Abstract: The invention relates to a negative pressure clamp that includes a bearing plate including a plurality of chambers into each of which gives a suction duct, said working plate being covered with a flexible and formable working plate having suction openings formed therein for drawing a part to be maintained and perforations in which are inserted the lugs of the bearing plate arranged about the chambers.

Abstract: A clearance increasing jig of a heat transfer tube, includes: a jig main body inserted into a clearance between adjacent heat transfer tubes; an inflow hole provided in the jig main body and configured to allow a fluid to flow into the jig main body; and an increasing unit provided in the jig main body and configured to increase the clearance as the fluid flows into the jig main body.

Abstract: The vise includes a seat body having two movable jaws separately with two inner threads, a fixed jaw and a rail. A screwing rod has a rear portion and a front portion whose diameter is less than the rear portion. A first outer thread is formed on the rear portion. A step is formed between the front portion and the rear portion. A screwing tube telescopically and unrotatably sheathes the front portion of the screwing rod and has a second outer thread. The two movable jaws are separately engaged with the screwing tube and screwing rod by screwing the outer threads and the inner threads. A spiral direction of the first outer thread is contrary to the second outer thread. A main spring is nipped between the screwing rod and screwing tube. A crank is axially connected to the front portion of the screwing rod for rotating the screwing rod.

Abstract: A method for mutually positioning tubes. End faces, which includes a generally annular and generally circular end surface near an inner surface of the tube and a beveled edge surface connecting the end surface to an outer surface of the tube, are provided on first and second tubes, respectively. Plural clamping cylinders are engaged with the first and second tubes, respectively. Each cylinder is radially arranged onto and evenly distributed around respective tubes. The first and second tubes are pre-positioned relative to each other such that their respective end faces are opposite each other. At least one radial offset is assessed between the respective end surfaces of the first and second tubes. The clamping cylinders of the first and/or second tube are moved relative to each other in accordance with the assessed radial offset based on an optimization of areas in which their respective end surfaces coincide.

Abstract: A holding apparatus includes a base provided with a protrusion for supporting a substrate, and holds the substrate via liquid with which a gap between the substrate supported by the protrusion and the base is filled. The holding apparatus includes a heat storage member arranged on the base to be covered with the liquid. The heat storage member includes a latent heat storage material, and a heat conduction material containing the latent heat storage material to conduct heat to the latent heat storage material.

Abstract: In an embodiment, a chuck to support a solar cell in hot spot testing is provided. This embodiment of the chuck comprises a base portion and a support portion disposed above the base portion. The support portion is configured to support the solar cell above the base portion and to define a cavity between a bottom surface of the solar cell and the base portion that thermally separates a portion of the bottom surface of the solar cell from the base portion.

Abstract: A protective chuck is magnetically levitated on a substrate with a gas layer between the bottom surface of the protective chuck and the substrate surface. The gas layer protects a surface region of the substrate against a fluid layer covering the remaining of the substrate surface without contacting the substrate, reducing or eliminating potential damage to the substrate surface. The magnetically levitated protective chuck can enable combinatorial processing of a substrate, providing multiple isolated processing regions on a single substrate with different material and processing conditions.

Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.

Abstract: A receiving means for receiving and mounting of wafers, comprised of: a mounting surface, mounting means for mounting a wafer on the mounting surface and compensation means for active, especially locally controllable, at least partial compensation of local and/or global distortions of the wafer.

Abstract: Non-contact manipulating devices and methods can include a fluid distribution member including a first fluid port configured to dispense fluid and create a Bernoulli effect to attract an article to be manipulated by the manipulating device while maintaining a gap between the article and the fluid distribution member. The fluid distribution member can further include a second fluid port configured to dispense fluid to assist in maintaining the gap. The non-contact manipulating devices and methods can further include a controller configured to control a fluid flow through at least the second fluid port to help maintain the gap.

Abstract: A sheet restrainer is used to restrain movement of continuously traveling glass sheet and includes arms on either side of the glass sheet. A driving device coupled to the arms moves the arms from a retracted position in which the arms are withdrawn from the glass sheet to an engaged position in which the arms are near the glass sheet and in alignment with each other. Rollers are connected to the arms and contact the glass sheet in the engaged position. A damping device applies an adjustable damping force to at least one of the arms dampening movement of the arm in the engaged position thereby restraining movement of the sheet. In a method of operation, the damping devices restrain angular and/or lateral movement of the sheet by transmitting movement of the sheet against the rollers into a resistive damping force of the damping devices.

Abstract: The invention concerns a safety clamping system for the fastening of workpieces on machine tools, wherein, in addition to one clamping mechanism known from the state of the art, at least one positioning mechanism is also provided, which can pre-position the workpiece roughly before the affixing and move it into the final affixing position and, at the same time, can facilitate the monitoring for an undesired detachment of the workpiece.

Abstract: A suction cup for a tool driven by vacuum is presented, the suction cup in a first or upper end arranged to be brought into fluid flow communication with a vacuum source and in its opposite end arranged to be brought tightly into contact with the surface of an object to be handled. The suction cup is in its lower end arranged to be coupled to a sealing ring having a sealing surface arranged between an outer periphery and a through-opening defined by an inner periphery, and the sealing ring in the region of its inner periphery having a lip arranged to engage with the suction cup, to which purpose the suction cup in its lower end has a circumferentially running groove) in which the peripheral region and the lip of the sealing ring is insertable under form fitting engagement and in a radially overlapping relation between the groove and the lip in the region (r) of engagement.

Abstract: The invention concerns a clamping system for the clamping of workpieces, wherein clamping means can be moved by a small spacing relative to a stationary affixing block, so as to be able to clamp a workpiece independently of a fastening grid prespecified on a machine tool or to compensate for a distance change between clamping components located on the workpiece, so that a zero point previously defined on the workpiece again coincides after a renewed clamping with clamping components whose distances were changed.

Abstract: Methods and apparatus provide for delivering a controlled supply of gas to at least one aero-mechanical device to impart a gas flow to suspend a material sheet; preventing lateral movement of the material sheet in at least one direction when suspended; and imparting a stream of water, from a side of the material sheet opposite the at least one aero-mechanical device, to cut the material sheet when suspended.

Abstract: Provided is a clamping device having improved safety and an improved clamping force for clamping a work to an attaching table, said work having the inner circumferential surface thereof to be processed. The clamping device clamps a work (101) disposed on the reference surface (32) of an attaching table (30). The clamping device is provided with: a board-like fixing member (10), which has formed therein a hole (11a) that is larger than the inner diameter (D1) of the work (101) but smaller than the outer diameter (D2) of the work, and which is in surface-contact with the end surface (101a) of the work (101) disposed on the reference surface (32) of the attaching table (30); and a pressing force applicator (20), which has a cylindrical shape that surrounds the attaching table (30), and which applies a pressing force toward the end surface (101a) of the work (101) with respect to the fixing member (10).

Abstract: An opener and a buffer table for a test handler are disclosed. The opener includes an opening plate, a plurality of pin blocks forming pairs, and at least one or more interval retaining apparatus for retaining an interval between the pin blocks forming a pair. Each of the pin blocks is movably coupled to the opening plate, and includes opening pins for releasing a holding state of a holding apparatus that holds semiconductor devices in a carrier board. Although semiconductor devices to be tested are altered in size and a carrier board loading with the semiconductor devices is thus replaced, the opener does not need to be replaced, thereby reducing the replacement cost and the waste of resources.

Abstract: A clamp device includes a support mechanism that supports a grip member when expanding the diameter thereof, a clamping hydraulic cylinder that can drive the grip member and a clamp rod axially forwards and backwards (up and down), and a main body member to which the grip member, the clamp rod, the support mechanism, and the clamping hydraulic cylinder are mounted, with the grip member, the clamp rod, and the support mechanism being positioned at one end portion of the body member, and with the common axis of the grip member and the clamp rod being offset from the axis of the clamping hydraulic cylinder in a direction orthogonal to the clamp rod.

Abstract: In an embodiment, a chuck to support a solar cell in hot spot testing is provided. This embodiment of the chuck comprises a base portion and a support portion disposed above the base portion. The support portion is configured to support the solar cell above the base portion and to define a space between a bottom surface of the solar cell and the base portion that thermally separates a portion of the bottom surface of the solar cell from the base portion.

Abstract: The invention relates to a pneumatic coupling module, in particular for a zero-point clamping system, with a least one pneumatically operable coupling device, to which the pneumatic medium can be fed via a supply channel and which is constructed in such a manner that the coupling device occupies a release position in its pressurized state and a locked position in its non-pressurized state, wherein the coupling module comprises an interface area for coupling another pneumatic coupling module or a pneumatically operable working module.

Abstract: A laser-machining system and method is disclosed for forming retainers on a suture thread. The laser system is preferably a femtosecond laser system which is capable of creating submicron features on the suture thread while preserving strength of the suture thread. The laser-machining system enables creation of retainers and self-retaining suture systems in configurations which are difficult and/or impossible to achieve using mechanical cutting technology.

Abstract: Respective attracting openings of a bonding head are disposed so as to avoid joining regions at which bump electrodes (obverse electrodes) of a semiconductor chip are joined with bump electrodes of a package substrate. Bump electrodes (reverse electrodes) that are connected to the bump electrodes are provided at a reverse side of the semiconductor chip at positions opposing the bump electrodes. Because the attracting openings do not overlap the joining regions, the bump electrodes (reverse electrodes) are not suctioned at the joining regions.

Abstract: A composite fabrication vent assembly for connection to an inflatable bladder, the combination of a vent assembly and an inflatable bladder, and a method of mechanically connecting a vent assembly and a bladder. The vent assembly comprises a body member having a first clamping surface, a clamping member having a second clamping surface, and a carriage member interconnecting the body member and the clamping member, with the first and second clamping surfaces in opposing relationship. With the open end of an inflatable bladder inserted between the opposed clamping surfaces, the carriage member is adapted to translate the body member and clamping member toward one another to form an airtight seal with the inflatable bladder. A controlled source of pressurized gas, connected to a gas inlet of the vent assembly, can then inflate and deflate the bladder in a controlled manner through one or more passageways in the vent assembly.

Abstract: A holding apparatus holds a substrate. The apparatus includes a base having burls that support the substrate. A top surface of the base is configured such that a capillary pressure of a liquid provided in a gap between the base and the substrate supported by the burls increases with reduction in an amount of the liquid in the gap.

Abstract: A holding apparatus holds a substrate. The apparatus includes a base having burls that support the substrate, a pool whose capacity is variable and from which a liquid is to be supplied into a gap between the base and the substrate supported by the burls, and a regulator configured to regulate the capacity of the pool.

Abstract: A method and device for treating a wafer-shaped article utilizes a novel clamping mechanism, which permits wafer shift to be performed with reduced wear to the chuck pins. A wafer is rotated on a spin chuck that has a plurality of pins positioned at a periphery of the wafer shaped article. The pins each have a head portion which, in a service position, extends radially inwardly of and above the wafer. Gas is supplied onto a surface of the wafer facing the spin chuck at a flow rate sufficient to displace the wafer upwardly into contact with the head portions of the pins. This serves to clamp the wafer against the head portions of the pins. However, the pins contact the wafer only on upwardly oriented wafer surfaces and the wafer is supported from below solely by the gas flow.

Abstract: A charged particle lithography system comprising a preparation unit. The preparation unit comprises a housing having a first load port for loading and/or unloading a substrate into or out of the housing, a substrate transfer unit for locating the substrate onto a substrate support structure within the housing, and a second load port for loading and/or unloading the substrate support structure supporting the substrate.

Abstract: A substrate laminating apparatus which sticks substrates together in vacuum with high accuracy. The apparatus includes a first chamber into which two substrates are carried; a second chamber in which substrates are stuck together; and a third chamber which delivers a substrate laminate. The pressure level in the first chamber and the third chamber is varied from atmospheric to medium vacuum under control and that in the second chamber is varied from medium vacuum to high vacuum under control. In the second chamber, electrostatic adsorption means which can move up and down picks up an upper substrate and holds it on an upper table.

Abstract: A clamping sleeve is of generally cylindrical shape with a hollow interior and comprises an upper crown, a lower crown, and a tubular sidewall. The upper crown is positioned at an upper end of the clamping sleeve. The lower crown is positioned at a lower end of the clamping sleeve. The tubular sidewall is positioned between the upper and lower crown and includes one or more corrugations that utilize spring like principles such that pressure applied to the external surface of the tubular sidewall circumferentially flexes the clamping sleeve in order to reduce the diameter of the clamping sleeve and apply a clamping force to an object within the clamping sleeve. The clamping sleeve may be utilized in a work support that includes a plunger positioned within the clamping sleeve, wherein a pressurized flowable medium provides pressure to the exterior of the tubular sidewall thereby causing the clamping sleeve to apply a clamping force to the plunger.

Abstract: A workpiece-holding unit for installation on machining centers for connecting rods, comprising a crosspiece which is adapted to be rotatably supported about its axis in front of a machining head of the machining center and has internal, hydraulic longitudinal ducts which communicate with respective hydraulic outlets on the main faces of the crosspiece and are connected to hydraulic feed means. Several workpiece-holding tools are installable on the main faces of the crosspiece and are provided with positioning mechanisms and locking mechanisms for at least one connecting rod, which are hydraulically operated via respective hydraulic lines leading at positions aligned to said hydraulic outlets.

Abstract: A locating pin assembly is provided. The assembly includes a body and a cylinder assembly for moving a ram in a reciprocally linear manner. A bearing is coupled to the ram and configured to engage a bearing wedge to reduce “play” between the ram and the assembly. Illustratively, the bearing and bearing wedge reduce or substantially eliminate this “play” to prevent axial rotation of the ram.

Abstract: A lower die or nest apparatus is described to create a hemming environment that locates and holds a metal panel to a frame using suction in a manner that substantially resists said loads on the panel without damage or deformation. The vacuum nest includes a frame made of a rigid material with an outer work surface and an interior region with a sealed elongated channel shaped to the contour of the metal panel. A polymeric rope is inlayed within a groove formed in the interior region to form the sealed elongated channel. A support member may be formed within the channel by inlaying additional polymeric ropes into grooves formed within the channel. A vacuum source is fluidly coupled with the sealed elongated channel to create a downward force by evacuating the volume of the channel.

Abstract: Embodiments of the invention provide a thermal processing system and methods for uniformly heating and/or cooling a semiconductor wafer. Embodiments of the invention may be applied to provide a more uniform temperature profile when processing 300 mm and larger wafers having different curvature profiles that occur at the same and/or different points in a manufacturing cycle. Wafer curvature can be dependent on the number and thickness of the metal layers.

Abstract: Inflatable rings for supporting friction welding workpieces, and associated systems and methods. A support assembly for joining multiple workpieces in a representative embodiment includes a carriage and a generally ring-shaped support member that in turn includes a body and at least one inflatable member carried by the body and positioned to expand from a first configuration to a second configuration.

Abstract: An annular piston is vertically movable and rotatable. A guide groove is provided in an outer peripheral portion of the annular piston, and an engaging ball to be fitted into the guide groove is provided on an inner peripheral wall of a cylinder hole. A transmission mechanism prevents the clamp rod and the annular piston from rotating relatively to each other and permits them to move relatively to each other in a vertical direction. When the clamp rod is moved from a released raised position to a locked lowered position, the annular piston descends while rotating via a rotational groove and the engaging ball, and the annular piston causes the clamp rod to rotate, causing the clamp rod to descend straight down.

Abstract: In the course of a method for handling a workpiece having at least one through-opening, at least one suction element and the workpiece are placed against each other to form a suction chamber. A vacuum is generated in the suction chamber in order to fix the workpiece and the suction element to each other with a holding force for subsequent manipulation of the workpiece. The workpiece and the suction element are fixed to each other with a holding force by at least partially providing at least one through-opening of the workpiece opening into the suction chamber with a covering in order to reduce the flow of air through the through-opening to the suction chamber after the vacuum has been generated. A workpiece handling system is used to carry out the above-mentioned method.

Abstract: The invention relates to a holding device (1), especially for fixing a glass substrate during a cutting process. The holding device comprises a housing (2) and a plunger (3) which can be axially displaced in relation to the housing (2). The plunger has a first and a second end section (4, 5), the first end section (4) projecting from the housing (2) and having a suction element (6). The aim of the invention is inter alia to improve a known holding device in such a manner that the substrate can be approached and fixed almost without the application of force. The holding device (1) according to the invention is characterized in that the plunger (3) is received in the housing (2) by a pneumatic spring. A holding system (20) comprising a plurality of holding devices (1) is protected in a support plate (24), the support plate (24) having a vacuum channel collector (21) which is connected to vacuum channels (13) and which is connected to a common vacuum pump (14).

Abstract: A pneumatically actuated area vacuum gripper for gripping and, if necessary, separating workpieces is provided by the present disclosure. In particular, the vacuum gripper is used with thin, flexible workpieces, and has a suction chamber, which has a suction wall with perforations, to be placed on the workpiece. An ejector nozzle has a connection and an outlet, the ejection nozzle being connected to the suction chamber via its connection, and the outlet of the ejector nozzle opening to the outside or into an exhaust air duct, and the suction inlet of the ejector nozzle empties into the suction chamber, whereby the direction of the air stream in the connection coming from the suction chamber corresponds to the direction of the main air conveyance in the ejector nozzle.

Abstract: The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.

Abstract: A part mounting apparatus of the invention comprises: a pickup head having a pickup tool for picking up a part; a pickup head supporting unit for supporting the pickup head; a pickup head supporting arm having one end portion where the pickup head is disposed and an other end portion rotatably mounted to the pickup head supporting unit; a pickup head inverting unit for vertically inverting the pickup head with respect to the pickup head supporting unit; and a pickup tool rotating unit for rotating the pickup tool about a rotational axis of the pickup tool, wherein the pickup tool rotating unit includes driving force generating unit and driving force transmitting unit for transmitting a driving force of the driving force generating unit as a rotational force of the pickup tool, and the driving force generating unit is disposed on the pickup head supporting unit.

Abstract: A clamp device including a detection mechanism provided to detect whether the clamp device is in a clamped state or an unclamped state. The detection mechanism includes a tilt plate tiltably placed inside a switch holder installed on a body and a sliding rod displaced together with a piston rod and displaced in the direction normal to the tilt plate. When the sliding rod presses and tilts the tilt plate while a piston is displaced, a second detection switch detects that the clamp device is in the unclamped state.

Abstract: An apparatus and method for aligning a gemstone such as diamond (106) with a predetermined vertical axis (108) is described. The apparatus includes an upwardly extending nozzle (105) aligned with the vertical axis (108) and sized to allow the gemstone (106) to settle into it under the action of gravity so that the article is supported by the aperture. A fluid supply system supplies fluid to the nozzle (105) under sufficient pressure to support the article within or above the aperture. A fluid pressure control system controls the pressure of fluid supplied to the nozzle (105), so that it can be reduced gradually.

Abstract: Embodiments of the invention provide a thermal processing system and methods for uniformly heating and/or cooling a semiconductor wafer. Embodiments of the invention may be applied to provide a more uniform temperature profile when processing 300 mm and larger wafers having different curvature profiles that occur at the same and/or different points in a manufacturing cycle. Wafer curvature can be dependent on the number and thickness of the metal layers.

Abstract: An exemplary lens holding apparatus includes a pipe, a number of hollow lens holding units, and an air pump. The pipe has an airtight end and an air vent end. The lens holding units each are in communicate with the pipe and each include a number of first portions and a number of second portions. The first and second portions are alternately arranged and each have an inner space for communicating each other. The second portions each have a top wall and a bottom wall. The top wall has a first through hole defined therein and in communicate with the inner space of the second portion. The air pump is connected to the air vent end and configured for pumping air from the pipe, such that lenses received in the first through holes are releasably held in position.

Abstract: The support system and method enables exact and preferably machine assisted manual location and height placement of a vacuum operated hold down with rigid pre-set support on a conventional working table. A height adjustable jack screw support with angularly flexible hold down enables a holding support engaging the bottom of a work piece even where a lower surface of the work piece has an irregular shape due to the ability of the upper cup support to passively tilt to engage the work piece.

Abstract: A clamp device has a gripping member which is expandable and contractible and is inserted into an aperture in a workpiece and grips the aperture, a clamp rod including a tapered shaft portion that fits into the gripping member, and a drive means for driving the clamp rod forwards and backwards. Provided is a support mechanism that supports the gripping member by fluid pressure when the gripping member is radially expanded, and a fluid pressure release means that releases the fluid pressure of the support mechanism after radial expansion of the gripping member when the clamp rod is driven by the drive means to perform clamping. The support mechanism has an annular pressure reception member that supports the gripping member, and a supporting fluid chamber that causes fluid pressure in the direction opposite to the clamping direction to be received on the annular pressure reception member.

Abstract: A clamping fixture comprises a chuck (1) and a workpiece pallet (22) releasably located thereon. The chuck (1) is provided with a clamping mechanism for locating the workpiece pallet (22). The clamping mechanism comprises a plurality of clamping members configured as plungers (10). The workpiece pallet (22) comprises a clamping surface (28a) running essentially along its shell surface (26) for surface contacting the plungers (10) by its front part (12) provided with a compression surface (13) during clamping.

Abstract: The present invention relates to a level compensator in a vacuum system including a fixing tube fixed to a structure, a hollow slider disposed in the fixing tube so as to move in a vertical direction, and a spring disposed between the fixing tube and the slider so as to elastically support the slider, in which a vacuum pump having an inflow port at one end, an outflow port at the other end, and an inhalation hole in a side wall thereof is mounted inside the slider. When compressed air guided to an upper opening in the slider passes between the inflow port and the outflow port and is discharged through a discharging port formed on the side wall of the slider, air is induced to the space inside the slider from the lower portion of the slider, and is discharged along with the compressed air.

Abstract: A clamp device for clamping a panel regardless of the panel's shape may include an air conduit, an air supplying unit that is communicated with the air conduit for selectively supplying air thereto and a tube that is connected with the air conduit to communicate therewith and expanded outwardly.

Abstract: An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.