Abstract: The function of the key element of the SMA, is based on a mutual alternating slipping of two systems of filaments. Its contraction is caused by the attractive effect of van der Waal's forces between the functional particles among the filaments. The relaxation is attained through the repulsive effect of the electrostatic repulsive forces between the functional particles. The alternating change of ionic concentration in the area of the particles results in the alternating function of van der Waal's attraction and repulsive electrostatic forces. The size and material of the particles, their configuration and working temperature must be specifically optimized. The total contraction of the key element results from the summation of its partial contractions. The total force and contraction of the SNA result from the summation of the key elements in the parallel (collateral) and/or serial (linear ranked) arrangements, respectively.

Abstract: An electret power generator having two output electrodes on a stator and a rotor positioned above the output electrodes with charged electret material between the electrodes and the rotor. Power is generated when the rotor moves laterally above the electrodes. The electret material is preferably parylene HT .

Abstract: A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base forming a gap therebetween; and a spring-like structure disposed between the top plate and the lower portion of the base. The spring-like structure has a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and a top plate. In an alternate embodiment, the spring-like has a vertical bendable connector connecting the top plate and the lower portion of the base. The spring-like structure transports the top plate vertically in a piston like manner to perform the function of the transducer. Fabrication methods to make the same are also disclosed.

Abstract: CMUT elements are formed on a substrate. Electrical conductors are formed to interconnect between different portions of the substrate. The substrate is then separated into pieces while maintaining the electrical connections across the separation. Since the conductors are flexible, the separated substrate slabs may be positioned on a curved surface while maintaining the electrical interconnection between the slabs. Large curvatures may be provided, such as associated with forming a multidimensional transducer array for use in a catheter. The electrical interconnections between the different slabs and elements may allow for a walking aperture arrangement for three dimensional imaging.

Abstract: A miniature motor includes an actuator and a transmission assembly. The actuator includes a chamber, an electrically conductive aqueous layer, a dielectric oily layer and two electrodes. The aqueous and oily layers are accommodated in the chamber. The oily layer contacts with the aqueous layer thereby forming a contact interface therebetween. The two electrodes are configured for producing an electric field to induce the aqueous layer to produce an electrowetting effect. The transmission assembly includes a thin film disposed at the interface and at least one transmission member. The thin film defines a first surface and a second surface, respectively, facing towards the aqueous and oily layers. A hydrophilic coating and a hydrophobic coating are, respectively, formed on the first and second surfaces. Each transmission member has a first end connected to one of the hydrophilic and hydrophobic coatings and a second end extending out of the chamber.

Abstract: The present invention provides a method for mitigating an unintended-mechanical strain in a device (100). The method includes transducing (304) strain-energy in the device to electrical-potential energy. This strain-energy develops due to unintended-mechanical strain. The unintended-mechanical strain is generated due to an impact force received by the device. Further, the method includes dissipating (306) the electrical-potential energy. The electrical-potential energy is dissipated via an electrical-circuit (204) in the device.

Abstract: A capacitive micromachined ultrasonic transducer (CMUT) array connected to a separate electronic unit is provided. The CMUT array includes at least two active elements, a ground element at the array end, and a non-active element having isolation trenches disposed between the active and ground elements. The active element includes a doped first silicon layer, a doped second silicon layer, and a first insulating layer disposed there between. A cavity is in the first silicon layer having a cross section that includes vertical portions disposed at each end of a horizontal portion, and the vertical portion spans from the first insulating layer through the first silicon layer such that a portion of the first silicon layer is isolated by the first insulating layer and the cavity. A membrane layer on the first silicon layer spans the cavity. A bottom electrode is disposed on the bottom of the second silicon layer.

Abstract: A microactuator has a fixed portion and a movable portion that is provided in such a way as to be movable relative to the fixed portion between a first position at which it is in contact with a predetermined portion of the fixed portion and a second position away from the first position. The fixed portion has a first electrode portion, the movable portion has a second electrode portion that can produce an electrostatic force between it and the first electrode portion by a voltage between it and the first electrode portion, and the first and second electrode portions are arranged in such a way that a first force that biases the movable portion in a direction toward the first position according to the electrostatic force created when the voltage is constant reaches a peak when the movable portion is at a third position between the first position and the second position.

Abstract: An active matrix device includes: a substrate; a pixel electrode formed at a side adjacent to one of surfaces of the substrate; a switching element, including: a fixed electrode formed so as to correspond to the pixel electrode and coupled with the pixel electrode; a movable electrode formed so as to be displaced toward the fixed electrode along a surface direction of the substrate to be in one of states being in contact with the fixed electrode and apart from the fixed electrode; a driving electrode formed so as to form an electrostatic gap between the movable electrode and the driving electrode, the fixed electrode, the movable electrode, and the driving electrode being disposed in different positions from each other along the surface direction of the substrate; a first wiring line coupled with the movable electrode; and a second wiring line coupled with the driving electrode.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A liquid-gap electrostatic hydraulic micro actuator is provided that produces higher displacement (in and out of plane) and larger force than typical electrostatic actuators by utilizing a non-conducting liquid as its dielectric material. This new class of actuators utilizes the liquid dielectric for hydraulic amplification and force transfer. The liquid electrostatic actuator consists of two chambers each forming a parallel-plate capacitor, filled with a non-conducting incompressible liquid. One chamber is compressed by pulling down a flexible membrane using electrostatic actuation, thus forcing the liquid under it to transfer into the other chamber. Such movement causes the other chamber's membrane to expand out of plane.

Abstract: Linear actuators (also known as inchworm actuators) including a magnetically actuatable member with a plurality of wings or blades made from a shape memory alloy (SMA) are described. The linear actuators include a bar and an actuator assembly, configured to achieve a linear displacement of the actuator assembly relative to the bar. The actuator assembly includes a housing, a magnetic trigger including an electromagnet and a permanent magnet, and the magnetically actuatable SMA member. Significantly, the wings/blades of the magnetically actuatable SMA member are coupled to the housing. Activation of the magnetic trigger causes the magnetically actuatable SMA member to move toward the magnetic trigger. The motion of the magnetically actuatable SMA can be converted to a linear displacement. The magnetically actuatable SMA can be implemented using a SMA exhibiting both ferromagnetic and SMA properties, or by a ferromagnetic mass coupled with a SMA (i.e., a ferromagnetic SMA composite).

Abstract: An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode.

Abstract: An electronic apparatus includes a power generator including a movable portion displaced by kinetic energy acting on an electronic apparatus body and a conversion portion converting displacement of the movable portion to electric energy, wherein the movable portion of the power generator is arranged at a position separated from a support portion of the electronic apparatus body.

Abstract: Bio-electromechanical device capable to convert electrochemical potential energy stored in a both animal or plant cellular system to mechanical energy. This bio-electromechanical device has sizes varying in the order of microns, with maximum electric voltages near 100 mV, currents in the order of nA and associated power in the order of 10?10 W. The device uses the membrane potential, and specifically the action potential activation of an excitable cell, to power an electromechanical circuit which comprises at least a resistance, a capacitor and a mechanical oscillator connected to one of the capacitor plates. The resulting system is a bio-electromechanical system capable of self-oscillations triggered by a limit cycle in which the oscillating mechanical element, having different possible constructions, is the member that produces mechanical energy. The latter component can directly drive a user micro-device.

Abstract: An apparatus includes a silica container that contains a plurality of silica particles such that a first subgroup of the plurality of silica particles is located within a first chamber of the silica container and a second subgroup of the plurality of silica particles is located within a second chamber of the silica container. The first chamber receives a negative electrical current and the second chamber receiving a positive electrical current. Further, the apparatus includes a plurality of magnets. Each of the plurality of magnets receives an electrical current. In addition, the plurality of magnets is arranged to surround the silica container so that a magnetic field exerts a force on at least one of the silica particles to remove an electron from the silica particle to cause the silica particle to replace the removed electron by absorbing an electron from the atmosphere.

Abstract: A carbon nanotube MEMS assembly comprises a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device. An interstitial material at least partially binds adjacent carbon nanotubes one to another. At least one component of the frame is fixed and at least one component of the frame is movable relative to the fixed component.

Abstract: A polymer actuator is provided. The polymer actuator includes a plurality of gel/electrode complexes arranged in an electrolytic solution, wherein the gel/electrode complex is composed of a polymeric hydrogel containing acidic or basic functional groups and electrodes placed in the polymeric hydrogel, such that it changes in volume upon application of a voltage across said electrodes. The polymer actuator expands and contracts in the linear direction without curved deformation. The polymer actuator is light in weight and is capable of control with a low voltage.

Abstract: An electrostatic generator includes a substrate, an electrode formed on or in a surface of the substrate, an electret film provided so as to be opposed to the electrode and an insulating film on an electrode side formed on a surface of the electrode on a side opposed to the electret film.

Abstract: When a mover during moving is displaced in a direction (X2 direction) perpendicular to a moving direction, between a deformation pattern portion formed in stator-side electrodes of a stator and a deformation pattern portion formed in mover-side electrodes of the mover, a restoring force trying to return the mover toward a direction (X1 direction) opposite to the X2 direction acts on the mover. This makes it possible to prevent the mover from displacement, and consequently to provide an electrostatic actuator improved in the linear movability toward the moving direction.

Abstract: A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied.

Abstract: There is provided an electrostatic induction conversion device which is small, has high conversion efficiency between electric energy and kinetic energy, and can prevent degradation of an electret. The electret is formed by injecting an electric charge into the vicinity of the surface of an insulating material, is disposed between two conductors, and is constructed so that it moves relatively to at least one of the conductors opposite to the electret and converts between electric energy and kinetic energy. As the insulating material forming the electret, it is preferable to use a polymer having a fluorine-containing aliphatic cyclic structure.

Abstract: A bimorphic structure responsive to changes in an environmental condition, sensor structures incorporating one or more of such bimorphic structures, and a method of forming such bimorphic structures. The sensor structure has an electrically-conductive first contact on a substrate, and a bimorph beam anchored to the substrate so that a portion thereof is suspended above the first contact. The bimorph beam has a multilayer structure that includes first and second layers, with the second layer between the first layer and the substrate. A portion of the first layer projects through an opening in the second layer toward the first contact so as to define an electrically-conductive second contact located on the beam so as to be spaced apart and aligned with the first contact for contact with the first contact when the beam sufficiently deflects toward the substrate.

Abstract: A composite material exhibiting at least one of a negative effective permittivity and a negative effective permeability for incident radiation at an operating wavelength is described. The composite material comprises a dielectric layer generally parallel to a dielectric layer plane, and further comprises a first plurality of nanowire pairs disposed in the dielectric layer. Each of the first plurality of nanowire pairs comprises substantially parallel conductive nanowires of short length and separation relative to the operating wavelength. Each of the first plurality of nanowire pairs is substantially coplanar with a first plane substantially parallel to the dielectric layer plane.

Abstract: The current invention provides a stepping actuator, achieving large range up to ±35 ?m with low operating voltages of 15V or lower and large output forces of up to ±110 ?N. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.

Abstract: Fuel-powered actuators are described wherein actuation is a consequence of electrochemical processes, chemical processes, or combinations thereof. These fuel-powered actuators include artificial muscles and actuators in which actuation is non-mechanical. The actuators range from large actuators to microscopic and nanoscale devices.

Abstract: The present invention generally relates to a method for using nanoporous materials to convert mechanical motion and/or heat into electrical energy. In one embodiment, the present invention relates to the use of a nanopore confinement effect that results from a fluid infiltrating a porous material as a means to generating electrical energy. In another embodiment, the present invention relates to the use of a nanopore confinement effect that results from a continuous solid phase infiltrating a porous material as a means to generate electrical energy. In still another embodiment, the present invention relates to the use of a thermoelectric effect that results from a fluid infiltrating a porous material as a means to generate electrical energy. In yet another embodiment, the present invention relates to the use of a thermoelectric effect that results from a continuous solid phase infiltrating a porous material as a means to generate electrical energy.

Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

Abstract: [Problems] To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. [Solving Means] An electrostatic actuator including an individual electrode 5 formed on a substrate, a vibration plate 6 arranged opposite to the individual electrode 5 via a predetermined gap and a driving means for causing a displacement of the vibration plate 6 by generating an electrostatic force between the individual electrode 5 and the vibration plate 6 includes an insulation film 7 provided on one or both of opposing surfaces of the fixed electrode and the movable electrode and a surface protection film 8 provided on the insulation film 7. The surface protection film 8 is made of a hard ceramic film or a hard carbon film.

Abstract: A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap therebetween. The insulator has an insulating support disposed generally between the two electrodes and an insulation extension extending into at least one of two electrodes to increase the effective insulation without having to increase the transducing gap. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate.

Abstract: Methods and apparatus are disclosed for harvesting energy from motion of one or more joints. Energy harvesters comprise: a generator for converting mechanical energy into corresponding electrical energy; one or more sensors for sensing one or more corresponding characteristics associated with motion of the one or more joints; and control circuitry connected to receive the one or more sensed characteristics and configured to assess, based at least in part on the one or more sensed characteristics, whether motion of the one or more joints is associated with mutualistic conditions or non-mutualistic conditions. If conditions are determined to be mutualistic, energy harvesting is engaged. If conditions are determined to be non-mutualistic, energy harvesting is disengaged.

Abstract: A capacitive transducer having a significantly increased actuation force and improved response time as compared to similar prior art capacitive transducers. In the capacitive transducer of the present invention it is not necessary to balance response time and actuation force or to provide pre-strain to the transducer in a direction of actuation. Additionally, buckling in the capacitive transducer is prevented, or at least substantially reduced, in a simple manner.

Abstract: Methods, compositions, and apparatus for generating electricity are provided. Electricity is generated through the mechanisms nuclear magnetic spin and remnant polarization electric generation. The apparatus may include a material with high nuclear magnetic spin or high remnant polarization coupled with a poled ferroelectric material. The apparatus may also include a pair of electrical contacts disposed on opposite sides of the poled ferroelectric material and the high nuclear magnetic spin or high remnant polarization material. Further, a magnetic field may be applied to the high nuclear magnetic spin material.

Abstract: A method for driving an actuator. The method includes applying an electrical potential across an electrostrictive material relative to a counterelectrode disposed within an electrolyte, thereby creating a double layer potential across a region of enhanced ionic concentration. A current flowing between the electorostrictive material and the counterelectrode is measured. A portion of the applied potential appearing across the electrolyte and counterelectrode is calculated and subtracted from the applied potential to obtain an estimated double layer potential. The applied electrical potential is adjusted to obtain a specified double layer potential.

Abstract: This invention converts inertial impulses into electric currents. Specifically, it converts impulses created by the impacts of high-energy particles from the Sun and other cosmic sources into the Earth's Magnetosphere and the varying D, E, F1 and F2 layers of its Ionosphere to controlled electric currents. This invention presents a new method of utilizing energy from the Sun and other sources of high energy articles as a virtually, inexhaustible, alternative-energy source for the world.

Abstract: The present invention concerns a semi-permeable membrane for use in osmosis consisting of one thin layer of a non-porous material (the diffusion skin), and one or more layers of a porous material (the porous layer), where the porous layer has a structure where porosity ?, thickness of the porous layer (m), and tortuosity ?, are related to one another as given by the expression: x·?=?·S wherein S is a structure parameter having a value equal to or less than 0.0015 meter. Further a method for providing elevated pressure by osmosis as well as a device for providing an elevated osmotic pressure and electric power is described.

Abstract: A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.

Abstract: To improve the yield, lifetime and driving voltage of the micro scratch drive actuator (SDA), this invention proposes a novel layout design including the etch holes and flange structure designs. Once the etch holes added to the layout of conventional SDA plate, the releasing of structure layer can be accelerated and the accumulated residual charges in the front end of SDA plate is reduced. In this innovative design, a longer lifetime and lower driving voltage of the SDA device can be achieved. On the other hand, adding the flange structure design in the corner of the beam-to-plate conjunction can improve the flexural rigidity of the narrow polysilicon supporting beam which will further enhance the yield of the SDA device and reduce the crack failure under actuating situation.

Abstract: Based on the voltage-division theory, this invention proposes a new method to decrease the driving voltage of the micro scratch drive actuator (SDA) by using an ultra-low resistivity silicon wafer as substrate. This patent has compared two SDA actuators with the same layout and fabricating processes but under different resistivity of substrate. The SDA fabricated on the ultra-low resistivity silicon wafer has demonstrated a lower driving voltage of only about 4˜12 Vo-p. However, the conventional SDA using normal silicon wafer needs higher driving voltage (30˜75 Vo-p), thus has lower probability for commercial applications. On the other hand, this invention presents a new SDA process to overcome the inherent 2 ?m line-width limitation of conventional mask aligner with 4360 ? UV wavelength light source (g-line) and further to reduce the driving voltage of SDA.

Abstract: One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.

Abstract: An electronic trigger assembly for triggering an actuator, the electronic trigger assembly having a trigger member capable of connection to the actuator. The trigger member may be configured for rotation between a first position and a second position and the trigger member may be able to trigger the actuator as the trigger member rotates between the first position and the second position. The trigger member may also include a guide. A shape memory alloy member may be connected to the trigger member and may be received by the guide such that a substantial portion of the shape memory alloy member is disposed in a curvilinear arrangement. The shape memory alloy member may contract when electrified. The shape memory alloy member may be confined by the guide to contract along a path such that the shape memory alloy member exerts torque on the trigger member and causes the trigger member to rotate from the first position to the second position.

Abstract: An improved diode energy converter for chemical kinetic electron energy transfer is formed using nanostructures and includes identifiable regions associated with chemical reactions isolated chemically from other regions in the converter, a region associated with an area that forms energy barriers of the desired height, a region associated with tailoring the boundary between semiconductor material and metal materials so that the junction does not tear apart, and a region associated with removing heat from the semiconductor.

Abstract: The present invention discloses a carbon nanotube (SWNT)-polymer composite actuator and method to make such actuator. A series of uniform composites was prepared by dispersing purified single wall nanotubes with varying weight percents into a polymer matrix, followed by solution casting. The resulting nanotube-polymer composite was then successfully used to form a nanotube polymer actuator.

Abstract: A bearing structure has a bearing and a shockproof structure. The bearing is disposed in a bushing. The shockproof structure is disposed in the bushing for covering at least one portion of the outer wall of the bearing.

Abstract: An actuator element which functions stably in air and in vacuo, and can be driven at low voltages is described. A actuator element which includes at least two electrode layers, each of which is mutually insulated and comprises a gel composition comprising carbon nanotubes, an ionic liquid and a polymer, are formed on the surface of ion-conductive layer comprising a gel composition comprising an ionic liquid and a polymer, so that the actuator element is capable of being flexed or deformed by creating a potential difference between the electrode layers; and an actuator element wherein at least two electrode layers, each of which is mutually insulated, are formed on the surface of ion-conductive layer, conductive layer is formed on the surface of each electrode layer, and the actuator element is capable of being flexed or deformed by creating a potential difference between the conductive layers.

Abstract: Adjustable cooling machinery for optical disc manufacturing is described. According to one exemplary embodiment, the adjustable cooling machine can be easily configured to allow two different diameters (e.g., 120 mm and 80 mm) of optical discs to be cooled in an optical disc manufacturing production facility. Specifically, the adjustable cooling machine can be adjusted from a first to a second configuration by changing few screws or locknuts and a connecting belt. According to one aspect of the present invention, the adjustable cooling machine comprises three identical spiral grooved shafts supported at either end by a pair of support structures via respective pairs of adjustable bearings. Each of the support structures is connected to a base plate via a pair of fasteners.

Abstract: A linear electrochemical actuator is described where at least one electrically conductive (between 400 and 1000 S/cm), doped polyaniline solid fiber or a yarn produced from such fibers is disposed in an electrolyte inside of a electrically conductive polyaniline hollow fiber, thereby allowing 2-electrode operation without a metal backing. This is an example of the electrochemical devices of the present invention having a solid-in-hollow polymer fiber configuration. In a propylene carbonate electrolyte, the electrochemical and actuation behavior of the fibers was found to be influenced by the solubility and size of the polymer dopants. That is, solubility of the dopant in the electrolyte resulted in high electroactivity and strain in the fibers. Actuation of fibers was also affected by electrolyte anions, small anions resulting in anion-exchange dominated actuation, while large anions resulted in cation-exchange dominated actuation. Isotonic strains of 0.9% and isometric stresses of 0.

Abstract: A polymer linear actuator for a micro electro mechanical system (MEMS) and a micro manipulator for a measurement device of cranial nerve signal using the same are provided. The polymer linear actuator has first and second bodies positioned spaced apart to a distance from each other, and one or more pairs of V-type moving units connecting the first and second bodies together, wherein the moving units in pair are opposed to each other to convert a rotation motion of the respective moving units into a linear motion, thereby causing the first and second bodies to move linearly.

Abstract: One nanostructured actuator embodiment includes an actuation region between electrical contacts. The actuation region includes an elastic matrix with embedded nanocomposite layered structures, which have inorganic material layers with pillared organic material structures between the inorganic material layers responsive to the surface acidity of the inorganic material layers. The elastic matrix allows transport of species for changing the surface acidity. A separator region is between the electrical contacts. A proton generation region capable of reversible electrochemical production and elimination of protons is provided, which may be a hydrogen storage material located on a side of the separator region opposite the actuation region, which may include metal hydride, or metal hydroxide. Alternatively, it may include an electrolytic solution and conductive particles within the elastic matrix for in situ electrochemical generation of an acid/base.

Abstract: A method for driving an actuator. The method includes applying an electrical potential across an electrostrictive material relative to a counterelectrode disposed within an electrolyte, thereby creating a double layer potential across a region of enhanced ionic concentration. A current flowing between the electorostrictive material and the counterelectrode is measured. A portion of the applied potential appearing across the electrolyte and counterelectrode is calculated and subtracted from the applied potential to obtain an estimated double layer potential. The applied electrical potential is adjusted to obtain a specified double layer potential.