At Least One Layer Of Glass Patents (Class 257/644)
  • Patent number: 11634356
    Abstract: The disclosure relates to a glass and a melt solder for the passivation of semiconductor components, the use of the glass or the melt solder for the passivation of semiconductor components, a passivated semiconductor component and a method for passivating semiconductor components.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: April 25, 2023
    Assignee: SCHOTT AG
    Inventors: Linda Johanna Bartelt, Antonio Trizzino, Julia Gold, Sabine Pichler-Wilhelm, Martin Letz, Martun Hovhannisyan
  • Patent number: 11374076
    Abstract: A display panel is provided, which includes a display area, an encapsulation area, and a frame area, wherein the encapsulation area includes a first encapsulation area and a second encapsulation area, multiple layers of crack prevention structures are disposed in sequence in the frame area and the second encapsulation area and on a side of the first encapsulation area adjacent to the frame area, and each of the multiple layers of the crack prevention structures are present as a dashed circle structure, and includes at least one groove, and the organic layer fills the groove, and wherein grooves of one layer of the multiple layers of the crack prevention structures and grooves of another layer of the multiple layers of the crack prevention structures adjacent to the one layer are mutually staggered.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: June 28, 2022
    Inventor: Zhiwei Zhou
  • Patent number: 10678990
    Abstract: In some embodiments, an initial circuit arrangement is provided. The initial circuit arrangement includes cells that include default-rule lines and non-default-rule lines. Line widths of the default-rule lines are selectively increased for a first cell in the initial circuit arrangement, thereby providing a first modified circuit arrangement. A first maximum capacitance value is calculated for the first cell of the first modified circuit arrangement. A second modified circuit arrangement is provided by selectively increasing line widths of the non-default-rule lines in the first modified circuit arrangement. A second maximum capacitance value is calculated for the first cell of the second modified circuit arrangement. A line width of a first non-default-rule line is selectively reduced based on whether the first maximum capacitance value adheres to a predetermined relationship with the second maximum capacitance value. The second modified circuit arrangement is manufactured on a semiconductor substrate.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Nan Yang, Chung-Hsing Wang, Yi-Kan Cheng, Kumar Lalgudi
  • Patent number: 9601364
    Abstract: A method for adhesive bonding in microelectronic device processing is provided that includes bonding a handling wafer to a front side of a device wafer with an adhesive comprising phenoxy resin; and thinning the device wafer from the backside of the device wafer while the device wafer is adhesively engaged to the handling wafer. After the device wafer has been thinned, the adhesive comprising phenoxy resin may be removed by laser debonding, wherein the device wafer is separated from the handling wafer.
    Type: Grant
    Filed: March 22, 2016
    Date of Patent: March 21, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Robert D. Allen, Paul S. Andry, Jeffrey D. Gelorme, Li-wen Hung, John U. Knickerbocker, Cornelia K. Tsang
  • Patent number: 9570542
    Abstract: A semiconductor device includes a semiconductor body with a first surface at a first side, a second surface opposite to the first surface and an edge surface connecting the first and second surfaces. An edge termination structure includes a glass structure and extends along the edge surface, at least from a plane coplanar with the first surface towards the second surface. A conductive structure extends parallel to the first surface and overlaps the glass structure at the first side.
    Type: Grant
    Filed: April 1, 2014
    Date of Patent: February 14, 2017
    Assignee: Infineon Technologies AG
    Inventors: Alexander Breymesser, Andre Brockmeier, Elmar Falck, Francisco Javier Santos Rodriguez, Holger Schulze
  • Patent number: 9356004
    Abstract: Disclosed is a light emitting device array. The light emitting device array comprises a light emitting device and a body comprises first and second lead frames electrically connected to the light emitting device and a substrate on which the light emitting device package is disposed, the substrate comprises a base layer and a metal layer disposed on the base layer and electrically connected to the light emitting device package, wherein the metal layer comprises first and second electrode patterns electrically connected to the first and second lead frames and a heat dissipation pattern insulated from at least one of the first or(and) second electrode patterns, absorbing heat generated from at least one of the base layer or(and) the light emitting device package and then dissipating the heat.
    Type: Grant
    Filed: May 5, 2014
    Date of Patent: May 31, 2016
    Assignee: LG Innotek Co., Ltd.
    Inventors: Sangwoo Lee, JonDongwook Park, Hongboem Jin
  • Patent number: 9343242
    Abstract: A device 20 includes a substrate 22 coupled with a substrate 24 such that a volume 32 is formed between the substrates 22, 24. Contact posts 48, 50 on the substrate 22 and a cantilever beam structure 36 on the substrate 24 are located within the volume 32. The cantilever beam structure has a conductive trace 38 that is selectively contactable with the contact posts 48, 50 to yield a microelectromechanical (MEMS) switch within the volume 32. Fabrication methodology for making the contact posts 48, 50 entails forming post protrusions 68, 70 on the substrate 22 and shaping post protrusions 68, 70 so that they acquire a rounded shape. Input and output signal lines 42, 44 are constructed such that respective portions of input and output signal lines 42, 44 overly corresponding post protrusions 68, 70 and take on the shape of post protrusions 68, 70.
    Type: Grant
    Filed: June 22, 2007
    Date of Patent: May 17, 2016
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Lianjun Liu
  • Publication number: 20140312472
    Abstract: Provided is a method of manufacturing a semiconductor device which includes, in the following order: a first step of preparing a semiconductor element which includes a pn junction exposure portion; a second step of forming an insulation layer such that the insulation layer covers the pn junction exposure portion; and a third step of forming a glass layer on the insulation layer where a layer made of glass composition for protecting a semiconductor junction is formed on the insulation layer and, thereafter, the layer made of glass composition for protecting a semiconductor junction is baked.
    Type: Application
    Filed: November 28, 2012
    Publication date: October 23, 2014
    Inventors: Atsushi Ogasawara, Koji Ito, Kazuhiko Ito, Koya Muyari
  • Publication number: 20140291816
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Application
    Filed: June 16, 2014
    Publication date: October 2, 2014
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20140175618
    Abstract: Methods of forming a high K dielectric semiconductor stack are described. A semiconductor substrate is provided, in which the native oxide layer is removed. A transition metal aluminate layer is deposited onto the semiconductor substrate across discrete multiple regions in a combinatorial manner. A high K dielectric layer is deposited onto the transition metal aluminate layer across the discrete multiple regions in a combinatorial manner. The transition metal aluminate layer and the high K dielectric layer are patterned to form a plurality of high K dielectric semiconductor stacks across discrete multiple regions. A three-five semiconductor substrate or a germanium substrate can be used in methods of forming a high K dielectric semiconductor stack.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: Intermolecular Inc.
    Inventor: Intermolecular Inc.
  • Publication number: 20140103499
    Abstract: A method for processing a semiconductor wafer includes applying a release layer to a transparent handler. An adhesive layer, that is distinct from the release layer, is applied between a semiconductor wafer and the transparent handler having the release layer applied thereon. The semiconductor wafer is bonded to the transparent handler using the adhesive layer. The semiconductor wafer is processed while it is bonded to the transparent handler. The release layer is ablated by irradiating the release layer through the transparent handler with a laser. The semiconductor wafer is removed from the transparent handler.
    Type: Application
    Filed: October 11, 2012
    Publication date: April 17, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Paul S. Andry, Russell A. Budd, John U. Knickerbocker, Robert E. Trzcinski, Douglas C. La Tulipe, JR.
  • Publication number: 20140103498
    Abstract: Methods and etchant compositions for wet etching to selectively remove a hafnium aluminum oxide (HfAlOx) material relative to silicon oxide (SiOx) are provided.
    Type: Application
    Filed: December 20, 2013
    Publication date: April 17, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Prashant Raghu, Yi Yang
  • Publication number: 20130307127
    Abstract: A semiconductor device includes a semiconductor body including a first surface. The semiconductor device further includes a continuous silicate glass structure over the first surface. A first part of the continuous glass structure over an active area of the semiconductor body includes a first composition of dopants that differs from a second composition of dopants in a second part of the continuous glass structure over an area of the semiconductor body outside of the active area.
    Type: Application
    Filed: May 16, 2012
    Publication date: November 21, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Patent number: 8587008
    Abstract: A light-emitting device includes a substrate, a plurality of light-emitting elements mounted on one surface of the substrate, a first glass film provided to one surface of the substrate and having a plurality of apertures that form a light-reflecting frame surrounding the perimeter of each the light-emitting elements, and a second glass film provided to the other surface of the substrate. A coefficient of thermal expansion of the second glass film is greater than that of the substrate when a coefficient of thermal expansion of the first glass film is greater than that of the substrate, and a coefficient of thermal expansion of the second glass film is less than that of the substrate when a coefficient of thermal expansion of the first glass film is less than that of the substrate.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: November 19, 2013
    Assignees: Stanley Electric Co., Ltd., Nippon Carbide Industries Co., Inc.
    Inventors: Dai Aoki, Makoto Ida, Shigehiro Kawaura
  • Patent number: 8476742
    Abstract: Edges of a first conductive layer (104) and a silicate glass layer (106) extend adjacent one another along a via (164) extending to a semiconductor substrate (41). An electrical conductor (112/114) extends through the via (164) into contact with the semiconductor substrate (41).
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: July 2, 2013
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Gregory N. Burton, Paul I. Mikulan
  • Patent number: 8394656
    Abstract: MEMS devices (such as interferometric modulators) may be fabricated using a sacrificial layer that contains a heat vaporizable polymer to form a gap between a moveable layer and a substrate. One embodiment provides a method of making a MEMS device that includes depositing a polymer layer over a substrate, forming an electrically conductive layer over the polymer layer, and vaporizing at least a portion of the polymer layer to form a cavity between the substrate and the electrically conductive layer.
    Type: Grant
    Filed: July 7, 2010
    Date of Patent: March 12, 2013
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventors: Chun-Ming Wang, Jeffrey Lan, Teruo Sasagawa
  • Patent number: 8368064
    Abstract: A glass to be used in a scattering layer of an organic LED element, and an organic LED element using the scattering layer are provided. The organic LED element of the present invention includes, a transparent substrate, a first electrode provided on the transparent electrode, an organic layer provided on the first electrode, and a second electrode provided on the organic layer, and further includes a scattering layer including, in terms of mol % on the basis of oxides, 15 to 30% of P2O5, 5 to 25% of Bi2O3, 5 to 27% of Nb2O5, and 10 to 35% of ZnO and having a total content of alkali metal oxides including Li2O, Na2O and K2O of 5% by mass or less.
    Type: Grant
    Filed: July 25, 2011
    Date of Patent: February 5, 2013
    Assignee: Asahi Glass Company, Limited
    Inventors: Naoya Wada, Nobuhiro Nakamura, Nao Ishibashi
  • Publication number: 20120306059
    Abstract: Methods and etchant compositions for wet etching to selectively remove a hafnium aluminum oxide (HfAlOx) material relative to silicon oxide (SiOx) are provided.
    Type: Application
    Filed: August 14, 2012
    Publication date: December 6, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Prashant Raghu, Yi Yang
  • Patent number: 8227877
    Abstract: A method of manufacturing a semiconductor bio-sensor comprises providing a substrate, forming a first dielectric layer on the substrate, forming a patterned first conductive layer on the first dielectric layer, the patterned first conductive layer including a first portion and a pair of second portions, forming a second dielectric layer, a third dielectric layer and a fourth dielectric layer in sequence over the patterned first conductive layer, forming cavities into the fourth dielectric layer, forming vias through the cavities, exposing the second portions of the patterned first conductive layer, forming a patterned second conductive layer on the fourth dielectric layer, forming a passivation layer on the patterned second conductive layer, forming an opening to expose a portion of the third dielectric layer over the first portion of the patterned first conductive layer, and forming a chamber through the opening.
    Type: Grant
    Filed: July 14, 2010
    Date of Patent: July 24, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: Ming-Tung Lee, Shih-Chin Lien, Chia-Huan Chang
  • Patent number: 8097932
    Abstract: A method for fabricating a SiCOH dielectric material comprising Si, C, O and H atoms from a single organosilicon precursor with a built-in organic porogen is provided. The single organosilicon precursor with a built-in organic porogen is selected from silane (SiH4) derivatives having the molecular formula SiRR1R2R3, disiloxane derivatives having the molecular formula R4R5R6—Si—O—Si—R7R8R9, and trisiloxane derivatives having the molecular formula R10R11R12—Si—O—Si—R13R14—O—Si—R15R16R17 where R and R1-17 may or may not be identical and are selected from H, alkyl, alkoxy, epoxy, phenyl, vinyl, allyl, alkenyl or alkynyl groups that may be linear, branched, cyclic, polycyclic and may be functionalized with oxygen, nitrogen or fluorine containing substituents. In addition to the method, the present application also provides SiCOH dielectrics made from the inventive method as well as electronic structures that contain the same.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: January 17, 2012
    Assignee: International Business Machines Corporation
    Inventors: Son Van Nguyen, Stephen McConnell Gates, Deborah A. Neumayer, Alfred Grill
  • Patent number: 7999328
    Abstract: A method of forming and resulting isolation region, which allows for densification of an oxide layer in the isolation region. One exemplary embodiment of the method includes the steps of forming a first trench, forming an oxide layer on the bottom and sidewalls of the trench, forming nitride spacers on the lined trench, and thereafter etching the silicon beneath the first trench to form a second trench area. An oxide layer is then deposited to fill the second trench. Densification of the isolation region is possible because the silicon is covered with nitride, and therefore will not be oxidized. Light etches are then performed to etch the oxide and nitride spacer area in the first trench region. A conventional oxide fill process can then be implemented to complete the isolation region.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: August 16, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Sukesh Sandhu, Gurtej Sandhu
  • Patent number: 7795061
    Abstract: MEMS devices (such as interferometric modulators) may be fabricated using a sacrificial layer that contains a heat vaporizable polymer to form a gap between a moveable layer and a substrate. One embodiment provides a method of making a MEMS device that includes depositing a polymer layer over a substrate, forming an electrically conductive layer over the polymer layer, and vaporizing at least a portion of the polymer layer to form a cavity between the substrate and the electrically conductive layer.
    Type: Grant
    Filed: December 29, 2005
    Date of Patent: September 14, 2010
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventors: Chun-Ming Wang, Jeffrey Lan, Teruo Sasagawa
  • Patent number: 7772648
    Abstract: The present invention includes a silicon-on-insulator (SOI) wafer that enhances certain performance parameters by increasing silicon device layer and insulator layer thicknesses and increasing silicon handle wafer resistivity. By increasing the silicon device layer thickness, effects of the floating body problem may be significantly reduced. By increasing the insulator layer thickness and the silicon handle wafer resistivity, influences from the silicon handle wafer on devices formed using the silicon device layer may be significantly reduced. As a result, standard tools, methods, and processes may be used.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: August 10, 2010
    Assignee: RF Micro Devices, Inc.
    Inventors: Tony Ivanov, Julio Costa, Michael Carroll, Thomas Gregory McKay, Christian Rye Iversen
  • Patent number: 7759801
    Abstract: A first wire having sidewalls of an integrated circuit is tapered from the proximal end to the distal end to reduce width from the first width to the second width. A second wire, spaced apart from the first wire, the second wire has sidewalls. The first wire and the second wire are each horizontally disposed along side each other forming a part of a sidewall capacitor between facing sidewalls. The sidewall capacitor capacitance is progressively reduced responsive to the first wire taper.
    Type: Grant
    Filed: September 19, 2007
    Date of Patent: July 20, 2010
    Assignee: Xilinx, Inc.
    Inventors: Austin H. Lesea, Peter H. Alfke
  • Patent number: 7632760
    Abstract: In one embodiment, a high voltage semiconductor device is formed with a first dielectric layer and a charge stabilization layer comprising a flowable glass formed over the first dielectric layer.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: December 15, 2009
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Shanghui Larry Tu, Takeshi Ishiguro, Fumika Kuramae, Ryuji Omi
  • Patent number: 7579622
    Abstract: A method of making an etched structure in the fabrication of a MEMS device involves depositing a bulk layer, typically of polysilicon, prone to surface roughness. At least one layer of photo-insensitive spin-on planarizing material, such as silicate-based spin-on glass, is formed on the bulk layer to reduce surface roughness. This is patterned with a photoresist layer. A deep etch is then performed through the photoresist layer into the bulk layer. This technique results in much more precise etch structures.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: August 25, 2009
    Assignee: DALSA Semiconductor Inc.
    Inventor: Luc Ouellet
  • Patent number: 7446392
    Abstract: An electronic device is provided using wiring comprising aluminum to prevent hillock or whisker from generating, wherein the wiring contains oxygen atoms at a concentration of 8×1018 atoms·cm?3 or less, carbon atoms at a concentration of 5×1018 atoms·cm?3 or less, and nitrogen atoms at a concentration of 7×1017 atoms·cm?3 or less; furthermore, a silicon nitride film is formed on the aluminum gate, and an anodic oxide film is formed on the side planes thereof.
    Type: Grant
    Filed: November 19, 2007
    Date of Patent: November 4, 2008
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Teramoto
  • Patent number: 7436076
    Abstract: A micromechanical component includes a cap wafer made up of at least a first silicon substrate and a thin glass substrate, and having a functional wafer made up of at least a second silicon substrate, at least one electrical contact surface being disposed on the functional wafer. the cap wafer is joined at the glass substrate to the functional wafer by anodic bonding. the electrical contact surface is disposed on a side of the functional wafer facing the cap wafer, and the cap wafer has at least one recess, such that an access is provided to the electrical contact surface. A method for encapsulating a micromechanical component having a cap wafer, by anodically bonding the cap wafer to a functional wafer.
    Type: Grant
    Filed: August 29, 2006
    Date of Patent: October 14, 2008
    Assignee: Robert Bosch GmbH
    Inventors: Heiko Stahl, Nicolaus Ulbrich, Rainer Straub
  • Patent number: 7405466
    Abstract: A method of simultaneously bonding components, comprising the following steps. At least first, second and third components are provided and comprise: at least one glass component; and at least one conductive or semiconductive material component. The order of stacking of the components is determined to establish interfaces between the adjacent components. A hydrogen-free amorphous film is applied to one of the component surfaces at each interface comprising an adjacent: glass component; and conductive or semiconductive component. A sol gel with or without alkaline ions film is applied to one of the component surfaces at each interface comprising an adjacent: conductive or semiconductive component; and conductive or semiconductive component. The components are simultaneously anodically bonded in the determined order of stacking.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: July 29, 2008
    Assignee: Agency for Science, Technology and Research
    Inventors: Jun Wei, Stephen Chee Khuen Wong, Yongling Wu, Fern Lan Ng
  • Patent number: 7355269
    Abstract: An integrated circuit and method of fabrication including a non-semiconductor material substrate with a layer of single crystal rare earth deposited on the surface thereof. A layer of single crystal semiconductor material is grown on the layer of single crystal rare earth and an integrated circuit is formed in the layer of single crystal semiconductor material. In a preferred embodiment the single crystal semiconductor material is silicon and the integrated circuit is formed by standard semiconductor industry processes.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: April 8, 2008
    Inventors: Michael Lebby, Vijit Sabnis, Petar B. Atanackovic
  • Patent number: 7298021
    Abstract: An electronic device is provided using wiring comprising aluminum to prevent hillock or whisker from generating, wherein the wiring contains oxygen atoms at a concentration of 8×1018 atoms·cm?3 or less, carbon atoms at a concentration of 5×1018 atoms·cm?3 or less, and nitrogen atoms at a concentration of 7×1017 atoms·cm?3 or less; furthermore, a silicon nitride film is formed on the aluminum gate, and an anodic oxide film is formed on the side planes thereof.
    Type: Grant
    Filed: June 2, 2005
    Date of Patent: November 20, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Teramoto
  • Patent number: 7291923
    Abstract: In an integrated circuit, a layer including a plurality of conductive wires is described. A first wire, having sidewalls, is tapered from a proximal end which has a first width to a distal end which has a second width, to reduce width from the first width to the second width, and the first wire also has a substantially vertical surface. A second wire, spaced apart from the first wire, also has a substantially vertical surface. The first wire and the second wire are each horizontally disposed along side each other forming a part of a sidewall capacitor between facing sidewalls. Capacitors are created between the first substantially vertical surface and the second substantially vertical surface, the capacitors are respectively associated with capacitances and with a plurality of loads, the plurality of loads is progressively reduced responsive to a progressive reduction of the capacitances as associated with the first wire taper.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: November 6, 2007
    Assignee: Xilinx, Inc.
    Inventors: Austin H. Lesea, Peter H. Alfke
  • Publication number: 20070241430
    Abstract: A heating unit includes an AlN substrate having a main surface on which an elongated heat-generating resistor is provided. A protection layer is formed on the main surface of the substrate for the heat-generating resistor. The protection layer includes a first cover layer covering the heat-generating resistor and a second cover layer covering the first cover layer. The first cover layer is made of crystallized or semi-crystallized glass having a higher crystallization temperature by at least 50° C. than the softening point of the glass. The second cover layer is made of non-crystalline glass.
    Type: Application
    Filed: March 26, 2007
    Publication date: October 18, 2007
    Applicant: ROHM CO., LTD.
    Inventor: Teruhisa Sako
  • Patent number: 7250670
    Abstract: A semiconductor structure is provided. The semiconductor structure is disposed on the scribe line of a wafer and is around the chip area of the wafer. The semiconductor structure includes a plurality of dielectric layers sequentially disposed on the scribe line and a plurality of metal patterns disposed in each dielectric layer. The metal patterns disposed in each dielectric layer extend to the next underlying dielectric layer.
    Type: Grant
    Filed: September 27, 2005
    Date of Patent: July 31, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Li Kuo, Bing-Chang Wu, Jui-Meng Jao
  • Patent number: 7226875
    Abstract: A method for enhancing stability of a fluorinated silicon glass layer is disclosed. A fluorinated silicon glass layer provided on a substrate is subjected to a phosphorous-containing and hydrogen-containing gas such as phosphine (PH3), for example. The gas forms reactive hydrogen species which removes fluorine radicals and reactive phosphorous species which forms a moisture-gettering and ion-gettering phosphorious oxide film the layer.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: June 5, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Yuan Tsai, You-Hua Chou, Chih-Lung Lin
  • Patent number: 7208836
    Abstract: A semiconductor processing method of forming a plurality of conductive lines includes, a) providing a substrate; b) providing a first conductive material layer over the substrate; c) providing a first insulating material layer over the first conductive layer; d) etching through the first insulating layer and the first conductive layer to the substrate to both form a plurality of first conductive lines from the first conductive layer and provide a plurality of grooves between the first lines, the first lines being capped by first insulating layer material, the first lines having respective sidewalls; e) electrically insulating the first line sidewalls; and f) after insulating the sidewalls, providing the grooves with a second conductive material to form a plurality of second lines within the grooves which alternate with the first lines. Integrated circuitry formed according to the method, and other methods, is also disclosed.
    Type: Grant
    Filed: August 26, 2003
    Date of Patent: April 24, 2007
    Assignee: Micron Technology, Inc.
    Inventor: Monte Manning
  • Patent number: 7180129
    Abstract: A method of manufacturing an insulating layer that ensures reproducibility across like manufacturing apparatus. The insulating layer is formed on the substrate by (a) flowing an oxidizing gas at an oxidizing gas flow rate, (b) flowing a first carrier gas at a first carrier gas flow rate while carrying a first impurity including boron flowing at a first impurity flow rate, (c) flowing a second carrier gas at a second carrier gas flow rate while carrying a second impurity including phosphorus flowing at a second impurity flow rate, and (d) flowing a silicon source material at a silicon source flow rate. The second carrier gas flow rate is greater than the first carrier gas flow rate.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: February 20, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Woo-Chan Jung, Jin-Ho Jeon, Jeon-Sig Lim, Jong-Seung Yi
  • Patent number: 7145245
    Abstract: The present invention discloses a method including providing a substrate; forming a dielectric over the substrate, the dielectric having a k value of about 2.5 or lower, the dielectric having a Young's modulus of elasticity of about 15 GigaPascals or higher; forming an opening in the dielectric; and forming a conductor in the opening. The present invention further discloses a structure including a substrate; a dielectric located over the substrate, the dielectric having a k value of 2.5 or lower, the dielectric having a Young's modulus of elasticity of about 15 GigaPascals or higher; an opening located in the dielectric; and a conductor located in the opening.
    Type: Grant
    Filed: September 2, 2005
    Date of Patent: December 5, 2006
    Assignee: Intel Corporation
    Inventors: Grant Kloster, Lee Rockford, Jihperng Leu
  • Patent number: 7075187
    Abstract: There is disclosed a coating material formulation for layering a plurality of electrodes to provide a substrate for the electrochemical synthesis of organic oligomers. Specifically, there is disclosed a coating layer of from about 0.5 to about 100 microns thick and is composed of a mixture of controlled porosity glass (CPG) particles having an average particle size of from about 0.25 to about 25 microns, and a thickening agent.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: July 11, 2006
    Assignee: CombiMatrix Corporation
    Inventor: Karl Maurer
  • Patent number: 7030468
    Abstract: Dielectric materials including elements of Si, C, O and H having specific values of mechanical properties (tensile stress, elastic modulus, hardness cohesive strength, crack velocity in water) that result in a stable ultra low k film which is not degraded by water vapor or integration processing are provided. The dielectric materials have a dielectric constant of about 2.8 or less, a tensile stress of less than 45 MPa, an elastic modulus from about 2 to about 15 GPa, and a hardness from about 0.2 to about 2 GPa. Electronic structures including the dielectric materials of the present invention as well as various methods of fabricating the dielectric materials are also provided.
    Type: Grant
    Filed: January 16, 2004
    Date of Patent: April 18, 2006
    Assignee: International Business Machines Corporation
    Inventors: Stephen M. Gates, Christos D. Dimitrakopoulos, Alfred Grill, Son Van Nguyen
  • Patent number: 6979882
    Abstract: An electronic device is provided using wiring comprising aluminum to prevent hillock or whisker from generating, wherein the wiring contains oxygen atoms at a concentration of 8×1018 atoms·cm?3 or less, carbon atoms at a concentration of 5×1018 atoms·cm?3 or less, and nitrogen atoms at a concentration of 7×1017 atoms·cm?3 or less; furthermore, a silicon nitride film is formed on the aluminum gate, and an anodic oxide film is formed on the side planes thereof.
    Type: Grant
    Filed: April 30, 1999
    Date of Patent: December 27, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Teramoto
  • Patent number: 6943429
    Abstract: A marked wafer includes a front-side surface and a back-side surface. A vertical scribe line and a horizontal scribe line are on the front-side surface of the wafer. A back-side alignment mark is located at an intersection of the vertical scribe line and the horizontal scribe line. The back-side alignment mark extends from the front-side surface to the back-side surface of the wafer. The back-side alignment mark is used to aligning a saw, which singulates the wafer from the back-side surface.
    Type: Grant
    Filed: March 8, 2001
    Date of Patent: September 13, 2005
    Assignee: Amkor Technology, Inc.
    Inventors: Thomas P. Glenn, Roy Dale Hollaway, Steven Webster
  • Patent number: 6890786
    Abstract: This invention relates to a method of fabricating a light modulation system having a semiconductor substrate. In one exemplary method, an optical layer is applied over a semiconductor substrate which includes a plurality of integrated circuits. Each of these integrated circuits is capable of creating a separate display device. A protective layer is then applied over the optical layer. The plurality of integrated circuits is then singulated. Various other embodiments of apparatuses and methods are disclosed.
    Type: Grant
    Filed: April 22, 2002
    Date of Patent: May 10, 2005
    Assignee: Brillian Corporation
    Inventors: Tobias W. Walker, Douglas J. McKnight, Kam Wan
  • Patent number: 6888224
    Abstract: Low-k dielectric materials have desirable insulating characteristics for use in insulating sub micron conductors in semiconductor devices. However, certain physical and material characteristics of the low-k dielectric materials make them difficult to work with. More particularly, the soft, porous, leakage-prone characteristics of low-k materials makes it difficult to accommodate electrical contacts for electrical probing to conductors covered by such materials. The present invention provides methods and structures for facilitating the electrical probing of semiconductor device conductors insulated by overlying low-k layers of dielectric material.
    Type: Grant
    Filed: June 30, 2003
    Date of Patent: May 3, 2005
    Assignee: International Business Machines Corporation
    Inventors: Terence Lawrence Kane, Michael P. Tenney
  • Patent number: 6864562
    Abstract: A semiconductor device of the present invention has (1) an active element provided on a semiconductor substrate, (2) an interlayer insulating film formed so as to cover the active element, (3) a pad metal for an electrode pad which is provided on the interlayer insulating film, (4) a barrier metal layer which is provided on the active element with the interlayer insulating film therebetween, so that the pad metal is formed on the barrier metal layer, and (5) an insulating layer having high adherence to the barrier metal layer, the insulating layer being provided between the interlayer insulating film and the barrier metal layer. With this arrangement, the adherence between the barrier metal layer, the insulating film and the interlayer insulating film is surely improved, and even in the case where an external force is applied to the electrode pad upon bonding or after bonding, the barrier metal layer hardly comes off the part thereunder.
    Type: Grant
    Filed: June 21, 2000
    Date of Patent: March 8, 2005
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Kenji Toyosawa, Atsushi Ono, Yasunori Chikawa, Nobuhisa Sakaguchi, Nakae Nakamura, Yukinori Nakata
  • Patent number: 6844628
    Abstract: An electronic device is provided using wiring comprising aluminum to prevent hillock or whisker from generating, wherein the wiring contains oxygen atoms at a concentration of 8×1018 atoms·cm?3 or less, carbon atoms at a concentration of 5×1018 atoms·cm?3 or less, and nitrogen atoms at a concentration of 7×1017 atoms·cm?3 or less; furthermore, a silicon nitride film is formed on the aluminum gate, and an anodic oxide film is formed on the side planes thereof.
    Type: Grant
    Filed: May 23, 2002
    Date of Patent: January 18, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Teramoto
  • Patent number: 6800928
    Abstract: A surface treatment for porous silica to enhance adhesion of overlying layers. Treatments include surface group substitution, pore collapse, and gap filling layer (520) which invades open surface pores (514) of xerogel (510).
    Type: Grant
    Filed: May 28, 1998
    Date of Patent: October 5, 2004
    Assignee: Texas Instruments Incorporated
    Inventors: Wei William Lee, Richard Scott List, Changming Jin
  • Patent number: 6791164
    Abstract: A stereolithographically fabricated package that surrounds at least a portion of a semiconductor die so as to substantially hermetically seal the same. The package may be fabricated from thermoplastic glass, other types of glass, ceramics, or metals. Stereolithographic processes are used to fabricate at least a portion of the substantially hermetic package around the semiconductor dice of assemblies including carrier substrates or leads or around bare or minimally packaged semiconductor dice, including on dice that have yet to be singulated from a wafer. As at least a portion of the substantially hermetic package is stereolithographically fabricated, that portion may include a series of superimposed, contiguous, mutually adhered layers of a suitable hermetic material. The layers can be fabricated by consolidated selected regions of a layer of unconsolidated particulate or powdered material, or by defining an object layer from a sheet of material.
    Type: Grant
    Filed: January 9, 2002
    Date of Patent: September 14, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Warren M. Farnworth
  • Patent number: 6787886
    Abstract: A semiconductor device includes a semiconductor substrate which has a major surface and a MOS transistor which has a gate and first and second diffusion regions and which is formed on the major surface. The semiconductor device also includes a laminated structure of a SOG layer, wherein the laminated structure is composed of a base layer and a surface layer formed on the base layer and is formed over the MOS transistor and wherein the surface layer is denser than the base layer.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: September 7, 2004
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Kazuhiko Asakawa, Wataru Shimizu
  • Patent number: RE39690
    Abstract: A method for planarizing integrated circuit topographies, wherein, after a first layer of spin-on glass is deposited, a layer of low-temperature oxide is deposited before a second layer of spin-on glass.
    Type: Grant
    Filed: November 16, 2001
    Date of Patent: June 12, 2007
    Assignee: STMicroelectronics, Inc.
    Inventors: Alex Kalnitsky, Yih-Shung Lin