Via (interconnection Hole) Shape Patents (Class 257/774)
  • Patent number: 11488862
    Abstract: A semiconductor interconnect structure having a first electrically conductive structure having a plurality of bottom portions; a dielectric capping layer, at least a portion of the dielectric capping layer being in contact with a first bottom portion of the plurality of bottom portions; and a second electrically conductive structure in electrical contact with a second bottom portion of the plurality of bottom portions. A method of forming the interconnect structure is also provided.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: November 1, 2022
    Assignee: Tessera LLC
    Inventors: Conal E. Murray, Chih-Chao Yang
  • Patent number: 11488840
    Abstract: A method of manufacturing a wafer-to-wafer interconnection structure includes forming a first etching stop layer with at least two portions on a first surface of a first substrate, and forming a void in one portion of the first etching stop layer. A second etching stop layer is formed on a first surface of a second substrate, and then the first surfaces of the first substrate and the second substrate are bonded, wherein the second etching stop layer is aligned to the void. By using the first and the second etching stop layers as etching stop layers, a first opening is formed from a second surface of the first substrate into the first substrate, and a second opening is formed through the void to the second substrate. A first TSV (through silicon via) is formed in the first opening, and a second TSV is formed in the second opening.
    Type: Grant
    Filed: January 11, 2021
    Date of Patent: November 1, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yi-Jen Lo
  • Patent number: 11488909
    Abstract: A package structure includes at least one integrated circuit component, an insulating encapsulation, and a redistribution structure. The at least one integrated circuit component includes a semiconductor substrate, an interconnection structure disposed on the semiconductor substrate, and signal terminals and power terminals located on and electrically connecting to the interconnection structure. The interconnection structure is located between the semiconductor substrate and the signal terminals and between the semiconductor substrate and the power terminals, and where a size of the signal terminals is less than a size of the power terminals. The insulating encapsulation encapsulates the at least one integrated circuit component. The redistribution structure is located on the insulating encapsulation and electrically connected to the at least one integrated circuit component.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: November 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Wen Lin, Chung-Hao Tsai, Chen-Hua Yu, Chuei-Tang Wang, Che-Wei Hsu
  • Patent number: 11482485
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes an interposer substrate having an upper surface and a lower surface that is opposite to the upper surface. A guard ring is formed in the interposer substrate and surrounds a device region of the interposer substrate. At least a through-silicon via is formed in the interposer substrate. An end of the guard ring and an end of the through-silicon via that are near the upper surface of the interposer substrate are flush with each other.
    Type: Grant
    Filed: October 18, 2020
    Date of Patent: October 25, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Hung Chen, Ming-Tse Lin
  • Patent number: 11482509
    Abstract: Disclosed is a semiconductor package comprising a first memory chip including a first semiconductor substrate and a first through structure that penetrates the first semiconductor substrate, a second memory chip that directly contacts a top surface of the first memory chip and includes a second semiconductor substrate and a second through structure that penetrates the second semiconductor substrate, a first dummy chip that directly contacts a top surface of the second memory chip and includes a first conductive via, a second dummy chip that directly contacts a top surface of the first dummy chip and includes a second conductive via, and a logic chip in direct contact with a top surface of the second dummy chip. The logic chip is electrically connected to the first through structure through the second conductive via, the first conductive via, and the second through structure.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: October 25, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Se-Ho You, Kyung Suk Oh, Sunkyoung Seo
  • Patent number: 11476293
    Abstract: A manufacturing method of a chip package includes forming a temporary bonding layer on a carrier; forming an encapsulation layer on a top surface of a wafer or on the temporary bonding layer; bonding the carrier to the wafer, in which the encapsulation layer covers a sensor and a conductive pad of the wafer; patterning a bottom surface of the wafer to form a through hole, in which the conductive pad is exposed through the through hole; forming an isolation layer on the bottom surface of the wafer and a sidewall of the through hole; forming a redistribution layer on the isolation layer and the conductive pad that is in the through hole; forming a passivation layer on the isolation layer and the redistribution layer; and removing the temporary bonding layer and the carrier.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: October 18, 2022
    Assignee: XINTEC INC.
    Inventors: Yen-Shih Ho, Tsang-Yu Liu, Po-Han Lee
  • Patent number: 11476200
    Abstract: The present disclosure provides a semiconductor package structure. The semiconductor package structure includes a first die, at least a second die, an RDL disposed over the second die, a molding encapsulating the first die and the second die, a plurality of first conductors disposed in the molding, and a plurality of second conductors disposed in the second die. The first die has a first side and a second side opposite to the first side. The second die has a third side facing the first side of the first die and a fourth side opposite to the third side. The RDL is disposed on the fourth side of the second die. The first die is electrically connected to the RDL through the plurality of first conductors, and the second die is electrically connected to the RDL through the plurality of second conductors.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: October 18, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11476152
    Abstract: The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: October 18, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll
  • Patent number: 11469173
    Abstract: The present disclosure relates to a method of manufacturing a semiconductor structure. The method of manufacturing a semiconductor structure includes providing a carrier; disposing a dielectric layer over the carrier; removing a first portion of the dielectric layer to form an opening extending through the dielectric layer; removing a second portion of the dielectric layer to form a trench extending through and along the dielectric layer; disposing a conductive material into the opening and the trench to form a conductive via and a metallic strip, respectively; removing a third portion of the dielectric layer; detaching the dielectric layer from the carrier; disposing the dielectric layer over a substrate; disposing a die over the substrate; and forming a molding to surround the die.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: October 11, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11469195
    Abstract: The present disclosure relates to a semiconductor device with tilted insulating layers and a method for fabricating the semiconductor device with the tilted insulating layers. The semiconductor device includes a substrate, two conductive pillars positioned above the substrate and extended along a vertical axis, a first set of tilted insulating layers parallel to each other and positioned between the two conductive pillars, and a second set of tilted insulating layers parallel to each other and positioned between the two conductive pillars. The first set of tilted insulating layers are extended along a first direction slanted with respect to the vertical axis, the second set of tilted insulating layers are extended along a second direction slanted with respect to the vertical axis, and the first direction and the second direction are crossed.
    Type: Grant
    Filed: September 24, 2020
    Date of Patent: October 11, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11469214
    Abstract: Aspects of the disclosure relate to forming stacked NAND with multiple memory sections. Forming the stacked NAND with multiple memory sections may include forming a first memory section on a sacrificial substrate. A logic section may be formed on a substrate. The logic section may be bonded to the first memory section. The sacrificial substrate may be removed from the first memory section and a second memory section having a second sacrificial substrate may be formed and bonded to the first memory section.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: October 11, 2022
    Assignee: Xcelsis Corporation
    Inventors: Stephen Morein, Javier A. Delacruz, Xu Chang, Belgacem Haba, Rajesh Katkar
  • Patent number: 11456267
    Abstract: A method of forming a semiconductor device with a metal pillar overlapping a first top metal interconnect and a second top metal interconnect is disclosed. The metal pillar overlapping the first top metal interconnect and second top metal interconnect is connected to the first top metal interconnect by top metal vias while the second top metal interconnect does not contain top metal vias and remains free of a direct electrical connection to the metal pillar. The metal pillars are attached directly to top metal vias without a bond pad of metal. The elimination of the bond pad layer reduces the mask count, processing, and cost of the device. In addition, the elimination of the bond pad results in reduced die area requirements for the metal pillar.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: September 27, 2022
    Assignee: Texas Instruments Incorporated
    Inventor: Manoj Kumar Jain
  • Patent number: 11456207
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection in the first IMD layer; removing part of the first IMD layer; forming a spacer adjacent to the first metal interconnection; forming a second IMD layer on the spacer and the first metal interconnection; and forming a second metal interconnection in the second IMD layer and on the spacer and the first metal interconnection.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: September 27, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ching-Chih Chang, Yuan-Fu Ko, Chih-Sheng Chang
  • Patent number: 11456251
    Abstract: A semiconductor structure including at least one integrated circuit component is provided. The at least one integrated circuit component includes a first semiconductor substrate and a second semiconductor substrate electrically coupled to the first semiconductor substrate, wherein the first semiconductor substrate and the second semiconductor substrate are bonded through a first hybrid bonding interface, and at least one of the first semiconductor substrate or the second semiconductor substrate includes at least one first embedded capacitor.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: September 27, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Ting Chen, Chung-Hao Tsai, Chen-Hua Yu, Chuei-Tang Wang
  • Patent number: 11450581
    Abstract: A package structure and a method of forming the same are provided. A method includes forming first electrical connectors and second electrical connectors on a first side of an interposer wafer. An integrated circuit die is bonded to the first side of the interposer wafer using the first electrical connectors. A stiffener structure is attached to the first side of the interposer wafer adjacent the integrated circuit die. The stiffener structure covers the second electrical connectors in a plan view. The integrated circuit die and the stiffener structure are encapsulated with a first encapsulant. The interposer wafer and the stiffener structure are singulated to form a stacked structure.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: September 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Teng-Yuan Lo, Lipu Kris Chuang, Hsin-Yu Pan
  • Patent number: 11444005
    Abstract: The present technology relates to a semiconductor device, an imaging device, and a manufacturing apparatus, capable of providing a semiconductor substrate maintaining and improving insulating performance. A through hole that penetrates the semiconductor substrate, an electrode at the center of the through hole, and a space around the electrode are included. The through hole also penetrates an insulating film formed on the semiconductor substrate. A barrier metal is further included around the electrode. An insulating film is further included in the semiconductor substrate and the space. The semiconductor device has a multilayer structure, and the electrode connects wirings formed in different layers to each other. The present technology can be applied to, for example, an image sensor in which a logic circuit and a sensor circuit are laminated.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: September 13, 2022
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Reijiroh Shohji
  • Patent number: 11445601
    Abstract: A component carrier includes a stack having at least one electrically conductive layer structure, a first electrically insulating layer structure and a second electrically insulating layer structure. The first electrically insulating layer structure is made of a material which has first physical properties. The second electrically insulating layer structure is made of another material which has second physical properties differing from the first physical properties. The first electrically insulating layer structure and the second electrically insulating layer structure are at least partially in direct physical contact with each other. A method of manufacturing a component carrier is also disclosed.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: September 13, 2022
    Assignee: AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
    Inventors: Mikael Tuominen, Seok Kim Tay
  • Patent number: 11430766
    Abstract: Embodiments of semiconductor devices and fabrication methods thereof are disclosed. In an example, a semiconductor device includes a first semiconductor structure including a processor, an array of static random-access memory (SRAM) cells, and a first bonding layer including a plurality of first bonding contacts. The semiconductor device also includes a second semiconductor structure including an array of dynamic random-access memory (DRAM) cells and a second bonding layer including a plurality of second bonding contacts. The semiconductor device further includes a bonding interface between the first bonding layer and the second bonding layer. The first bonding contacts are in contact with the second bonding contacts at the bonding interface.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: August 30, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Jun Liu, Weihua Cheng
  • Patent number: 11430931
    Abstract: The invention describes a circuit assembly comprising a circuit board with a metal core, a pattern of conductive tracks, and a dielectric layer between the metal core and the conductive tracks; at least one circuit component mounted to the circuit board by means of solder interconnects, wherein a solder interconnect is formed between a contact pad of the circuit component and a conductive track; characterized in that the metal core comprises at least one cavity, wherein a cavity is arranged in the vicinity of a solder interconnect. The invention further describes a circuit board for such a circuit assembly, and a method of manufacturing such a circuit assembly.
    Type: Grant
    Filed: October 17, 2019
    Date of Patent: August 30, 2022
    Assignee: Lumileds LLC
    Inventor: Barbara Muelders
  • Patent number: 11430670
    Abstract: Stacked semiconductor devices and methods of forming the same are provided. Contact pads are formed on a die. A passivation layer is blanket deposited over the contact pads. The passivation layer is subsequently patterned to form first openings, the first openings exposing the contact pads. A buffer layer is blanket deposited over the passivation layer and the contact pads. The buffer layer is subsequently patterned to form second openings, the second opening exposing a first set of the contact pads. First conductive pillars are formed in the second openings. Conductive lines are formed over the buffer layer simultaneously with the first conductive pillars, ends of the conductive lines terminating with the first conductive pillars. An external connector structure is formed over the first conductive pillars and the conductive lines, the first conductive pillars electrically coupling the contact pads to the external connector structure.
    Type: Grant
    Filed: November 23, 2020
    Date of Patent: August 30, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsien-Wei Chen, Der-Chyang Yeh, Li-Hsien Huang
  • Patent number: 11424192
    Abstract: A component-embedded substrate includes a first wiring substrate, an electronic component provided on the first wiring substrate, an intermediate wiring substrate provided around the electronic component on the first wiring substrate and connected to the first wiring substrate via a first connection member, a second wiring substrate provided above the first wiring substrate, the electronic component and the intermediate wiring substrate, and connected to the intermediate wiring substrate via a second connection member, and an encapsulating resin filled between the first wiring substrate and the second wiring substrate and covering the electronic component and the intermediate wiring substrate. Side surfaces of the intermediate wiring substrate are entirely covered by the encapsulating resin.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: August 23, 2022
    Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Norio Yamanishi, Takeshi Meguro
  • Patent number: 11422475
    Abstract: Photolithography overlay errors are a source of patterning defects, which contribute to low wafer yield. An interconnect formation process that employs a patterning photolithography/etch process with self-aligned interconnects is disclosed herein. The interconnection formation process, among other things, improves a photolithography overlay (OVL) margin since alignment is accomplished on a wider pattern. In addition, the patterning photolithography/etch process supports multi-metal gap fill and low-k dielectric formation with voids.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: August 23, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Li-Lin Su, Yung-Hsu Wu
  • Patent number: 11417597
    Abstract: Provided is a semiconductor package including a redistribution substrate, a connection substrate on the redistribution substrate, the connection substrate having an opening that penetrates the connection substrate, a semiconductor chip in the opening of the connection substrate, and a molding layer that covers the semiconductor chip and the connection substrate, and fills a space between the semiconductor chip and the connection substrate, the connection substrate includes a base layer, a plurality of vias that vertically penetrate the base layer, a plurality of first patterns on a top surface of the base layer and connected to the plurality of vias, and a plurality of second patterns on a bottom surface of the base layer and connected to the plurality of vias, an extension of the molding layer extends into a plurality of holes that are spaced apart from the plurality of vias and are formed to vertically penetrate the base layer.
    Type: Grant
    Filed: November 27, 2020
    Date of Patent: August 16, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Bong-Soo Kim, Juhyeon Kim
  • Patent number: 11417629
    Abstract: A stacking structure including a first die, a second die stacked on the first die, and a third die and a fourth die disposed on the second die. The first die has a first metallization structure, and the first metallization structure includes first through die vias. The second die has a second metallization structure, and second metallization structure includes second through die vias. The first through die vias are bonded with the second through die vias, and sizes of the first through die vias are different from sizes of the second through die vias. The third and fourth dies are disposed side-by-side and are bonded with the second through die vias.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: August 16, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Fa Chen, Sung-Feng Yeh, Tzuan-Horng Liu, Chao-Wen Shih
  • Patent number: 11411014
    Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a substrate, a memory stack on the substrate; and a source contact structure extending vertically through the memory stack. The source contact structure includes a first source contact portion in the substrate and having a conductive material different from the substrate. The source contact structure also includes a second source contact portion above, in contact with, and conductively connected to the first source contact portion.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: August 9, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Ji Xia, Wei Xu, Pan Huang, Wenxiang Xu, Beihan Wang
  • Patent number: 11410982
    Abstract: A method includes forming a redistribution structure including metallization patterns; attaching a semiconductor device to a first side of the redistribution structure; encapsulating the semiconductor device with a first encapsulant; forming openings in the first encapsulant, the openings exposing a metallization pattern of the redistribution structure; forming a conductive material in the openings, comprising at least partially filling the openings with a conductive paste; after forming the conductive material, attaching integrated devices to a second side of the redistribution structure; encapsulating the integrated devices with a second encapsulant; and after encapsulating the integrated devices, forming a pre-solder material on the conductive material.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Yi Yang, Po-Yao Chuang, Shin-Puu Jeng
  • Patent number: 11411037
    Abstract: [Object] To provide a solid-state imaging device and an electronic apparatus with further improved performance. [Solution] A solid-state imaging device including: a first substrate on which a pixel unit is formed, and a first semiconductor substrate and a first multi-layered wiring layer are stacked; a second substrate on which a circuit having a predetermined function is formed, and a second semiconductor substrate and a second multi-layered wiring layer are stacked; and a third substrate on which a circuit having a predetermined function is formed, and a third semiconductor substrate and a third multi-layered wiring layer are stacked. The first substrate, the second substrate, and the third substrate are stacked in this order. The pixel unit has pixels arranged thereon. The first substrate and the second substrate are bonded together in a manner that the first multi-layered wiring layer and the second semiconductor substrate are opposed to each other.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: August 9, 2022
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Hideto Hashiguchi, Reijiroh Shohji, Hiroshi Horikoshi, Ikue Mitsuhashi, Tadashi Iijima, Takatoshi Kameshima, Minoru Ishida, Masaki Haneda
  • Patent number: 11412615
    Abstract: An electronic component includes a glass base in which through holes are formed passing through both surfaces thereof; an insulating resin layer laminated on each of both surfaces of the glass base and including a copper plated layer formed therein; and a capacitor including a lower electrode formed on the copper plated layer, a dielectric layer laminated on the lower electrode, and an upper electrode laminated on the dielectric layer. In the electronic component, the upper electrode has a region that is parallel to the copper plated layer and is formed so as to be smaller than a region of the dielectric layer parallel to the surface of the copper plated layer or a region of the lower electrode parallel to the surface of the copper plated layer.
    Type: Grant
    Filed: May 7, 2019
    Date of Patent: August 9, 2022
    Assignee: TOPPAN PRINTING CO., LTD.
    Inventors: Fusao Takagi, Kiyotomo Nakamura
  • Patent number: 11410948
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes an integrated circuit (IC) component, an insulating layer laterally encapsulating sidewalls of the IC component, a redistribution structure disposed on the insulating layer and the IC component, and a warpage control portion coupling to a back side of the IC component opposite to the redistribution structure. The redistribution structure is electrically connected to the IC component. The warpage control portion includes a substrate, a patterned dielectric layer disposed between the substrate and the IC component, and a metal pattern embedded in the patterned dielectric layer and electrically isolated from the IC component.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Fa Chen, Hsien-Wei Chen, Jie Chen
  • Patent number: 11404396
    Abstract: This semiconductor device includes a memory semiconductor chip in which a plurality of memory cells are laminated on a semiconductor substrate, a planar buffer chip which is a semiconductor chip that comprises a plurality of buffer circuits which hold data read from the memory cell and data written to the memory cell and which output the held data in accordance with the number of bit lines of the plurality of memory cells, and an electrical connection structure which electrically connects the bit lines of the memory cells of the memory semiconductor chips and the buffer circuits of the planar buffer chips to each other in a thickness direction of the memory semiconductor chip and the planar buffer chip. The electrical connection structure electrically connects the bit lines of the plurality of memory cells in the thickness direction through a penetration electrode penetrating at least the plurality of memory cells in the thickness direction.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: August 2, 2022
    Assignees: HONDA MOTOR CO., LTD., TOKYO INSTITUTE OF TECHNOLOGY
    Inventors: Koji Sakui, Takayuki Ohba
  • Patent number: 11404378
    Abstract: A semiconductor device that includes a metal pad buried in the semiconductor substrate that is electrically connected to a metal interconnection structure and electrically isolated from the semiconductor substrate. The semiconductor substrate forms an opening that extends from a back surface to the metal pad. A method for manufacturing a semiconductor device with buried metal pad including depositing, in a recess of a semiconductor substrate, a metal pad, isolating the pad from the substrate, electrically connecting the metal pad to the frontside of the substrate and connecting the metal pad to the backside of the substrate with an opening. A method for stabilizing through-silicon via connections in semiconductor device including electrically coupling a metal interconnection structure to a metal pad submerged in a semiconductor substrate and forming a through-silicon via into the semiconductor substrate that contacts the metal pad.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: August 2, 2022
    Assignee: OmniVision Technologies, Inc.
    Inventors: Yin Qian, Ming Zhang, Dyson H. Tai, Lindsay Grant
  • Patent number: 11398416
    Abstract: A structure including a semiconductor die, a conductive pillar, and an insulating encapsulation is provided. The conductive pillar includes a first pillar portion and a second pillar portion disposed on the first pillar portion, wherein a first width of the first pillar portion is greater than a second width of the second pillar portion. The insulating encapsulation laterally encapsulates the semiconductor die and the conductive pillar.
    Type: Grant
    Filed: November 28, 2019
    Date of Patent: July 26, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzung-Hui Lee, Hung-Jui Kuo, Ming-Che Ho
  • Patent number: 11398432
    Abstract: A wiring substrate includes a resin layer formed of an insulating resin, a first component, at least a part of which is embedded in the resin layer, a first wiring embedded in the resin layer, the first wiring including an exposed surface exposed from the resin layer at a first surface-side of the resin layer, and a first electrode including a wiring portion and an electrode portion, the wiring portion embedded in the resin layer and connecting to the first component in the resin layer, the electrode portion protruding from the first surface-side of the resin layer to a position higher than the exposed surface of the first wiring.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: July 26, 2022
    Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Tetsuichiro Kasahara, Tsukasa Nakanishi
  • Patent number: 11393779
    Abstract: Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad having a larger diameter or surface area (e.g., oversized for the application) may be used when a contact pad is positioned over a TSV in one or both substrates.
    Type: Grant
    Filed: June 12, 2019
    Date of Patent: July 19, 2022
    Assignee: INVENSAS BONDING TECHNOLOGIES, INC.
    Inventors: Guilian Gao, Bongsub Lee, Gaius Gillman Fountain, Jr., Cyprian Emeka Uzoh, Laura Wills Mirkarimi, Belgacem Haba, Rajesh Katkar
  • Patent number: 11393760
    Abstract: A semiconductor apparatus includes a floating-bridge interconnect that couples two semiconductive devices that are arranged across a middle semiconductive device. The floating-bridge interconnect can be semiconductive material such as a silicon bridge, or it can be an organic bridge. Computing functions required in one of the two semiconductive devices can be off-loaded to any of the floating-bridge interconnect or the other of the two semiconductive devices.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: July 19, 2022
    Assignee: Intel Corporation
    Inventors: Boon Ping Koh, Eng Huat Goh, Jiun Hann Sir, Khang Choong Yong, Min Suet Lim, Wil Choon Song
  • Patent number: 11393768
    Abstract: A semiconductor package having improved impact resistance and excellent heat dissipation and electromagnetic wave shielding property, and a manufacturing method thereof are provided. There is provided a semiconductor package including: a chip having a contact pad provided on one surface thereof; a buffer layer formed on one surface of the chip; one or more wiring patterns disposed on the buffer layer, electrically connected to the contact pad of the chip, and extended to an outside of the chip; an external pad provided on the wiring pattern and electrically connected to the wiring pattern; an external connection terminal electrically connected to the external pad; and a mold layer formed to surround the other surface and a side surface of the chip and a side surface of the buffer layer, and formed up to the other surface of the wiring pattern.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: July 19, 2022
    Assignee: NEPES CO., LTD.
    Inventors: Dong Hoon Oh, Su Yun Kim, Ju Hyun Nam
  • Patent number: 11387187
    Abstract: Embodiments may relate to an interposer that has a first layer with a plurality of first layer pads that may couple with a die. The interposer may further include a second layer with a power delivery component. The interposer may further include a very high density (VHD) layer, that has a VHD pad coupled by a first via with the power delivery component and coupled by a second via with a first layer pad. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: July 12, 2022
    Assignee: Intel Corporation
    Inventors: Andrew Paul Collins, Jianyong Xie, Sujit Sharan, Henning Braunisch, Aleksandar Aleksov
  • Patent number: 11387271
    Abstract: In described examples an integrated circuit (IC) has multiple layers of dielectric material overlying at least a portion of a surface of a substrate. A trench is etched through the layers of dielectric material to expose a portion the substrate to form a trench floor, the trench being surrounded by a trench wall formed by the layers of dielectric material. A metal perimeter band surrounds the trench adjacent the trench wall, the perimeter band being embedded in one of the layers of the dielectric material.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: July 12, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Scott Robert Summerfelt, Hassan Omar Ali, Benjamin Stassen Cook
  • Patent number: 11373866
    Abstract: Provided is a dielectric material composition and related methods. The method includes patterning a substrate to include a first feature, a second feature adjacent to the first feature, and a trench disposed between the first and second features. The method further includes depositing a dielectric material over the first feature and within the trench. In some embodiments, the depositing the dielectric material includes flowing a first precursor, a second precursor, and a reactant gas into a process chamber. Further, while flowing the first precursor, the second precursor, and the reactant gas into the process chamber, a plasma is formed within the process chamber to deposit the dielectric material.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: June 28, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Yu-Yun Peng
  • Patent number: 11373952
    Abstract: A semiconductor device includes: at least one conductive feature disposed on a substrate; at least one dielectric layer overlying the substrate, a trench structure extending through the at least one dielectric layer; and a protection layer overlaying the trench structure.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: June 28, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Chiang Kuo, Tao-Cheng Liu, Shih-Chi Kuo, Tsung-Hsien Lee
  • Patent number: 11373953
    Abstract: A manufacturing method of a semiconductor structure includes at least the following steps. Forming a first portion includes forming a first patterned conductive pad with a first through hole on a first interconnect structure over a first semiconductor substrate; patterning a dielectric material over the first interconnect structure to form a first patterned dielectric layer with a first opening that passes through a portion of the dielectric material formed inside the first through hole to accessibly expose the first interconnect structure; and forming a conductive material inside the first opening and in contact with the first interconnect structure to form a first conductive connector laterally isolated from the first patterned conductive pad by the first patterned dielectric layer. A singulation process is performed to cut off the first patterned dielectric layer, the first interconnect structure, and the first semiconductor substrate to form a continuous sidewall of a semiconductor structure.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: June 28, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Jung Yang, Hsien-Wei Chen, Ming-Fa Chen
  • Patent number: 11373958
    Abstract: Provided is a semiconductor device that includes a semiconductor substrate, an interconnection layer that is formed on a first face of the semiconductor substrate, at least one of a structural element that is formed to the interconnection layer, or a structural element that is formed in the semiconductor substrate from the first face side of the semiconductor substrate, a semiconductor-through-electrode that is positioned and formed, from a second face side of the semiconductor substrate opposite to the first face, so as to have a predetermined positional relationship with respect to the structural element, and a metallic-diffusion-preventing insulating layer that is formed from the first face side of the semiconductor substrate in a position, and with a shape, surrounding the semiconductor-through-electrode in the semiconductor substrate.
    Type: Grant
    Filed: May 8, 2017
    Date of Patent: June 28, 2022
    Assignee: SONY CORPORATION
    Inventor: Tadamasa Shioyama
  • Patent number: 11373948
    Abstract: An interconnection structure and a method of manufacturing the same, and an electronic device including the interconnection structure are provided.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: June 28, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11373943
    Abstract: A flip-chip film includes a substrate and a plurality of flip-chip film units. The plurality of flip-chip film units are disposed on the substrate, and each of the flip-chip film units includes a plurality of first metal traces arranged at intervals. A punch cut is defined between the first metal traces of two adjacent flip-chip film units.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: June 28, 2022
    Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Yicheng Chen
  • Patent number: 11362018
    Abstract: Apparatuses and methods are disclosed herein for the formation of to capacitance through substrate via structures. An example apparatus includes an opening formed in a substrate. Wherein the opening has at least one sidewall, a first dielectric at least formed on the sidewall of the opening, a first conductor at least formed on the first dielectric, a second dielectric at least formed on the first conductor, and a second conductor at least formed on a sidewall of the second dielectric.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: June 14, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Deepak C. Pandey, Haitao Liu, Chandra Mouli
  • Patent number: 11362037
    Abstract: An integrated fan-out package including an integrated circuit, an insulating encapsulation, and a redistribution circuit structure is provided. The integrated circuit includes an antenna region. The insulating encapsulation encapsulates the integrated circuit. The redistribution circuit structure is disposed on the integrated circuit and the insulating encapsulation. The redistribution circuit structure is electrically connected to the integrated circuit, and the redistribution circuit structure includes a redistribution region and a dummy region including a plurality of dummy patterns embedded therein, wherein the antenna region includes an inductor and a wiring-free dielectric portion, and the wiring-free dielectric portion of the antenna region is between the inductor and the dummy region.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: June 14, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Yen Chiu, Ching-Fu Chang, Hsin-Chieh Huang
  • Patent number: 11355421
    Abstract: A semiconductor device that includes a through hole forming region, an insulating wall, a semiconductor substrate, a side wall insulating film, and an electric conductor. The insulating wall has an inner peripheral surface surrounding the through hole forming region. The semiconductor substrate has the insulating wall buried in one of surfaces thereof. The semiconductor substrate has a through hole whose side wall is provided outwardly from the inner peripheral surface of the insulating wall. The side wall insulating film covers the side wall of the through hole and the inner peripheral surface of the insulating wall. The electric conductor is provided in the through hole of the semiconductor substrate via the side wall insulating film.
    Type: Grant
    Filed: October 18, 2018
    Date of Patent: June 7, 2022
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Toshiaki Shiraiwa
  • Patent number: 11355461
    Abstract: An integrated fan-out package includes a die, an encapsulant, a seed layer, a conductive pillar, a redistribution structure, and a buffer layer. The encapsulant encapsulates the die. The seed layer and the conductive pillar are sequentially stacked over the die and the encapsulant. The redistribution structure is over the die and the encapsulant. The redistribution structure includes a conductive pattern and a dielectric layer. The conductive pattern is directly in contact with the seed layer and the dielectric layer covers the conductive pattern and surrounds the seed layer and the conductive pillar. The buffer layer is disposed over the redistribution structure. The seed layer is separate from the dielectric layer by the buffer layer, and a Young's modulus of the buffer layer is higher than a Young's modulus of the dielectric layer of the redistribution structure.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: June 7, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Yang Yu, Chin-Liang Chen, Hai-Ming Chen, Kuan-Lin Ho, Yu-Min Liang
  • Patent number: 11355380
    Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: June 7, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11355385
    Abstract: The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: June 7, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll