Varying Width Or Thickness Of Conductor Patents (Class 257/775)
  • Publication number: 20080111246
    Abstract: A method and apparatus for partially strapping two polysilicon lines, each having a first end and second end, uses a metal line having a plurality of spaced apart metal segments with each metal segment partially strapping a different portion of a polysilicon line. The metal segments are arranged from the first end to the second end with the signals propagating from the second end to the first end. Where two metal segments are used, the segments have lengths of x = 2 ? L 7 and L?X where L is the length between the first end and the second end. Where three segments are used, the segments have lengths of X=0.25 L, Y=0.48 L, and Z=0.27 L.
    Type: Application
    Filed: November 14, 2006
    Publication date: May 15, 2008
    Inventor: Michael James Heinz
  • Patent number: 7372163
    Abstract: A semiconductor device provided with: a first interconnection layer provided on a semiconductor substrate; an interlevel insulation film provided over the first interconnection layer; a second interconnection layer of gold provided as an uppermost interconnection layer on the interlevel insulation film; and a barrier layer provided between the first interconnection layer and the second interconnection layer in an interlevel connection opening formed in the interlevel insulation film. The barrier layer includes a first sublayer provided in contact with the first interconnection layer to reduce a contact resistance, a second sublayer provided in contact with the second interconnection layer to improve a bonding strength, and a third sublayer provided between the first sublayer and the second sublayer. The first sublayer, the second sublayer and the third sublayer are, for example, a first tantalum sublayer, a second tantalum sublayer and a tantalum nitride sublayer, respectively.
    Type: Grant
    Filed: August 6, 2004
    Date of Patent: May 13, 2008
    Assignee: Rohm Co., Ltd.
    Inventor: Goro Nakatani
  • Patent number: 7372152
    Abstract: An integrated circuit (IC) may include a substrate, a first dielectric layer adjacent the substrate, and at least one trench in the first dielectric layer. The IC may also include a metal liner within the at least one trench, and a first conductive region including copper within the at least one trench. A cap layer including metal may be provided on the first conductive region. A second dielectric layer may be over the first conductive region and the cap layer. A dielectric etch stop and diffusion barrier layer may be over the second dielectric layer, and a via may be over the first conductive region and through the second dielectric layer and the cap layer. A diffusion barrier layer may be on sidewalls of the via, and an alloy seed layer including copper and at least one of tantalum, molybdenum, chromium, and tungsten may be over the diffusion barrier.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: May 13, 2008
    Assignee: Beck Semiconductor LLC
    Inventor: James A. Cunningham
  • Patent number: 7365001
    Abstract: A method of making a diffusion barrier for a interconnect structure. The method comprises: providing a conductive line in a bottom dielectric trench; depositing a sacrificial liner on the cap layer; depositing an interlayer dielectric; forming a trench and a via in the top interlayer dielectric; and removing a portion of the cap layer and the sacrificial layer proximate to the bottom surface of the via. The removed portions of the cap layer and sacrificial layer deposit predominantly along the lower sidewalls of the via. The conductive line is in contact with a cap layer, and the sacrificial layer is in contact with the cap layer. The invention is also directed to the interconnect structures resulting from the inventive process.
    Type: Grant
    Filed: December 16, 2003
    Date of Patent: April 29, 2008
    Assignee: International Business Machines Corporation
    Inventors: Chih-Chao Yang, Louis L. Hsu, Keith Kwong Hon Wong, Timothy Joseph Dalton, Carl Radens, Larry Clevenger
  • Patent number: 7361983
    Abstract: In a semiconductor device (1), semiconductor elements (2) and (3) are mounted on a lead frame (5) having leads (4). The semiconductor elements (2) and (3) are connected with the leads (4) by metallic wires (6) and (7). The semiconductor device (1) also has a heat sink (8). The members (2) to (8) are sealed with a plastic package (10). The leads (4) are exposed outward. Each of the end leads (4a) to (4d) has a wide first lead portion, a narrow second lead portion, a third lead portion to be inserted into an external substrate, and a protruding gap-controlling portion (9) for keeping the gap between the semiconductor device (1) and the external substrate constant. Because the heat resistance from the leads (4) to the plastic package (10) increases, the temperature-rise property of the lead is improved so that the solderability is improved.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: April 22, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Kenichi Hayashi, Hisashi Kawafuji, Junichi Murai, Goro Izuta
  • Patent number: 7361994
    Abstract: A system may include a conductive plane defining a non-conductive antipad area and a second non-conductive area extending from the antipad area in at least a first direction, a dielectric plane coupled to the conductive plane, a conductive via passing through the dielectric plane and the antipad area, a conductive pad connected to an end of the conductive via, and a conductive trace coupled to the dielectric plane and connected to the conductive pad, the conductive trace extending from the conductive pad in the first direction.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: April 22, 2008
    Assignee: Intel Corporation
    Inventor: Xiaoning Ye
  • Patent number: 7361552
    Abstract: A semiconductor device including an interlayer insulation film formed on a substrate so as to cover first and second regions defined on the substrate, and a capacitor formed over the interlayer insulation film in the first region, wherein the interlayer insulation film includes, in the first region, a stepped part defined by a groove having a bottom surface lower in level than a surface of the interlayer insulation film in the second region.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: April 22, 2008
    Assignee: Fujitsu Limited
    Inventors: Tadaaki Hayashi, legal representative, Taiji Ema, Narumi Ohkawa, Masao Hayashi
  • Patent number: 7358613
    Abstract: A semiconductor device includes a plurality of wirings each wiring including a metal wiring layer, a first barrier metal layer disposed on the metal wiring layer, a second barrier metal layer disposed below the metal wiring layer, a first insulating layer disposed below the second barrier metal layer, and a second insulating layer covering the wirings so that a void is defined between the wirings. The void has a larger sectional area than the metal wiring layer and includes an upper portion located between the upper surface and the bottom surface of the first barrier metal layer. The void includes a bottom portion located between the upper surface and the bottom surface of the second barrier metal layer.
    Type: Grant
    Filed: March 24, 2006
    Date of Patent: April 15, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takaharu Nishimura
  • Patent number: 7352059
    Abstract: A low loss on-die interconnect structure includes first and second differential signal lines on one of the metal layers of a microelectronic die. One or more traces may also be provided on another metal layer of the die that are non-parallel (e.g., orthogonal) to the differential signal lines. Because the traces are non-parallel, they provide a relatively high impedance return path for signals on the differential signal lines. Thus, a signal return path through the opposite differential line predominates for the signals on the differential lines. In one application, the low loss interconnect structure is used within an on-die salphasic clock distribution network.
    Type: Grant
    Filed: June 14, 2005
    Date of Patent: April 1, 2008
    Assignee: Intel Corporation
    Inventors: Frank O'Mahony, Mark A. Anders, Krishnamurthy Soumyanath
  • Patent number: 7348679
    Abstract: A method for manufacturing an electronic part, including: cutting a wiring substrate, which contains a base substrate, a wiring pattern provided on a first surface of the base substrate, and a reinforcing member provided on a second surface of the base substrate, along a line intersecting with an outer circumference of the reinforcing member; wherein a wire, out of a plurality of wires composing the wiring pattern, arranged closest to an intersecting point of the outer circumference of the reinforcing member and the line has a widest width.
    Type: Grant
    Filed: October 10, 2005
    Date of Patent: March 25, 2008
    Assignee: Seiko Epson Corporation
    Inventor: Munehide Saimen
  • Publication number: 20080067538
    Abstract: An electrode structure of a transistor, and a pixel structure and a display apparatus comprising the electrode structure of the transistor are disclosed. The electrode structure of the transistor comprises a first electrode and a second electrode. The first electrode has at least two first portions and at least one second portion. The first portions are substantially parallel with each other and each has a first width. The second portion has a second width, and connects the substantially parallel first portions to define a space with an opening. The first width is substantially greater than the second width.
    Type: Application
    Filed: March 7, 2007
    Publication date: March 20, 2008
    Applicant: AU OPTRONICS CORP.
    Inventors: Yu-Min Lin, Kuo-Lung Fang, Feng-Yuan Gan
  • Patent number: 7345368
    Abstract: A semiconductor device has a semiconductor substrate having first and second surface, a first resin film formed on the first surface of the semiconductor substrate and a second resin film formed on the second surface of the semiconductor substrate. A projection electrode or an interconnection is formed on the first surface of the semiconductor substrate, the second resin film is made of low elastic resin which is capable of absorbing an impact applied to the second surface of the semiconductor substrate and the second resin film is thinner than the semiconductor substrate.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: March 18, 2008
    Assignee: Rohm Co., Ltd.
    Inventor: Kazutaka Shibata
  • Patent number: 7339274
    Abstract: Phenomena such as electromigration and stress-induced migration occurring in metal interconnects of devices such as integrated circuits are inhibited by use of underlying non-planarities. Thus the material underlying the interconnect is formed to have non-planarities typically of at least 0.02 ?m in height and advantageously within 100 ?m of another such non-planarity. Such non-planarities, it is contemplated, reduce grain boundary movement in the overlying interconnect with a concomitant reduction in void aggregation.
    Type: Grant
    Filed: August 17, 2004
    Date of Patent: March 4, 2008
    Assignee: Agere Systems Inc.
    Inventors: John C. Desko, Jr., Bailey R. Jones, Sean Lian, Simon John Molloy, Vivian Ryan
  • Patent number: 7335991
    Abstract: There is provided a barrier structure provided with a concave portion corresponding to a pattern formed out of a functional liquid, the barrier structure comprising: a first concave portion provided in the barrier to correspond to a first pattern; and a second concave portion that is connected to the first pattern and is provided in the barrier to correspond to a second pattern having a width smaller than that of the first pattern, wherein the height of at least a part of the bottom surface of the second concave portion is greater than that of the bottom surface of the first concave portion.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: February 26, 2008
    Assignee: Seiko Epson Corporation
    Inventors: Toshimitsu Hirai, Katsuyuki Moriya
  • Patent number: 7332806
    Abstract: A semiconductor die package. It includes (a) a semiconductor die including a first surface and a second surface, (b) a source lead structure including protruding region having a major surface, the source lead structure being coupled to the first surface, (c) a gate lead structure being coupled to the first surface, and (d) a molding material around the source lead structure and the semiconductor die. The molding material exposes the second surface of the semiconductor die and the major surface of the source lead structure.
    Type: Grant
    Filed: January 31, 2005
    Date of Patent: February 19, 2008
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Rajeev Joshi, Chung-Lin Wu
  • Patent number: 7332805
    Abstract: An electronic package and method for forming such package that expands the current capability of lines and/or reducing line resistance for packages with a given feature dimension while relaxing feature tolerances. The methods and structures include electrical wirings having regions of larger wire cross-sectional areas in locations where the package must supply higher current distribution to the electronic devices and/or where signal lines need lower electrical resistance. These larger wire cross-sectional areas are vertically extended conductors applied to either the entire conductor or portions of the conductor.
    Type: Grant
    Filed: January 6, 2004
    Date of Patent: February 19, 2008
    Assignee: International Business Machines Corporation
    Inventors: Govindarajan Natarajan, Raschid J Bezama
  • Publication number: 20080017989
    Abstract: A semiconductor device 300 includes a metal line 304 formed in a first dielectric layer 302. A capping layer 306 is formed the metal line 304. A second dielectric layer 308 is formed over the first dielectric layer 302 and the metal line 304. A first via 310 is formed in the second dielectric layer 308 and in contact with the metal line 304. A second via 312 is formed in the second dielectric layer 308 and in contact with the metal line 304, and is positioned a distance away from the first via 310. An electrically isolated via 326 is formed in the second dielectric layer 308 and in contact with the metal line 304 and in between the first via 310 and the second via 312. A third dielectric layer 314 is formed over the second dielectric layer 308. First and second trenches 316, 318 are formed in the third dielectric layer 314 and in contact with the first via 310 and the second via 312, respectively. An isolated trench 328 is formed in the third dielectric layer and in contact with the isolated via 326.
    Type: Application
    Filed: July 24, 2006
    Publication date: January 24, 2008
    Inventors: Ki-Don Lee, Young-Joon Park, Ennis Takashi Ogawa
  • Patent number: 7317254
    Abstract: A semiconductor device is composed of a circuit board, a semiconductor chip connected with the circuit board by a plurality of bumps. The semiconductor chip includes a center portion and a peripheral portion surrounding the center portion. The peripheral portion has a thickness smaller than that of the center portion.
    Type: Grant
    Filed: September 2, 2005
    Date of Patent: January 8, 2008
    Assignee: NEC Electronics Corporation
    Inventor: Masanao Horie
  • Patent number: 7317208
    Abstract: A plurality of gate lines are formed on a substrate. After depositing a gate insulating layer, a semiconductor layer and a doped amorphous silicon layer are sequentially formed thereon. A lower insulating layer made of silicon nitride and an upper insulating layer made of a photosensitive organic material are deposited thereon after forming data lines and drain electrodes. The upper insulating layer is patterned to form an unevenness pattern on its surface and contact holes on the drain electrodes. The lower insulating layer is patterned together with the gate insulating layer using a photoresist pattern having apertures located in the contact holes to form other contact holes respectively exposing the drain electrodes, portions of the gate lines, and portions of the data lines.
    Type: Grant
    Filed: January 13, 2003
    Date of Patent: January 8, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chun-Gi You
  • Patent number: 7315083
    Abstract: A circuit device suitable for connecting a plurality of laminated wiring layers to each other through an insulating layer, and a manufacturing method thereof are provided. According to a hybrid integrated circuit device of the present invention and a manufacturing method thereof, a first conductive film is laminated on a first insulating layer, and a first wiring layer is formed by patterning the first conductive film. Next, a second conductive film is laminated on a second insulating layer. Thereafter, by partially removing the second insulating layer and the second conductive film in a desired spot, a connection part for connecting the wiring layers to each other is formed.
    Type: Grant
    Filed: May 31, 2005
    Date of Patent: January 1, 2008
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Yusuke Igarashi, Takeshi Nakamura, Yasunori Inoue, Hideki Mizuhara, Ryosuke Usui
  • Patent number: 7312530
    Abstract: A semiconductor device comprises a first insulating film formed on a semiconductor substrate, a first metal pattern formed on the first insulating film, a second insulating film formed on the first metal pattern, a second metal pattern formed on the second insulating film, and a third metal pattern formed in the second insulating film and connecting between the first metal pattern and the second metal pattern. The third metal pattern is a single continuous structure, and the principal orientation axes of crystals of a metal constituting the third metal pattern are parallel to the principal surface of the semiconductor substrate.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: December 25, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Shin Hashimoto, Tadaaki Mimura
  • Publication number: 20070278693
    Abstract: A semiconductor device comprises metal lines in a specific metallization layer which have a different thickness and thus a different resistivity in different device regions. In this way, in high density areas of the device, metal lines of reduced thickness may be provided in order to comply with process requirements for achieving a minimum pitch between neighboring metal lines, while in other areas having less critical constraints with respect to minimum pitch, a reduced resistivity may be obtained at reduced lateral dimensions compared to conventional strategies. For this purpose, the dielectric material of the metallization layer may be appropriately patterned prior to forming respective trenches or the etch behavior of the dielectric material may be selectively adjusted in order to obtain differently deep trenches.
    Type: Application
    Filed: January 3, 2007
    Publication date: December 6, 2007
    Inventors: Matthias Lehr, Matthias Schaller, Carsten Peters
  • Patent number: 7304390
    Abstract: An anisotropic conductive sheet manufactured through improved manufacturing steps and a method of manufacturing the same. Conductive portions are unevenly arranged in a nonconductive elastomer having fluidity and serving as a matrix, the conductive portions highly densely containing the conductive particles having a specific gravity greater than that of the matrix component, the conductive particles are unevenly dispersed to form substantially nonconductive portions, and the conductive portions and the nonconductive portions are integrally cured to mold anisotropic conductive pieces. The anisotropic conductive pieces are so laminated that the conductive portions and the nonconductive portions are alternately arranged thereby to obtain a first laminate, and the first laminate is cut maintaining a predetermined thickness to obtain a zebra-like sheet.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: December 4, 2007
    Assignee: J.S.T. Mfg. Co., Ltd
    Inventor: Miki Hasegawa
  • Publication number: 20070273044
    Abstract: An interconnect structure and method of fabricating the same in which the adhesion between a chemically etched dielectric material and a noble metal liner is improved are provided. In accordance with the present invention, a chemically etching dielectric material is subjected to a treatment step which modified the chemical nature of the dielectric material such that the treated surfaces become hydrophobic. The treatment step is performed prior to deposition of the noble metal liner and aides in improving the adhesion between the chemically etched dielectric material and the noble metal liner.
    Type: Application
    Filed: May 25, 2006
    Publication date: November 29, 2007
    Inventors: Chih-Chao Yang, Griselda Bonilla, Qinghuang Lin, Terry A. Spooner
  • Patent number: 7301241
    Abstract: The semiconductor device has insulating films 40, 42 formed over a substrate 10; an interconnection 58 buried in at least a surface side of the insulating films 40, 42; insulating films 60, 62 formed on the insulating film 42 and including a hole-shaped via-hole 60 and a groove-shaped via-hole 66a having a pattern bent at a right angle; and buried conductors 70, 72a buried in the hole-shaped via-hole 60 and the groove-shaped via-hole 66a . A groove-shaped via-hole 66a is formed to have a width which is smaller than a width of the hole-shaped via-hole 66. Defective filling of the buried conductor and the cracking of the inter-layer insulating film can be prevented. Steps on the conductor plug can be reduced. Accordingly, defective contact with the upper interconnection layer and the problems taking place in forming films can be prevented.
    Type: Grant
    Filed: July 21, 2003
    Date of Patent: November 27, 2007
    Assignee: Fujitsu Limited
    Inventor: Kenichi Watanabe
  • Publication number: 20070267755
    Abstract: A pad (20) is electrically connected to a first I/O cell (14) while also physically overlying active circuitry of a second I/O cell (16). Note that although the pad (20) overlies the second I/O cell (16), the pad (20) is not electrically connected to the I/O cell (16). Such a pattern may be replicated in any desired manner so that the I/O cells (e.g. 300-310) may have a finer pitch than the corresponding pads (320-324 and 330-335). In addition, the size of the pads may be increased (e.g. pad 131 may be bigger than pad 130) while the width “c” of the I/O cells (132-135) does not have to be increased. Such a pattern (e.g. 500) may be arranged so that the area required in one or more dimensions may be minimized.
    Type: Application
    Filed: May 16, 2006
    Publication date: November 22, 2007
    Inventors: Nhat D. Vo, Tu-Anh T. Tran, Burton J. Carpenter, Dae Y. Hong, James W. Miller, Kendall D. Phillips
  • Patent number: 7294934
    Abstract: A low-k dielectric sacrificial material is formed within a microelectronic structure covered with a suitable porous or low density permeable material. At an appropriate time, the underlying sacrificial material is decomposed and diffused away through the overlying permeable material. As a result, at least one void is created, contributing to desirable dielectric characteristics.
    Type: Grant
    Filed: November 21, 2002
    Date of Patent: November 13, 2007
    Assignee: Intel Corporation
    Inventors: Grant M. Kloster, Xiarong Morrow, Jihperng Leu
  • Patent number: 7291923
    Abstract: In an integrated circuit, a layer including a plurality of conductive wires is described. A first wire, having sidewalls, is tapered from a proximal end which has a first width to a distal end which has a second width, to reduce width from the first width to the second width, and the first wire also has a substantially vertical surface. A second wire, spaced apart from the first wire, also has a substantially vertical surface. The first wire and the second wire are each horizontally disposed along side each other forming a part of a sidewall capacitor between facing sidewalls. Capacitors are created between the first substantially vertical surface and the second substantially vertical surface, the capacitors are respectively associated with capacitances and with a plurality of loads, the plurality of loads is progressively reduced responsive to a progressive reduction of the capacitances as associated with the first wire taper.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: November 6, 2007
    Assignee: Xilinx, Inc.
    Inventors: Austin H. Lesea, Peter H. Alfke
  • Patent number: 7291915
    Abstract: A circuit board includes an insulating substrate, a first conductive layer on the insulating substrate, a second conductive layer on the first conductive layer, and a third conductive layer covering the first conductive layer and the second conductive layer. The first conductive layer has a surface provided on the surface of the insulating substrate, and a surface having a width smaller than a width of the above surface. In this circuit board, the conductive layers have small impedances even if a high-frequency signal flows in the conductive layers.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: November 6, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Toshio Sugawa, Hideki Higashitani, Takumi Misaki
  • Patent number: 7288729
    Abstract: A circuit board includes a film substrate, a plurality of wiring layers arranged in order on the film substrate, and bumps formed on the wiring layers, respectively. Each of the bumps is provided across a longitudinal direction of a corresponding one of the wiring layers so as to extend over regions on both sides of the wiring layer above the insulating substrate, and a cross sectional shape of the bump taken in the width direction of the wiring layer is such that a central portion is higher than portions on both sides of the central portion. Accordingly, the bumps formed on the wiring layers can be held with strength sufficient for practical use against the force applied in the lateral direction.
    Type: Grant
    Filed: June 7, 2005
    Date of Patent: October 30, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hiroyuki Imamura, Nobuyuki Koutani
  • Patent number: 7287325
    Abstract: Disclosed are a damascene and dual damascene processes both of which incorporate the use of a release layer to remove trace amounts of residual material between metal interconnect lines. The release layer is deposited onto a dielectric layer. The release layer comprises an organic material, a dielectric material, a metal or a metal nitride. Trenches are etched into the dielectric layer. The trenches are lined with a liner and filled with a conductor. The conductor and liner materials are polished off the release layer. However, trace amounts of the residual material may remain. The release layer is removed (e.g., by an appropriate solvent or wet etching process) to remove the residual material. If the trench is formed such that the release layer overlaps the walls of the trench, then when the release layer is removed another dielectric layer can be deposited that reinforces the corners around the top of the metal interconnect line.
    Type: Grant
    Filed: May 10, 2005
    Date of Patent: October 30, 2007
    Assignee: International Business Machines Corporation
    Inventors: Kaushik Chanda, James J. Demarest, Ronald G. Filippi, Roy C. Iggulden, Edward W. Kiewra, Ping-Chuan Wang, Yun-Yu Wang
  • Patent number: 7288792
    Abstract: Exemplary embodiments of the present invention are intended to provide a semiconductor device that can readily address or achieve high integration. Exemplary embodiments provide a semiconductor device constructed to include a transistor and a multi-layer wiring structure electrically connected to the transistor, the multi-layer wiring structure having a first wiring layer disposed in the same layer as the semiconductor layer of the transistor.
    Type: Grant
    Filed: February 22, 2005
    Date of Patent: October 30, 2007
    Assignee: Seiko Epson Corporation
    Inventor: Ichio Yudasaka
  • Patent number: 7285734
    Abstract: A circuit board includes a film substrate, a plurality of wiring layers arranged in order on the film substrate, and bumps formed on the wiring layers, respectively. Each of the bumps is provided across a longitudinal direction of a corresponding one of the wiring layers so as to extend over regions on both sides of the wiring layer above the insulating substrate, and a cross sectional shape of the bump taken in the width direction of the wiring layer is such that a central portion is higher than portions on both sides of the central portion. Accordingly, the bumps formed on the wiring layers can be held with strength sufficient for practical use against the force applied in the lateral direction.
    Type: Grant
    Filed: April 27, 2004
    Date of Patent: October 23, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hiroyuki Imamura, Nobuyuki Koutani
  • Publication number: 20070228528
    Abstract: An insulating layer is formed on a semiconductor substrate, and has a through hole for via. A porous silica layer has a trench for interconnection communicating to the through hole for via, and is formed on the insulating layer in contact therewith. A conductive layer is formed in the through hole for via and in the trench for interconnection. The insulating layer is formed from a material containing carbon, hydrogen, oxygen, and silicon, and having absorption peak attributed to Si—CH3 bond in a range from at least 1260 cm?1 to at most 1280 cm?1 (around 1274 cm?1) when measured with FT-IR. Thus, a semiconductor device having a porous insulating layer in which depth of the trench for interconnection is readily controlled, a dielectric constant is low, and increase in leakage current is less likely, as well as a manufacturing method thereof can be obtained.
    Type: Application
    Filed: March 28, 2007
    Publication date: October 4, 2007
    Inventors: Ryotaro Yagi, Shinichi Chikaki, Yoshinori Shishida
  • Patent number: 7268434
    Abstract: There is disclosed a semiconductor device comprising at least one first insulating film provided above a substrate, being formed with at least one first recess having a first width, and being formed with at least one second recess having a second width which is 1/x (x: positive numbers larger than 1) a size of the first width and having a same depth as the first recess, a second insulating film provided at both sides of the first recess and at a lower part of the second recess, and a conductor provided inside of the second insulating films provided at the both sides of the first recess with extending from an opening of the first recess to a bottom surface thereof, and provided with extending from an opening of the second recess to an upper surface of the second insulating film provided at the lower part of the second recess.
    Type: Grant
    Filed: April 5, 2006
    Date of Patent: September 11, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yuichi Nakashima
  • Patent number: 7265449
    Abstract: A liquid crystal display device includes a liquid crystal panel including a pad electrode, a tape circuit substrate and an anisotropic conductive film. The pad electrode receives one of a driving signal and a power supply voltage signal. The tape circuit substrate includes a base film made of an insulating material, and a signal line formed on the base film and having a slit at a portion of the signal line which overlaps the pad electrode of the liquid crystal panel. The anisotropic conductive film connects the outer lead with the pad electrode.
    Type: Grant
    Filed: July 21, 2005
    Date of Patent: September 4, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hee-bum Park, Ock-jin Kim, Jin-ho Park, Kwang-soo Lee
  • Patent number: 7265436
    Abstract: A method of forming an improved seal ring structure is described. A continuous metal seal ring is formed along a perimeter of a die wherein the metal seal ring is parallel to the edges of the die and sloped at the corner of the die so as not to have a sharp corner and wherein the metal seal ring has a first width at the corners and a second width along the edges wherein the first width is wider than the second width.
    Type: Grant
    Filed: February 17, 2004
    Date of Patent: September 4, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tai-Chun Huang, Chih-Hsiang Yao, Kuan-Shou Chi
  • Patent number: 7262505
    Abstract: Structures and methods are provided which include a selective electroless copper metallization. The present invention includes a novel methodology for forming copper vias on a substrate, including depositing a thin film seed layer of Palladium (Pd) or Copper (Cu) on a substrate to a thickness of less than 15 nanometers (nm). A number of via holes is defined above the seed layer. A layer of copper is deposited over the seed layer using electroless plating to fill the via holes to a top surface of the patterned photoresist layer. The method can be repeated any number of times, forming second, third and fourth layers of copper. The photoresist layers along with the seed layers in other regions can then be removed, such as by oxygen plasma etching, such that a chemical mechanical planarization process is avoided.
    Type: Grant
    Filed: August 30, 2004
    Date of Patent: August 28, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Kie Y. Ahn, Leonard Forbes
  • Patent number: 7253439
    Abstract: The invention relates to a substrate for a display, a method of manufacturing the same, and a display having the same and provides a substrate for a display which can be manufactured through simple steps with high reliability, a method of manufacturing the same, and a display having the same. The substrate is configured to have a gate bus line, an OC layer formed on the gate bus line, a pixel electrode formed on the OC layer at each pixel region, and a gate terminal for electrically connecting an external circuit and the gate bus line.
    Type: Grant
    Filed: September 29, 2005
    Date of Patent: August 7, 2007
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Katsunori Misaki, Shiro Hirota
  • Patent number: 7253528
    Abstract: A design methodology reduces electromigration in integrated circuit joints such as flip-chip bumps by seeking to produce a more uniform current distribution at the interface between the integrated circuit pad and the joint while maintaining an interface form that coincides with standard integrated circuit designs is presented. The design methodology addresses the current distribution at the pad by introducing an intermediate trace routing design between the current delivering trace and the pad that distributes the inflow of current from the trace to multiple points of entry on the pad. The intermediate trace routing design includes an outer trace channel connected to the current delivering trace. A plurality of conductive trace leads connect the outer trace channel to the pad. Preferably, each of the plurality of conductive trace leads is characterized by a respective trace impedance so as to distribute equal current flow through each of the leads to the pad.
    Type: Grant
    Filed: February 1, 2005
    Date of Patent: August 7, 2007
    Assignee: Avago Technologies General IP Pte. Ltd.
    Inventors: Walter John Dauksher, Wayne Patrick Richling, William S. Graupp
  • Patent number: 7253514
    Abstract: A connecting element for electrically connecting a semiconductor chip and a superordinate circuit board includes an elastic metal strip that is bent forming two metal limbs with flattened limb ends, thus forming a base between the metal limbs which is suitable for contacting and providing electrical connectivity to a plurality of contact pads of a superordinate circuit board. At least one of the two limb ends is electrically connected to the contact areas of a semiconductor chip, while the other limb end is elastically supported on the top side of the semiconductor chip, thereby enabling the connecting element to be self supporting.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: August 7, 2007
    Assignee: Infineon Technologies, AG
    Inventors: Anton Legen, Jochen Thomas, Ingo Wennemuth
  • Patent number: 7250679
    Abstract: The semiconductor device comprises a lower interconnection part 12 which is formed on a silicon substrate 10 and includes an inter-layer insulation film 36 formed of a low-k film 32 and a hydrophilic insulation film 34 formed on the low-k film 32, and an interconnection layer 44a, 44b buried in interconnection trenches 38a, 38b formed in the inter-layer insulation film 36 and having an interconnection pitch which is a first pitch; and an intermediate interconnection part 14 which is formed on the lower interconnection part 12 and includes an inter-layer insulation film 142 formed of low-k films 136, 140, an interconnection layer 152a, 152b buried in interconnection trenches 146a, 146b formed in the inter-layer insulation film 142 and having an interconnection pitch which is a second pitch larger than the first pitch, and an SiC film 154 formed directly on the low-k film 140 and the interconnection layer 152a, 152b.
    Type: Grant
    Filed: April 5, 2004
    Date of Patent: July 31, 2007
    Assignee: Fujitsu Limited
    Inventor: Satoshi Otsuka
  • Patent number: 7250681
    Abstract: A semiconductor device includes first level wires; a low-dielectric constant film on the first level wires; first flat vias embedded in the low-dielectric constant film connected to the first level wires, each via having a first length in a longitudinal direction of the first level wires and a second length in a orthogonal direction to the first direction on a plane where the first level wires are disposed, aspect ratio of at least one of the first and second lengths to a height perpendicular to the plane is over 1; and second level wires disposed on the low-dielectric constant film connected to the first vias.
    Type: Grant
    Filed: September 14, 2004
    Date of Patent: July 31, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Noriaki Matsunaga
  • Patent number: 7247943
    Abstract: In an integrated circuit (1) having a substrate (3) and having a signal-processing circuit (4) which is produced at a surface (8) of the substrate (3), there is provided on the substrate surface (8) a protective layer (12) that has at least one aperture (13) through which a second contact pad (14) is electrically and mechanically connected to a first contact pad (9), wherein the second contact pad (14) is of a height of at least 15 ?m and projects laterally beyond the aperture (13) on all sides and is seated on the protective layer (12) by an overlap zone (z) that is closed on itself like a ring, wherein the overlap zone (z) has a constant width of overlap (w) of between 2 ?m and 15 ?m, and wherein at least one element of the signal-processing circuit (4), and preferably only one capacitor (5) of the signal-processing circuit (4), is provided opposite the first contact pad (9).
    Type: Grant
    Filed: October 31, 2003
    Date of Patent: July 24, 2007
    Assignee: NXP B.V.
    Inventor: Heimo Scheucher
  • Patent number: 7247931
    Abstract: A leadframe for a semiconductor package is formed with an indentation on a bottom surface. A side of the indentation is used to form a mold-lock that assists in securing the leadframe to the encapsulation material of the semiconductor package.
    Type: Grant
    Filed: July 24, 2006
    Date of Patent: July 24, 2007
    Assignee: Semiconductor Components Industries, L.L.C.
    Inventors: Chuan Kiak Ng, Ein Sun Ng, Yeu Wen Lee
  • Patent number: 7247939
    Abstract: A method for forming a metal filled semiconductor feature with improved structural stability including a semiconductor wafer having an anisotropically etched opening formed through a plurality of dielectric insulating layers revealing a first etching resistant layer overlying a conductive area; a plurality of dielectric insulating layers sequentially stacked to have alternating etching rates to a preferential etching process; subjecting the anisotropically etched opening to the preferential etching process whereby the sidewalls of the anisotropically etched opening are preferentially etched to produce etched dielectric insulating layers to form roughened sidewall surfaces; anisotropically etching through the etching resistant layer to reveal the conductive area; and, filling the anisotropically etched opening with a metal to form a metal filled semiconductor feature.
    Type: Grant
    Filed: April 1, 2003
    Date of Patent: July 24, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Chen Huang, Chao-Chen Chen
  • Patent number: 7245014
    Abstract: A semiconductor light emitting apparatus includes a non-conductive sub mount; a metal layer provided on the sub mount; a solder material member provided on the metal layer; and a semiconductor light emitting device die-bonded to the metal layer by the solder material member. A surface of the metal layer includes a solder material attachment area having the solder material member attached thereto, and a metal layer exposed area where the surface of the metal layer is exposed. The solder material attachment area is electrically connected to the metal layer exposed area. The solder material attachment area is larger than a die-bond area of the semiconductor light emitting device. The metal layer exposed area has a metal layer removed area therein where the sub mount is exposed.
    Type: Grant
    Filed: May 19, 2004
    Date of Patent: July 17, 2007
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Kenichi Kurita, Nobumasa Kaneko
  • Patent number: 7239028
    Abstract: A semiconductor device includes a semiconductor chip, electrodes pads, an insulating layer, first and second conductive patterns and external terminals. The electrode pads are formed on a first area of a main surface of the semiconductor chip. The insulating layer is formed on a second area of the semiconductor chip so as to expose the electrode pads. The first conductive pattern provides a ground potential and is formed on the insulating layer. The second conductive pattern transfers a signal. The second conductive pattern is formed on the insulating layer and located to partially surround the first conductive pattern. The external terminals are formed on the first and second patterns at the second area.
    Type: Grant
    Filed: September 23, 2005
    Date of Patent: July 3, 2007
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Noritaka Anzai
  • Patent number: 7235883
    Abstract: A layered wiring line of silver or silver alloy includes a silver or silver alloy conductor layer including silver or silver alloy; and a protective conductor layer layered on and covering the silver or silver alloy conductor layer. A method for forming the layered wiring line includes steps of: layering the silver or silver alloy conductor layer and the protective conductor layer on a substrate in turn; making the protective conductor layer in contact with a liquid etchant common to the silver or silver alloy conductor layer and the protective conductor layer by a predetermined pattern. The protective conductor layer has a thickness satisfying a relationship in that a ratio of (the protective conductor layer's thickness)/(the silver or silver alloy conductor layer's thickness) is less than that of (a solution velocity of the protective conductor layer in the liquid etchant)/(a solution velocity of the silver or silver alloy conductor layer in the liquid etchant).
    Type: Grant
    Filed: July 19, 2002
    Date of Patent: June 26, 2007
    Assignee: Pioneer Corporation
    Inventors: Kenichi Nagayama, Akira Sugimoto, Satoshi Miyaguchi
  • Patent number: 7230320
    Abstract: In an electronic circuit device including a substrate including a front surface on which an electronic circuit element is mounted and a reverse surface opposite to the front surface in a thickness direction of the substrate, an electrically conductive terminal member electrically connected to the electronic circuit element, a lead frame extending perpendicular to the thickness direction to face the reverse surface in the thickness direction, and a sealing resin covering at least partially the electronic circuit element, substrate and lead frame while at least a part of the electrically conductive terminal member is prevented from being covered by the sealing resin, the substrate extends to project outward from an end of the lead frame in a transverse direction perpendicular to the thickness direction while the end of the lead frame is covered by the sealing resin.
    Type: Grant
    Filed: July 29, 2003
    Date of Patent: June 12, 2007
    Assignee: Hitachi, Ltd.
    Inventors: Hiroaki Doi, Noriyoshi Urushiwara, Akira Matsushita