Abstract: A new arrangement for machining parts is disclosed. The parts to be machined are mounted on fixture plates on a fixture. Using a stationary hydraulic line, hydraulic equipment is then pressurized by a pump within the fixture. The pump is mechanically powered by a separate (and disconnectable) power source. A rotatable coupling is attached to the pump. It receives a spindle from a CNC machine, enabling the machine to activate the pump by rotating the spindle while the spindle is received in the coupling. The coupling has axially extending prongs that form slots that accommodates the spindle. The prongs have ends that taper inwardly toward the slots. The spindle is also used to actuate a pressure release valve. The fixture also has at least four angled work faces and an access face that separates two of those faces. In operation, parts are first mounted on the fixture plates. The fixture is then moved to a work area, where the spindle actuates the pump, pressuring clamps that lock the parts in position.

Abstract: A mandrel for producing a fibre-reinforced composite part, in particular a blade for a wind turbine is disclosed. The mandrel includes an expandable body with an outer surface onto which a fibre material of the fibre-reinforced composite part is layable out. The expandable body is expandable in an expanded state, wherein in the expanded state the outer surface forms an interior shape of the fibre-reinforced composite part to be produced. Moreover, the expandable body is collapsible in a collapsed state.

Abstract: An apparatus for processing a medical stent that includes a holding device for holding a stent and a processing device for processing the stent held by the holding device that includes a first chamber for a fluid medium adapted to exert pressure around the stent. The first chamber for the fluid medium at least partially surrounds or encompasses the stent in the holding device that may include a housing which substantially encloses the first chamber for the fluid medium. A method of processing a medical stent is described. The method may include holding a stent with a holding device, and processing the stent with a processing device while holding the stent with the holding device. Holding the stent may include pressurizing a first chamber for a fluid medium to exert pressure around the stent. A method of producing or manufacturing a stent according to this method is described.

Abstract: The invention relates to a workholder (10) for holding a workpiece to be processed in a machine tool, which workholder (10) is in the form of a annular body (12) having a central through hole (14), said annular body (12) having at least one weakened area (18, 20; 34, 36, 38, 40; 50, 52, 54, 56) obtained by material removal, as well as at least one pressure chamber (22; 42, 44; 58, 60) assigned to said at least one weakened area (18, 20; 34, 36, 38, 40; 50, 52, 54, 56) that can be charged with a pressurized fluid. Said at least one weakened area (18, 20; 34, 36, 38, 40; 50, 52, 54, 56) is dimensioned and arranged so as to cause said annular body (12) to be elastically deformable in an axial and/or a radial direction (a, r). As a result, with pressure acting on said pressure chamber (22; 42, 44; 58, 60), said annular body (12) can then be deformed elastically in a well-defined manner in an axial and/or a radial direction (a, r).

Abstract: A cradle assembly for a pressure decay leak tester is provided. The assembly operatively receives a printhead integrated circuit carrier having a plurality of printing fluid paths defined therein, respective fluid inlets in fluid communication with respective fluid paths and a locating formation to facilitate correct location of the carrier on the tester. The assembly includes at least one complementary locating formation for engaging the locating formation of the carrier, and at least one fluid outlet for charging the carrier with fluid via a respective fluid inlet of the carrier. Also included is a clamping device for clamping the carrier to the fluid outlet, so that the integrity of the fluid paths is observable via pressure decay testing, and a control system operatively connected to the clamping device for controlling operation of the clamping device.

Abstract: A universal tensioning apparatus for a work piece to be tensioned, having a housing with a pressure chamber filled with a pressure medium and a covering sealing the housing and the pressure chamber. In the area of the housing a pressure introduction element is located for exerting pressure on the pressure medium and a pressure transferring element for transferring the pressure of the pressure medium onto a tensioning element to be tensioned. The pressure medium is an elastic solid and the pressure is adjustable and controllable by a pressure sensor. The pressure medium is preferably a one-piece silicon substance by which a pressure introduced radially relative to the longitudinal axis of the apparatus is transferred by the pressure-transferring element axially onto the tensioning element.

Abstract: This patent pertains to a work piece clamping system with manual or powered clamping. Work piece locations of all three axis can be determined from the device. Various clamping devices can be included in the system. Single or multiple work pieces of various sizes and shapes can be clamped.

Abstract: A pneumatic assembly for a pressure decay tester of printhead integrated circuits includes a pressurized air supply. A pneumatic clamping arrangement is in fluid communication with the pressurized air supply for clamping a carrier for the printhead integrated circuits such that the carrier is in fluid communication with the printhead integrated circuits. A valve arrangement applies a predetermined pressure to the carrier. A sensing arrangement senses a static pressure in the carrier. A control system is in communication with the clamping, valve and sensing arrangements to control operation thereof and to generate a discernible signal representing said static pressure such that a decay in said static pressure can be determined.

Abstract: In order to improve a receiving unit for tools or workpieces, comprising a receiving member (14) and a clamping apparatus (30) for the tool or workpiece which is associated with it and has clamping elements (40) of a clamping device (32) arranged in a receiving area (26) of the receiving member (14) and a unit (60) for generating a clamping force, in such a manner that a more simple actuation of the clamping device (32) is possible whilst maintaining a reliable clamping of the tool or workpiece, it is suggested that the unit (60) for generating a clamping force have a supporting element (90) with a supporting surface (92), an actuator element (70) with a pressure surface (76) and a wedging element (80) which can be moved into an intermediate space (94) between the supporting surface (92) and the pressure surface (76) as a result of movement in an entry direction (96) from a release position into a pressure position in order to displace the actuator element (70) away from the supporting element (90) from a fir

Abstract: Provided is a scan stage for a semiconductor wafer pollutant measurement apparatus, which includes: a stage main body which comprises: a circular fixed housing; an adsorption plate which is rotatably installed in the inside of the fixed housing, at the center of which an adsorption path is formed, at the bottom of which a vacuum port is connected, and which is rotated by an external rotating force; and a step motor which is placed at the bottom of the fixed housing and connected with the adsorption plate; a base plate that is supported by pillars to form a lower space between the fixed housing of the stage main body and the base plate; a cylinder at the bottom of which a cylinder load is connected so that the base plate moves up and down; and support jigs that hold up a wafer in the outer side of the stage main body, in which three support jigs are disposed in proximity with the outer circumference of the stage main body.

Abstract: Bracing means for supporting a moveably mounted or flexible component during a machining operation that has an expandable member adapted to fit between a component and a support surface. When the expandable member is expanded a bracing member will resist movement and/or flexing of the component caused by forces arising during the machining operation. The expandable member is deformable to substantially conform to the shape of the component and the support surface.

Abstract: A clamping apparatus for attaching work pieces to be machined to the work table of a machine tool in a precisely defined position comprises at least one clamping rail to be attached to the work table of the machine, as well as at least one work piece holder. The clamping rail is provided with an elongate protruding portion, the front face thereof constituting a stop surface and which defines a recess between itself and the work table of the machine tool. The elongate protruding portion may be provided with threaded bores for receiving clamping screws. Each work piece holder includes a clamping portion which can be inserted into the recess and clamped therein by means of the clamping screws. The clamping rail includes a flat bottom surface resting on the surface of the work table of the machine tool and running perpendicular to the aforementioned front face of the elongate protruding portion.

Abstract: Workpieces of large dimensions, typically body pressings or fuselage panels, are supported and secured for machining by a device capable of movement in a vertical direction and adaptable thus to the particular geometry of the workpiece. The vertical movement is produced by a rod of which the top end carries a head incorporating a pivotable fixture mechanism, equipped with a suction cup connected to a source of negative pressure by way of a suction duct and activated to clamp the work once the head is in position.

Abstract: A flexible fixture system for a CNC machine is coupled to a base fixture. The flexible fixture includes quick connects that connect with the base fixture in order to allow hydraulic fluid, air, and water to be communicated from the base fixture to the flexible fixture system. The flexible fixture system includes features operable to hold a workpiece within the CNC machine. The flexible fixture system is modular and may be swapped out for a different flexible fixture in order to allow other operations to be performed on the workpiece.

Abstract: A plurality of air levitation units that jet air to the lower surface of a substrate are placed below the substrate, and the substrate is supported in a noncontact manner so as to be substantially horizontal. Further, a portion subject to exposure of the substrate is held by a fixed-point stage from below in a noncontact manner, and the surface position of the portion subject to exposure is adjusted in a pinpoint manner. Accordingly, exposure can be performed on the substrate with high precision, and a configuration of a substrate stage device can be simplified.

Abstract: A labeling machine, a vacuum drum for use in a labeling machine, and a method of using a labeling machine having a vacuum drum. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.

Abstract: An exemplary clamp includes a holder, a moving unit, a fixing arm, and a driving unit. The moving unit includes a push block, a connecting member, and a guiding member. The guiding member is fixed on the holder. The connecting member connects the push block and the guiding member. The push block includes a slanted side surface. The push block is guided to move by the guiding member. The slanted side surface of the push block interacts with the connecting member. The fixing arm is fixed to the connecting member. The driving unit is connected to the push block. The driving unit is capable of moving the push block of the moving unit.

Abstract: An adaptor and its method of use for cleaning the work piece chuck clamping surfaces of a turning center (lathe). An adaptor of the present invention includes a number of orifices that are arranged and oriented to direct pressurized fluid (e.g., air and/or another fluid) against the clamping surfaces of the work pieces chucks when a work piece is not present. The pressurized fluid impinges on the work piece chuck clamping surfaces, thereby removing chips and/or other debris therefrom.

Abstract: The invention relates to a method of clamping a substrate on a surface of a substrate support structure. First, a liquid is applied on a surface of the substrate support structure. The surface is provided with a plurality of contact elements. The liquid is applied such that the contact elements are fully covered by a liquid layer. Then the substrate is provided and placed onto the liquid layer. Finally, liquid underneath the substrate is removed such that the substrate rests on the plurality of contact elements and is clamped by means of a capillary clamping force exerted by a capillary layer of the liquid between the substrate and the surface of the substrate support structure.

Abstract: A sheet restrainer is used to restrain movement of continuously traveling glass sheet and includes arms on either side of the glass sheet. A driving device coupled to the arms moves the arms from a retracted position in which the arms are withdrawn from the glass sheet to an engaged position in which the arms are near the glass sheet and in alignment with each other. Rollers are connected to the arms and contact the glass sheet in the engaged position. A damping device applies an adjustable damping force to at least one of the arms dampening movement of the arm in the engaged position thereby restraining movement of the sheet. In a method of operation, the damping devices restrain angular and/or lateral movement of the sheet by transmitting movement of the sheet against the rollers into a resistive damping force of the damping devices.

Abstract: A substrate support structure for clamping a substrate by means of a capillary force created by a liquid clamping layer having a lower pressure than its surroundings. The substrate support structure comprises a surface provided with a plurality of substrate supporting elements for holding the substrate, and the surface further comprises portions with different capillary potential for inducing, during clamping, a predetermined capillary flow within the liquid clamping layer.

Abstract: An intensified machinist vise for supporting and holding work pieces during the machining thereof. The intensified machinist vise includes an elongate housing having a top and a bottom, and also having a first end and a second end, and also includes a first jaw being securely mounted upon the elongate housing, and further includes a second jaw being rotatably and adjustably mounted upon the elongate housing, and also includes a jaw support assembly for supporting the second jaw upon the elongate housing, and further includes an actuator assembly for moving the second jaw toward and away from said first jaw.

Abstract: A device and a process for transporting a sleeve, in particular for a cup or a can, in which the sleeve is transported during the production process from a first working station to a second working station. The sleeve is transported by a blast of air, whereby the blast of air is generated in the opposite direction to the transport direction of the sleeve. A first working station comprises a mandrel for taking up the sleeve. An air jet is provided for creating the blast of air, the mouthpiece of the air jet being directed towards the mandrel in the opposite direction to the transport direction of the sleeve.

Abstract: Methods and apparatus provide for delivering a controlled supply of gas to at least one aero-mechanical device to impart a gas flow to suspend a material sheet; preventing lateral movement of the material sheet in at least one direction when suspended; and imparting a stream of water, from a side of the material sheet opposite the at least one aero-mechanical device, to dice the material sheet when suspended.

Abstract: An inner member having a supply port is installed at the inside of a housing, wherein the housing and the inner member are connected together by connecting bolts. Air is supplied to the supply port of the inner member and is directed and introduced through communication passages into an annular passage. Thereafter, the air is directed outwardly from a plurality of lead-out holes, which communicate with the annular passage, in a swirling direction with respect to an annular recess facing the workpiece. In addition, by having the air flow along the annular recess, which is formed with a substantially trapezoidal shape in cross section, the workpiece is maintained in a non-contact state with respect to a holding surface of the inner member.

Abstract: A device for positioning a workpiece includes a socket body rotatably held on a metallic ball by an array of permanent magnets arranged into a partial socket. An air delivery system controls a flow of air passing between the magnets and the ball to alter the friction between the socket body and the ball. A positive flow of air into the socket reduces the friction, allowing the workpiece to be more easily rotated during repositioning, whereas drawing air away from the socket produces a partial vacuum which increases the friction, causing the socket body to be locked in a single position on the ball.

Abstract: The present invention is directed towards a chucking system to hold a substrate, said system including, inter alia, a chuck body having first and second opposed sides, said first side including an array of fluid chambers arranged in rows and columns, said fluid chambers each comprising first and second spaced-apart recesses defining first and second spaced-apart support regions, with said first support region cincturing said second support region and said first and second recesses, and said second support region cincturing said second recess, with said substrate resting against said first and second support regions, with said first recess and a portion of said substrate in superimposition therewith defining a first chamber and said second recess and a portion of said substrate in superimposition therewith defining a second chamber, with each column of said first chambers and each row of said second chambers being in fluid communication with a differing source of fluid to control a flow of fluid in said array

Abstract: A vacuum hold-down device comprising a base member (1) and a separate workpiece support (8) which co-operate to define a vacuum chamber. The device further comprises a venturi (15) having an inlet port (7) for connection to a source of pressurized fluid, an outlet (9) for fluid from the venturi, and a fluid connection (19, 5) from a low pressure region of the venturi (15) to the inside of the vacuum chamber, for providing a partial vacuum therein. The partial vacuum will hold the base member (1) and the workpiece support (8) together to maintain a peripheral seal therebetween. The workpiece support (8) is provided with securing means (16) for securing a workpiece (10) thereon. The invention also provides a vacuum hold-down system comprising the base member (1) and a plurality of interchangeable workpiece supports (8).

Abstract: [Problems] To provide a clamp which can enhance machining precision of a work by suppressing generation of chatter vibration when the work is machined by means of a machine tool. [Means for Solving Problems] The clamp (8) is provided with abutting devices (9) for clamping a work (2) when it is machined by means of a machine tool. The abutting device (9) comprises a plurality of portions (14) abutting against the surface of the work (2), a press-urging means (16) for press-urging the plurality of abutting portions (14) toward the work (2), and a means (17) secured to the body of the clamp (8) and moving in the same direction as the press-urging direction of the press-urging means (16) when the plurality of abutting portions (14) abut against the work (2) to stop at the position kept abutting against the work (2) so as to prevent retraction of the abutting portions (14) by utilizing noncompressive fluid.

Abstract: A holding/turning device for touch-sensitive flat objects, in particular wafers, with a distance positioning device which is arranged for holding the object perpendicular to the object plane at a defined distance, a lateral positioning device, arranged for positioning the object in the object plane and for rotating together with the object about a rotational axis perpendicular to the object plane, and with a rotational drive, coupled with the lateral positioning device, providing a driving force for rotating the object about the rotational axis, wherein the driving force can be applied to the object by means of the lateral positioning device. The distance positioning device has means for holding the object without involving contact, and is decoupled from the rotational drive in such a way that the distance positioning device does not rotate together with the object.

Abstract: Disclosed are a substrate support apparatus and an apparatus for examining the seal pattern of an LCD cell. The substrate support apparatus includes a movable stage provided with drawing nozzles for attaching a substrate to an upper surface and adapted to rotate by a predetermined angle; a fixed stage spaced from the movable stage and provided with floating nozzles for ejecting air upward and drawing nozzles for drawing air downward; and a driving device coupled to the movable stage to rotate the movable stage. The apparatus for examining the seal pattern of an LCD cell includes the substrate support apparatus; and a gantry unit including support platforms positioned on both sides of the substrate support apparatus, a bridge positioned above the substrate support apparatus to connect the support platforms, and a correction device coupled to the bridge to examine and repair a seal pattern of a substrate.

Abstract: A clamping apparatus detachably clamps a work on a pallet. When a second pressing plate moves down from the unclamped state of a first position, elastic force of a first elastic member acts on a shaft through a first retainer and first operating balls so that a clamping arm is pressed down. When a first pressing plate moves down by a short distance, the first operating balls shift to the position of an unlocking segment of a sleeve, and a second operating balls are also located at an unlocking segment of a clamping case, to realize a releasing position. When the shaft is located at the releasing position where the first and second operating balls are not engaged with the shaft, the shaft can be removed from the clamping case.

Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.

Abstract: An apparatus for cutting a planar medical component having a first surface and a second surface, comprising a clamp for fixing the component and applying a tensile force, a support having a surface having a hole therein, the upper surface disposed proximate the second surface of the component, and a cutting device having a cutting head disposed proximate the support and facing the first surface, wherein the support is configured to move along the plane of the component relative to the clamp and the cutting device cutting head is configured to hold position relative to the support.

Abstract: There is provided a method for unloading an object vacuum-chucked on a mounting table having one or more gas flow paths opened at one or more locations on the mounting table, including the steps of (a) turning off a vacuum-chucking of the object vacuum-chucked via the gas flow paths; (b) lifting the object from the mounting table by using an object lifting unit; and (C) supplying a gas between the mounting table and the object during the step (b) via at least one of the gas flow paths. Further, there is also provided a program storage medium storing therein a computer executable program for executing the unloading method.

Abstract: A new arrangement for machining parts is disclosed. The parts to be machined are mounted on fixture plates on a fixture. Using a stationary hydraulic line, hydraulic equipment is then pressurized by a pump within the fixture. The pump is mechanically powered by a separate (and disconnectable) power source. A rotatable coupling is attached to the pump. It receives a spindle from a CNC machine, enabling the machine to activate the pump by rotating the spindle while the spindle is received in the coupling. The coupling has axially extending prongs that form slots that accommodates the spindle. The prongs have ends that taper inwardly toward the slots. The spindle is also used to actuate a pressure release valve. The fixture also has at least four angled work faces and an access face that separates two of those faces. In operation, parts are first mounted on the fixture plates. The fixture is then moved to a work area, where the spindle actuates the pump, pressuring clamps that lock the parts in position.

Abstract: A combinable positioning table constructed from an assembly and a cradle. The assembly comprises means for rotating the cradle which includes attachable elements that can be rotated about first axis and capable of being attached to the sides of the cradle for rotating the cradle, wherein the cradle includes means for attaching to the attachable elements of the assembly and where in said cradle has a work holder and means for rotating the work holder in an axis of rotation perpendicular to the first axis of rotation and wherein said cradle can be separated from the assembly so that the separated assembly and separated cradle can operate as independent positioning tables.

Abstract: A platen assembly is provided for supporting a polish pad of the type utilized to planarize a wafer. The platen assembly comprises a sensor system and a polish platen having a first surface for supporting the polish pad. The sensor system comprises a flexible sensor and a flexible circuit operatively coupled to the sensor controller. The flexible circuit includes a first flexible sensor disposed proximate the first surface.

Abstract: The present invention relates to a substrate processing apparatus useful for plating a substrate or processing a substrate by dipping a substrate in a processing liquid. A substrate processing apparatus of the present invention includes: a loading/unloading area for carrying in and out a substrate; a cleaning area for cleaning the substrate; and a plating area for plating the substrate. The loading/unloading area is provided with a substrate transfer robot having a plurality of hands of dry-use design, a loading port mounted with a cassette for housing substrates, and a reversing machine of dry-use design for reversing the substrate from face up to face down.

Abstract: A conformal vacuum cup provides a machine tool attachment fitting usable in a flexible-track drill system. Using multiple, independently articulated stiffeners, the conformal vacuum cup conforms to the contour of complex aerostructure surface shapes. The individual stiffeners are decoupled from each other to some extent by grooves and slots molded into resilient overmolding material to support long-axis curving. Spacing pins employ a domed shape consonant with the elastic deformation of the workpiece surface under load. The pins employ a hard material to prevent particle embedment in use and to control position tolerance for drill heads and other tools traveling on the flexible track. Partial holes in each vacuum cup are blocked by diaphragms. Interconnection from a vacuum system manifold to the vacuum cups can be realized by penetrating the diaphragms and inserting barbed fittings connected by vacuum tubing.

Abstract: A rocking substrate 31 provided with a porous unit 41 is supported by a platform 21 by means of a spherical bearing. Furthermore, air is provided between the platform 21 and the rocking substrate 31 to allow the rocking substrate 31 and the porous unit 41 to rock along a spherical surface. This rocking allows the top surface 12a of an improved levitation unit 12 to tilt freely. When a wavy glass substrate is placed on the levitation device, the top surface 12a of the improved levitation unit 12 tilts, tracing the tilt of the substrate. Jetting air out in this state levitates the substrate, with its top surface 12a in the horizontal state, and allows the levitational force to be reliably applied to the substrate.

Abstract: A clamping system can be reconfigured to clamp any of multiple workpieces having differing shapes. The system includes a retention assembly for retaining an inflatable bladder that applies a clamping force to the workpiece. The retention assembly includes a flexible chain of pivotally connected links that can be locked in place to form a rigid assembly that conforms to the shape of the workpiece. The links can be unlocked to allow reconfiguration of the retention assembly into shapes matching other workpieces.

Abstract: An inner member having a supply port is installed at the inside of a housing, wherein the housing and the inner member are connected together by connecting bolts. Air is supplied to the supply port of the inner member and is directed and introduced through communication passages into an annular passage. Thereafter, the air is directed outwardly from a plurality of lead-out holes, which communicate with the annular passage, in a swirling direction with respect to an annular recess facing the workpiece. In addition, by having the air flow along the annular recess, which is formed with a substantially trapezoidal shape in cross section, the workpiece is maintained in a non-contact state with respect to a holding surface of the inner member.

Abstract: A clamping apparatus for clamping a plurality of Hi-Fix boards arranged in a row, includes at least one rotational clamping unit installed to clamp facing end sides of the two or more Hi-Fix boards together, and a plurality of clamping units installed to clamp end sides of the Hi-Fix boards other than the facing sides thereof. The rotational clamping unit includes a clamper installed to rotate about a fixed rotation point to clamp or release the claming of the facing end sides of the two or more Hi-Fix boards, and a driving unit for providing a rotational force to the clamper.

Abstract: A versatile palletized system provides for work to be held in place even while a top plate (7) as one type of workholder web is transferred. Movement can be provided by a coordinated topographically fixed movement web (39) which may have hydraulic pistons or other movement mechanisms (11) which cause actuation of a great variety of workholder devices (8) which may be attached to the workholder web (7). Accurate, repeatable positioning between the two webs can be accomplished for quick changeout and even configuration as a rotatable pallet system where one pallet can be set up while the other is being used.

Abstract: A flexible hydraulic vise that is actuated hydraulically along the entire length of the jaw travel. The vise includes master jaws disposed in a complementary shaped tracks, connected to pistons by pins. Top jaws with spring loaded ball detents are secured to the master jaws by a dove-tail notch connection. Internal passageways allow pressure to be delivered to either side of pairs of the pistons disposed in the bores, allowing the clamping force to be exerted inwardly or outwardly.

Abstract: A conformal vacuum cup provides a machine tool attachment fitting usable in a flexible-track drill system. Using multiple, independently articulated stiffeners, the conformal vacuum cup conforms to the contour of complex aerostructure surface shapes. The individual stiffeners are decoupled from each other to some extent by grooves and slots molded into resilient overmolding material to support long-axis curving. Spacing pins employ a domed shape consonant with the elastic deformation of the workpiece surface under load. The pins employ a hard material to prevent particle embedment in use and to control position tolerance for drill heads and other tools traveling on the flexible track. Partial holes in each vacuum cup are blocked by diaphragms. Interconnection from a vacuum system manifold to the vacuum cups can be realized by penetrating the diaphragms and inserting barbed fittings connected by vacuum tubing.

Abstract: A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to provide a radiation beam, an article support configured to support an article to be placed in a beam path of the radiation beam, a multipolar clamp configured to provide a clamping pressure for clamping the article against the article support, and a bias voltage circuit for biasing at least one electrode of the multipolar clamp, such that the occurrence of ridges that appear due to static charges on the article may be circumvented.

Abstract: A motor pack for an electrically driven tool includes at least one electric motor and a linearly displaceable member coupled to the electric motor such that the linearly displaceable member is displaced axially by operation of the at least one electric motor. The motor pack further includes a housing enclosing the electric motor and at least partially enclosing the linearly displaceable member. The housing includes a front plate to which a tool head may be removably coupled. The front plate has an aperture formed therein through which the linearly displaceable element can be coupled to a moveable element in the tool head. The motor pack also includes tool control circuitry enclosed within the housing and electrically coupled to the electric motor to control operation thereof.

Abstract: An article (e.g. a semiconductor wafer) is held in an article holder by means of a number of gas flows emitted from gas vortex chambers. Some of the gas flows act to cool an adjacent article portion more than the other gas flows. For example, some of the vortex chambers emit more gas per unit of time than the other chambers. More cooling is provided to those portions of the article which are heated more during processing. Greater temperature uniformity can be achieved.