Abstract: Substrate stand-offs for use with semiconductor devices are provided. Active pillars and dummy pillars are formed on a first substrate such that the dummy pillars may have a height greater than a height of the active pillars. The dummy pillars act as stand-offs when joining the first substrate to a second substrate, thereby creating greater uniformity. In an embodiment, the dummy pillars may be formed simultaneously as the active pillars by forming a patterned mask having openings with a smaller width for the dummy pillars than for the active pillars. When an electro-plating process of the like is used to form the dummy and active pillars, the smaller width of the dummy pillar openings in the patterned mask causes the dummy pillars to have a greater height than the active pillars.

Abstract: A bonding pad design is disclosed that includes one or more pad groups on a semiconductor device. Each pad group is made up of two or more bonding pads that have an alternating orientation, such that adjacent bonding pads have their bond ball on opposite sides in relation to the adjacent bonding pad.

Abstract: A printed wiring board is configured to be connected to an organic substrate in a state where a semiconductor chip is mounted thereon. A plurality of first layers are formed of a material having the same coefficient of thermal expansion as the semiconductor chip. A plurality of second layers are formed of a material having the same coefficient of thermal expansion as the organic substrate. The first layers have different thicknesses from each other and the second layers have different thicknesses from each other. The first layers and the second layers form a lamination by being laminated alternately one on another. The thicknesses of the first layers decrease from a side where the semiconductor chip is mounted toward a side where the organic substrate is connected. The thicknesses of the second layers decrease from the side where the organic substrate is connected toward the side where the semiconductor chip is mounted.

Abstract: A structure device having a multilayer interconnection structure; such a structure includes at least a first interconnection layer and a second interconnection layer; the first interconnection layer includes a first conductor pattern embedded in a first interlayer insulation film and a second conductor pattern embedded in said first interlayer insulation film; the second interconnection layer includes a third conductor pattern embedded in a second interlayer insulation film; the third conductor pattern being coupled to an extension part in a part thereof so as to extend in said second interlayer insulation film in a plane of said second interlayer insulation film; the extension part of said third conductor pattern, said first via-plug and said second viaplug forming help form a dual damascene structure.

Abstract: A semiconductor device including an intermediate insulating film formed over a plurality of first conductors over a semiconductor substrate. Contact holes are formed in the intermediate insulating film over the first conductors, and contact plugs are buried in the contact holes, respectively. A plurality of second conductors are formed over the plurality of contact plugs on the intermediate insulating film, respectively, and are electrically connected to the plurality of first conductors via the contact plugs. In certain regions of the semiconductor device, the contact plugs may terminate within the intermediate insulating film, thereby electrically insulating the second conductors from the first conductors.

Abstract: A semiconductor device, a semiconductor module, an electronic apparatus and methods of fabricating and manufacturing the same are provided. The semiconductor device includes a lower interconnection formed on a substrate, a plurality of control patterns formed on the lower interconnection, a plurality of lower contact plug patterns formed on the control patterns, a plurality of storage patterns formed on the lower contact plug patterns, a plurality of upper electrodes formed on the storage patterns, and a plurality of upper interconnections formed on the upper electrodes. The lower contact plug patterns each include at least two contact holes having different sizes, a plurality of sidewall patterns formed on inner sidewalls of the two contact holes and wherein the sidewall patterns have different thicknesses from one another.

Abstract: A semiconductor device and systems and methods for forming a semiconductor device are provided. A method of manufacturing a semiconductor device can include patterning a first conductive element on a first layer of a semiconductor device, patterning a second conductive element on a second layer of a semiconductor device, and forming an electrical connection in a third layer of the semiconductor device at a predetermined location between the first and the second conductive elements, the connection between the first and the second conducting elements having a geometry that is larger in at least one dimension relative to the corresponding dimension of the second conductive element at the predetermined location.

Abstract: A semiconductor device includes: a gate electrode formed above a semiconductor region; a drain region and a source region formed in portions of the semiconductor region located below sides of the gate electrode in a gate length direction, respectively; a plurality of drain contacts formed on the drain region to be spaced apart in a gate width direction of the gate electrode; and a plurality of source contacts formed on the source region to be spaced apart in the gate width direction of the gate electrode. The intervals between the drain contacts are greater than the intervals between the source contacts.

Abstract: A layout structure disposed on the substrate of the liquid crystal display (LCD) for chip coupling is provided. The first and second orientations that are substantially perpendicular to the first orientation can be defined on the substrate. The layout structure includes a plurality of lines, which extend along the second orientation, and a plurality of conductive pads that are respectively disposed on the lines. The conductive pads are distributed along the first orientation and staggered along the second orientation. Each line can shift away from the adjacent conductive pad on the first orientation. Thus, the LCD chip has a better conductivity and a thinner dimension under the precision of the conventional machines.

Abstract: Provided may be a semiconductor memory device and a method of forming the semiconductor memory device. The memory device of example embodiments may include a bit line structure including a bit line on a semiconductor substrate, and a buried contact plug structure including a buried contact pad and a buried contact plug that extends in a lower portion of the bit line from one side of the bit line and connected to the buried contact pad. A width of the buried contact plug near a top surface of the buried contact pad may be greater than a width of the buried contact plug adjacent to the bit line.

Abstract: A nonvolatile semiconductor memory device comprises a semiconductor substrate; a cell array block formed on the semiconductor substrate and including plural stacked cell array layers each with a plurality of first lines, a plurality of second lines crossing the plurality of first lines, and memory cells connected at intersections of the first and second lines between both lines; and a plurality of via-holes extending in the stacked direction of the cell array layers to individually connect the first or second line in the each cell array layer to the semiconductor substrate. The via-holes are formed continuously through the plural cell array layers, and multiple via-holes having equal lower end positions and upper end positions are connected to the first or second lines indifferent cell array layers.

Abstract: Intermediate structures are provided that are formed during the manufacture of a memory device. These structures include first and second spaced apart gate patterns on a semiconductor substrate. A source/drain region is provided in the semiconductor substrate between the first and second gate patterns. An etch stop layer is provided on first and second sidewalls of the first gate pattern. The first and second sidewalls face each other to define a gap region between the etch stop layer on the first sidewall and the etch stop layer on the second sidewall. A dielectric layer is provided in the gap region. Finally, a preliminary contact hole is provided in the dielectric layer.

Abstract: A wiring structure may include a first wiring having a first width that extends in a first direction, and a second wiring intersecting the first wiring, the second wiring extending in a second direction and having a second width that is equal to or less than the first width. Furthermore, the first wiring may have a third width that is smaller than the first width and the second wiring may have a fourth width that is smaller than the second width. Portions of the first and second wirings having the third and fourth widths may extend from an intersecting region in which the first wiring and the second wiring intersect each other.

Abstract: In a positional offset measurement pattern unit formed in an insulating layer, a first interconnection is formed in the insulating layer. A via-plug is formed in the insulating layer so as to be electrically connected to the first interconnection. A second interconnection is formed in the insulating layer at substantially the same level as the first interconnection so as to be spaced from the first interconnection by a given distance. A voltage is applied between the first and second interconnections to measure a relative positional offset amount between the via-plug and the second interconnection.

Abstract: An integrated circuit described herein includes a substrate and a plurality of lines overlying the substrate. The lines define a plurality of first trenches and a plurality of second trenches. The plurality of first trenches extend into the substrate a distance different than that of the plurality of second trenches. Adjacent pairs of lines are separated by a first trench in the plurality of first trenches, and each pair of lines comprises a first line and a second line defining a corresponding second trench in the plurality of second trenches.

Abstract: A seal ring is provided between a region where a circuit is formed on a semiconductor substrate and a dicing region. The seal ring has a portion where sealing layers of which the cross sectional form is in T-shape are layered and a portion where sealing layers of which the cross sectional form is rectangular are layered.

Abstract: A semiconductor device may include a substrate and a dielectric layer may be formed on the substrate. A multi-layered interconnection structure may be embedded in the dielectric layer. A plurality of bonding pads, which may be connected to an uppermost interconnection layer of the multi-layered interconnection structure, may be spaced apart in a first direction. A passivation layer may have a plurality of bonding pad openings that may be defined by a plurality of slits and respectively expose the bonding pads. The slits may overlap isolations of the bonding pads. Each of the slits may have an edge width that may be larger than a center width thereof.

Abstract: Chip assemblies are disclosed that include a semiconductor substrate, multiple devices in and on the semiconductor substrate, a first metallization structure over the semiconductor substrate, and a passivation layer over the first metallization structure. First and second openings in the passivation layer expose first and second contact pads of the first metallization structure. A first metal post is positioned over the passivation layer and over the first contact pad. A second metal post is positioned over the passivation layer and over the second contact pad. A polymer layer is positioned over the passivation layer and encloses the first and second metal posts. A second metallization structure is positioned on the polymer layer, on the top surface of the first metal post and on the top surface of second metal post. The second metallization structure includes an electroplated metal. Related fabrication methods are also described.

Abstract: Method of fabricating thin-film transistors in which contact with connecting electrodes becomes reliable. When contact holes are formed, the bottom insulating layer is subjected to a wet etching process, thus producing undercuttings inside the contact holes. In order to remove the undercuttings, a light etching process is carried out to widen the contact holes. Thus, tapering section are obtained, and the covering of connection wiring is improved.

Abstract: A memory device includes a number of memory cells and a bit line structure coupled to a group of the memory cells. The bit line structure includes an upper portion having a first width, and a lower portion having a second width, where the first width is less than the second width.

Abstract: Methods for fabrication of high aspect ratio micropillars and nanopillars are described. Use of alumina as an etch mask for the fabrication methods is also described. The resulting micropillars and nanopillars are analyzed and a characterization of the etch mask is provided.

Abstract: A semiconductor package includes a substrate and a semiconductor device. The semiconductor device includes a body having a center, a layer disposed adjacent to the body, and a plurality of conductive pillars configured to electrically connect the semiconductor device to the substrate. The layer defines a plurality of openings. Each of the plurality of conductive pillars extends at least partially through a corresponding one of the plurality of openings. An offset between a first central axis of the each of the plurality of conductive pillars and a second central axis of the corresponding one of the plurality of openings varies with distance between the first central axis and the center of the body. The second central axis of the corresponding one of the plurality of openings is disposed between the first central axis of the each of the plurality of conductive pillars and the center of the body.

Abstract: A semiconductor device includes a first interconnect 31; a second interconnect 32 which is formed in a different interconnect layer from that of the first interconnect 31, and which has a wider line width than that of the first interconnect 31; and first and second plugs 51 and 52 which are formed in a region where the first and second interconnects 31 and 32 extend in the same direction so as to overlap one above the other, and which electrically connect the first and second interconnects 31 and 32. The first plug 51 has a larger base area than that of the second plug 52, and is formed on an end side of the first interconnect 31 with respect to the second plug 52.

Abstract: An interlevel dielectric layer, such as a silicon oxide layer, is selectively etched using a plasma etch chemistry including a silicon species and a halide species and also preferably a carbon species and an oxygen species. The silicon species can be generated from a silicon compound, such as SixMyHz, where “Si” is silicon, “M” is one or more halogens, “H” is hydrogen and x?1, y?0 and z?0. The carbon species can be generated from a carbon compound, such as C?M?H?, where “C” is carbon, “M” is one or more halogens, “H” is hydrogen, and ??1, ??0 and ??0. The oxygen species can be generated from an oxygen compound, such as O2, which can react with carbon to form a volatile compound.

Abstract: An integrated circuit as described herein includes an upper interconnect level including a continuous upper interconnect area, the continuous upper interconnect area including a plurality of upper contact openings. The integrated circuit further includes a lower interconnect level including a continuous lower interconnect area, the continuous lower interconnect area including a plurality of lower contact openings. First contacts extend through the lower contact openings to the upper interconnect area and second contact openings extend through the upper contact openings to the lower interconnect area.

Abstract: A semiconductor device includes: a semiconductor substrate 1; a through electrode 7 extending through the semiconductor substrate 1; a diffusion layer 24 formed in a region of an upper portion of the semiconductor substrate 1 located on a side of the through electrode 7; and a diffusion layer 22 formed in an upper portion of the diffusion layer 24. A portion of the side surface of the through electrode 7 facing the diffusion layer 24 is curved, and a portion of the surface of the diffusion layer 24 facing the through electrode 7 is curved.

Abstract: A semiconductor device comprises a buffer layer 16 of an i-InAlAs layer formed over an SI-InP substrate 14, insulating films 24, 36 of BCB formed over the buffer layer 16, and a coplanar interconnection including a signal line 52 and ground lines 54 formed over the insulating film 36, a cavity 46 is formed in the SI-InP substrate 14, the buffer layer 16 and the insulating film below the signal line 52, and pillar-shaped supports in the cavity 46 support the insulating films 34, 36 which are the ceiling of the cavity 46.

Abstract: A circuit device includes a dielectric substrate including a first face and a second face opposite side of the first face; a coplanar line including a first line, a second line and ground electrodes, the first line and the second line being decupled mutually, the ground electrodes formed around the first line and the second line, the first line, the second line and the ground electrodes formed on the first face of the dielectric substrate; a capacitor for connecting the first line and the second line; a termination resistor connecting the second line; a microstrip line formed on the second face of the dielectric substrate; and a conducting portion formed in the dielectric substrate and electrically connecting the first line and the microstrip line.

Abstract: A semiconductor device includes a first plug formed on a semiconductor substrate and exposed on side and upper surfaces of an upper part thereof and a second plug formed on the first plug to contact the exposed side and upper surfaces of the upper part of the first plug.

Abstract: An integrated circuit includes a number of probe pads arranged in a staggered manner in a core region of the integrated circuit and a number of bond pads in an Input/Output (I/O) region surrounding the core region. The core region includes logic circuitry therein, and the I/O region is configured to enable the core region to communicate with one or more external circuit(s) through the number of bond pads. The integrated circuit also includes a die metal interconnect separating a bond pad area in the I/O region from a probe pad area in the core region. A dimension of the die metal interconnect and/or a position of the die metal interconnect between the probe pad area and the bond pad area is variable.

Abstract: Embodiments of the present invention relate to the use of stamping to form features on a lead frame of a semiconductor device package. In one embodiment, portions of the lead frame such as pins are moved out of the horizontal plane of a diepad by stamping. In certain embodiments, indentations or a complex cross-sectional profile, such as chamfered, may be imparted to portions of the pins and/or diepad by stamping. The complexity offered by such a stamped cross-sectional profile serves to enhance mechanical interlocking of the lead frame within the plastic molding of the package body. Other techniques such as selective electroplating and/or formation of a brown oxide guard band to limit spreading of adhesive material during die attach, may be employed alone or in combination to facilitate fabrication of a package having such stamped features.

Abstract: An integrated circuit described herein includes a substrate and a plurality of lines overlying the substrate. The lines define a plurality of first trenches and a plurality of second trenches. The plurality of first trenches extend into the substrate a distance different than that of the plurality of second trenches. Adjacent pairs of lines are separated by a first trench in the plurality of first trenches, and each pair of lines comprises a first line and a second line defining a corresponding second trench in the plurality of second trenches.

Abstract: The disclosure provides a chip package structure and method for fabricating the same. The chip package structure includes at least one chip having at least one through via. At least one stress buffering structure is disposed in the through via. The stress buffering structure includes a first gasket and a second gasket. A supporting pillar has two terminals respectively connected to the first gasket and the second gasket. The cross-sectional area of the supporting pillar is smaller than areas of the first gasket and the second gasket. A buffering layer is sandwiched between the first gasket and the second gasket, surrounding a sidewall of the supporting pillar. An insulating layer is disposed on the through via, surrounding a sidewall of the stress buffering structure.

Abstract: A higher aspect ratio for upper level metal interconnects is described for use in higher frequency circuits. Because the skin effect reduces the effective cross-sectional area of conductors at higher frequencies, various approaches are described to reduce the effective RC delay in interconnects.

Abstract: Provided is a semiconductor device having a pad on a semiconductor chip, a first passivation film formed over the semiconductor chip and having an opening portion on the pad of a probe region and a coupling region, a second passivation film formed over the pad and the first passivation film and having an opening portion on the pad of the coupling region, and a rewiring layer formed over the coupling region and the second passivation film and electrically coupled to the pad. The pad of the probe region placed on the periphery side of the semiconductor chip relative to the coupling region has a probe mark and the rewiring layer extends from the coupling region to the center side of the semiconductor chip. The present invention provides a technology capable of achieving size reduction, particularly pitch narrowing, of a semiconductor device.

Abstract: An electronic package structure and method use a conductive strip to bond die-to-die, die-to-lead, chip carrier-to-lead, or lead-to-lead. A conductive strip may carry greater current than a bonding wire, and thus may replace several bonding wires. The bonding of the conductive strip may be carried out by an SMT process, and thus requires lower cost than wire bonding processes. A conductive strip may be bonded to more than two dice or leads to save more bonding wires. A conductive strip is stronger than a bonding wire, and thus lowers the possibility of being broken.

Abstract: Interconnect structures and methods are disclosed. In one embodiment, an interconnect structure includes a via extendable through a workpiece from a first side of the workpiece to a second side of the workpiece. The via is partially filled with a conductive material and has sidewalls. The interconnect structure includes a contact coupled to the conductive material in the via proximate the first side of the workpiece. The conductive material in the via comprises a recessed region comprising a landing zone proximate the second side of the workpiece.

Abstract: When an integrated circuit having an interlayer insulation film built up on top of a wiring layer is subjected to a heat treatment, it is unlikely that a void formed in the interlayer insulation film will rupture in a portion wherein are connected a narrow gap between wirings and a wide open part contiguous therewith. A corner part of a wiring positioned at a portion where a gap and an open part are connected is chamfered, and an end part of the gap is shaped so as to widen toward the open part. Providing the widening end part in the gap thus mitigates any discontinuity in the built up interlayer insulation film between the gap and the open part. As a result, the interlayer insulation film does not readily seal off an end of a void formed in the gap.

Abstract: A semiconductor device production method including: the step of forming a stopper mask layer of a first metal on a semiconductor substrate, the stopper mask layer having an opening at a predetermined position thereof; the metal supplying step of supplying a second metal into the opening of the stopper mask layer to form a projection electrode of the second metal; and removing the stopper mask layer after the metal supplying step.

Abstract: A longest wiring and a shortest wiring alongside each other among the plurality of wirings are placed. Then, a longest wiring from among remaining wires which have not being placed yet, alongside an outside of a space surrounded by the wirings already placed and on a side of a shorter wiring of the wrings placed at outermost ends are placed. A shortest wiring from among remaining wires which have not placed yet, alongside an outside of a space surrounded by the wirings already placed and on a side of a longer wiring of the wirings placed at outermost ends is placed. These two processes are repeated.

Abstract: A pad structure and passivation scheme which reduces or eliminates IMC cracking in post wire bonded dies during Cu/Low-k BEOL processing. A thick 120 nm barrier layer can be provided between a 1.2 ?m aluminum layer and copper. Another possibility is to effectively split up the barrier layer, where the aluminum layer is disposed between the two barrier layers. The barrier layers may be 60 nm while the aluminum layer which is disposed between the barrier layers may be 0.6 ?m. Another possibility is provide an extra 0.6 ?m aluminum layer on the top barrier layer. Still another possibility is to provide an extra barrier layer on the top-most aluminum layer, such that a top barrier layer of 60 nm is provided on a 0.6 ?m aluminum layer, followed by another harrier layer of 60 nm, another aluminum layer of 0.6 ?m and another barrier layer of 60 nm.

Abstract: A semiconductor device includes a semiconductor constituent having a semiconductor substrate and a plurality of electrodes for external connection provided under the semiconductor substrate. An under-layer insulating film is provided under and around the semiconductor constituent. A plurality of under-layer wires are provided under the under-layer insulating film and electrically connected to the electrodes for external connection of the semiconductor constituent. An insulating layer is provided around the semiconductor constituent and on the under-layer insulating film. A frame-like insulating substrate is embedded in an upper surface of the insulating layer and positioned around the semiconductor constituent. A plurality of upper-layer wires are provided on the insulating substrate. A base plate on which the semiconductor constituent and the insulating layer are mounted is removed.

Abstract: A through-hole interconnection structure for a semiconductor wafer, in which: the each wafer includes at least a first wafer and a second wafer electrically connected to the first wafer; an electrical signal connecting section of the second wafer is provided to protrude from a bonding surface of the second wafer, the bonding surface being bonded with the first wafer; and the electrical signal connecting section has a cross section with a curved line or two or more straight lines extending in different directions when the second wafer is seen along a cross section parallel to the bonding surface.

Abstract: A self-aligned contact includes a lower contact disposed in a dielectric layer of a substrate and an upper contact disposed in the dielectric layer and directly on the lower contact, and electrically connected to the lower contact. The profile of the upper contact and the lower contact is zigzag.

Abstract: A semiconductor device including a semiconductor substrate; a first insulating film formed on the semiconductor substrate including a contact hole opened therethrough; a lower plug filled in the contact hole having a recess defined in an upper portion thereof; a second insulating film including a via hole opened therethrough; a third insulating film formed on an inner surface of the via hole and extending in a predetermined depth from an upper edge of the via hole so as to reduce a cross sectional area thereof; and an upper plug filled in the via hole that has a protrusion formed on a lower portion thereof that conforms to the recess to electrically connect the upper and the lower plug.

Abstract: An electrical fuse comprises: an interconnect to be cut; and a first terminal and a second terminal which are respectively provided at both ends of the interconnect to be cut. The interconnect to be cut comprises: a first orientation film which contains copper as a main component and is oriented in a (111) plane; and a second orientation film which contains copper as a main component and is oriented in a (511) plane. The second orientation film is provided inside the first orientation film over a width direction of the first orientation film, which is perpendicular to a direction from the first terminal toward the second terminal, so as to partition the first orientation film. Accordingly, it becomes possible to securely cut the electrical fuse whose constituent material is copper, and moreover, to maintain a satisfactory cut state of the electrical fuse after the cutting.

Abstract: A metal barrier is realized on top of a metal portion of a semiconductor product, by forming a metal layer on the surface of the metal portion, with this metal layer comprising a cobalt-based metal material. Then, after an optional deoxidation step, a silicidation step and a nitridation step of the cobalt-based metal material of the metal layer are performed. The antidiffusion properties of copper atoms (for example) and the antioxidation properties of the metal barrier are improved.

Abstract: There is provided a multilayer ceramic substrate including a conductive via of a dual-layer structure capable of preventing loss in electrical conductivity and signal. The multilayer ceramic substrate includes: a plurality of dielectric layers; and a circuit pattern part formed on at least a portion of the dielectric layers, the circuit pattern part including at least one conductive via and conductive pattern, wherein the at least one conductive via comprises an outer peripheral portion and an inner peripheral portion, the outer peripheral portion formed along an inner wall of a via hole extending through the dielectric layers and formed of a first conductive material containing a metal, and the inner peripheral portion filled in the outer peripheral portion and formed of a second conductive material having a shrinkage initiation temperature higher than a shrinkage initiation temperature of the first conductive material.

Abstract: A semiconductor device comprises an electrical contact designed to reduce a contact resistance. The electrical contact has a size that varies according to a length of a region where the contact is to be formed.

Abstract: A power semiconductor module includes: an interconnect layer including an electrical conductor patterned on a dielectric layer, the electrical conductor including a power coupling portion having a thickness sufficient to carry power currents and a control coupling portion having a thickness thinner than that of the power coupling portion; and a semiconductor power device physically coupled to the interconnect layer and electrically coupled to the power coupling portion of the electrical conductor.