Specified Wide Band Gap (1.5ev) Semiconductor Material Other Than Gaasp Or Gaalas Patents (Class 257/76)
  • Patent number: 9768356
    Abstract: A method is described for forming at least one metal contact on a surface of a semiconductor and a device with at least one metal contact. The method is used for forming at least one metal contact (60) on a surface (11) of a semiconductor (10) and has the steps of: applying a metal layer (20) of palladium onto the semiconductor surface (11), applying a mask (40, 50) onto the metal layer (20), and structuring the palladium of the metal layer (20) using the mask (40, 50), wherein lateral deposits (21) of the metal are formed on sidewalls of the mask by the structuring so that the mask is embedded between the deposits (21) and the structured metal layer (20?) after the structuring. Since the mask is conductive, it can remain embedded in the metal. The deposits and the mask form a part of the contact.
    Type: Grant
    Filed: December 17, 2014
    Date of Patent: September 19, 2017
    Assignee: Forschungsverbund Berlin E.V.
    Inventors: Sven Einfeldt, Luca Redaelli, Michael Kneissl
  • Patent number: 9748353
    Abstract: A method of making a GaN device includes: forming a GaN substrate; forming a plurality of spaced-apart first metal contacts directly on the GaN substrate; forming a layer of insulating GaN on the exposed portions of the upper surface; forming a stressor layer on the contacts and the layer of insulating GaN; forming a handle substrate on the first surface of the stressor layer; spalling the GaN substrate that is located beneath the stressor layer to separate a layer of GaN and removing the handle substrate; bonding the stressor layer to a thermally conductive substrate; forming a plurality of vertical channels through the GaN to define a plurality of device structures; removing the exposed portions of the layer of insulating GaN to electrically isolate the device structures; forming an ohmic contact layer on the second surface; and forming second metal contacts on the ohmic contact layer.
    Type: Grant
    Filed: December 31, 2015
    Date of Patent: August 29, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Keith E. Fogel, Paul A. Lauro, Devendra K. Sadana
  • Patent number: 9735318
    Abstract: A multilayer structure including a hexagonal epitaxial layer, such as GaN or other group III-nitride (III-N) semiconductors, a <111> oriented textured layer, and a non-single crystal substrate, and methods for making the same. The textured layer has a crystalline alignment preferably formed by the ion-beam assisted deposition (IBAD) texturing process and can be biaxially aligned. The in-plane crystalline texture of the textured layer is sufficiently low to allow growth of high quality hexagonal material, but can still be significantly greater than the required in-plane crystalline texture of the hexagonal material. The IBAD process enables low-cost, large-area, flexible metal foil substrates to be used as potential alternatives to single-crystal sapphire and silicon for manufacture of electronic devices, enabling scaled-up roll-to-roll, sheet-to-sheet, or similar fabrication processes to be used.
    Type: Grant
    Filed: February 10, 2016
    Date of Patent: August 15, 2017
    Assignee: iBeam Materials, Inc.
    Inventors: Vladimir Matias, Christopher Yung
  • Patent number: 9728611
    Abstract: A semiconductor device includes: a substrate; a first GaN layer on the substrate and containing carbon; a second GaN layer on the first GaN layer and containing transition metal and carbon; a third GaN layer on the second GaN layer and containing transition metal and carbon; and an electron supply layer on the third GaN layer and having a larger band gap than GaN. A transition metal concentration of the third GaN layer gradually decreases from that of the second GaN layer from the second GaN layer toward the electron supply layer and is higher than 1×1015 cm?3 at a position of 100 nm deep from a bottom end of the electron supply layer. A top end of the second GaN layer is deeper than 800 nm from the bottom end. A carbon concentration of the third GaN layer is lower than those of the first and second GaN layers.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: August 8, 2017
    Assignee: Mitsubishi Electric Corporation
    Inventors: Atsushi Era, Susumu Hatakenaka
  • Patent number: 9726547
    Abstract: A microbolometer device integrated with CMOS and BiCMOS technologies and methods of manufacture are disclosed. The method includes forming a microbolometer unit cell, comprises damaging a portion of a substrate to form a damaged region. The method further includes forming infrared (IR) absorbing material on the damaged region. The method further includes isolating the IR absorbing material by forming a cavity underneath the IR absorbing material.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: August 8, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Qizhi Liu, Anthony K. Stamper, Ronald F. Waller
  • Patent number: 9722039
    Abstract: According to an embodiment of the present invention, a method for fabricating a semiconductor device comprises depositing a transition layer on a substrate, depositing GaN material on the transition layer, forming a contact on the GaN material, depositing a stressor layer on the GaN material, separating the transition layer and the substrate from the GaN material, patterning and removing portions of the GaN material to expose portions of the stressor layer.
    Type: Grant
    Filed: December 31, 2015
    Date of Patent: August 1, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Keith E. Fogel, Paul A. Lauro, Devendra K. Sadana
  • Patent number: 9711362
    Abstract: A semiconductor device of an embodiment includes a first layer, a second layer provided on the first layer, the second layer forming a two-dimensional electron gas in the first layer, a source electrode provided on the second layer, a drain electrode provided on the second layer, a gate electrode provided between the source electrode and the drain electrode on the second layer, and a first insulating layer provided between the gate electrode and the drain electrode on the second layer, the first insulating layer being a first oxide of at least one first element selected from the group consisting of Hf, Zr, Ti, Al, La, Y, and Sc, the first insulating layer containing 5×1019 cm?3 or more of at least one second element selected from the group consisting of F, H, D, V, Nb, and Ta.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: July 18, 2017
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Tatsuo Shimizu
  • Patent number: 9711687
    Abstract: In embodiments of the invention, a semiconductor structure comprising a III-nitride light emitting layer disposed between an n-type region and a p-type region is grown on a substrate. The substrate is a non-III-nitride material. The substrate has an in-plane lattice constant asubstrate. At least one III-nitride layer in the semiconductor structure has a bulk lattice constant alayer and [(|asubstrate?alayer|)/asubstrate]*100% is no more than 1%. A surface of the substrate opposite the surface on which the semiconductor structure is grown is textured.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: July 18, 2017
    Assignee: Koninklijke Philips N.V.
    Inventors: Nathan Frederick Gardner, Werner Karl Goetz, Michael Jason Grundmann, Melvin Barker McLaurin, John Edward Epler, Michael David Camras, Aurelien Jean Francois David
  • Patent number: 9705058
    Abstract: An optoelectronic semiconductor chip includes a semiconductor body that has a semiconductor layer sequence and at least one opening that extends through a second semiconductor layer into a first semiconductor layer. The chip also includes a support, which includes at least one recess, and a metallic connecting layer between the semiconductor body and the support. The metallic connecting layer includes a first region and a second region. The first region is connected to the first semiconductor layer in an electrically conductive manner through the opening and the second region is connected to the second semiconductor layer in an electrically conductive manner. A first contact is connected to the first region in an electrically conductive manner through the recess or a second contact is connected to the second region in an electrically conductive manner through the recess.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: July 11, 2017
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Norwin von Malm, Andreas Plöβl
  • Patent number: 9691855
    Abstract: The present disclosure involves a method of fabricating a semiconductor device. A surface of a silicon wafer is cleaned. A first buffer layer is then epitaxially grown on the silicon wafer. The first buffer layer contains an aluminum nitride (AlN) material. A second buffer layer is then epitaxially grown on the first buffer layer. The second buffer layer includes a plurality of aluminum gallium nitride (AlxGa1-xN) sub-layers. Each of the sub-layers has a respective value for x that is between 0 and 1. A value of x for each sub-layer is a function of its position within the second buffer layer. A first gallium nitride (GaN) layer is epitaxially grown over the second buffer layer. A third buffer layer is then epitaxially grown over the first GaN layer. A second GaN layer is then epitaxially grown over the third buffer layer.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: June 27, 2017
    Assignee: Epistar Corporation
    Inventors: Zhen-Yu Li, Hsing-Kuo Hsia, Hao-Chung Kuo
  • Patent number: 9691605
    Abstract: A semiconductor device includes a first semiconductor layer made of a nitride semiconductor and formed on a substrate, a second semiconductor layer made of a material including InAlN and formed on the first semiconductor layer, an insulator layer formed by an oxidized surface part of the second semiconductor layer, a gate electrode formed on the insulator layer, and a source electrode and a drain electrode respectively formed on the first or second semiconductor layer.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: June 27, 2017
    Assignee: FUJITSU LIMITED
    Inventors: Kozo Makiyama, Shirou Ozaki
  • Patent number: 9680052
    Abstract: An optoelectronic component includes a semiconductor layer structure having a quantum film structure, and a p-doped layer arranged above the quantum film structure, wherein the p-doped layer includes at least one first partial layer and a second partial layer, and the second partial layer has a higher degree of doping than the first partial layer.
    Type: Grant
    Filed: April 23, 2014
    Date of Patent: June 13, 2017
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Andreas Löffler, Tobias Meyer, Adam Bauer, Christian Leirer
  • Patent number: 9680105
    Abstract: Embodiments of the present disclosure are directed towards techniques and configurations for hybrid carbon-metal interconnect structures in integrated circuit assemblies. In one embodiment, an apparatus includes a substrate, a metal interconnect layer disposed on the substrate and configured to serve as a growth initiation layer for a graphene layer and the graphene layer, wherein the graphene layer is formed directly on the metal interconnect layer, the metal interconnect layer and the graphene layer being configured to route electrical signals. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: June 13, 2017
    Assignee: INTEL CORPORATION
    Inventor: Hans-Joachim Barth
  • Patent number: 9666708
    Abstract: Techniques related to III-N transistors having enhanced breakdown voltage, systems incorporating such transistors, and methods for forming them are discussed. Such transistors include a hardmask having an opening over a substrate, a source, a drain, and a channel between the source and drain, and a portion of the source or the drain disposed over the opening of the hardmask.
    Type: Grant
    Filed: March 26, 2014
    Date of Patent: May 30, 2017
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Benjamin Chu-Kung, Sansaptak Dasgupta, Robert S. Chau, Seung Hoon Sung, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9660066
    Abstract: A high electron mobility transistor is provided, which includes a substrate, a superlattice structure formed on the substrate, and a transistor epitaxial structure formed on the superlattice structure such that the superlattice structure is interposed between the substrate and the transistor epitaxial layer. As the high electron mobility transistor has the carbon-doped AlN/GaN superlattice structure between the substrate and the transistor epitaxial layer. Thus, the present invention can effectively reduce vertical leakage current, so as to improve the epitaxial quality and the breakdown voltage of the high electron mobility transistor.
    Type: Grant
    Filed: October 1, 2015
    Date of Patent: May 23, 2017
    Inventors: Zhen-Yu Li, An-Jye Tzou, Hao-Chung Kuo, Chunyen Chang
  • Patent number: 9653554
    Abstract: Techniques for processing materials for manufacture of gallium-containing nitride substrates are disclosed. More specifically, techniques for fabricating and reusing large area substrates using a combination of processing techniques are disclosed. The methods can be applied to fabricating substrates of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others. Such substrates can be used for a variety of applications including optoelectronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photo detectors, integrated circuits, transistors, and others.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: May 16, 2017
    Assignee: Soraa, Inc.
    Inventors: Mark P. D'Evelyn, Michael Ragan Krames
  • Patent number: 9653642
    Abstract: A method for manufacturing a display panel comprising light emitting device including micro LEDs includes providing multiple donor wafers having a surface region and forming an epitaxial material overlying the surface region. The epitaxial material includes an n-type region, an active region comprising at least one light emitting layer overlying the n-type region, and a p-type region overlying the active layer region. The multiple donor wafers are configured to emit different color emissions. The epitaxial material on the multiple donor wafers is patterned to form a plurality of dice, characterized by a first pitch between a pair of dice less than a design width. At least some of the dice are selectively transferred from the multiple donor wafers to a common carrier wafer such that the carrier wafer is configured with different color emitting LEDs. The different color LEDs could comprise red-green-blue LEDs to form a RGB display panel.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: May 16, 2017
    Assignee: SORAA LASER DIODE, INC.
    Inventors: James W. Raring, Melvin McLaurin, Alexander Sztein, Po Shan Hsu
  • Patent number: 9647170
    Abstract: The present techniques provide a method for producing a Group III nitride semiconductor light-emitting device, with suppression of an increase in polarity inversion defect density. The production method includes an n-type semiconductor layer formation step, a light-emitting layer formation step, and a p-type semiconductor layer formation step. The p-type semiconductor layer formation step includes a p-type cladding layer formation step. The p-type cladding layer formation step includes a first p-type semiconductor layer formation step for forming a p-type AlGaN layer, a first semiconductor layer growth intermission step after the first p-type semiconductor layer formation step, and a p-type InGaN layer formation step after the first semiconductor layer growth intermission step. In the first semiconductor layer growth intermission step, a mixture of nitrogen gas and hydrogen gas is supplied to the substrate.
    Type: Grant
    Filed: February 6, 2015
    Date of Patent: May 9, 2017
    Assignee: TOYODA GOSEI CO., LTD.
    Inventor: Masato Aoki
  • Patent number: 9640648
    Abstract: A semiconductor device includes a first semiconductor layer formed on a substrate; a second semiconductor layer and a third semiconductor layer formed on the first semiconductor layer; a fourth semiconductor layer formed on the third semiconductor layer; a gate electrode formed on the fourth semiconductor layer; and a source electrode and a drain electrode formed in contact with the second semiconductor layer. The third semiconductor layer and the fourth semiconductor layer are formed in an area immediately below the gate electrode, the fourth semiconductor layer is formed with a p-type semiconductor material, and the second semiconductor layer and the third semiconductor layer are formed with AlGaN, and the third semiconductor layer has a lower composition ratio of Al than that of the second semiconductor layer.
    Type: Grant
    Filed: February 25, 2016
    Date of Patent: May 2, 2017
    Assignee: Transphorm Japan, Inc.
    Inventor: Toshihide Kikkawa
  • Patent number: 9640647
    Abstract: A semiconductor device includes: a substrate; a nitride semiconductor film on the substrate; a schottky electrode on the nitride semiconductor film; a first insulating film on the nitride semiconductor film, contacting at least part of a side surface of the schottky electrode, forming an interface with the nitride semiconductor film and formed of SiN; and a second insulating film covering the schottky electrode and the first insulating film and formed of AlO whose atomic layers are alternately disposed.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: May 2, 2017
    Assignee: Mitsubishi Electric Corporation
    Inventors: Hiroyuki Okazaki, Kenichiro Kurahashi, Hidetoshi Koyama, Toshiaki Kitano, Yoshitaka Kamo
  • Patent number: 9627530
    Abstract: In accordance with an embodiment, a method for manufacturing a semiconductor component includes forming a first trench through a plurality of layers of compound semiconductor material. An insulating material is formed on first and second sidewalls of the first trench and first and second sidewalls of the second trench and a trench fill material is formed in the first and second trenches. In accordance with another embodiment, the semiconductor component includes a plurality of layers of compound semiconductor material over a body of semiconductor material and first and second filled trenches extending into the plurality of layers of compound semiconductor material. The first trench has first and second sidewalls and a floor and a first dielectric liner over the first and second sidewalls and the second trench has first and second sidewalls and a floor and second dielectric liner over the first and second sidewalls of the second trench.
    Type: Grant
    Filed: August 5, 2014
    Date of Patent: April 18, 2017
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Chun-Li Liu, Balaji Padmanabhan, Ali Salih, Peter Moens
  • Patent number: 9627222
    Abstract: A method for fabricating a semiconductor device including: forming a silicon layer on an upper face of a nitride semiconductor layer including a channel layer of a FET; thermally treating the nitride semiconductor layer in the process of forming the silicon layer or after the process of forming the silicon layer; and forming an insulating layer on an upper face of the silicon layer after the process of forming the silicon layer.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: April 18, 2017
    Assignees: SUMITOMO ELECTRIC INDUSTRIES, LTD., SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
    Inventors: Takeshi Araya, Tsutomu Komatani
  • Patent number: 9614070
    Abstract: A uni-terminal transistor device is described. In one embodiment, an n-channel transistor comprises a first semiconductor layer having a discrete hole level H0; a second semiconductor layer having a conduction band minimum EC2; a wide bandgap semiconductor barrier layer disposed between the first and the second semiconductor layers; a gate dielectric layer disposed above the first semiconductor layer; and a gate metal layer disposed above the gate dielectric layer and having an effective workfunction selected to position the discrete hole level H0 below the conduction band minimum Ec2 for zero bias applied to the gate metal layer and to obtain n-terminal characteristics.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: April 4, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Matthias Passlack
  • Patent number: 9613891
    Abstract: Electronic packages are formed from a generally planar leadframe having a plurality of leads coupled to a GaN-based semiconductor device, and are encased in an encapsulant. The plurality of leads are interdigitated and are at different voltage potentials.
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: April 4, 2017
    Assignee: Navitas Semiconductor, Inc.
    Inventor: Daniel M. Kinzer
  • Patent number: 9608103
    Abstract: A method for forming a high electron mobility transistor (HEMT) device with a plurality of alternating layers of one or more undoped gallium nitride (GaN) layers and one or more carbon doped gallium nitride layers (c-GaN), and an HEMT device formed by the method is disclosed. In one embodiment, the method includes forming a channel layer stack on a substrate, the channel layer stack having a plurality of alternating layers of one or more undoped gallium nitride (GaN) layers and one or more carbon doped gallium nitride layers (c-GaN). The method further includes forming a barrier layer on the channel layer stack. In one embodiment, the channel layer stack is formed by growing each of the one or more undoped gallium nitride (GaN) layers in growth conditions that suppress the incorporation of carbon in gallium nitride, and growing each of the one or more carbon doped gallium nitride (c-GaN) layers in growth conditions that promote the incorporation of carbon in gallium nitride.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: March 28, 2017
    Assignee: Toshiba Corporation
    Inventors: Jeffrey Craig Ramer, Karl Knieriem
  • Patent number: 9607850
    Abstract: Embodiments of the present disclosure are a method of forming a semiconductor device and methods of patterning a semiconductor device. An embodiment is a method of forming a semiconductor device, the method including forming a first hard mask layer over a semiconductor device layer, forming a set of mandrels over the first hard mask layer, and forming a first spacer layer over the set of mandrels and the first hard mask layer. The method further includes forming a second spacer layer over the first spacer layer, patterning the first spacer layer and the second spacer layer to form a mask pattern, and patterning the first hard mask layer using the mask pattern as a mask.
    Type: Grant
    Filed: August 6, 2015
    Date of Patent: March 28, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hsiung Tsai, Yung-Hsu Wu, Tsung-Min Huang, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue
  • Patent number: 9601377
    Abstract: A FinFET and methods for forming a FinFET are disclosed. In a method, first trenches are formed in a substrate. First isolation regions are then formed in the first trenches. An epitaxial region is epitaxially grown between the first isolation regions. A second trench is formed by etching in the epitaxial region, forming a plurality of fins. A second isolation region is formed in the second trench. A structure includes a substrate, a first fin on the substrate, a gate dielectric over the first fin, and a gate electrode over the gate dielectric. The first fin comprises an epitaxial layer having a stacking fault defect density less than 1*104 cm?3.
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: March 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Yao Wen, Sai-Hooi Yeong, Sheng-Chen Wang
  • Patent number: 9595512
    Abstract: According to one exemplary embodiment, a semiconductor package includes a substrate having lower and upper surfaces. The semiconductor package further includes at least one passive component coupled to first and second conductive pads on the upper surface of the substrate. The semiconductor package further includes at least one semiconductor device coupled to a first conductive pad on the lower surface of the substrate. The at least one semiconductor device has a first electrode for electrical and mechanical connection to a conductive pad external to the semiconductor package. The at least one semiconductor device can have a second electrode electrically and mechanically coupled to the first conductive pad on the lower surface of the substrate.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: March 14, 2017
    Assignee: Infineon Technologies Americas Corp.
    Inventor: Martin Standing
  • Patent number: 9590096
    Abstract: In one implementation, a vertical field-effect transistor (FET) includes a substrate having a drift region situated over a drain, a body region situated over the drift region and having source diffusions formed therein, a gate trench extending through the body region, and channel regions adjacent the gate trench. The channel regions are spaced apart along the gate trench by respective deep body implants. Each of the deep body implants is situated approximately under at least one of the source diffusions, and has a depth greater than a depth of the gate trench.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: March 7, 2017
    Assignee: Infineon Technologies Americas Corp.
    Inventors: Harsh Naik, Timothy D. Henson, Niraj Ranjan
  • Patent number: 9590139
    Abstract: A light emitting module including a driving unit and a light emitting diode is provided. The light emitting diode is electrically connected to the driving unit and the driving unit provides an operating current to make the light emitting diode emit light. The light emitting diode includes an n-type semiconductor layer, a light-emitting layer, an electron-blocking layer, and a p-type semiconductor layer. The electron-blocking layer has a thickness, and the thickness is smaller than or equal to 30 nm or is larger than or equal to 80 nm. The light-emitting layer is located between the electron-blocking layer and the n-type semiconductor layer. The electron-blocking layer is located between the p-type semiconductor layer and the light-emitting layer. A ratio of current density of the light emitting diode to the thickness is larger than 0 and is smaller than or equal to 2.
    Type: Grant
    Filed: June 6, 2016
    Date of Patent: March 7, 2017
    Assignee: PlayNitride Inc.
    Inventors: Yen-Lin Lai, Jyun-De Wu
  • Patent number: 9590060
    Abstract: A III-N enhancement-mode transistor includes a III-N structure including a conductive channel, source and drain contacts, and a gate electrode between the source and drain contacts. An insulator layer is over the III-N structure, with a recess formed through the insulator layer in a gate region of the transistor, with the gate electrode at least partially in the recess. The transistor further includes a field plate having a portion between the gate electrode and the drain contact, the field plate being electrically connected to the source contact. The gate electrode includes an extending portion that is outside the recess and extends towards the drain contact. The separation between the conductive channel and the extending portion of the gate electrode is greater than the separation between the conductive channel and the portion of the field plate that is between the gate electrode and the drain contact.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: March 7, 2017
    Assignee: Transphorm Inc.
    Inventor: Rakesh K. Lal
  • Patent number: 9577148
    Abstract: An n-type GaN layer made of n-type gallium nitride (GaN) is formed on a sapphire substrate. A plurality of island-phased layered structures are formed in random sizes between the n-type GaN layer and a p-type GaN layer that is made of p-type GaN. Each of the layered structures is configured by stacking multiple AlN layers made of aluminum nitride (AlN) and multiple InGaN layers made of indium gallium nitride (InGaN) on an AlN base layer. The respective layered structures emit lights of different wavelengths. This accordingly allows for emission of light in a wider wavelength range.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: February 21, 2017
    Assignee: THE UNIVERSITY OF TOKYO
    Inventors: Masakazu Sugiyama, Manish Mathew, Yoshiaki Nakano, Hassanet Sodabanlu
  • Patent number: 9548376
    Abstract: A method of manufacturing a semiconductor device includes forming a barrier structure over a substrate. The method further includes forming a channel layer over the barrier structure. The method further includes depositing an active layer over the channel layer. The method further includes forming source/drain electrodes over the channel layer. The method further includes annealing the source/drain electrodes to form ohmic contacts in the active layer under the source/drain electrodes.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: January 17, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Chun Liu, Chi-Ming Chen, Chen-Hao Chiang, Chung-Yi Yu, Chia-Shiung Tsai, Xiaomeng Chen
  • Patent number: 9543429
    Abstract: There is provided a silicon carbide semiconductor device allowing for increased switching speed with a simpler configuration. A silicon carbide semiconductor device includes: a gate electrode provided on a gate insulating film; and a gate pad. The gate electrode includes a first comb-tooth shaped electrode portion extending from outside of the gate pad toward a circumferential edge portion of the gate pad and overlapping with the gate pad at the circumferential edge portion of the gate pad when viewed in a plan view. A p+ region includes: a central portion overlapping with the gate pad when viewed in the plan view; and a peripheral portion extending from the central portion toward the outside of the gate pad, the peripheral portion being provided to face the first comb-tooth shaped electrode portion of the gate electrode with a space interposed therebetween.
    Type: Grant
    Filed: August 11, 2014
    Date of Patent: January 10, 2017
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Toru Hiyoshi, Takeyoshi Masuda, Keiji Wada
  • Patent number: 9536747
    Abstract: A method is for treating a doped gallium nitride substrate of a first conductivity type, having dislocations emerging on the side of at least one of its surfaces. The method may include: a) forming, where each dislocation emerges, a recess extending into the substrate from the at least one surface; and b) filling the recesses with doped gallium nitride of the second conductivity type.
    Type: Grant
    Filed: August 20, 2014
    Date of Patent: January 3, 2017
    Assignee: STMICROELECTRONICS (TOURS) SAS
    Inventor: Arnaud Yvon
  • Patent number: 9520491
    Abstract: A III-N semiconductor HEMT device includes an electrode-defining layer on a III-N material structure. The electrode-defining layer has a recess with a first sidewall proximal to the drain and a second sidewall proximal to the source, each sidewall comprising a plurality of steps. A portion of the recess distal from the III-N material structure has a larger width than a portion of the recess proximal to the III-N material structure. An electrode is in the recess, the electrode including an extending portion over the first sidewall. A portion of the electrode-defining layer is between the extending portion and the III-N material structure. The first sidewall forms a first effective angle relative to the surface of the III-N material structure and the second sidewall forms a second effective angle relative to the surface of the III-N material structure, the second effective angle being larger than the first effective angle.
    Type: Grant
    Filed: October 22, 2015
    Date of Patent: December 13, 2016
    Assignee: Transphorm Inc.
    Inventors: Srabanti Chowdhury, Umesh Mishra, Yuvaraj Dora
  • Patent number: 9515179
    Abstract: An electronic device can include a vertical III-V transistor having a gate electrode and a channel region within a homostructure. The channel region can be disposed between a first portion and a second portion of the gate electrode. In an embodiment, the III-V transistor can be an enhancement-mode GaN transistor, and in a particular embodiment, the drain, source, and channel regions can include the same conductivity type.
    Type: Grant
    Filed: April 20, 2015
    Date of Patent: December 6, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Peter Moens, Piet Vanmeerbeek, John Michael Parsey, Jr.
  • Patent number: 9502544
    Abstract: A vertical JFET includes a III-nitride substrate and a III-nitride epitaxial layer of a first conductivity type coupled to the III-nitride substrate. The first III-nitride epitaxial layer has a first dopant concentration. The vertical JFET also includes a III-nitride epitaxial structure coupled to the first III-nitride epitaxial layer. The III-nitride epitaxial structure includes a set of channels of the first conductivity type and having a second dopant concentration, a set of sources of the first conductivity type, having a third dopant concentration greater than the first dopant concentration, and each characterized by a contact surface, and a set of regrown gates interspersed between the set of channels. An upper surface of the set of regrown gates is substantially coplanar with the contact surfaces of the set of sources.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: November 22, 2016
    Assignee: Avogy, Inc.
    Inventors: Isik C. Kizilyalli, Linda Romano, David P. Bour
  • Patent number: 9496453
    Abstract: There is provided a method for producing a Group III nitride semiconductor light-emitting device having a low driving voltage, which is realized by steeply increasing the concentration of Mg within a p-type semiconductor layer. This production method includes the steps of forming an n-type contact layer, forming an n-side high electrostatic breakdown voltage layer, forming an n-side superlattice layer, forming a light-emitting layer, forming a p-type cladding layer, forming a p-type intermediate layer, and forming a p-type contact layer. The step of forming the p-type cladding layer includes supplying a dopant gas without supplying a first raw material gas (TMG) containing a Group III element during a first period TA1 and supplying the first raw material gas (TMG) and the dopant gas during a second period TA2 after the first period TA1 so as to grow a semiconductor layer.
    Type: Grant
    Filed: January 27, 2016
    Date of Patent: November 15, 2016
    Assignee: TOYODA GOSEI CO., LTD.
    Inventor: Koji Okuno
  • Patent number: 9496207
    Abstract: A semiconductor package includes an electrically conductive base (base) having a source connector. A drain connector and a gate connector are electrically coupled with the base. A depletion mode gallium nitride field-effect transistor (GaN FET) and an enhancement mode laterally diffused metal-oxide-semiconductor field-effect transistor (LDMOS FET) are also coupled with the base. The gate connector and a gate contact of the LDMOS FET are both included in a first electrical node, the source connector and a source contact of the LDMOS FET are both included in a second electrical node, and the drain connector and a drain contact of the GaN FET are both included in a third electrical node. The GaN FET and LDMOS FET together form a cascode that operates as an enhancement mode amplifier. The semiconductor package does not include an interposer between the GaN FET and the base or between the LDMOS FET and the base.
    Type: Grant
    Filed: June 19, 2015
    Date of Patent: November 15, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Phuong Trong Le, Alexander Young
  • Patent number: 9484506
    Abstract: A manufacturing method of a LED display is provided. A temporary substrate is provided, wherein the temporary substrate has a first adhesive layer and a plurality of first, second and third LED chips mounted on the first adhesive layer. A first transparent substrate is provided, the transparent substrate has a plurality of pixels disposed thereon, and each of the pixels comprises a first sub-pixel, a second sub-pixel and a third sub-pixel respectively surrounded by a light-insulating structure. Then, the temporary substrate and the first transparent substrate are bonded together, such that each of the first, second and third LED chips is correspondingly mounted in each of the first sub-pixels, the second sub-pixels and the third sub-pixels. After that, the temporary substrate is removed. A LED display manufactured by said method is also provided.
    Type: Grant
    Filed: December 4, 2015
    Date of Patent: November 1, 2016
    Assignee: LEXTAR ELECTRONICS CORPORATION
    Inventors: Chia-En Lee, Chia-Hung Hou
  • Patent number: 9478420
    Abstract: A method for depositing a Group III nitride semiconductor film on a substrate is provided that comprises: providing a sapphire substrate; placing the substrate in a vacuum chamber; conditioning a surface of the substrate by etching and providing a conditioned surface; holding the substrate away from a substrate facing surface of a heater by a predetermined distance; heating the substrate to a temperature by using the heater whilst the substrate is held away from the substrate facing surface of the heater, and depositing a Group III nitride semiconductor film onto the conditioned surface of the substrate by a physical vapour deposition method whilst the substrate is held away from the substrate facing surface of the heater and forming an epitaxial Group III nitride semiconductor film with N-face polarity on the conditioned surface of the substrate.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: October 25, 2016
    Assignee: EVATEC AG
    Inventors: Lorenzo Castaldi, Martin Kratzer, Heinz Felzer, Robert Mamazza, Jr.
  • Patent number: 9478605
    Abstract: A highly reliable semiconductor device with high withstand voltage is provided. As means therefor, an impurity concentration in a first JTE region is set to 4.4×1017 cm?3 or higher and 6×1017 cm?3 or lower and an impurity concentration in a second JTE region is set to 2×1017 cm?3 or lower in a case of a Schottky diode, and an impurity concentration in the first JTE region is set to 6×1017 cm?3 or higher and 8×1017 cm?3 or lower and an impurity concentration in the second JTE region is set to 2×1017 cm?3 or lower in a case of a junction barrier Schottky diode.
    Type: Grant
    Filed: December 10, 2013
    Date of Patent: October 25, 2016
    Assignee: Hitachi Power Semiconductor Device, Ltd.
    Inventors: Kazuhiro Mochizuki, Hidekatsu Onose, Norifumi Kameshiro, Natsuki Yokoyama
  • Patent number: 9461002
    Abstract: A semiconductor device and a method of making the same. The semiconductor device includes a semiconductor substrate mounted on a carrier. The semiconductor substrate includes a Schottky diode. The Schottky diode has an anode and a cathode. The semiconductor device also includes one or more bond wires connecting the cathode to a first electrically conductive portion of the carrier. The semiconductor device further includes one or more bond wires connecting the anode to a second electrically conductive portion of the carrier. The first electrically conductive portion of the carrier is electrically isolated from the second electrically conductive portion of the carrier. The first electrically conductive portion of the carrier is configured to provide shielding against electromagnetic interference associated with switching of the anode during operation of the device.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: October 4, 2016
    Assignee: NXP B.V.
    Inventors: Jeroen Antoon Croon, Coenraad Cornelis Tak
  • Patent number: 9455341
    Abstract: A transistor includes a substrate and a buffer layer on the substrate, wherein the buffer layer comprises p-type dopants. The transistor further includes a channel layer on the buffer layer and a back-barrier layer between a first portion of the channel layer and a second portion of the channel layer. The back-barrier layer has a band gap discontinuity with the channel layer. The transistor further includes an active layer on the second portion of the channel layer, wherein the active layer has a band gap discontinuity with the second portion of the channel layer. The transistor further includes a two dimensional electron gas (2-DEG) in the channel layer adjacent an interface between the channel layer and the active layer.
    Type: Grant
    Filed: July 17, 2013
    Date of Patent: September 27, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming Chen, Chih-Wen Hsiung, Po-Chun Liu, Ming-Chang Ching, Chung-Yi Yu, Xiaomeng Chen
  • Patent number: 9450068
    Abstract: In a method for manufacturing a silicon carbide semiconductor device having a JFET, a trench is formed in a semiconductor substrate, and a channel layer and a second gate region are formed on an inner wall of the trench. The channel layer and the second gate region are planarized to expose a source region. A first recess deeper than a thickness of the source region is formed on both leading ends of the trench, and an activation annealing process of 1300° C. or higher is conducted in an inert gas atmosphere. A first conductivity type layer formed by the annealing process to cover a corner which is a boundary between a bottom and a side of the first recess is removed.
    Type: Grant
    Filed: April 10, 2013
    Date of Patent: September 20, 2016
    Assignee: DENSO CORPORATION
    Inventors: Yuichi Takeuchi, Naohiro Sugiyama
  • Patent number: 9431526
    Abstract: A heterostructure grown on a silicon substrate includes a single crystal rare earth oxide template positioned on a silicon substrate, the template being substantially crystal lattice matched to the surface of the silicon substrate. A heterostructure is positioned on the template and defines at least one heterojunction at an interface between a III-N layer and a III-III-N layer. The template and the heterostructure are crystal matched to induce an engineered predetermined tensile strain at the at least one heterojunction. A single crystal rare earth oxide dielectric layer is grown on the heterostructure so as to induce an engineered predetermined compressive stress in the single crystal rare earth oxide dielectric layer and a tensile strain in the III-III-N layer. The tensile strain in the III-III-N layer and the compressive stress in the REO layer combining to induce a piezoelectric field leading to higher carrier concentration in 2DEG at the heterojunction.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: August 30, 2016
    Assignee: TRANSLUCENT, INC.
    Inventors: Rytis Dargis, Andrew Clark, Erdem Arkun
  • Patent number: 9425291
    Abstract: A semiconductor structure is provided that includes a plurality of suspended and stacked nanosheets of semiconductor channel material located above a pillar of a sacrificial III-V compound semiconductor material. Each semiconductor channel material comprises a semiconductor material that is substantially lattice matched to, but different from, the sacrificial III-V compound semiconductor material, and each suspended and stacked nanosheets of semiconductor channel material has a chevron shape. A functional gate structure can be formed around each suspended and stacked nanosheet of semiconductor channel material.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: August 23, 2016
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 9425176
    Abstract: A semiconductor device comprises a substrate, a patterned conductive layer, a first transistor structure and a second transistor structure. The patterned conductive layer is formed on the substrate. The first transistor structure includes a first source, a first gate and a first drain and is electrically connected to the patterned conductive layer by flip-chip bonding. The second transistor structure includes a second source, a second gate and a second drain and is electrically connected to the patterned conductive layer by flip-chip bonding. The first gate is electrically connected to the second source through the patterned conductive layer, and the first source is electrically connected to the second drain through the patterned conductive layer.
    Type: Grant
    Filed: December 31, 2014
    Date of Patent: August 23, 2016
    Assignee: NATIONAL TAIWAN UNIVERSITY
    Inventors: Jian-Jang Huang, Liang-Yu Su, Chih-Hao Wang
  • Patent number: 9418984
    Abstract: An electronic power component including a normally on high-voltage transistor and a normally off low-voltage transistor. The normally on transistor and the normally off transistor are coupled in cascode configuration and are housed in a single package. The normally off transistor is of the bottom-source type.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: August 16, 2016
    Assignee: STMicroelectronics S.r.l.
    Inventors: Antonello Santangelo, Marcello Francesco Salvatore Giuffrida