With Passive Components, (e.g., Polysilicon Resistors) Patents (Class 257/904)
  • Patent number: 7064398
    Abstract: In a full CMOS SRAM having a lateral type cell (memory cell having three partitioned wells arranged side by side in a word line extending direction and longer in the word line direction than in the bit line direction) including first and second driver MOS transistors, first and second load MOS transistors and first and second access MOS transistors, two capacitors are arranged spaced apart from each other on embedded interconnections to be storage nodes, with lower and upper cell plates cross-coupled to each other.
    Type: Grant
    Filed: December 21, 2004
    Date of Patent: June 20, 2006
    Assignee: Renesas Technology Corp.
    Inventor: Takahiro Yokoyama
  • Patent number: 7061128
    Abstract: A semiconductor device according to the present invention includes: a semiconductor substrate including an active region and an isolation region; a gate electrode formed on the active region with an oxide film interposed therebetween; and a set of impurity regions formed on both sides of the gate electrode. A surface of the active region is entirely rounded so as to be inclined downward toward the isolation region. This rounded shape can be formed by forming an isolation oxide film such that a bird's beak portion is connected on the active region.
    Type: Grant
    Filed: July 23, 2001
    Date of Patent: June 13, 2006
    Assignee: Renesas Technology Corp.
    Inventor: Yukio Maki
  • Patent number: 7045864
    Abstract: A semiconductor integrated circuit device, e.g., a memory cell of an SRAM, is formed of a pair of inverters having their input and output points connected in a crisscross manner and being formed of drive n-channel MISFETs and load p-channel MISFETs. The n-channel MISFETs and p-channel MISFETs have their back gates supplied with power supply voltage and a ground voltage, respectively. The MISFETs are formed with a metal silicide layer on the gate electrodes G and source regions (hatched areas) and without the formation of a metal silicide layer on the drain regions, respectively, whereby the leakage current of the MISFETs due to a voltage difference between the drain regions and wells can be reduced, and, thus, the power consumption can be reduced.
    Type: Grant
    Filed: June 14, 2002
    Date of Patent: May 16, 2006
    Assignees: Renesas Technology Corp., Hitachi ULSI Systems Co., Ltd.
    Inventors: Kota Funayama, Yasuko Yoshida, Masaru Nakamichi, Akio Nishida
  • Patent number: 7042107
    Abstract: A memory device includes a semiconductor substrate, a first gate insulator on a first portion of a semiconductor substrate, a storage node on the first gate insulator, a tunnel junction barrier on the storage node and a data electrode on the layer tunnel junction barrier. The device further includes a second gate insulator layer on a sidewall of the tunnel junction barrier, a third gate insulator on a second portion of the substrate adjacent the tunnel junction barrier and a gate electrode on the second gate insulator and the third gate insulator. First and second impurity-doped regions are disposed in the substrate and are coupled by a channel through the first and second portions of the substrate. Fabrication of such a device is also describes.
    Type: Grant
    Filed: March 15, 2004
    Date of Patent: May 9, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Seung-Jae Baik
  • Patent number: 7038297
    Abstract: Ion implanted resistors formed in the body of a crystalline silicon substrate. The resistors have a different conductivity type from that of the silicon substrate. The sheet resistance and temperature dependence of the resistor layer is determined by the dose of the implant. Temperature variation can be optimized to be less than 2% over the temperature range ?40 C to +85 C. Furthermore, the temperature variation at room temperature (˜25 C) can be reduced to nearly zero.
    Type: Grant
    Filed: January 21, 2004
    Date of Patent: May 2, 2006
    Assignee: Winbond Electronics Corporation
    Inventors: Paul Vande Voorde, Chun-Mai Liu
  • Patent number: 7026692
    Abstract: A p-channel non-volatile memory (NVM) transistor is programmed by shifting the threshold voltage of the transistor. The threshold voltage is shifted by introducing a programming current to the gate electrode of the transistor, and simultaneously introducing a negative bias to the transistor. The threshold voltage of the p-channel NVM transistor is shifted in response to the negative bias condition and the heat generated by the programming current. The high temperature accelerates the threshold voltage shift. The threshold voltage shift is accompanied by an agglomeration of material in the gate electrode. The agglomeration of material in the gate electrode is an indication of the high temperature reached during programming. The threshold voltage shift of the p-channel NVM transistor is permanent.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: April 11, 2006
    Assignee: Xilinx, Inc.
    Inventor: Kevin T. Look
  • Patent number: 7022579
    Abstract: A method of filling vias for a PCRAM cell with a metal is described. A PCRAM intermediate structure including a substrate, a first conductor, and an insulator through which a via extends has a metallic material formed within the via and on a surface of the insulator. The metallic material may be deposited on the surface and within the via. A hard mask of a flowable oxide is deposited over the metallic material in the via to protect the metallic material in the via. A subsequent dry sputter etch removes the metallic material from the surface of the insulator and a portion of the hard mask. After complete removal of the hard mask, a glass material is recessed over the metallic material in the via. Then, a layer of a metal-containing material is formed over the glass material. Finally, a second conductor is formed on the surface of the insulator.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: April 4, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Li Li, Jiutao Li
  • Patent number: 7005691
    Abstract: A magnetoresistance element, wherein a first electric conductor is so formed as to contact almost the center of the surface opposite to a non-magnetic layer of a first ferromagnetic layer so formed as to sandwich, along with a second ferromagnetic layer, the non-magnetic layer, and an insulator so formed as to cover at least the side surface of the first ferromagnetic layer and the non-magnetic layer is formed so as to cover the peripheral edge of the surface of the first ferromagnetic layer, whereby it is possible to prevent a leakage current from flowing from the first electric conductor to a second electric conductor along the side surfaces of the first ferromagnetic layer, the non-magnetic layer and the second ferromagnetic layer, and to make uniform a bias current running from the first electric conductor to the second electric conductor to thereby restrict variations in magnetoresistance characteristics such as MR value and junction resistance.
    Type: Grant
    Filed: June 4, 2002
    Date of Patent: February 28, 2006
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Akihiro Odagawa, Masayoshi Hiramoto, Nozomu Matsukawa, Masahiro Deguchi
  • Patent number: 7002258
    Abstract: A Static Random Access Memory (SRAM) dual port memory with an improved core cell design having internally matched capacitances and decreased bit line capacitance is disclosed. The core cell is fabricated on a substrate divided into three approximately equal columns of different substrate materials. In a preferred embodiment, the memory cell is fabricated on a central p-type column that in turn is sandwiched between two n-type columns. The three-column substrate architecture permits reduced bit line height, with an accompanying reduction in bit line capacitance, which increases the speed at which the core cell can operate. The architecture also permits separating the core cell's bitline and complement bitline, reducing capacitive coupling between these lines and increasing the core cell's operating speed. The architecture further permits better matching of internal node capacitances.
    Type: Grant
    Filed: December 3, 2003
    Date of Patent: February 21, 2006
    Assignee: ARM Physical IP, Inc.
    Inventors: Jim Mali, Betina Hold
  • Patent number: 6998306
    Abstract: The present invention discloses a semiconductor memory device having a multiple tunnel junction pattern and a method of forming the same. The semiconductor memory device includes a unit cell composed of planar transistor and vertical transistors. The planar transistor includes first and second conductive regions formed at predetermined regions of a semiconductor substrate and a storage node stacked on a channel region therebetween. The vertical transistor includes a storage node, a multiple tunnel junction pattern stacked thereon, a data line stacked thereon, and a word line for covering both sidewalls of the storage node and the multiple tunnel junction pattern. Width of the multiple tunnel junction pattern is narrower than the storage node and data lines. Semiconductor layers and tunnel oxide layers are alternately and repeatedly stacked and anisotropically etched to form the multiple tunnel junction pattern of narrow width while forming the data line and the storage node.
    Type: Grant
    Filed: December 30, 2003
    Date of Patent: February 14, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Woo-Sik Kim, Ji-Hye Yi
  • Patent number: 6984859
    Abstract: An access transistor, provided between a storage node in a memory cell and a bit line is formed of a P channel MOS transistor including P type first and second impurity regions formed in an N type well and a gate electrode. Buried interconnection is formed of metal having high melting point such as tungsten and provided stacked on a driver transistor formed on a main surface of a P type well and the access transistor. A polysilicon film forming a P channel TFT as a load element is formed on the buried interconnection, which is planarized, with an interlayer insulating film interposed.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: January 10, 2006
    Assignee: Renesas Technology Corp.
    Inventor: Motoi Ashida
  • Patent number: 6930344
    Abstract: A nonvolatile semiconductor memory device includes a substrate, a plurality of transistors formed on the substrate to constitute a latch, a plate line, and a pair of capacitors each including a lower electrode, a ferroelectric film, and an upper electrode, the pair of capacitors being provided in a layer situated above the substrate and below a metal wiring layer in which the plate line is formed.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: August 16, 2005
    Assignee: Fujitsu Limited
    Inventors: Wataru Yokozeki, Akio Itoh
  • Patent number: 6924560
    Abstract: A method and system is disclosed for an SRAM device cell having at least one device of a first semiconductor type and at lease one device of a second semiconductor type. The cell has a first device of the first type constructed as a part of a first FinFET having one or more devices of the first type, a first device of the second type whose poly region is an extension of a poly region of the first device of the first type with no contact needed to connect therebetween, wherein the two devices are constructed using a silicon-on-insulator (SOI) technology so that they are separated by an insulator region therebetween so as to minimize the distance between the two devices.
    Type: Grant
    Filed: August 8, 2003
    Date of Patent: August 2, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ping-Wei Wang, Chang-Ta Yang
  • Patent number: 6921959
    Abstract: A semiconductor device includes a semiconductor substrate, an insulating layer, an inductor, a guard ring and a potential-applying line. The insulating layer is formed on the semiconductor substrate. The inductor is formed on the insulating layer. The guard ring is formed in the semiconductor substrate, surrounding the inductor and being a closed ring composed of waving segments connected, end to end. The potential-applying line applies a predetermined potential to the guard ring.
    Type: Grant
    Filed: November 25, 2003
    Date of Patent: July 26, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kentaro Watanabe
  • Patent number: 6864506
    Abstract: SRAM cell and method for fabricating the same, the SRAM cell including a first local interconnection connected between first terminals of the first access transistor, the first load transistor, and the first drive transistor, and gates of the second load transistor, and the second drive transistor electrically, and a second local interconnection connected between first terminals of the second access transistor, the second load transistor, and the second drive transistor, and gates of the first load transistor, and the first drive transistor electrically, thereby reducing an area of the SRAM cell.
    Type: Grant
    Filed: December 18, 2002
    Date of Patent: March 8, 2005
    Assignee: Hynix Semiconductor Inc.
    Inventors: Sung Jin Kim, Sung Wook Choi
  • Publication number: 20040245577
    Abstract: The invention includes SRAM constructions comprising at least one transistor device having an active region extending into a crystalline layer comprising Si/Ge. A majority of the active region within the crystalline layer is within a single crystal of the crystalline layer, and in particular aspects an entirety of the active region within the crystalline layer is within a single crystal of the crystalline layer. The SRAM constructions can be formed in semiconductor on insulator assemblies, and such assemblies can be supported by a diverse range of substrates, including, for example, glass, semiconductor substrates, metal, insulative materials, and plastics. The invention also includes electronic systems comprising SRAM constructions.
    Type: Application
    Filed: June 3, 2003
    Publication date: December 9, 2004
    Inventor: Arup Bhattacharyya
  • Patent number: 6815839
    Abstract: The semiconductor memory device includes two PMOS transistors that make the SRAM memory cell. The gate insulating films of these PMOS transistors are formed using a material that has a high permittivity. As a result, the capacitance of memory nodes is increased, and the probability of soft errors is lowered.
    Type: Grant
    Filed: September 24, 2003
    Date of Patent: November 9, 2004
    Assignee: Renesas Technology Corp.
    Inventors: Koji Nii, Motoshige Igarashi
  • Patent number: 6812574
    Abstract: A semiconductor storage device includes a memory cell array, a plurality of word lines, a plurality of bit lines, a first gate wiring element 3a, 3b, a second gate wiring element 3c, 3d, a first connector 5a, 5b, and a second connector 5c, 5d. Each memory cell 10 has first and second sets having a driver transistor 11, a load transistor 12, and an access transistor 13. The word lines are arranged in parallel to each other along a first direction. The bit lines are arranged in parallel to each other along a second direction perpendicular to the first direction. The first gate wiring element comprises a gate electrode of the first driver transistor and the first load transistor, and has a rectangular shape having straight line on opposite sides. The second gate wiring element comprises a gate electrode of the access transistor and has a rectangular shape having straight line on opposite sides.
    Type: Grant
    Filed: July 9, 2002
    Date of Patent: November 2, 2004
    Assignee: Renesas Technology Corp.
    Inventors: Hidemoto Tomita, Shigeki Ohbayashi, Yoshiyuki Ishigaki
  • Patent number: 6809399
    Abstract: A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element. Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer. Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.
    Type: Grant
    Filed: November 26, 2002
    Date of Patent: October 26, 2004
    Assignees: Renesas Technology Corp., Hitachi ULSI Systems Co., Ltd.
    Inventors: Shuji Ikeda, Toshiaki Yamanaka, Kenichi Kikushima, Shinichiro Mitani, Kazushige Sato, Akira Fukami, Masaya Iida, Akihiro Shimizu
  • Patent number: 6791114
    Abstract: An organic light emitting device display may include transverse row and column lines. In a passively driven OLED display, a fuse may be positioned between the OLED material and the row electrode. When a short occurs, the single pixel may be separated from the circuit by the fuse, avoiding the possibility that an entire row of pixels may be adversely affected by the short associated with one single pixel along a row.
    Type: Grant
    Filed: July 12, 2001
    Date of Patent: September 14, 2004
    Assignee: Intel Corporation
    Inventor: Zilan Shen
  • Patent number: 6787850
    Abstract: The invention concerns a semi-conductor device comprising on a substrate: a first dynamic threshold voltage MOS transistor (10), with a gate (116), and a channel (111) of a first conductivity type, and a current limiter means (20) connected between the gate and the channel of said first transistor. In accordance with the invention, this first transistor is fitted with a first doped zone (160) of the first conductivity type, connected to the channel, and the current limiter means comprises a second doped zone (124) of a second conductivity type, placed against the first doped zone and electrically connected to the first zone by an ohmic connection. Application to the manufacture of CMOS circuits.
    Type: Grant
    Filed: July 27, 2001
    Date of Patent: September 7, 2004
    Assignee: Commissariat a l'Energie Atomique
    Inventor: Jean-Luc Pelloie
  • Patent number: 6777286
    Abstract: A compact SRAM cell that incorporates refractory metal-silicon-nitrogen resistive elements as its pull-up transistors is described which includes a semi-conducting substrate, a pair of NMOS transfer devices formed vertically on the sidewalls of an etched substrate by a metal conductor providing electrical communication between an n+ region in the substrate and a bitline on top, a pair of pull-down nMOS devices on the substrate connected to ground interconnects, and a pair of vertical high-resistive elements formed of a refractory metal-silicon-nitrogen and function as a load for connecting to Vdd. The invention further describes a method for fabricating such compact SRAM cell.
    Type: Grant
    Filed: July 8, 2003
    Date of Patent: August 17, 2004
    Assignee: International Business Machines Corporation
    Inventors: Lawrence Clevenger, Louis Hsu, Li-Kong Wang
  • Publication number: 20040144979
    Abstract: The invention includes three-dimensional TFT based stacked CMOS inverters. Particular inverters can have a PFET device stacked over an NFET device. The PFET device can be a semiconductor-on-insulator thin film transistor construction, and can be formed over a conventional substrate (such as a monocrystalline silicon wafer) or a non-conventional substrate (such as one or more of glass, aluminum oxide, silicon dioxide, metal and plastic). The thin film of semiconductor material can comprise both silicon and germanium. Further, the thin film can contain two different layers. A first of the two layers can have silicon and germanium present in a relaxed crystalline lattice, and a second of the two layers can be a strained crystalline lattice of either silicon alone, or silicon in combination with germanium. The invention also includes computer systems utilizing such CMOS inverters.
    Type: Application
    Filed: January 14, 2004
    Publication date: July 29, 2004
    Inventor: Arup Bhattacharyya
  • Patent number: 6765272
    Abstract: A semiconductor device has a gate electrode which is formed on a first conductive-type well set in semiconductor substrate, with a gate insulating film lying therebetween; a LDD structure in which, on either side of said gate electrode, there are formed a LDD region and a source/drain region; an interlayer insulating film to cover said gate electrode as well as said LDD regions; and contact sections. A contact section connecting to one side of the source/drain regions having a potential equal to a potential of said first conductive-type well is disposed so as to come into contact with the LDD region lying thereunder; and a contact section connecting to the other side of the source/drain region having a potential different from the potential of said first conductive-type well is disposed so as not to come into contact with the LDD region lying thereunder.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: July 20, 2004
    Assignee: NEC Electronics Corporation
    Inventor: Hidetaka Natsume
  • Patent number: 6762474
    Abstract: A method and apparatus for temperature compensation of a resistive based Read-Only Memory device is disclosed. In accordance with the method of the invention, the input voltage supplied to ROM device is adjusted in response to changes in temperature to maintain the current through the ROM at a substantially constant level even as the resistivity of the temperature-dependent connection resistors changes. In one embodiment of the invention, the voltage across the reference resistor is determined by providing a constant current source to the reference resistor and this voltage level is applied to the input of the ROM device. The reference resistor is selected to have similar properties of conductivity as those of the data resistor, for example, a polysilicon. As the temperature increases, the resistivity of a polysilicon data resistor and resistor decrease in a similar manner and, accordingly, the voltage across the reference resistor also decreases.
    Type: Grant
    Filed: January 7, 2000
    Date of Patent: July 13, 2004
    Assignee: Agere Systems Inc.
    Inventor: Allen P. Mills, Jr.
  • Patent number: 6734075
    Abstract: A CMOS device includes a reverse electric conduction type well (2) formed on a monoelectric conduction type semiconductor substrate (1), a first MOS transistor (3) of a reverse electric conduction type channel formed on a surface of the semiconductor substrate, and a second MOS transistor (4) of monoelectric conduction type channel is formed on a surface of the well. In the present invention, resistance elements (8R, 7R, 2R) are formed in the semiconductor substrate on a lower side of a thick field oxide film (9) covering a surface of the semiconductor substrate. Further, a second resistance element (11R) composed of a polycrystal silicon layer is formed on an upper side of the field oxide film.
    Type: Grant
    Filed: May 19, 1999
    Date of Patent: May 11, 2004
    Assignee: Mitsumi Electric Co., Ltd.
    Inventor: Shigeki Onodera
  • Patent number: 6730984
    Abstract: A method and structure for increasing an electrical resistance of a resistor that is within a semiconductor structure, by oxidizing or nitridizing a fraction of a surface layer of the resistor with oxygen/nitrogen (i.e., oxygen or nitrogen) particles, respectively. The semiconductor structure may include a semiconductor wafer, a semiconductor chip, and an integrated circuit. The method and structure comprises five embodiments. The first embodiment comprises heating an interior of a heating chamber that includes the oxygen/nitrogen particles as gaseous oxygen/nitrogen-comprising molecules (e.g., molecular oxygen/nitrogen). The second embodiment comprises heating the fraction of the surface layer by a beam of radiation (e.g., laser radiation), or a beam of particles, such that the semiconductor structure is within a chamber that includes the oxygen/particles as gaseous oxygen/nitrogen-comprising molecules (e.g., molecular oxygen/nitrogen).
    Type: Grant
    Filed: November 14, 2000
    Date of Patent: May 4, 2004
    Assignee: International Business Machines Corporation
    Inventors: Arne W. Ballantine, Daniel C. Edelstein, Anthony K. Stamper
  • Patent number: 6717223
    Abstract: N well contact area 13 is integrally formed with second diffused area 12 within the upper parts of a N well and a P well, and P well contact area 14 is integrally formed with first diffused area 11 in the upper parts of the P well and the N well.
    Type: Grant
    Filed: August 5, 2002
    Date of Patent: April 6, 2004
    Assignee: Renesas Technology Corp.
    Inventors: Koji Nii, Yoshiki Tsujihashi, Hisashi Matsumoto
  • Publication number: 20040041151
    Abstract: A method of forming a power device (10) includes forming a power transistor (27) and a pull-down transistor (28) on a semiconductor die (36). The pull-down transistor (28) is enabled to rapidly and predictably disable the power transistor (27). The pull-down transistor (28) remains enabled for a first time period during the enabling of the power transistor (27) to facilitate rapidly and predictably enabling the power transistor (27).
    Type: Application
    Filed: August 27, 2002
    Publication date: March 4, 2004
    Applicant: Semiconductor Components Industries, LLC.
    Inventor: Benjamin M. Rice
  • Patent number: 6700166
    Abstract: A memory cell has two cross-coupled inverters each formed from a load transistor and a drive transistor. In the memory cell, the gates of the load transistor and the drive transistor are electrically coupled to the same gate line having a poly-metal gate structure. In the memory cell, a potential change at a storage node corresponding to an output node of one inverter is transmitted to the gate of the load transistor of the other inverter through a contact resistance at the interface between a silicon layer and a metal layer of the poly-metal structure.
    Type: Grant
    Filed: December 9, 2002
    Date of Patent: March 2, 2004
    Assignee: Renesas Technology Corp.
    Inventor: Tomoaki Yoshizawa
  • Patent number: 6677649
    Abstract: Prior known static random access memory (SRAM) cells are required that a diffusion layer be bent into a key-like shape in order to make electrical contact with a substrate with a P-type well region formed therein, which would result in a decrease in asymmetry leading to occurrence of a problem as to the difficulty in micro-patterning. To avoid this problem, the P-type well region in which an inverter making up an SRAM cell is formed is subdivided into two portions, which are disposed on the opposite sides of an N-type well region NW1 and are formed so that a diffusion layer forming a transistor has no curvature while causing the layout direction to run in a direction parallel to well boundary lines and bit lines. At intermediate locations of an array, regions for use in supplying power to the substrate are formed in parallel to word lines in such a manner that one regions is provided per group of thirty two memory cell rows or sixty four cell rows.
    Type: Grant
    Filed: May 5, 2000
    Date of Patent: January 13, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Kenichi Osada, Masataka Minami, Shuji Ikeda, Koichiro Ishibashi
  • Patent number: 6657243
    Abstract: A semiconductor device having an SRAM section in which a p-well, a first n-well, and a second n-well are formed in a semiconductor substrate. Two n-type access transistors and two n-type driver transistors are formed in the p-well. Two p-type load transistors are formed in the first n-well. The second n-well is located under the p-well and the first n-well and also is connected to the first n-well. The potential of the first n-well is supplied from the second n-well. According to the present invention, the SRAM section can be reduced in size.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: December 2, 2003
    Assignee: Seiko Epson Corporation
    Inventors: Takashi Kumagai, Masahiro Takeuchi, Satoru Kodaira, Takafumi Noda
  • Patent number: 6653695
    Abstract: Disclosed is a semiconductor device using a gate electrode such as an SRAM, wherein the electrode pattern is a formed with fidelity to a reticle pattern through no complicated layout design. The gate electrode pattern is formed in an area smaller than that of a conventional semiconductor device. In a lithographic step using a reticle pattern provided with substantially linear gate electrode patterns, a projecting portion in which at least a part of a contact region is arranged is formed such that it is included in almost the center of a long side of a linear gate electrode pattern and a concave portion facing at least the entire length of the projecting portion is formed such that it is included in a long side opposite to the projecting portion between transistor regions of a reticle pattern.
    Type: Grant
    Filed: October 14, 1999
    Date of Patent: November 25, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hisato Oyamatsu
  • Patent number: 6639326
    Abstract: A full CMOS SRAM cell includes first and second active regions formed in a semiconductor substrate. A word line traverses first and second areas of the second active region, and first and second gate electrodes are arranged to be perpendicular to the word line. The first and second gate electrodes are parallel to each other and traverse the first and second active regions, respectively. A power line is electrically connected to a first common source region and is arranged parallel to the word line, the first common source region being the first active region between the first gate electrode and the second gate electrode. A ground line is electrically connected to a second common source region and is arranged parallel to the word line, the second common source region being the second active region between the first gate electrode and the second gate electrode. First and second bit lines are arranged to be perpendicular to the word line and parallel to each other.
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: October 28, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Jun-eui Song
  • Patent number: 6624526
    Abstract: A compact SRAM cell that incorporates refractory metal-silicon-nitrogen resistive elements as its pull-up transistors is described which includes a semi-conducting substrate, a pair of NMOS transfer devices formed vertically on the sidewalls of an etched substrate by a metal conductor providing electrical communication between an n+ region in the substrate and a bitline on top, a pair of pull-down nMOS devices on the substrate connected to ground interconnects, and a pair of vertical high-resistive elements formed of a refractory metal-silicon-nitrogen and function as a load for connecting to Vdd. The invention further describes a method for fabricating such compact SRAM cell.
    Type: Grant
    Filed: June 1, 2001
    Date of Patent: September 23, 2003
    Assignee: International Business Machines Corporation
    Inventors: Lawrence Clevenger, Louis Hsu, Li-Kong Wang
  • Patent number: 6603178
    Abstract: Disclosed is a semiconductor integrated circuit device (e.g., an SRAM) having memory cells each of a flip-flop circuit constituted by a pair of drive MISFETs and a pair of load MISFETs, the MISFETs being cross-connected by a pair of local wiring lines, and having transfer MISFETs, wherein gate electrodes of all of the MISFETs are provided in a first level conductive layer, and the pair of local wiring lines are provided respectively in second and third level conductive layers. The local wiring lines can overlap and have a dielectric therebetween so as to form a capacitance element, to increase alpha particle soft error resistance. Moreover, by providing the pair of local wiring lines respectively in different levels, integration of the device can be increased.
    Type: Grant
    Filed: January 4, 2001
    Date of Patent: August 5, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Kenichi Kikushima, Fumio Ootsuka, Kazushige Sato
  • Patent number: 6583518
    Abstract: A dual-polycide semiconductor structure and method for forming the same having reduced dopant cross-diffusion. A conductive layer is formed over a polysilicon layer having a first region doped with a first dopant and a second region adjoining the first region at an interface doped with a second dopant. A region of discontinuity is then formed in the conductive layer located away from the interface. The conductive layer formed over the polysilicon gate overlaps the interface to provide electrical continuity between the first and second regions of the polysilicon gate, but also includes a region of discontinuity to reduce dopant cross-diffusion.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: June 24, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Jigish D. Trivedi, Zhongze Wang, Todd R. Abbott, Chih-Chen Cho
  • Patent number: 6580130
    Abstract: An integrated static random access memory device includes four transistors and two resistors defining a memory cell. The four transistors are in a semiconductor substrate and are mutually interconnected by a local interconnect layer. The local interconnect layer is under a first metal level and a portion of the local interconnect layer defines above the substrate a base metal level. The two resistors extend in contact with a portion of the local interconnect layer between the base metal level and the first metal level.
    Type: Grant
    Filed: December 13, 1999
    Date of Patent: June 17, 2003
    Assignee: STMicroelectronics S.A.
    Inventors: Jean-Pierre Schoellkopf, Philippe Gayet
  • Patent number: 6576978
    Abstract: The present disclosure is directed to the use of non-ion-implanted silicon oxynitride films as resistive elements. Such films have been traditionally used in semiconductor processing as antireflective coatings, but their utility as highly resistive circuit elements has heretofore not been realized. Such films find specific utility when used as the load resistors in a 4-T SRAM cell.
    Type: Grant
    Filed: June 29, 2001
    Date of Patent: June 10, 2003
    Assignee: Micron Technology, Inc.
    Inventor: Jigish D. Trivedi
  • Patent number: 6577021
    Abstract: An SRAM of the present invention comprises a plurality of memory cells, which are formed over a plurality of wells, which store data and which do not have a well contact region for fixing the potential of the wells, and a plurality of well contact cells for fixing the potential of the wells that are formed over the plurality of wells so as to adjoin the memory cells, wherein the areas of the memory cells and the areas of the well contact cells are equal.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: June 10, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Chikayoshi Morishima, Yoshinori Okumura, Takashi Kuroi
  • Patent number: 6570264
    Abstract: The invention provides SRAMs that can reduce memory cells in size and correct light proximity effect. Gate electrode layers in a first layer, drain—drain connection layers in a second layer, and drain-gate connection layers in a third layer define conduction layers of a flip-flop. The drain-gate connection layer has an extension section extending in a direction toward the drain-gate connection layer. The drain-gate connection layer 41b has an extension section extending in a direction toward the drain-gate connection layer.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: May 27, 2003
    Assignee: Seiko Epson Corporation
    Inventors: Takashi Kumagai, Masahiro Takeuchi, Satoru Kodaira, Takafumi Noda
  • Patent number: 6563177
    Abstract: A semiconductor memory device includes a trench type SRAM(Static Random Access Memory) cell having a higher integration than a stack type SRAM. The SRAM cell memory device is provided with a trench formed in a semiconductor substrate and having four side walls therein, wherein a source region and a drain region of each of first and second drive transistors are formed in two of the four side walls. A pair of active layers respectively having a source region and a drain region of a first load transistor and a second load transistor, respectively, are formed on the substrate adjacent to the side walls. A gate electrode common to the first drive transistor and the first load transistor is formed on a gate oxide film. A gate electrode of an access transistor is vertically formed in a direction vertical to the semiconductor substrate instead of being formed on the substrate for thereby decreasing an area to be occupied by the transistor.
    Type: Grant
    Filed: July 22, 1998
    Date of Patent: May 13, 2003
    Assignee: Hyundai Electronics Industries Co. Ltd.
    Inventor: Seen-Suk Kang
  • Patent number: 6559510
    Abstract: A Static Random Access Memory (SRAM) device includes at least a transfer transistor, a driving transistor and a load resistor which are commonly connected to a node. A well has a first conductive type, and is placed on a substrate. A first impurity region has a second conductive type opposite to the first conductive type, and is placed in the well. A second impurity region has the first conductive type and has higher impurity concentration than the well, and is placed at a lower portion of the first impurity region. The node is composed of at least the first impurity region and the second impurity region.
    Type: Grant
    Filed: November 9, 2000
    Date of Patent: May 6, 2003
    Assignee: NEC Corporation
    Inventor: Hiroaki Yokoyama
  • Patent number: 6528896
    Abstract: A Scalable Two-Transistor Memory (STTM) cell array having a 4F2 unit cell area, where F is the minimum feature size. The data lines and the bit lines alternate and are adjacent to each other along the Y-axis direction, and the word lines are laid out along the X-axis direction. Each STTM cell consists of a floating gate MOS sensing transistor at the surface of a semiconductor substrate, with a vertical double sidewall gate multiple tunnel junction barrier programming MOS transistor on top of the sensing transistor. A data line connects all source regions of the programming transistors and a bit line connects all the source/drain regions of the sensing transistors in a column direction. A word line connects all double sidewall gate regions of programming transistors in a row direction. This invention also deals with a column addressing circuit as well as the driving method for the circuit.
    Type: Grant
    Filed: June 21, 2001
    Date of Patent: March 4, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seungheon Song, Woosik Kim, Hokyu Kang
  • Patent number: 6512245
    Abstract: A static random access memory comprising memory cells each composed of transfer MISFETs controlled by word lines and of a flip-flop circuit made of driver MISFETs and load MISFETs. The top of the load MISFETs is covered with supply voltage lines so that capacitor elements of a stacked structure are formed between the gate electrodes of the load MISFETs and the supply voltage lines.
    Type: Grant
    Filed: May 17, 2001
    Date of Patent: January 28, 2003
    Assignees: Hitachi, Ltd., Hitachi ULSI Engineering Corp.
    Inventors: Shuji Ikeda, Satoshi Meguro, Kyoichiro Asayama, Eri Fujita, Koichiro Ishibashi, Toshiro Aoto, Sadayuki Morita, Atsuyoshi Koike, Masayuki Kojima, Yasuo Kiguchi, Kazuyuki Suko, Fumiyuki Kanai, Naotaka Hashimoto, Toshiaki Yamanaka
  • Patent number: 6507124
    Abstract: The invention provides SRAMs that can reduce memory cells in size and correct light proximity effect. Gate electrode layers in a first layer, drain-drain connection layers in a second layer, and drain-gate connection layers in a third layer define connection wirings of a flip-flop. A p+ type well contact region is provided for every two of the memory cells arranged in the Y-axis direction.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: January 14, 2003
    Assignee: Seiko Epson Corporation
    Inventors: Takashi Kumagai, Masahiro Takeuchi, Satoru Kodaira, Takafumi Noda
  • Patent number: 6479905
    Abstract: A full CMOS SRAM cell includes first and second active regions formed in a semiconductor substrate. A word line traverses first and second areas of the second active region, and first and second gate electrodes are arranged to be perpendicular to the word line. The first and second gate electrodes are parallel to each other and traverse the first and second active regions, respectively. A power line is electrically connected to a first common source region and is arranged parallel to the word line, the first common source region being the first active region between the first gate electrode and the second gate electrode. A ground line is electrically connected to a second common source region and is arranged parallel to the word line, the second common source region being the second active region between the first gate electrode and the second gate electrode. First and second bit lines are arranged to be perpendicular to the word line and parallel to each other.
    Type: Grant
    Filed: July 20, 2000
    Date of Patent: November 12, 2002
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Jun-eui Song
  • Patent number: 6462385
    Abstract: A semiconductor memory device has a semiconductor substrate, a peripheral circuit region and a memory cell region on the principal surface of the semiconductor substrate. The semiconductor memory device has a first well formed in the peripheral circuit region, a second well of first conductivity type and a third well of second conductivity type formed in the memory cell region having substantially the same depth, and a device element isolator formed in the memory cell region for isolating a device element formed in the second well from a device element formed in the third well. The second and third wells extend to an area under the device element isolator. The second and third wells extend to a level under the device element isolator. The second and third wells may include a first layer having a depth shallower than the first well, and a second layer having substantially the same depth as the first well.
    Type: Grant
    Filed: November 23, 1999
    Date of Patent: October 8, 2002
    Assignee: Seiko Epson Corporation
    Inventor: Takashi Kumagai
  • Patent number: 6445049
    Abstract: A highly flexible, heterogeneous architecture for portable, high density, high performance standard cell and gate array applications is disclosed. The architecture is based on the three basic cells and their derivatives, particularly a transmission gate cell, a logic cell, and a drive cell. For gate array implementations, the cells are arranged in a pre-determined regular array format. For standard cell implementations, the arrangement of the cells may be optimized to suit each target logic gate. Optimized transistor sizing is achievable through leaf cells, software sizing, or both.
    Type: Grant
    Filed: September 30, 1998
    Date of Patent: September 3, 2002
    Assignee: Artisan Components, Inc.
    Inventor: Ali Akbar Iranmanesh
  • Patent number: RE38545
    Abstract: A semiconductor memory device having a plurality of memory cells each comprising two CMOS inverters cross-coupled to each other and arranged at intersections between a plurality of word lines extending in a column direction and a plurality of complementary data line pairs extending in a row direction; wherein p-channel type load MISFETs of the memory cells arranged in the column direction are formed on the main surface of an n-type well region in the direction in which the word lines extend, the source regions of the p-channel type load MISFETs of the memory cells arranged in the column direction are electrically connected to the n-type well region through conductor layers, and each of the conductor layer is formed independently of the memory cells arranged in the column direction.
    Type: Grant
    Filed: August 8, 2000
    Date of Patent: July 6, 2004
    Assignee: Renesas Technology Corporation
    Inventors: Toshiro Hiramoto, Nobuo Tamba, Motoki Kasai