With At Least Part Of Active Region On Insulating Substrate (e.g., Lateral Dmos In Oxide Isolated Well) (epo) Patents (Class 257/E29.261)
  • Publication number: 20110057263
    Abstract: An ultra high voltage MOS transistor device includes a substrate having a first conductive type, a first well having a second conductive type and a second well having the first conductive type formed in the substrate, a drain region having the second conductive type formed in the first well, a source region having the second conductive type formed in the second well, a first doped region having the first conductive type formed between the second well and the substrate, an insulating layer formed in a first recess in the first well, a gate formed on the substrate between the source region and the first well, and a recessed channel region formed in the substrate underneath the gate.
    Type: Application
    Filed: September 10, 2009
    Publication date: March 10, 2011
    Inventors: Sung-Nien Tang, Sheng-Hsiong Yang
  • Publication number: 20110049621
    Abstract: An integrated circuit with a transistor advantageously embodied in a laterally diffused metal oxide semiconductor device having a gate located over a channel region recessed into a semiconductor substrate and a method of forming the same. In one embodiment, the transistor includes a source/drain including a lightly or heavily doped region adjacent the channel region, and an oppositely doped well extending under the channel region and a portion of the lightly or heavily doped region of the source/drain. The transistor also includes a channel extension, within the oppositely doped well, under the channel region and extending under a portion of the lightly or heavily doped region of the source/drain.
    Type: Application
    Filed: August 28, 2009
    Publication date: March 3, 2011
    Applicant: Enpirion Incorporated, A Delaware Corporation
    Inventors: Ashraf W. Lotfi, William W. Troutman, Douglas Dean Lopata, Tanya Nigam
  • Publication number: 20110024838
    Abstract: There is provided a high withstand voltage LDMOS which is a MOS transistor formed on a semiconductor substrate and isolated by a trench, and a source region of which is sandwiched by a drain region, in which the metal layer gate wire connected to the gate electrode is led out outside the trench so as to pass over a P-type drift layer.
    Type: Application
    Filed: July 12, 2010
    Publication date: February 3, 2011
    Inventors: Keigo KITAZAWA, Junji Noguchi, Takayuki Oshima, Shinichiro Wada, Tomoyuki Miyoshi, Atsushi Itoh
  • Publication number: 20110024839
    Abstract: A method of forming a lateral DMOS transistor includes performing a low energy implantation using a first dopant type and being applied to the entire device area. The dopants of the low energy implantation are blocked by the conductive gate. The method further includes performing a high energy implantation using a third dopant type and being applied to the entire device area. The dopants of the high energy implantation penetrate the conductive gate and is introduced into the entire device active area including underneath the conductive gate. After annealing, a double-diffused lightly doped drain (DLDD) region is formed from the high and low energy implantations and is used as a drift region of the lateral DMOS transistor. The DLDD region overlaps with the body region at a channel region and interacts with the dopants of the body region to adjust a threshold voltage of the lateral DMOS transistor.
    Type: Application
    Filed: July 31, 2009
    Publication date: February 3, 2011
    Applicant: MICREL, INC.
    Inventors: David R. Zinn, Paul M. Moore
  • Patent number: 7868378
    Abstract: An LDMOS transistor includes a gate including a conductive material over an insulator material, a source including a first impurity region and a second impurity region, a third impurity region, and a drain including a fourth impurity region and a fifth impurity region. The first impurity region is of a first type, and the second impurity region is of an opposite second type. The third impurity region extends from the source region under the gate and is of the first type. The fourth impurity region is of the second type, the fifth impurity region is of the second type, and the fourth impurity region impinges the third impurity region.
    Type: Grant
    Filed: July 17, 2006
    Date of Patent: January 11, 2011
    Assignee: Volterra Semiconductor Corporation
    Inventors: Marco A. Zuniga, Budong You, Yang Lu
  • Publication number: 20100327350
    Abstract: An electronic device, including an integrated circuit, can include a buried conductive region and a semiconductor layer overlying the buried conductive region, wherein the semiconductor layer has a primary surface and an opposing surface lying closer to the buried conductive region. The electronic device can also include a first doped region and a second doped region spaced apart from each other, wherein each is within the semiconductor layer and lies closer to primary surface than to the opposing surface. The electronic device can include current-carrying electrodes of transistors. A current-carrying electrode of a particular transistor includes the first doped region and is a source or an emitter and is electrically connected to the buried conductive region. Another current-carrying electrode of a different transistor includes the second doped region and is a drain or a collector and is electrically connected to the buried conductive region.
    Type: Application
    Filed: June 30, 2009
    Publication date: December 30, 2010
    Inventors: Gary H. Loechelt, Gordon M. Grivna
  • Publication number: 20100327347
    Abstract: An electronic device including an integrated circuit can include a buried conductive region and a semiconductor layer overlying the buried conductive region, and a vertical conductive structure extending through the semiconductor layer and electrically connected to the buried conductive region. The integrated circuit can further include a doped structure having an opposite conductivity type as compared to the buried conductive region, lying closer to an opposing surface than to a primary surface of the semiconductor layer, and being electrically connected to the buried conductive region. The integrated circuit can also include a well region that includes a portion of the semiconductor layer, wherein the portion overlies the doped structure and has a lower dopant concentration as compared to the doped structure. In other embodiment, the doped structure can be spaced apart from the buried conductive region.
    Type: Application
    Filed: June 30, 2009
    Publication date: December 30, 2010
    Inventors: Gary H. Loechelt, Gordon M. Grivna
  • Publication number: 20100314683
    Abstract: Provided is a semiconductor device which scarcely malfunctions even when the device is used as a high-side element, and can keep a high breakdown voltage. In a semiconductor substrate having a main surface, a first p? epitaxial region is formed. At the main surface side of the first p? epitaxial region, a second p? epitaxial region is formed. At the main surface side of the second p? epitaxial region, an n-type drift region and a p-type body region are formed. Between the first and second p? epitaxial regions, an n+ buried region having a floating potential is formed to isolate these regions electrically from each other. Between n+ buried region and the second p? epitaxial region, a p+ buried region is formed which has a higher p-type impurity concentration than the second p? epitaxial region.
    Type: Application
    Filed: May 18, 2010
    Publication date: December 16, 2010
    Inventor: Shinichiro Yanagi
  • Publication number: 20100301413
    Abstract: Methods of making, structures, devices, and/or applications for lateral double-diffused metal oxide semiconductor (LDMOS) transistors are disclosed. In one embodiment, a method of fabricating an LDMOS transistor with source, drain, and gate regions on a substrate, can include: forming p-type and n-type buried layer (PBL, NBL) regions; growing an epitaxial (N-EPI) layer on the NBL/PBL regions; forming a p-doped deep p-well (DPW) region on the PBL region; forming a well region in the N-EPI layer; forming a doped body region; after the doped body region formation, forming an active area and a field oxide (FOX) region, and forming a drain oxide between the source and drain regions of the LDMOS transistor; after the doped body region formation, forming a gate oxide adjacent to the source and drain regions, and forming a gate on the gate oxide and a portion of the drain oxide; and forming a doped drain region, and first and second doped source regions.
    Type: Application
    Filed: May 29, 2009
    Publication date: December 2, 2010
    Applicant: Silergy Technology
    Inventor: Budong You
  • Patent number: 7842568
    Abstract: A lateral power semiconductor device has a substrate and an isolation layer formed over the substrate for reducing minority carrier storage in the substrate. A well region is formed over the isolation layer. A source region, drain region, and channel region are formed in the well. A first region is formed on a surface of the lateral power semiconductor device adjacent to the source region. The lateral power semiconductor device has a body diode between the first region and drain region. The isolation layer confines the minority carrier charge from the body diode to a depth of less than 20 ?m from the surface of the lateral power semiconductor device. In one embodiment, the isolation layer is a buried oxide layer and the substrate is an n-type or p-type handle wafer. Alternatively, the isolation layer is an epitaxial layer and the substrate is made with N+ or P+ semiconductor material.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: November 30, 2010
    Assignee: Great Wall Semiconductor Corporation
    Inventors: Samuel J. Anderson, David N. Okada
  • Publication number: 20100295125
    Abstract: An apparatus is disclosed to increase a breakdown voltage of a semiconductor device. The semiconductor device includes a first heavily doped region to represent a source region. A second heavily doped region represents a drain region of the semiconductor device. A third heavily doped region represents a gate region of the semiconductor device. The semiconductor device includes a gate oxide positioned between the source region and the drain region, below the gate region. The semiconductor device uses a split gate oxide architecture to form the gate oxide. The gate oxide includes a first gate oxide having a first thickness and a second gate oxide having a second thickness.
    Type: Application
    Filed: June 19, 2009
    Publication date: November 25, 2010
    Applicant: Broadcom Corporation
    Inventor: Akira Ito
  • Publication number: 20100289078
    Abstract: In order to further improve a driving performance without increasing an element area in a lateral MOS having a high driving performance, in which a gate width is increased per unit area by forming a plurality of trenches horizontally with respect to a gate length direction, the semiconductor device includes: a well region which is formed of a high resistance first conductivity type semiconductor at a predetermined depth from a surface of a semiconductor substrate; a plurality of trenches which extend from a surface to a midway depth in the well region; a gate insulating film which is formed on surfaces of concave and convex portions formed by the trenches; a gate electrode embedded inside the trenches; a gate electrode film which is formed on the surface of the substrate in contact with the gate electrode embedded inside the trenches in regions of the concave and convex portions, the regions excluding vicinities of both ends of the trenches; another gate electrode film which is embedded inside the trenches in
    Type: Application
    Filed: August 20, 2008
    Publication date: November 18, 2010
    Inventor: Tomomitsu Risaki
  • Patent number: 7829947
    Abstract: Lateral DMOS devices having improved drain contact structures and methods for making the devices are disclosed. A semiconductor device comprises a semiconductor substrate; an epitaxial layer on top of the substrate; a drift region at a top surface of the epitaxial layer; a source region at a top surface of the epitaxial layer; a channel region between the source and drift regions; a gate positioned over a gate dielectric on top of the channel region; and a drain contact trench that electrically connects the drift layer and substrate. The contact trench includes a trench formed vertically from the drift region, through the epitaxial layer to the substrate and filled with an electrically conductive drain plug; electrically insulating spacers along sidewalls of the trench; and an electrically conductive drain strap on top of the drain contact trench that electrically connects the drain contact trench to the drift region.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: November 9, 2010
    Assignee: Alpha & Omega Semiconductor Incorporated
    Inventor: François Hébert
  • Patent number: 7825439
    Abstract: A semiconductor memory according to an example of the invention includes active areas, and element isolation areas which isolate the active areas. The active areas and the element isolation areas are arranged alternately in a first direction. An n-th (n is odd number) active area from an endmost portion in the first direction and an (n+1)-th active area are coupled to each other at an endmost portion in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: November 2, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tatsuo Izumi, Takeshi Kamigaichi, Shinya Takahashi
  • Publication number: 20100270615
    Abstract: A lateral diffused metal oxide semiconductor transistor is disclosed. A p-type bulk is disposed on a substrate. An n-type well region is disposed in the p-type bulk. A plurality of field oxide layers are disposed on the p-type bulk and the n-type well region. A gate structure is disposed on a portion of the p-type bulk and one of the plurality of field oxide layers. At least one deep trench isolation structure is disposed in the p-type bulk and adjacent to the n-type well region.
    Type: Application
    Filed: April 28, 2009
    Publication date: October 28, 2010
    Applicant: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Kwang-Ming Lin, Shih-Chieh Pu, Shih-Chan Chen
  • Publication number: 20100270614
    Abstract: An embodiment method for forming a MOS transistor for power applications in a substrate of semiconductor material, said method being integrated in a process for manufacturing integrated circuits which uses an STI technique for forming the insulating regions. The method includes the phases of forming an insulating element on a top surface of the substrate and forming a control electrode on a free surface of the insulating element. The insulating element insulates the control electrode from the substrate. Said insulating element comprises a first portion and a second portion. The extension of the first portion along a first direction perpendicular to the top surface is lower than the extension of the second portion along such first direction. The phase of forming the insulating element comprises generating said second portion by locally oxidizing the top surface.
    Type: Application
    Filed: April 22, 2010
    Publication date: October 28, 2010
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Giuseppe CROCE, Paolo GATTARI, Andrea PALEARI, Alessandro DUNDULACHI
  • Patent number: 7821064
    Abstract: A lateral MISFET having a semiconductor body has a doped semiconductor substrate of a first conduction type and an epitaxial layer of a second conduction type, which is complementary to the first conduction type, the epitaxial layer being provided on the semiconductor substrate. This MISFET has, on the top side of the semiconductor body, a drain, a source, and a gate electrode with gate insulator. A semiconductor zone of the first conduction type is embedded in the epitaxial layer in a manner adjoining the gate insulator, a drift zone of the second conduction type being arranged between the semiconductor zone and the drain electrode in the epitaxial layer. The drift zone has pillar-type regions which are arranged in rows and columns and whose boundary layers have a metal layer which in each case forms a Schottky contact with the material of the drift zone.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: October 26, 2010
    Assignee: Infineon Technologies Austria AG
    Inventors: Michael Rueb, Markus Schmitt, Carolin Tolksdorf, Uwe Wahl, Armin Willmeroth
  • Publication number: 20100264491
    Abstract: A high breakdown voltage semiconductor device, in which a semiconductor layer is formed on a semiconductor substrate across a dielectric layer, includes a drain layer on the semiconductor layer, a buffer layer formed so as to envelop the drain layer, a source layer, separated from the drain layer, and formed so as to surround a periphery thereof, a well layer formed so as to envelop the source layer, and a gate electrode formed across a gate insulating film on the semiconductor layer, wherein the planar shape of the drain layer 113 and buffer layer is a non-continuous or continuous ring.
    Type: Application
    Filed: March 8, 2010
    Publication date: October 21, 2010
    Applicant: FUJI ELECTRIC SYSTEMS CO. LTD.
    Inventor: Masaharu YAMAJI
  • Publication number: 20100258867
    Abstract: A semiconductor device comprises a substrate and a gate which extends on the substrate in a first horizontal direction. A source region is positioned at a first side of the gate and extends in the first direction. A body region of a first conductivity type is under the source region and extends in the first direction. A drain region of a second conductivity type is at a second side of the gate and extends in the first direction. A drift region of the second conductivity type extends between the body region and the drain region in the substrate in a second horizontal direction. A first buried layer is under the drift region in the substrate, the first buried layer extending in the first and second directions. A plurality of second buried layers is between the first buried layer and the drift region in the substrate. The second buried layers extend in the second direction and are spaced apart from each other in the first direction.
    Type: Application
    Filed: April 7, 2010
    Publication date: October 14, 2010
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Nam-Young Lee, Mueng-Ryul Lee
  • Publication number: 20100259321
    Abstract: Embodiments include but are not limited to apparatuses and systems including a field-effect transistor switch. A field-effect transistor switch may include a first field plate coupled with a gate electrode, the first field plate disposed substantially equidistant from a source electrode and a drain electrode. The field-effect transistor switch may also include a second field plate proximately disposed to the first field plate and disposed substantially equidistant from the source electrode and the drain electrode. The first and second field plates may be configured to reduce an electric field between the source electrode and the gate electrode and between the drain electrode and the gate electrode.
    Type: Application
    Filed: April 14, 2009
    Publication date: October 14, 2010
    Applicant: TRIQUINT SEMICONDUCTOR, INC.
    Inventors: Hua-Quen Tserng, Deep C. Dumka, Martin E. Jones, Charles F. Campbell, Anthony M. Balistreri
  • Publication number: 20100258801
    Abstract: A semiconductor component including a lateral transistor component is disclosed. One embodiment provides an electrically insulating carrier layer. On the carrier layer a first and a second semiconductor layer are arranged on above another and are separated from another by a dielectric layer and from which at least the first semiconductor layer includes a polycrystalline semiconductor material, an amorphous semiconductor material or an organic semiconductor material. In the first semiconductor layer: a source zone, a body zone, a drift zone and a drain zone are provided. In the second semiconductor layer; a drift control zone is arranged adjacent to the drift zone, including a control terminal at a first lateral end for applying a control potential, and is coupled to the drain zone via a rectifying element at a second lateral end. A gate electrode is arranged adjacent to the body zone and is dielectrically insulated from the body zone by a gate dielectric layer.
    Type: Application
    Filed: April 9, 2009
    Publication date: October 14, 2010
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Joachim Weyers, Anton Mauder, Franz Hirler, Paul Kuepper
  • Publication number: 20100252882
    Abstract: An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.
    Type: Application
    Filed: April 3, 2009
    Publication date: October 7, 2010
    Applicant: Texas Instruments Incorporated
    Inventors: Marie Denison, Sameer Pendharkar, Binghua Hu, Taylor Rice Efland, Sridhar Seetharaman
  • Publication number: 20100244131
    Abstract: An asymmetric insulated-gate field-effect transistor (100 or 102) has a source (240 or 280) and a drain (242 or 282) laterally separated by a channel zone (244 or 284) of body material (180 or 182) of a semiconductor body. A gate electrode (262 or 302) overlies a gate dielectric layer (260 or 300) above the channel zone. A more heavily doped pocket portion (250 or 290) of the body material extends largely along only the source. The source has a main source portion (240M or 280M) and a more lightly doped lateral source extension (240E or 280E). The drain has a main portion (242M or 282M) and a more lightly doped lateral drain extension (242E or 282E). The drain extension is more lightly doped than the source extension. The maximum concentration of the semiconductor dopant defining the two extensions occurs deeper in the drain extension than in the source extension. Additionally or alternatively, the drain extension extends further laterally below the gate electrode than the source extension.
    Type: Application
    Filed: March 27, 2009
    Publication date: September 30, 2010
    Inventors: Constantin Bulucea, William D. French, Sandeep R. Bahl, Jeng-Jiun Yang, D. Courtney Parker, Peter B. Johnson, Donald M. Archer
  • Publication number: 20100237413
    Abstract: A semiconductor device has a LOCOS film formed on at least one of a drain side and a source side of a semiconductor substrate surface. A gate oxide film connected to the LOCOS film is formed on the semiconductor substrate surface. A conductive film is formed to cover the gate oxide film and the LOCOS film. A gate electrode is formed by etching the conductive film such that an end portion of the conductive film is positioned above the LOCOS film. The LOCOS film is etched such that an end portion of the LOCOS film is in alignment with an end portion of the gate electrode, thereby forming a recessed portion in a part of the semiconductor substrate surface from which the LOCOS film has been removed. A side wall spacer is formed to cover a side surface of the gate electrode such that a bottom surface of the side wall spacer contacts a surface of the recessed portion.
    Type: Application
    Filed: February 26, 2010
    Publication date: September 23, 2010
    Applicant: OKI SEMICONDUCTOR CO., LTD.
    Inventor: Hiroki Kasai
  • Publication number: 20100237416
    Abstract: Lateral DMOS devices having improved drain contact structures and methods for making the devices are disclosed. A semiconductor device comprises a semiconductor substrate; an epitaxial layer on top of the substrate; a drift region at a top surface of the epitaxial layer; a source region at a top surface of the epitaxial layer; a channel region between the source and drift regions; a gate positioned over a gate dielectric on top of the channel region; and a drain contact trench that electrically connects the drift layer and substrate. The contact trench includes a trench formed vertically from the drift region, through the epitaxial layer to the substrate and filled with an electrically conductive drain plug; electrically insulating spacers along sidewalls of the trench; and an electrically conductive drain strap on top of the drain contact trench that electrically connects the drain contact trench to the drift region.
    Type: Application
    Filed: March 17, 2009
    Publication date: September 23, 2010
    Applicant: ALPHA & OMEGA SEMICONDUCTOR INCORPORATED
    Inventor: Francois Hebert
  • Patent number: 7795680
    Abstract: An integrated circuit system that includes: providing a substrate; depositing a dielectric on the substrate; depositing an isolation dielectric on the dielectric; forming a trench through the isolation dielectric and the dielectric to expose the substrate; depositing a dielectric liner over the integrated circuit system; processing the dielectric liner to form a trench spacer; and depositing an epitaxial growth within the trench that includes a crystalline orientation that is substantially identical to the substrate.
    Type: Grant
    Filed: December 7, 2007
    Date of Patent: September 14, 2010
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Huang Liu, Alex K. H. See, James Lee, Johnny Widodo, Chung Woh Lai, Wenzhi Gao, Zhao Lun, Shailendra Mishra, Liang-Choo Hsia
  • Patent number: 7790527
    Abstract: In a first aspect, a first method of manufacturing a high-voltage transistor is provided. The first method includes the steps of (1) providing a substrate including a bulk silicon layer that is below an insulator layer that is below a silicon-on-insulator (SOI) layer; and (2) forming one or more portions of a transistor node including a diffusion region of the transistor in the SOI layer. A portion of the transistor node is adapted to reduce a voltage greater than about 5 V within the transistor to a voltage less than about 3 V. Numerous other aspects are provided.
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: September 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: William Hsioh-Lien Ma, Jack Allan Mandelman, Carl John Radens, William Robert Tonti
  • Publication number: 20100219472
    Abstract: In a method of manufacturing a high withstanding voltage MOSFET, a region to be doped with impurities and a region to be doped with no impurity are provided when ion implantation of the impurities is performed in the channel forming region, for controlling a threshold voltage. The region to be doped with no impurity is suitably patterned so that impurity concentration of the channel forming region near boundaries between a well region and a source region and between the well region and a drain region having the same conductivity type as the well region may be increased, to thereby induce a reverse short channel effect. By canceling a short channel effect with the reverse short channel effect induced by the above-mentioned method, the short channel effect of the high withstanding voltage MOSFET may be suppressed.
    Type: Application
    Filed: February 16, 2010
    Publication date: September 2, 2010
    Inventors: Ayako Inoue, Naoto Saitoh
  • Publication number: 20100213543
    Abstract: A method of forming a device is presented. The method includes providing a substrate prepared with an active device region. The active device region includes gate stack layers of a gate stack including at least a gate electrode layer over a gate dielectric layer. A first mask is provided on the substrate corresponding to the gate. The substrate is patterned to at least remove portions of a top gate stack layer unprotected by the first mask. A second mask is also provided on the substrate with an opening exposing a portion of the first mask and the top gate stack layer. A channel well is formed by implanting ions through the opening and gate stack layers into the substrate.
    Type: Application
    Filed: July 10, 2009
    Publication date: August 26, 2010
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
    Inventors: Guo Wei ZHANG, Purakh Raj VERMA
  • Patent number: 7781292
    Abstract: A structure and method of fabricating the structure. The structure including: a dielectric isolation in a semiconductor substrate, the dielectric isolation extending in a direction perpendicular to a top surface of the substrate into the substrate a first distance, the dielectric isolation surrounding a first region and a second region of the substrate, a top surface of the dielectric isolation coplanar with the top surface of the substrate; a dielectric region in the second region of the substrate; the dielectric region extending in the perpendicular direction into the substrate a second distance, the first distance greater than the second distance; and a first device in the first region and a second device in the second region, the first device different from the second device, the dielectric region isolating a first element of the second device from a second element of the second device.
    Type: Grant
    Filed: April 30, 2007
    Date of Patent: August 24, 2010
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey Peter Gambino, Steven Howard Voldman, Michael Joseph Zierak
  • Publication number: 20100193865
    Abstract: The invention provides a DMOS transistor in which a leakage current is decreased and the source-drain breakdown voltage of the transistor in the off state is enhanced when a body layer is formed by oblique ion implantation. After a photoresist layer 18 is formed, using the photoresist layer 18 and a gate electrode 14 as a mask, first ion implantation is performed toward a first corner portion 14C1 on the inside of the gate electrode 14 in a first direction shown by an arrow A?. A first body layer 17A? is formed by this first ion implantation. The first body layer 17A? is formed so as to extend from the first corner portion 14C1 to under the gate electrode 14, and the P-type impurity concentration of the body layer 17A? in the first corner portion 14C1 is higher than that of a conventional transistor.
    Type: Application
    Filed: September 26, 2008
    Publication date: August 5, 2010
    Applicants: SANYO Electric Co., Ltd., SANYO Semiconductor Co., Ltd.
    Inventors: Yasuhiro Takeda, Seiji Otake, Shuichi Kikuchi
  • Publication number: 20100171175
    Abstract: A semiconductor structure for high voltage/high current MOS circuits is provided, including a deep N-well (NMD), a P-well (PW) disposed within NWD, a plurality of field oxide regions (FOX), a plurality of doping regions, including both N+ regions and P+ regions, disposed within NWD and PW, a gate (G) connected to a doping region, a bulk pad (B) connected to a doping regions, a source pad (S) connected to a doping regions and a drain pad (D) connected to a doping region. The top view of the present invention shows that the regions are of non-specific shapes and overlaid in a radial manner, with doping region connected to B being encompassed by doping region connected to S, which in turn encompassed by G, encompassed by FOX, encompassed by doping region connected to D.
    Type: Application
    Filed: January 5, 2009
    Publication date: July 8, 2010
    Inventors: Bing-Yao Fan, Ming-Yi Hsieh, Tsuoe-Hsiang Liao, Maw-Hwa Chen
  • Publication number: 20100163989
    Abstract: A method for fabrication of a semiconductor device is provided. A first type doped body region is formed in a first type substrate. A first type heavily-doped region is formed in the first type doped body region. A second type well region and second type bar regions are formed in the first type substrate with the second type bar regions between the second type well region and the first type doped body region. The first type doped body region, the second type well region, and each of the second type bar regions are separated from each other by the first type substrate. The second type bar regions are inter-diffused to form a second type continuous region adjoining the second type well region. A second type heavily-doped region is formed in the second type well region.
    Type: Application
    Filed: April 17, 2009
    Publication date: July 1, 2010
    Applicant: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Shang-Hui Tu, Hung-Shern Tsai
  • Publication number: 20100163990
    Abstract: Disclosed is a lateral double diffused metal oxide semiconductor (LDMOS) device and methods of making the same. The LDMOS device may include a semiconductor substrate comprising a buried region and a first well region, a gate on the semiconductor substrate, a body region in the first well region and a source region in the body region on one side of the gate, a drift region and a drain region in the drift region on an opposite side of the gate relative to the body region, a second well region, a first deep sink region and a third well region in the first well region, and a second deep sink region in the first well region.
    Type: Application
    Filed: December 23, 2009
    Publication date: July 1, 2010
    Inventor: Choul Joo KO
  • Publication number: 20100163988
    Abstract: In one aspect, a lateral MOS device is provided. The lateral MOS device includes a gate electrode disposed at least partially in a gate trench to apply a voltage to a channel region, and a drain electrode spaced from the gate electrode, and in electrical communication with a drift region having a boundary with a lower end of the channel region. The device includes a gate dielectric layer in contact with the gate electrode, and disposed between the gate electrode and the drain electrode. The channel region is adjacent to a substantially vertical wall of the gate trench. The device includes a field plate contacting the gate electrode and configured to increase a breakdown voltage of the device.
    Type: Application
    Filed: April 20, 2008
    Publication date: July 1, 2010
    Applicant: Rensselaer Polytechnic Institute
    Inventors: Tat-sing Paul Chow, Kamal Raj Varadarajan
  • Publication number: 20100163991
    Abstract: A laterally double-diffused metal oxide semiconductor (LDMOS) and a method for fabrication thereof includes a well region formed in a semiconductor substrate having an active region defined by device isolation layers, a body region formed over the well region, a drain region spaced from the body region at a constant interval and formed above the well region, a source region and a source contact region formed in the body region in structural communication with the source region, a drift region having a trench formed therein formed in the well region between the body region and the drain region, and a gate formed over the semiconductor substrate which partially overlaps the source region and the drift region.
    Type: Application
    Filed: December 23, 2009
    Publication date: July 1, 2010
    Inventors: Hyun-Dong Kim, Seung-Man Jung
  • Publication number: 20100163987
    Abstract: Semiconductor device including semiconductor layer, first impurity region on surface layer portion of semiconductor layer, body region at interval from first impurity region, second impurity region on surface layer portion of body region, field insulating film at interval from second impurity region, gate insulating film on surface of the semiconductor layer between second impurity region and field insulating film, gate electrode on gate insulating film, first floating plate as ring on field insulating film, and second floating plate as ring on same layer above first floating plate. First and second floating plates formed by at least three plates so that peripheral lengths at centers in width direction thereof are entirely different from one another, alternately arranged in plan view so that one having relatively smaller peripheral length is stored in inner region of one having relatively larger peripheral length, and formed to satisfy relational expression: L/d=constant.
    Type: Application
    Filed: December 24, 2009
    Publication date: July 1, 2010
    Applicant: ROHM CO., LTD.
    Inventor: Yoshikazu Nakagawa
  • Publication number: 20100163992
    Abstract: A semiconductor device includes a high voltage first conduction type well in a semiconductor substrate, a second conduction type body in the high voltage first conduction type well, a source region in the second conduction type body, a trench in the high voltage first conduction type well, a first isolation oxide, an impurity doped polysilicon film, and a second isolation oxide stacked in the trench in succession, a drain region in the high voltage first conduction type well on one side of the trench, and a polygate on and/or over the high voltage first conduction type well.
    Type: Application
    Filed: December 27, 2009
    Publication date: July 1, 2010
    Inventor: Mi-Young Kim
  • Publication number: 20100155839
    Abstract: In one form a lateral MOSFET includes an active gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, and a non-active gate positioned above the drain region. In another form the lateral MOSFET includes a gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, the source region and the drain region being of a first conductivity type, a heavy body region of a second conductivity type in contact with and below the source region, and the drain region comprising a lightly doped drain (LDD) region proximate an edge of the gate and a sinker extending from the upper surface of the monocrystalline body to the bottom surface of the monocrystalline semiconductor body.
    Type: Application
    Filed: December 19, 2008
    Publication date: June 24, 2010
    Inventors: Thomas E. Grebs, Gary M. Dolny, Daniel M. Kinzer
  • Publication number: 20100155837
    Abstract: A voltage converter includes an output circuit having a high-side device and a low-side device which can be formed on a single die (a “PowerDie”). The high-side device can include a lateral diffused metal oxide semiconductor (LDMOS) while the low-side device can include a trench-gate vertical diffused metal oxide semiconductor (VDMOS). The voltage converter can further include a controller circuit on a different die which can be electrically coupled to, and co-packaged with the output circuit.
    Type: Application
    Filed: May 26, 2009
    Publication date: June 24, 2010
    Inventor: Francois HEBERT
  • Publication number: 20100148256
    Abstract: Lateral diffused metal oxide semiconductor (LDMOS) devices with electrostatic discharge (ESD) protection capability are presented for integrated circuits. The LDMOS device includes a semiconductor substrate with an epi-layer thereon. Patterned isolations are disposed on the epi-layer, thereby defining a first active region and a second active region. An N-type double diffused drain (NDDD) region is formed in the first active region and a N+ doped drain region is disposed in the NDDD region. A P-body diffused region is formed in the second active region, wherein the NDDD region and the P-body diffused region are separated with a predetermined distance exposing the epi-layer. An N+ doped source region and a P+ diffused region are disposed in the P-body diffused region. A gate structure is disposed between the N+ doped source region and the N+ doped drain region. An additional heavily doped region is formed between the semiconductor and the epi-layer.
    Type: Application
    Filed: April 17, 2009
    Publication date: June 17, 2010
    Applicant: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventor: Yih-Jau Chang
  • Publication number: 20100148257
    Abstract: A MOSFET comprising a substrate of a semiconductor material; source/drain regions, which are arranged at a distance from each other at a surface of the substrate; a gate electrode arranged above an area of the surface of the substrate between the source/drain regions, the gate electrode being electrically insulated from the semiconductor material; at least one recess in the gate electrode, a through-contact arranged in the recess of the gate electrode, the through-contact being electrically insulated from the gate electrode; a terminal contact on the semiconductor material; and a terminal conductor arranged on the side of the gate electrode that faces away from the substrate, wherein the through-contact electrically connects the terminal contact to the terminal conductor.
    Type: Application
    Filed: February 8, 2008
    Publication date: June 17, 2010
    Applicant: austriamicrosystems AG
    Inventor: Georg Röhrer
  • Publication number: 20100148251
    Abstract: A semiconductor device includes: a substrate on and/or over which a first conductive type well is formed; and an LDMOS device that includes a gate electrode and has a drain region formed in the substrate. The LDMOS device includes a trench formed on the substrate, a second conductive type body that is formed on one side of the trench and on the substrate therebeneath, and a first conductive type source region that is formed in the second conductive type body.
    Type: Application
    Filed: December 11, 2009
    Publication date: June 17, 2010
    Inventor: Hyon-Chol Lim
  • Publication number: 20100140699
    Abstract: A semiconductor device includes a logic device and a LDMOS device. The logic device including a first well of a first conductive type formed in the substrate, a first source region and a first drain region formed in the first well, and a first gate electrode formed over the first well. The LDMOS device including a deep well of the first conductive type formed in a second substrate, a body region of a second conductive type and a second well of a first conductive type formed in the deep well, a second source region formed in the body region, a second drain region formed in the second well, a second gate electrode formed over the second substrate, and an impurity layer of the first conductive type formed in the second substrate under the second gate electrode.
    Type: Application
    Filed: December 3, 2009
    Publication date: June 10, 2010
    Inventor: Kwang-Young Ko
  • Publication number: 20100140703
    Abstract: A semiconductor device and a method for manufacturing the same are disclosed. The semiconductor device includes a substrate having a first conductor-type, a buried layer of a second conductor-type on the substrate, a drain, and a first guard-ring on one side of the drain, a second guard-ring on one side of the first guard-ring, and a third guard-ring on one side of the second guard-ring.
    Type: Application
    Filed: December 4, 2009
    Publication date: June 10, 2010
    Inventor: Choul Joo Ko
  • Publication number: 20100140700
    Abstract: A semiconductor device and a method of manufacturing a semiconductor device. A semiconductor device may include a substrate and a laterally diffused metal oxide semiconductor (LDMOS) device. A semiconductor device may include a second conductive type well formed on and/or over a substrate. An LDMOS device may include a drain disposed on and/or over a substrate. An LDMOS device may include a field oxide at one side of a drain, a first conductive type impurity layer on and/or over a substrate, under a field oxide, and/or a second conductive type impurity layer between a first conductive type impurity layer and a field oxide.
    Type: Application
    Filed: November 24, 2009
    Publication date: June 10, 2010
    Inventor: Sang-Yong Lee
  • Patent number: 7723780
    Abstract: A lateral DMOS device includes a body diode region and a protective diode region. The body diode region has a second conduction type well region formed in a first conduction type semiconductor substrate, the second conduction type well region including a first conduction type body region and a drain region each formed in the second conduction type well region, a first conduction type impurity region and a source region formed in the first conduction type body region, and a gate insulating film and a gate electrode formed on the first conduction type semiconductor substrate. The first conduction type body region and the second conduction type well region compose a body diode. In the protective diode region, the first conduction type impurity region is formed at a prescribed interval and the first conduction type body region and the second conduction type well region compose a protective diode.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: May 25, 2010
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Sung-Man Pang
  • Publication number: 20100123196
    Abstract: A LDMOS transistor and a method for manufacturing the same are disclosed. A lateral double diffused metal oxide semiconductor (LDMOS) transistor includes a first dielectric layer formed on a top surface of a substrate; a plurality of second dielectric layers on a top surface of the first dielectric layer; a plurality of contact plugs spaced apart by a predetermined distance in an active region of the substrate, passing through the first and second dielectric layers; and a bridge metal line formed in the second dielectric layers, inter-connecting the contact plugs in a horizontal direction. The bridge metal line formed to inter-connect the contact plugs allows for more current to flow in the presently disclosed LDMOS transistor than in a conventional LDMOS transistor of identical size.
    Type: Application
    Filed: November 9, 2009
    Publication date: May 20, 2010
    Inventor: Cheol Ho CHO
  • Publication number: 20100123194
    Abstract: In a semiconductor substrate of a first conductivity type, first to third drain offset regions of a second conductivity type are formed in that order in a bottom up manner. A body region of the first conductivity type is formed partly in the second drain offset region and partly in the third drain offset region. The second drain offset region has a lower impurity concentration than the first and third drain offset regions. A curvature portion of the body region is located in the second drain offset region.
    Type: Application
    Filed: November 5, 2009
    Publication date: May 20, 2010
    Inventors: Kohei MIYAGAWA, Yasushi Kobayashi, Daigo Yamashina
  • Publication number: 20100123195
    Abstract: A lateral double diffused metal oxide semiconductor (LDMOS) device and a method of manufacturing the same. A LDMOS device may include a high voltage well formed over a substrate, a reduced surface field region formed thereover which may be adjacent a body region, and/or an isolation layer. An isolation layer may include a predetermined area formed over a reduced surface field region, may be partially overlapped with a top surface of a substrate and/or may include an area formed adjacent a high voltage well. A low voltage well may be formed over a substrate. A gate electrode may extend from a predetermined top surface of a body region to a predetermined top surface of an isolation layer. A drain region may be formed over a low voltage well. A source region may be formed over a body region and may have at least a portion formed under a gate electrode.
    Type: Application
    Filed: November 9, 2009
    Publication date: May 20, 2010
    Inventor: Yong-Jun Lee