to the enclosure; and the substrate is etched in the enclosure, including removing a portion of the substrate to form a structure having at least a portion that is isolated and/or suspended over the substrate.Type: ApplicationFiled: January 4, 2013Publication date: December 18, 2014Inventors: Marko Loncar, Mikhail D. Lukin, Michael J. Burek, Nathalie de Leon, Brendan Shields
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Patent number: 8890144Abstract: A high voltage semiconductor device includes a substrate, an insulating layer positioned on the substrate, and a silicon layer positioned on the insulating layer. The silicon layer further includes at least a first doped strip, two terminal doped regions formed respectively at two opposite ends of the silicon layer and electrically connected to the first doped strip, and a plurality of second doped strips. The first doped strip and the terminal doped regions include a first conductivity type, the second doped strips include a second conductivity type, and the first conductivity type and the second conductivity type are complementary. The first doped strip and the second doped strips are alternately arranged.Type: GrantFiled: March 8, 2012Date of Patent: November 18, 2014Assignee: United Microelectronics Corp.Inventors: Pao-An Chang, Ching-Ming Lee, Te-Yuan Wu, Chih-Chung Wang, Wen-Fang Lee, Wei-Lun Hsu
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Patent number: 8860033Abstract: The active-matrix substrate (100) of the present invention satisfies d2>d1 and d2+A1/2>d3+L1/2, where d1 is the length of the shortest line segment that connects together a channel region (134) and a gettering region (112) as measured by projecting the line segment onto a line that connects together the channel region (134) of a TFT (130) and a source contact portion, d2 is the distance from the channel region (134) to the source contact portion (132c), d3 is the distance from the channel region (134) to a first end portion (110a), L1 is the length of the first end portion (110a), and A1 is the length of the source contact portion (132c).Type: GrantFiled: February 29, 2008Date of Patent: October 14, 2014Assignee: Sharp Kabushiki KaishaInventors: Makoto Kita, Mutsumi Nakajima, Yoshimizu Moriya, Yasuyoshi Kaise
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Patent number: 8846459Abstract: A highly reliable semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device is manufactured with a high yield to achieve high productivity. In the manufacture of a semiconductor device including a transistor in which a gate electrode layer, a gate insulating film, and an oxide semiconductor film are sequentially stacked and a source electrode layer and a drain electrode layer are provided in contact with the oxide semiconductor film, the source electrode layer and the drain electrode layer are formed through an etching step and then a step for removing impurities which are generated by the etching step and exist on a surface of the oxide semiconductor film and in the vicinity thereof is performed.Type: GrantFiled: October 16, 2012Date of Patent: September 30, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Katsuaki Tochibayashi, Satoshi Higano, Shunpei Yamazaki
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Publication number: 20140264344Abstract: Glass treatment methods, wafer, panels, and semiconductor devices are disclosed. In some embodiments, a method of treating a glass substrate includes forming a first film on the glass substrate, the first film having a first porosity. The method includes forming a second film on the first film, the second film comprising an electrically insulating material and having a second porosity. The first porosity is lower than the second porosity.Type: ApplicationFiled: March 13, 2013Publication date: September 18, 2014Inventor: Wen-Shiang Liao
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Publication number: 20140264345Abstract: The present disclosure relates a method to mitigate wafer warpage in advanced technology manufacturing processes due to crystallization of one or more amorphous layers with asymmetrical front-surface and back-surface layer thicknesses. After deposition of one or more layers of amorphous material on a front-surface and a back-surface of the wafer in a furnace tool, the front-surface layers are patterned which thins a front layer thickness. Downstream thermal processing performed at a temperature which exceeds a crystallization threshold of the amorphous material will result in asymmetric stress between the front and back surfaces due to the asymmetrical layer thicknesses. To mitigate this effect, the amount of warpage as a function of the difference in asymmetrical layer thickness may be determined such that a front-surface deposition tool may be utilized in conjunction with the furnace tool to reduce the difference in front-surface and back-surface layer thicknesses. Other methods are also disclosed.Type: ApplicationFiled: July 8, 2013Publication date: September 18, 2014Inventors: Chun Hsiung Tsai, Shiang-Rung Tsai
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Patent number: 8835905Abstract: Described herein is device configured to be a solar-blind UV detector comprising a substrate; a plurality of pixels; a plurality of nanowires in each of the plurality of pixel, wherein the plurality of nanowires extend essentially perpendicularly from the substrate.Type: GrantFiled: March 15, 2011Date of Patent: September 16, 2014Assignee: Zena Technologies, Inc.Inventors: Munib Wober, Young-June Yu
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Patent number: 8822995Abstract: A display substrate includes a switching transistor electrically connected to a gate line and a data line, the data line extending in a first direction substantially perpendicular to the gate line extending in a second direction, the switching transistor including a switching active pattern comprising amorphous silicon, a driving transistor electrically connected to a driving voltage line and the switching transistor, the driving voltage line extended in the first direction, the driving transistor including a driving active pattern comprising a metal oxide; and a light-emitting element electrically connected to the driving transistor.Type: GrantFiled: June 17, 2009Date of Patent: September 2, 2014Assignee: Samsung Display Co., Ltd.Inventors: Chun-Gi You, Kap-Soo Yoon, Gug-Rae Jo, Sung-Hoon Yang, Ki-Hun Jeong, Seung-Hwan Shim, Jae-Ho Choi
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Patent number: 8822337Abstract: Deep via trenches and deep marker trenches are formed in a bulk substrate and filled with a conductive material to form deep conductive vias and deep marker vias. At least one first semiconductor device is formed on the first surface of the bulk substrate. A disposable dielectric capping layer and a disposable material layer are formed over the first surface of the bulk substrate. The second surface, located on the opposite side of the first surface, of the bulk substrate is polished to expose and planarize the deep conductive vias and deep marker vias, which become through-substrate vias and through-substrate alignment markers, respectively. At least one second semiconductor device and second metal interconnect structures are formed on the second surface of the bulk substrate. The disposable material layer and the disposable dielectric capping layer are removed and first metal interconnect structures are formed on the first surface.Type: GrantFiled: September 8, 2012Date of Patent: September 2, 2014Assignee: International Business Machines CorporationInventor: Huilong Zhu
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Patent number: 8810765Abstract: An electroluminescence element includes an electroluminescence substrate including a thin film transistor substrate, and a light-emitting layer provided over the thin film transistor substrate and divided by picture-element separating portions so as to correspond to unit picture elements; and a sealing substrate arranged to hermetically seal the light-emitting layer of the electroluminescence substrate. At least one of the electroluminescence substrate and the sealing substrate is a flexible substrate. Spacers are provided between the electroluminescence substrate and the sealing substrate.Type: GrantFiled: January 11, 2008Date of Patent: August 19, 2014Assignee: Sharp Kabushiki KaishaInventors: Tohru Okabe, Hirohiko Nishiki
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Patent number: 8803296Abstract: A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n?2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.Type: GrantFiled: March 4, 2013Date of Patent: August 12, 2014Assignee: Texas Instruments IncorporatedInventors: William Robert Morrison, Mark Christopher Fisher, Murali Hanabe, Ganapathy Subramaniam Sivakumar, Simon Joshua Jacobs
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Patent number: 8796691Abstract: A system for displaying images and fabricating method thereof are provided. The system includes a thin film transistor substrate including a substrate having a display area and a pad area. The thin film transistor substrate further includes a conductive line disposed on the substrate in the display area. The conductive line includes a lower metal line, an upper metal line and a middle metal line therebetween. The width of the middle metal line is narrower than that of the upper metal line.Type: GrantFiled: September 14, 2009Date of Patent: August 5, 2014Assignee: Innolux CorporationInventors: Chieh-Wen Lin, Chih-Chieh Wang, Sheng-Wen Chang, Te-Chang Wan
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Publication number: 20140209156Abstract: The invention relates to a novel silicon-based, single-stage solar cell which, instead of converting light in a bulk semiconductor material, generates electrical energy within a very thin quantum structure that is deposited. The layer sequence itself consists of a three-fold hetero structure as an absorber, which is embedded into the space charge region of a pn-junction and is based on quantummechanical effects. Therein, the layer is preferably deposited by a CVD or the like method. High efficiencies of above 30% were initially measured on small samples on silicon.Type: ApplicationFiled: December 23, 2011Publication date: July 31, 2014Inventor: Andreas Paul Schüppen
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Patent number: 8792060Abstract: A liquid crystal display device with a built-in touch screen, which uses a common electrode as a touch-sensing electrode including an intersection of a gate line and a data line to define a pixel region, a bridge line disposed in a central portion of the pixel, an insulating layer formed on the bridge line, a first contact hole disposed through the insulating layer to expose a predetermined portion of an upper surface of the bridge line, a contact metal on the insulating layer and inside the first contact hole, the contact metal electrically connected with the bridge line, a first passivation layer on the contact metal, a second contact hole disposed through the first passivation layer to expose a predetermined portion of an upper surface of the contact metal, a common electrode on the first passivation layer and inside the second contact hole, a conductive line electrically connected with the common electrode, and a second passivation layer on the first passivation layer and the conductive line, wherein theType: GrantFiled: August 4, 2011Date of Patent: July 29, 2014Assignee: LG Display Co., Ltd.Inventors: Kum Mi Oh, Jae Hoon Park, Han Seok Lee, Hee Sun Shin, Won Keun Park
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Patent number: 8779424Abstract: A sheet for use in a light-emitting device including layers including a light-emitting layer was invented. The sheet includes: a first layer including a plurality of projecting portions; and a second layer on the first layer, in which the projecting portions each include at least two steps, the second layer is formed on top at least surfaces of the steps, and when an effective refractive index of the first layer is n1, an effective refractive index of the second layer is n2, and an effective refractive index of the air above the second layer is n0, a relationship n1>n2>n0 is satisfied.Type: GrantFiled: June 17, 2013Date of Patent: July 15, 2014Assignee: Panasonic CorporationInventor: Jumpei Matsuzaki
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Patent number: 8779423Abstract: A method is provided for fabricating a semiconductor structure. The method includes providing a semiconductor substrate, forming an epitaxial layer on a top surface of the semiconductor substrate and having a predetermined thickness, and forming a plurality of trenches in the epitaxial layer. The trenches are formed in the epitaxial layer and have a predetermined depth, top width, and bottom width. Further, the method includes performing a first trench filling process to form a semiconductor layer inside of the trenches using a mixture gas containing at least silicon source gas and halogenoid gas, stopping the first trench filling process when at least one trench is not completely filled, and performing a second trench filling process, different from the first trench filling process, to fill the plurality of trenches completely.Type: GrantFiled: October 16, 2012Date of Patent: July 15, 2014Assignee: Shanghai Hua Hong Nec Electronics Company, LimitedInventors: Jiquan Liu, Shengan Xiao, Wei Ji
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Patent number: 8778708Abstract: There is provided a process for forming a layer of electroactive material having a substantially flat profile. The process includes: providing a workpiece having at least one active area; depositing a liquid composition including the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of ?25 to 80° C. and under a vacuum in the range of 10?6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer.Type: GrantFiled: March 8, 2010Date of Patent: July 15, 2014Assignee: E I du Pont de Nemours and CompanyInventors: Reid John Chesterfield, Justin Butler, Paul Anthony Sant
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Patent number: 8772095Abstract: The manufacturing a semiconductor device includes providing a substrate supporting a gate electrode, amorphizing and doping the source/drain regions located on both sides of the gate electrode by performing a pre-amorphization implant (PAI) process and implanting C or N into the source/drain regions in or separately from the PAI process, forming a stress inducing layer on the substrate to cover the amorphized source/drain regions, and subsequently recrystallizing the source/drain regions by annealing the substrate. The stress inducing layer may then be removed. Also, the C or N may be implanted into the entirety of the source/drain regions after the regions have been amorphized, or only into upper portions of the amorphized source/drain regions.Type: GrantFiled: June 13, 2012Date of Patent: July 8, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Seok-Hoon Kim, Sang-Su Kim, Chung-Geun Koh, Sun-Ghil Lee, Jin-Yeong Joe
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Patent number: 8772768Abstract: A semiconductor device in which fluctuation in electric characteristics due to miniaturization is less likely to be caused is provided. The semiconductor device includes an oxide semiconductor film including a first region, a pair of second regions in contact with side surfaces of the first region, and a pair of third regions in contact with side surfaces of the pair of second regions; a gate insulating film provided over the oxide semiconductor film; and a first electrode that is over the gate insulating film and overlaps with the first region. The first region is a CAAC oxide semiconductor region. The pair of second regions and the pair of third regions are each an amorphous oxide semiconductor region containing a dopant. The dopant concentration of the pair of third regions is higher than the dopant concentration of the pair of second regions.Type: GrantFiled: December 20, 2011Date of Patent: July 8, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Publication number: 20140175440Abstract: Non-crystalline inorganic light emitting diode. In accordance with a first embodiment of the present invention, an article of manufacture includes a light emitting diode. The light emitting diode includes a non-crystalline inorganic light emission layer and first and second semiconducting non-crystalline inorganic charge transport layers surrounding the light emission layer. The light emission layer may be amorphous. The charge transport layers may be configured to inject one type of charge carrier and block the other type of charge carrier.Type: ApplicationFiled: December 21, 2012Publication date: June 26, 2014Applicant: INVENSAS CORPORATIONInventors: Ilyas Mohammed, Liang Wang
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Publication number: 20140159042Abstract: Certain aspects of the present disclosure are directed to a method that includes: depositing, in a deposition environment, an amorphous semiconductor material on a substrate to form a semiconductor film on the substrate; filling, in the depositing process, the deposition environment with a first precursor material such that the semiconductor film formed on the substrate includes a first layer having a first material characteristic; filling, in the depositing process, the deposition environment with a crystallization-stop precursor material such that the silicon film includes a crystallization-stop layer having a crystallization characteristic different from a crystallization characteristic of the first layer; depositing a metal film on the semiconductor film; and annealing the semiconductor film and the metal film at an predetermined annealing temperature for a predetermined period of time such that the first layer is at least partially crystallized and the crystallization-stop layer is at least partially amoType: ApplicationFiled: March 2, 2012Publication date: June 12, 2014Applicants: SILICON SOLAR SOLUTIONS, LLC, BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSASInventors: Douglas Arthur Hutchings, Seth Daniel Shumate, Hameed Naseem
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Patent number: 8748889Abstract: It is an object to manufacture a semiconductor device in which a transistor including an oxide semiconductor has normally-off characteristics, small fluctuation in electric characteristics, and high reliability. First, first heat treatment is performed on a substrate, a base insulating layer is formed over the substrate, an oxide semiconductor layer is formed over the base insulating layer, and the step of performing the first heat treatment to the step of forming the oxide semiconductor layer are performed without exposure to the air. Next, after the oxide semiconductor layer is formed, second heat treatment is performed. An insulating layer from which oxygen is released by heating is used as the base insulating layer.Type: GrantFiled: July 22, 2011Date of Patent: June 10, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Toshinari Sasaki, Hitomi Sato, Kosei Noda, Yuta Endo, Mizuho Ikarashi, Keitaro Imai, Atsuo Isobe, Yutaka Okazaki
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Patent number: 8748215Abstract: One embodiment is a method for manufacturing a stacked oxide material, including the steps of forming an oxide component over a base component; forming a first oxide crystal component which grows from a surface toward an inside of the oxide component by heat treatment, and leaving an amorphous component just above a surface of the base component; and stacking a second oxide crystal component over the first oxide crystal component. In particular, the first oxide crystal component and the second oxide crystal component have common c-axes. Same-axis (axial) growth in the case of homo-crystal growth or hetero-crystal growth is caused.Type: GrantFiled: November 22, 2010Date of Patent: June 10, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8748890Abstract: A method of manufacturing a semiconductor wafer of the present invention includes the steps of: obtaining a composite base by forming a base surface flattening layer having a surface RMS roughness of not more than 1.0 nm on a base; obtaining a composite substrate by attaching a semiconductor crystal layer to a side of the composite base where the base surface flattening layer is located; growing at least one semiconductor layer on the semiconductor crystal layer of the composite substrate; and obtaining the semiconductor wafer including the semiconductor crystal layer and the semiconductor layer by removing the base surface flattening layer by wet etching and thereby separating the semiconductor crystal layer from the base.Type: GrantFiled: March 15, 2013Date of Patent: June 10, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Yuki Seki, Issei Satoh, Koji Uematsu, Yoshiyuki Yamamoto
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Patent number: 8735981Abstract: Disclosed is a transistor component having a control structure with a channel control layer of an amorphous semiconductor insulating material extending in a current flow direction along a channel zone.Type: GrantFiled: June 17, 2009Date of Patent: May 27, 2014Assignee: Infineon Technologies Austria AGInventor: Gerhard Schmidt
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Patent number: 8735882Abstract: A semiconductor device may include a composite represented by Formula 1 below as an active layer. x(Ga2O3).y(In2O3).z(ZnO)??Formula 1 wherein, about 0.75?x/z?about 3.15, and about 0.55?y/z? about 1.70. Switching characteristics of displays and driving characteristics of driving transistors may be improved by adjusting the amounts of a gallium (Ga) oxide and an indium (In) oxide mixed with a zinc (Zn) oxide and improving optical sensitivity.Type: GrantFiled: January 14, 2011Date of Patent: May 27, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Chang-jung Kim, I-hun Song, Dong-hun Kang, Young-soo Park
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Publication number: 20140138688Abstract: According to an embodiment of the present invention, a thin film transistor array panel includes a gate line and a data line insulated from each other an insulating substrate where the gate line and the data line cross each other to define a pixel region, a thin film transistor (TFT) disposed at an intersection of the gate line and the data line, a floating electrode where at least a portion of the floating electrode overlaps the data line, and a pixel electrode disposed at the pixel region where the pixel electrode is connected to the TFT and overlaps the at least a portion of the floating electrode.Type: ApplicationFiled: December 5, 2013Publication date: May 22, 2014Applicant: SAMSUNG DISPLAY CO., LTD.Inventor: Jong-woong CHANG
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Patent number: 8730134Abstract: A pixel circuit includes: a switching transistor whose conduction is controlled by a drive signal supplied to the control terminal; a drive wiring adapted to propagate the drive signal; and a data wiring adapted to propagate a data signal. The drive wiring is formed on a first wiring layer and connected to the control terminal of the switching transistor. The data wiring is formed on a second wiring layer and connected to a first terminal of the switching transistor. A multi-layered wiring structure is used so that the second wiring layer is formed on a layer different from that on which the first wiring layer is formed.Type: GrantFiled: September 6, 2011Date of Patent: May 20, 2014Assignee: Sony CorporationInventors: Tetsuo Minami, Yukihito Iida, Katsuhide Uchino